JP4410044B2 - Zirconia sintered body excellent in wear resistance and durability and method for producing the same - Google Patents

Zirconia sintered body excellent in wear resistance and durability and method for producing the same Download PDF

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JP4410044B2
JP4410044B2 JP2004196878A JP2004196878A JP4410044B2 JP 4410044 B2 JP4410044 B2 JP 4410044B2 JP 2004196878 A JP2004196878 A JP 2004196878A JP 2004196878 A JP2004196878 A JP 2004196878A JP 4410044 B2 JP4410044 B2 JP 4410044B2
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宏司 大西
美由紀 佐久田
利夫 河波
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Description

本発明は、耐摩耗性及び耐久性に優れたジルコニア質焼結体及びその製造方法に関する。本発明によるジルコニア質焼結体は、100℃程度かそれ以下の温水または高湿度雰囲気中でも優れた耐摩耗性及び耐久性を有する。   The present invention relates to a zirconia sintered body excellent in wear resistance and durability and a method for producing the same. The zirconia sintered body according to the present invention has excellent wear resistance and durability even in a hot water or high humidity atmosphere of about 100 ° C. or lower.

近年、セラミックスは耐摩耗、耐食性等が優れるため、従来の金属に変わって産業機用構造材に使用されるケースが増加している。例えば、電子材料等の高機能材料の製造には、微粉化および高分散化と高純度化が要求される。そのため、使用される粉砕機は、従来のボールミルから高速で粉砕・分散メディアを撹拌することにより高い粉砕・分散効率を有する媒体撹拌型粉砕機が主流となっている。   In recent years, ceramics are excellent in wear resistance, corrosion resistance, and the like, so that cases used for structural materials for industrial machines are increasing instead of conventional metals. For example, the production of highly functional materials such as electronic materials requires fine powdering, high dispersion, and high purity. For this reason, as the pulverizer used, a medium agitation pulverizer having a high pulverization / dispersion efficiency by stirring the pulverization / dispersion medium at a high speed from a conventional ball mill has become the mainstream.

このようなミルは、粉砕・分散用メディアに加わる負荷がかなり大きいことから、耐衝撃性、耐摩耗性にすぐれた主として正方晶系ジルコニアからなるY強化ジルコニア(Y−TZP)製粉砕・分散用メディアが用いられている。このY−TZPはすぐれた機械的性質を有しているが、200〜300℃の特定温度域において正方晶系ジルコニアから単斜晶系ジルコニアに転移し、その際に生じる体積変化により微小なクラックが多数発生し、強度低下につながる熱劣化を起こす欠点が広く知られるようになり、特許文献1などにその防止法が多く提案されている。 Since such a mill has a considerably large load on the grinding / dispersing media, it is pulverized by Y 2 O 3 reinforced zirconia (Y-TZP) mainly composed of tetragonal zirconia with excellent impact resistance and wear resistance.・ Distributing media is used. This Y-TZP has excellent mechanical properties, but it transitions from tetragonal zirconia to monoclinic zirconia in a specific temperature range of 200 to 300 ° C. As a result, many defects have been widely known, and a method for preventing such defects has been proposed.

一方で、Y−TZP製粉砕・分散用メディアは100℃程度かそれ以下の温水または高湿度雰囲気中における負荷において摩耗が大きくなったり、使用しているとある時に急激に摩耗が大きくなるなどの耐摩耗特性が低下する問題点を有していた。この100℃程度かそれ以下の温水または高湿度雰囲気中での耐摩耗特性の低下は、前記の200〜300℃における熱劣化を防止した焼結体であっても起こるため、前記特許文献1などの200〜300℃における熱劣化の防止法では改善できないのが現状である。   On the other hand, the Y-TZP grinding / dispersion media has a large wear under load in hot water or high humidity atmosphere of about 100 ° C. or lower, or abrupt increase in wear when used. There was a problem that the wear resistance was lowered. Since the deterioration of the wear resistance in a hot water or high humidity atmosphere of about 100 ° C. or lower occurs even in the sintered body that prevents the thermal deterioration at 200 to 300 ° C., the above-mentioned Patent Document 1 and the like However, the current situation is that it cannot be improved by the method for preventing thermal degradation at 200 to 300 ° C.

