JP4415255B2 - ロール状物の周面形状測定装置 - Google Patents
ロール状物の周面形状測定装置 Download PDFInfo
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- JP4415255B2 JP4415255B2 JP2004150733A JP2004150733A JP4415255B2 JP 4415255 B2 JP4415255 B2 JP 4415255B2 JP 2004150733 A JP2004150733 A JP 2004150733A JP 2004150733 A JP2004150733 A JP 2004150733A JP 4415255 B2 JP4415255 B2 JP 4415255B2
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- roll
- sensor
- position sensor
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- 230000002093 peripheral effect Effects 0.000 title claims description 36
- 238000006073 displacement reaction Methods 0.000 claims description 30
- 238000001514 detection method Methods 0.000 claims description 21
- 239000000523 sample Substances 0.000 claims description 7
- 239000000463 material Substances 0.000 claims description 6
- 241001422033 Thestylus Species 0.000 description 9
- 239000004744 fabric Substances 0.000 description 8
- 238000004804 winding Methods 0.000 description 7
- 238000005259 measurement Methods 0.000 description 5
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- 230000007246 mechanism Effects 0.000 description 2
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- 238000005516 engineering process Methods 0.000 description 1
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Description
Claims (2)
- 磁気テープ原反ロール等のロール状物の周面形状を測定するロール状物の周面形状測定装置において、
前記ロール状物との距離を検出する近接センサと、プローブの先端部が前記ロール状物の直径方向に付勢される位置センサとを備えるとともに、該近接センサ及び位置センサが固定されたセンサ支持プレートを前記ロール状物の直径方向に移動させる第1の移動手段を備える変位量検出手段と、
前記変位量検出手段を前記ロール状物の軸方向一端側から他端側まで移動させる第2の移動手段と、からなり、
前記近接センサが検出した信号により、前記第1の移動手段による前記センサ支持プレートの移動を制御し、
前記変位量検出手段の移動に伴う前記位置センサの検出変位量に基づいて前記ロール状物の周面形状を測定することを特徴とするロール状物の周面形状測定装置。 - 前記周面形状測定装置には、前記変位量検出手段の移動が前記ロール状物の中心軸に対して平行に移動し易くするためのガイド手段が設けられている請求項1に記載のロール状物の周面形状測定装置。
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JP2004150733A JP4415255B2 (ja) | 2004-05-20 | 2004-05-20 | ロール状物の周面形状測定装置 |
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JP2004150733A JP4415255B2 (ja) | 2004-05-20 | 2004-05-20 | ロール状物の周面形状測定装置 |
Publications (2)
Publication Number | Publication Date |
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JP2005331403A JP2005331403A (ja) | 2005-12-02 |
JP4415255B2 true JP4415255B2 (ja) | 2010-02-17 |
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JP2004150733A Expired - Fee Related JP4415255B2 (ja) | 2004-05-20 | 2004-05-20 | ロール状物の周面形状測定装置 |
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JP (1) | JP4415255B2 (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
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US7437911B2 (en) | 2004-12-15 | 2008-10-21 | Asml Holding N.V. | Method and system for operating an air gauge at programmable or constant standoff |
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