JP4417926B2 - ガラス基板の平坦化方法 - Google Patents
ガラス基板の平坦化方法 Download PDFInfo
- Publication number
- JP4417926B2 JP4417926B2 JP2006165580A JP2006165580A JP4417926B2 JP 4417926 B2 JP4417926 B2 JP 4417926B2 JP 2006165580 A JP2006165580 A JP 2006165580A JP 2006165580 A JP2006165580 A JP 2006165580A JP 4417926 B2 JP4417926 B2 JP 4417926B2
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- JP
- Japan
- Prior art keywords
- glass substrate
- etching
- etching solution
- solution
- hydrofluoric acid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000011521 glass Substances 0.000 title claims description 104
- 239000000758 substrate Substances 0.000 title claims description 104
- 238000000034 method Methods 0.000 title claims description 21
- 238000005530 etching Methods 0.000 claims description 119
- 239000000243 solution Substances 0.000 claims description 47
- 239000007788 liquid Substances 0.000 claims description 28
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 claims description 20
- 239000007864 aqueous solution Substances 0.000 claims description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 4
- 150000004715 keto acids Chemical class 0.000 claims description 3
- 150000002222 fluorine compounds Chemical class 0.000 claims description 2
- 239000004973 liquid crystal related substance Substances 0.000 description 3
- 239000002344 surface layer Substances 0.000 description 3
- 238000007796 conventional method Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 239000011241 protective layer Substances 0.000 description 2
- 239000003566 sealing material Substances 0.000 description 2
- 238000009835 boiling Methods 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- -1 perfluoroalkyl compound Chemical class 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C15/00—Surface treatment of glass, not in the form of fibres or filaments, by etching
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C15/00—Surface treatment of glass, not in the form of fibres or filaments, by etching
- C03C15/02—Surface treatment of glass, not in the form of fibres or filaments, by etching for making a smooth surface
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/133302—Rigid substrates, e.g. inorganic substrates
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- Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Surface Treatment Of Glass (AREA)
- Liquid Crystal (AREA)
Description
図1はこの発明の第1実施形態としてのガラス基板の平坦化方法の工程を示す図である。まず、図1のステップS1において、図示していないが、ガラス基板を第1のエッチング槽内に収容された第1のエッチング液中に浸漬し、ガラス基板の両面をエッチングする。この場合、第1のエッチング液は、フッ酸および水を含むフッ酸系水溶液からなり、ガラス基板に対するエッチングレートが0.01μm/分以上で5μm/分未満と比較的遅くなるように、フッ酸濃度が調整されている。
ところで、上記第1のエッチング液の代わりに、上記第1のエッチング液に1種類以上のフッ素化合物を添加したもの(以下、第1の変形エッチング液という)を用いてエッチングを行い、次いで上記第2のエッチング液を用いてエッチングを行い、これにより得られたガラス基板1の表面形状を上記測定器を用いて測定したところ、図5に示す結果が得られた。
図6はこの発明の第3実施形態としてのガラス基板の平坦化方法の工程を示す図である。まず、図6のステップS11において、図示していないが、ガラス基板を不活性液槽内に収容された不活性液中に浸漬する。この場合、不活性液は、第1の変形エッチング液および第2のエッチング液に対して不活性でエッチング温度下で液体であり、表面張力が各エッチング液よりも小さく、沸点が各エッチング液よりも高いものであり、例えば、ペルフルオロ−2−ブチルテトロヒドロフラン、ペルフルオロ−2−プロピルテトヒドロピランロ等のペルフルオロアルキル化合物液が挙げられる。
ところで、上記第3実施形態において、上記第2のエッチング液の代わりに、上記第2のエッチング液に0.1〜1.0%の無機オキソ酸系を添加したものを用いてエッチングを行ったところ、無機オキソ酸系により不活性液がガラス基板1の表面の凹部2内に沈着され、上記第3実施形態の場合と比較して、目視できる程度の大きさのディンプル3の発生がさらに減少した。なお、この場合も、ガラス基板1の表面が白っぽく見えたり、粗っぽく見えたりすることはなかった。
上記各実施形態では、ガラス基板1の両面をエッチングして平坦化する場合について説明したが、これに限らず、ガラス基板1の一方の表面にPVC、PET、ガラス、レジスト等からなる保護層を形成した状態において、ガラス基板1の他方の表面のみをエッチングして平坦化するようにしてもよい。