このようなことから長期間安定して優れた耐摩耗性と耐久性を有するジルコニア質焼結体が望まれていた。   For these reasons, a zirconia sintered body having excellent wear resistance and durability stably for a long period of time has been desired.

特公昭61−21184号公報Japanese Examined Patent Publication No. 61-21184

本発明の目的は、100℃程度かそれ以下の温水または高湿度雰囲気中においてすらも、長期間安定して優れた耐摩耗性と耐久性を示すジルコニア質焼結体及びその製造方法を提供する点にある。   An object of the present invention is to provide a zirconia sintered body that exhibits excellent wear resistance and durability stably for a long period of time, even in warm water or high humidity atmosphere of about 100 ° C. or lower, and a method for producing the same. In the point.

本発明者らは前記のような現状を鑑み、鋭意研究を重ねてきた結果、100℃程度かそれ以下の温水または高湿度雰囲気中における耐摩耗性の低下は、200〜300℃における熱安定性によるものとは全く異なる原因であることを見出した。そして、Y量を特定の割合含有するジルコニア質焼結体において、Al量とその他の成分量及び平均結晶粒径を適切な範囲に調整することにより100℃程度かそれ以下の温水または高湿度雰囲気中においても極めて優れた耐摩耗性及び耐久性を有することを見出し、本発明を完成するに至った。 As a result of intensive studies in view of the above situation, the present inventors have found that the decrease in wear resistance in hot water or high humidity atmosphere of about 100 ° C. or lower is the thermal stability at 200 to 300 ° C. It was found that the cause is completely different from that by. And in the zirconia sintered body containing a specific amount of Y 2 O 3, the amount of Al 2 O 3 and other components and the average crystal grain size are adjusted to an appropriate range to about 100 ° C. or less. The present inventors have found that it has extremely excellent wear resistance and durability even in warm water or a high humidity atmosphere, and has completed the present invention.

即ち、本発明の第一は、(a)ZrO結晶が主として正方晶であるZrO−Y系ジルコニア質焼結体であって、(b)Y/ZrOモル比が1.5/98.5〜2.8/97.2の範囲にあり、(c)Al 含有量が0.1〜5.0wt%であり、(d)SiO 含有量が0.15wt%以上、好ましくは0.2wt%以上であり、(e)SiOとTiOの合計量が0.15wt%を越え、3.0wt%以下であり、(f)平均結晶粒径が0.20〜0.70μmであり、(g)媒体撹拌ミルを用いた60℃温水中で、ディスク周速8m/secで1サイクル10時間運転で10サイクル運転した時のサイクル毎のジルコニア質焼結体摩耗率(メディア摩耗率)の最大値が50ppm/h以下であることを特徴とする耐摩耗性及び耐久性に優れたジルコニア質焼結体に関する。
本発明の第二は、(A)Y/ZrOモル比が1.5/98.5〜2.8/97.2の範囲にあり、Al 含有量が0.1〜5.0wt%であり、SiO 含有量が0.15wt%以上、好ましくは0.2wt%以上であり、SiOとTiOの合計量が0.15wt%を越え、3.0wt%以下であって、比表面積が3〜30m/g、好ましくは5〜20m/g、含有塩素量が50ppm以下であるZrOを主成分とする成形用粉体を用いて、(B)湿式で成形し、(C)大気中1200〜1550℃で焼成することを特徴とする請求項1記載の耐摩耗性及び耐久性に優れたジルコニア質焼結体の製造方法に関する。
That is, the first of the present invention is (a) a ZrO 2 —Y 2 O 3 -based zirconia sintered body in which ZrO 2 crystals are mainly tetragonal, and (b) a Y 2 O 3 / ZrO 2 molar ratio. Is in the range of 1.5 / 98.5 to 2.8 / 97.2, (c) Al 2 O 3 content is 0.1 to 5.0 wt% , and (d) SiO 2 content is 0.15 wt% or more, preferably not less than 0.2 wt%, (e) the total amount of SiO 2 and TiO 2 exceeds the 0.15 wt%, or less 3.0 wt%, (f) an average crystal grain size Is 0.20 to 0.70 [mu] m, and (g) zirconia for each cycle when 10 cycles of 10 cycle operation at 60 [deg.] C. warm water using a medium stirring mill at a disk peripheral speed of 8 m / sec. The maximum value of the sintered body wear rate (media wear rate) is 50 ppm / h or less. And a zirconia sintered body having excellent wear resistance and durability.
In the second aspect of the present invention, the (A) Y 2 O 3 / ZrO 2 molar ratio is in the range of 1.5 / 98.5 to 2.8 / 97.2, and the Al 2 O 3 content is 0.1. was 5.0 wt%, SiO 2 content of 0.15 wt% or more, preferably not less than 0.2 wt%, the total amount of SiO 2 and TiO 2 exceeds the 0.15 wt%, or less 3.0 wt% And using a powder for molding mainly composed of ZrO 2 having a specific surface area of 3 to 30 m 2 / g, preferably 5 to 20 m 2 / g and a chlorine content of 50 ppm or less, (B) wet 2. The method for producing a zirconia sintered body having excellent wear resistance and durability according to claim 1 , wherein the zirconia sintered body is excellent in abrasion resistance and durability.

なお、本発明では、媒体撹拌ミルを用いた60℃温水中で、ディスク周速8m/secで1サイクル10時間運転で10サイクル運転した時の各サイクル毎のジルコニア質焼結体摩耗率(メディア摩耗率)の測定方法はつぎのとおりである。 In the present invention, the wear rate of the zirconia sintered body for each cycle (media) when 10 cycles of 10 cycles of 1 cycle operation at a disk peripheral speed of 8 m / sec in 60 ° C. warm water using a medium stirring mill. The method for measuring the wear rate is as follows.

即ち、ジルコニア質焼結体よりなる粉砕・分散用メディア1200ccを内容積1400ccのダイノーミル(シンマルエンタープライゼス社製:タイプKDL−PILOT、ベッセル及びディスクは株式会社ニッカトー製高強度ジルコニア:YTZ)に入れ、60℃に保持した10リットルの温水600cc/minで60〜65℃の範囲で温度調整をしながら循環させ、ディスク周速8m/secで10時間を1サイクルとして10サイクル運転し、各サイクル毎に下式によりサイクル毎の時間当たりのジルコニア質焼結体摩耗率(メディア摩耗率)を測定する。   That is, 1200 cc of pulverizing / dispersing medium made of a zirconia sintered body is placed in a dyno mill (Shinmaru Enterprises Co., Ltd .: Type KDL-PILOT, Vessel and disk are Nikkato Co., Ltd. high strength zirconia: YTZ). Circulate while adjusting the temperature in the range of 60-65 ° C with 10 liters of hot water 600cc / min held at 60 ° C, and run for 10 cycles with a disk peripheral speed of 8m / sec. The zirconia sintered body wear rate (media wear rate) per time per cycle is measured according to the following equation.

Figure 0004410044
Figure 0004410044

そして、このサイクル毎のジルコニア質焼結体摩耗率の最大値が50ppm/時間以下のものを本明細書では耐摩耗性及び耐久性に優れていると呼ぶことにしている。   And the thing whose maximum value of this zirconia sintered compact abrasion rate for every cycle is 50 ppm / hour or less shall be called excellent in abrasion resistance and durability in this specification.

以下に本発明の耐摩耗性及び耐久性に優れたジルコニア質焼結体が充足すべき各要件について詳細に説明する。   Hereinafter, each requirement to be satisfied by the zirconia sintered body excellent in wear resistance and durability of the present invention will be described in detail.