2 凹部
3 ディンプル
4 不活性液
Claims (3)
- ガラス基板に対して、エッチングレートが異なる2種類のエッチング液を用意し、フッ酸および水を含むフッ酸系水溶液からなり1種類以上のフッ素化合物を含有するエッチングレートの遅い第1のエッチング液でエッチングを行い、次いで、フッ酸および水を含むフッ酸系水溶液からなり前記第1のエッチング液よりもエッチングレートの速い第2のエッチング液でエッチングを行うことを含み、
前記第1のエッチング液の前記ガラス基板に対するエッチングレートは0.01μm/分以上で5μm/分未満であり、前記第2のエッチング液の前記ガラス基板に対するエッチングレートは5μm/分以上で15μm/分以下であることを特徴とするガラス基板の平坦化方法。 - 請求項1に記載の発明において、前記第1のエッチング液によるエッチングを行う前に、前記ガラス基板を前記第1、第2のエッチング液に対して不活性な液体中に浸漬することを特徴とするガラス基板の平坦化方法。
- 請求項2に記載の発明において、前記第2のエッチング液は無機オキソ酸系を含有することを特徴とするガラス基板の平坦化方法。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006165580A JP4417926B2 (ja) | 2006-03-06 | 2006-06-15 | ガラス基板の平坦化方法 |
US11/527,292 US7824564B2 (en) | 2006-03-06 | 2006-09-26 | Method for flattening glass substrate |
TW095136865A TWI378084B (en) | 2006-03-06 | 2006-10-04 | Method for flattening glass substrate |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006058941 | 2006-03-06 | ||
JP2006165580A JP4417926B2 (ja) | 2006-03-06 | 2006-06-15 | ガラス基板の平坦化方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2007269619A JP2007269619A (ja) | 2007-10-18 |
JP4417926B2 true JP4417926B2 (ja) | 2010-02-17 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2006165580A Active JP4417926B2 (ja) | 2006-03-06 | 2006-06-15 | ガラス基板の平坦化方法 |
Country Status (3)
Country | Link |
---|---|
US (1) | US7824564B2 (ja) |
JP (1) | JP4417926B2 (ja) |
TW (1) | TWI378084B (ja) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7610872B2 (en) * | 2005-04-07 | 2009-11-03 | Roman Coppola | Tasting glasses having revealable indicators there on and method of conducting blind taste test |
JP2009237037A (ja) * | 2008-03-26 | 2009-10-15 | Sumitomo Chemical Co Ltd | 光学フィルム貼合ガラス基板 |
JP5448031B2 (ja) * | 2008-12-09 | 2014-03-19 | 株式会社 電硝エンジニアリング | ガラス基板のエッチング方法及びエッチング装置 |
CN102386136B (zh) * | 2010-09-06 | 2014-10-29 | 联华电子股份有限公司 | 互补式金属氧化物半导体元件的制造方法 |
KR20150010232A (ko) | 2013-07-18 | 2015-01-28 | 삼성디스플레이 주식회사 | 유기발광표시장치 및 그 제조방법 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4055458A (en) * | 1975-08-07 | 1977-10-25 | Bayer Aktiengesellschaft | Etching glass with HF and fluorine-containing surfactant |
JPH06340448A (ja) | 1993-05-26 | 1994-12-13 | Asahi Glass Co Ltd | ガラスのエッチング処理方法 |
JP2001089191A (ja) | 1999-09-27 | 2001-04-03 | Nippon Sheet Glass Co Ltd | ディスプレイ用ガラス基板の製造方法及び該製造方法により製造されたディスプレイ用ガラス基板 |
JP2002087844A (ja) | 2000-09-14 | 2002-03-27 | Sony Corp | 表示パネルの製造方法 |
US7329372B2 (en) * | 2002-01-18 | 2008-02-12 | Nippon Sheet Glass Co., Ltd. | Method for producing aspherical structure, and aspherical lens array molding tool and aspherical lens array produced by the same method |
JP4002154B2 (ja) | 2002-08-13 | 2007-10-31 | 東芝松下ディスプレイテクノロジー株式会社 | 液晶表示素子の製造方法およびその装置 |
JP4217885B2 (ja) | 2003-06-17 | 2009-02-04 | 株式会社ジェムコ | 細孔が存在する原体表面のエッチング方法 |
JP4379700B2 (ja) | 2004-01-29 | 2009-12-09 | 三菱マテリアル株式会社 | ガラスパネル等のエッチング方法 |
-
2006
- 2006-06-15 JP JP2006165580A patent/JP4417926B2/ja active Active
- 2006-09-26 US US11/527,292 patent/US7824564B2/en active Active
- 2006-10-04 TW TW095136865A patent/TWI378084B/zh active
Also Published As
Publication number | Publication date |
---|---|
TW200734280A (en) | 2007-09-16 |
TWI378084B (en) | 2012-12-01 |
US7824564B2 (en) | 2010-11-02 |
US20070207623A1 (en) | 2007-09-06 |
JP2007269619A (ja) | 2007-10-18 |
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