本発明における(a)の要件は、ZrOの結晶相が主として正方晶であるZrO−Y系ジルコニア質焼結体である。ジルコニア質焼結体に単斜晶が多く含有しているとその結晶周辺に微細なクラックが生じ、応力が負荷されるとこの微細なクラックを起点として微小破壊が起こり、摩擦、衝撃、圧壊等に対する抵抗性が低下するので好ましくない。また、同時に100℃程度またはそれ以下の温水または高湿度雰囲気中での耐久性が低下するので好ましくない。一方、立方晶を多く含有していると機械的特性の低下が起こるだけでなく、結晶粒界付近にYが偏在しやすくなって耐久性の低下をきたすので好ましくない。 The requirement (a) in the present invention is a ZrO 2 —Y 2 O 3 -based zirconia sintered body in which the crystal phase of ZrO 2 is mainly tetragonal. If the zirconia sintered body contains a large amount of monoclinic crystals, fine cracks are generated around the crystal. When stress is applied, microcracking occurs starting from the fine cracks, resulting in friction, impact, crushing, etc. This is not preferable because the resistance to the resistance is lowered. At the same time, the durability in hot water or high humidity atmosphere of about 100 ° C. or lower is lowered, which is not preferable. On the other hand, if a large amount of cubic crystals are contained, not only the mechanical properties are lowered, but also Y 2 O 3 tends to be unevenly distributed in the vicinity of the crystal grain boundary, resulting in a decrease in durability.

なお、本発明では、ジルコニアの結晶相である単斜晶系ジルコニア(M)の存在の有無及び含有量、正方晶系ジルコニア(T)及び立方晶系ジルコニア(C)の量については以下の方法でX線回折により求める。即ち、焼結体及び加工した焼結体製品の表面は応力誘起相変態により正方晶から単斜晶に変態しており、真の結晶相を同定することができないので、焼結体表面を鏡面にまで研磨し、X線回折により、回折角27〜34度の範囲で測定し、単斜晶系ジルコニアの有無及び含有量を次式から求める。   In the present invention, the presence / absence and content of monoclinic zirconia (M), which is a zirconia crystal phase, and the amounts of tetragonal zirconia (T) and cubic zirconia (C) are as follows. By X-ray diffraction. That is, the surface of the sintered body and the processed sintered body product are transformed from tetragonal to monoclinic by stress-induced phase transformation, and the true crystalline phase cannot be identified. And measured by X-ray diffraction in a diffraction angle range of 27 to 34 degrees, and the presence and content of monoclinic zirconia are obtained from the following equation.

Figure 0004410044
Figure 0004410044

また、正方晶系ジルコニア及び立方晶系ジルコニアは、単斜晶系ジルコニアの有無を確認した方法と同様にして、X線回折により、回折角70〜77度の範囲で測定し、次式により求める。   In addition, tetragonal zirconia and cubic zirconia are measured in the diffraction angle range of 70 to 77 degrees by X-ray diffraction in the same manner as the method for confirming the presence or absence of monoclinic zirconia, and obtained by the following formula. .

Figure 0004410044
Figure 0004410044

なお、本発明においては上記X線回折から求める立方晶系ジルコニアを5容積%及び単斜晶系ジルコニアを3容積%まで許容することができる。   In the present invention, it is possible to allow up to 5% by volume of cubic zirconia obtained from the X-ray diffraction and up to 3% by volume of monoclinic zirconia.

本発明における(b)の要件は、Y/ZrOモル比が1.5/98.5〜2.8/97.2の範囲内に、できれば1.7/98.3〜2.7/97.3の範囲内に、特に1.8/98.2〜2.5/97.5の範囲内であることが好ましい。通常ZrO原料中に少量含有することのあるHfOが混入していても良く、このHfO量を含めたZrOとHfOの合量をZrO量として取り扱う。
/ZrOモル比が1.5/98.5未満の場合には焼結体中の単斜晶系ジルコニア量が増加し、焼結体内部にクラックが発生し、負荷が加わったり、長時間使用するとクラックが進展し、割れや欠けが発生し、結果的に耐摩耗性の低下をきたすので好ましくない。一方、Y/ZrOモル比が2.8/97.2を越えると200〜300℃における熱劣化は少なくなるが、逆に本発明においては100℃程度かそれ以下の温水または高湿度雰囲気中での耐摩耗性及び耐久性の低下が起こるので好ましくない。
The requirement of (b) in the present invention is that the Y 2 O 3 / ZrO 2 molar ratio is within the range of 1.5 / 98.5 to 2.8 / 97.2, preferably 1.7 / 98.3 to 2 It is preferable that it is in the range of 1.8 / 98.2 to 2.5 / 97.5, particularly within the range of 0.7 / 97.3. It may typically be in the HfO 2 that may contain minor amounts mixed into ZrO 2 in the raw materials, handling ZrO 2 and the total amount of HfO 2, including the HfO 2 amount as ZrO 2 amount.
When the Y 2 O 3 / ZrO 2 molar ratio is less than 1.5 / 98.5, the amount of monoclinic zirconia in the sintered body increases, cracks are generated inside the sintered body, and a load is applied. If it is used for a long time, cracks develop and cracks and chips occur, resulting in a decrease in wear resistance. On the other hand, when the Y 2 O 3 / ZrO 2 molar ratio exceeds 2.8 / 97.2, thermal degradation at 200 to 300 ° C. decreases, but conversely in the present invention, hot water of about 100 ° C. or lower or high This is not preferable because wear resistance and durability are lowered in a humidity atmosphere.

なお、Y添加量の30モル%まで他の稀土類酸化物の1種または2種以上で置換したものも用いることができる。このような稀土類酸化物としては、CeO、Nd、Yb、Dy等が安価な点で好ましい。 Also it is possible to use those substituted with one or more other rare earth oxides up to 30 mol% of Y 2 O 3 amount. As such rare earth oxides, CeO 2 , Nd 2 O 3 , Yb 2 O 3 , Dy 2 O 3 and the like are preferable from the viewpoint of inexpensiveness.

本発明における(c)の要件は、Al 含有量が0.1〜5.0wt%である点にある。Alの添加は焼結性の向上、微構造の均一化に効果があるだけでなく、100℃程度かそれ以下の温水または高湿度雰囲気中における特性低下を抑制する効果がある。Al含有量が0.1wt%未満の場合は、Al添加の効果がなく、5.0wt%を越える場合は、ZrO結晶粒界にAl結晶粒子が多く存在することになり耐摩耗性及び耐久性の低下が起こるので好ましくない。 The requirement (c) in the present invention is that the Al 2 O 3 content is 0.1 to 5.0 wt% . The addition of Al 2 O 3 not only has an effect of improving the sinterability and homogenizing the microstructure, but also has an effect of suppressing the characteristic deterioration in hot water or high humidity atmosphere of about 100 ° C. or lower. When the Al 2 O 3 content is less than 0.1 wt%, there is no effect of adding Al 2 O 3 , and when it exceeds 5.0 wt%, there are many Al 2 O 3 crystal grains at the ZrO 2 crystal grain boundary. Therefore, wear resistance and durability are lowered, which is not preferable.

本発明における(d)の要件は、SiO 含有量が0.15wt%以上である点にある。本発明においてはSiO 含有量が0.15wt%以上であることが必要であり、より好ましくは0.2wt%以上である。SiO 含有量が0.15wt%未満の場合は、100℃程度かそれ以下の温水または高湿度雰囲気中での耐久性に劣るので好ましくない。一方、SiOが多すぎる場合には、ZrO結晶粒界に第2相が多く形成され耐摩耗性及び耐久性が悪化する場合がある。 The requirement (d) in the present invention is that the SiO 2 content is 0.15 wt% or more . In the present invention, the SiO 2 content needs to be 0.15 wt% or more, more preferably 0.2 wt% or more. When the SiO 2 content is less than 0.15 wt%, the durability in hot water or high humidity atmosphere of about 100 ° C. or lower is not preferable. On the other hand, if the SiO 2 is too large, there is a case where the second phase is often formed wear resistance and durability is deteriorated ZrO 2 grain boundaries.

本発明における(e)の要件は、SiOとTiOの合計量が0.15wt%を越え、3.0wt%以下である点にある。本発明においてはSiOとTiOの合計量が0.15wt%を越え、3.0wt%以下にあることが必要であり、好ましくは0.25〜2.5wt%である。耐久性を向上させるためには所定量のSiOが含有するだけでなく、TiOが同時に含有することが必要である。SiOとTiOの合計量が0.15wt%以下の場合は、耐久性が劣るので好ましくない。一方、SiOとTiOの合計量が3.0wt%を越える場合には、ZrO結晶粒界に第2相が多く、かつ第2相幅が広くなり、耐摩耗性及び耐久性の低下が起こる場合がある。さらに、TiOは2.0wt%以下含有することが好ましい。 The requirement (e) in the present invention is that the total amount of SiO 2 and TiO 2 exceeds 0.15 wt% and is 3.0 wt% or less. In the present invention, the total amount of SiO 2 and TiO 2 needs to be more than 0.15 wt% and not more than 3.0 wt%, preferably 0.25 to 2.5 wt%. In order to improve durability, it is necessary not only to contain a predetermined amount of SiO 2 but also to contain TiO 2 at the same time. When the total amount of SiO 2 and TiO 2 is 0.15 wt% or less, the durability is inferior, which is not preferable. On the other hand, when the total amount of SiO 2 and TiO 2 exceeds 3.0 wt%, there are many second phases at the ZrO 2 crystal grain boundary and the second phase width is widened, resulting in a decrease in wear resistance and durability. May happen. Further, TiO 2 is preferably contained in an amount of less 2.0 wt%.

本発明における(f)の要件は、平均結晶粒径が0.20〜0.70μmである点にある。本発明においては平均結晶粒径が0.20〜0.70μmにあることが必要であり、より好ましくは0.25〜0.60μmである。平均結晶粒径が0.20μm未満の場合は200〜300℃における熱安定性の向上は見られるが、100℃程度かそれ以下の温水または高湿度雰囲気中における耐久性が劣化するので好ましくない。平均結晶粒径が0.70μmを越える場合には耐摩耗性が低下するので好ましくない。平均結晶粒径は、ジルコニア質焼結体断面を鏡面にまで研磨し、次いで熱エッチングもしくは化学エッチングを施した後、走査電子顕微鏡で観察してインターセプト法により10点測定した平均値とする。算出式は下記の通りである。

Figure 0004410044
The requirement (f) in the present invention is that the average crystal grain size is 0.20 to 0.70 μm. In the present invention, the average crystal grain size is required to be 0.20 to 0.70 μm, and more preferably 0.25 to 0.60 μm. When the average crystal grain size is less than 0.20 μm, the thermal stability is improved at 200 to 300 ° C., but this is not preferable because the durability in a hot water or high humidity atmosphere of about 100 ° C. or lower is deteriorated. When the average crystal grain size exceeds 0.70 μm, the wear resistance is lowered, which is not preferable. The average crystal grain size is an average value obtained by polishing a cross section of the zirconia sintered body to a mirror surface, then performing thermal etching or chemical etching, then observing with a scanning electron microscope and measuring 10 points by the intercept method. The calculation formula is as follows.
Figure 0004410044

本発明における(g)の要件は、媒体撹拌ミルを用いた60℃温水中で、ディスク周速8m/secで1サイクル10時間運転で10サイクル運転した時のサイクル毎のジルコニア質焼結体摩耗率の最大値が50ppm/h以下である点にある。ジルコニア質焼結体摩耗率の最大値が50ppm/hを越える場合には、ジルコニア質焼結体粉体の摩耗が大きくなると同時にバッチ毎のジルコニア質焼結体摩耗率が安定しない。特に媒体撹拌ミルを用いて粉砕する場合にはこの欠点が顕著に現れるので好ましくない。 The requirement of (g) in the present invention is that the zirconia sintered body wears for each cycle when it is operated for 10 cycles in a cycle of 10 hours at a disk peripheral speed of 8 m / sec in 60 ° C. warm water using a medium stirring mill. The maximum value of the rate is 50 ppm / h or less. When the maximum value of the zirconia sintered body wear rate exceeds 50 ppm / h, the wear of the zirconia sintered body powder becomes large and at the same time, the zirconia sintered body wear rate for each batch is not stable. In particular, when the pulverization is performed using a medium stirring mill, this defect appears remarkably, which is not preferable.

本発明においては、かさ密度が5.80g/cm以上、より好ましくは5.85g/cm以上であることが好ましい。かさ密度が5.80g/cm未満の場合は、欠陥となるポアーが多く存在することになり、強度、硬度の低下が起こり、その結果、耐摩耗性の低下だけでなく、耐久性の低下が起こるので好ましくない。さらに、欠陥量が5%以下であることが好ましい。ここで示す欠陥とは、ポアーだけでなく、ジルコニア質焼結体(メディア)断面の研削及び研磨加工して鏡面仕上げする際に発生する脱粒の後のへこみも含む。この欠陥量の測定方法は、鏡面仕上げした面を所定の倍率(通常、1000〜3000倍)の走査電子顕微鏡で写真撮影を行い、その写真を画像解析にて欠陥部分と欠陥でない部分とを二値化により分離して、その欠陥部分が画像全体に占める面積の割合を算出する。この欠陥量が3%を越える場合には、かさ密度が5.80g/cm以上であっても耐摩耗性だけでなく、耐久性に劣るので好ましくない。 In the present invention, bulk density 5.80 g / cm 3 or more and more preferably 5.85 g / cm 3 or more. When the bulk density is less than 5.80 g / cm 3 , there will be many pores that become defects, resulting in a decrease in strength and hardness, resulting in a decrease in durability as well as a decrease in wear resistance. Is not preferable. Further, the defect amount is preferably 5% or less. The defects shown here include not only pores but also dents after grain removal that occurs when mirror-finishing is performed by grinding and polishing a cross section of a zirconia sintered body (media). In this defect amount measurement method, a mirror-finished surface is photographed with a scanning electron microscope having a predetermined magnification (usually 1000 to 3000 times), and the photograph is subjected to image analysis to obtain a defective portion and a non-defective portion. The ratio of the area occupied by the defective portion in the entire image is calculated by separation by valuation. When the amount of defects exceeds 3%, even if the bulk density is 5.80 g / cm 3 or more, not only the wear resistance but also the durability is inferior.

本発明の耐摩耗性及び耐久性にすぐれるジルコニア質焼結体の製造方法について説明する。   A method for producing a zirconia sintered body having excellent wear resistance and durability according to the present invention will be described.

ZrOとYの含有量が所定のモル比となるようにジルコニウム化合物(例えばオキシ塩化ジルコニウム)の水溶液とイットリウム化合物(例えば塩化イットリウム)の水溶液を均一に混合し、加水分解し、水和物を得、脱水、乾燥させた後、400〜1250℃で仮焼し、ジルコニア粉体を得る方法、もしくは酸化物あるいは塩の形態で水あるいは有機溶媒を用いて湿式で混合し、脱水、乾燥させた後、400〜1250℃で仮焼し、ジルコニア粉体を得る方法が採用される。Y以外の成分の添加はジルコニウム化合物とイットリウム化合物の水溶液または酸化物を混合する際に塩の水溶液として所定量添加してもよいし、後記する仮焼粉体の粉砕・分散時に水酸化物、炭酸化物、酸化物等の形態で添加しても良い。 An aqueous solution of a zirconium compound (eg, zirconium oxychloride) and an aqueous solution of an yttrium compound (eg, yttrium chloride) are uniformly mixed so that the content of ZrO 2 and Y 2 O 3 is a predetermined molar ratio, hydrolyzed, and water After obtaining a Japanese product, dehydrating and drying, calcining at 400 to 1250 ° C. to obtain a zirconia powder, or wet mixing with water or an organic solvent in the form of an oxide or salt, dehydrating, After drying, a method of calcining at 400 to 1250 ° C. to obtain zirconia powder is employed. Components other than Y 2 O 3 may be added in a predetermined amount as an aqueous salt solution when mixing an aqueous solution or oxide of a zirconium compound and an yttrium compound, or water may be added during pulverization / dispersion of the calcined powder described later. You may add with forms, such as an oxide, a carbonate, and an oxide.

得られた仮焼粉体を湿式により粉砕・分散し、乾燥して成形粉体を得る。必要に応じて成形助剤の添加やスプレードライヤーによる整粒を行う。   The obtained calcined powder is pulverized and dispersed by a wet method and dried to obtain a molded powder. If necessary, add a molding aid and adjust the size with a spray dryer.

得られたZrO を主成分とする成形粉体粒度は、比表面積が3〜30m/g、好ましくは5〜20m/gであることが必要である。これらの範囲を外れる場合は、焼結性の低下や後述する成形性の低下が起こり、焼結しても得られたジルコニア質焼結体に気孔や欠陥が多く存在してしまい、耐摩耗性及び耐久性に劣るので好ましくない。 Molding the powder particle size mainly composed of ZrO 2 obtained has a specific surface area 3~30m 2 / g, preferably it is necessary that 5 to 20 m 2 / g. When these ranges are exceeded, the sinterability and formability will be reduced as described later, and the zirconia sintered body obtained by sintering has many pores and defects, resulting in wear resistance. In addition, the durability is inferior.

さらに、ZrO を主成分とする成形粉体は塩素量が50ppm以下であることが必要であり、より好ましくは30ppm以下である。塩素量が50ppmを越える場合には、成形性の低下が起こり、得られたジルコニア質焼結体に欠陥が多く存在し、強度が低下したり、耐摩耗性及び耐久性に劣るので好ましくない。塩素の除去については粉体の洗浄やアンモニア水による中和等の方法が採用できる。 Further, the molded powder containing ZrO 2 as a main component needs to have a chlorine content of 50 ppm or less, more preferably 30 ppm or less. When the amount of chlorine exceeds 50 ppm, the formability is lowered, and there are many defects in the obtained zirconia sintered body, the strength is lowered, and the wear resistance and durability are inferior. For removal of chlorine, methods such as powder washing and neutralization with aqueous ammonia can be employed.

得られたZrO を主成分とする成形粉体を用いて、水を含有させたアルコール類、パラフィン系炭化水素類等の有機溶媒、可溶性高分子または水を用いて、転動造粒成形法、坏土成形法、鋳込成形法及び液中造粒成形法によりジルコニア質焼結体を成形する。 Rolling granulation molding method using the obtained molded powder mainly composed of ZrO 2 and using water-containing alcohols, paraffin hydrocarbons and other organic solvents, soluble polymers or water A zirconia sintered body is formed by a clay molding method, a cast molding method and a submerged granulation molding method.

上記の方法で成形した焼結体はスプレードライヤー等で乾燥した粉体を用いてCIP成形(静水圧プレス成形)した焼結体より焼結体内部の欠陥量が非常に少なくできるため優れた耐磨耗性及び耐久性を有するジルコニア質焼結体とすることができる。前述のように成形時に使用する溶液に水を含有していると、結晶粒界または近傍に適度な第2相を形成し、結晶粒界強度が高くなって耐磨耗性及び耐衝撃性が向上するだけでなく、優れた耐久性を示す効果がある。   The sintered body formed by the above method has excellent resistance to resistance because the amount of defects inside the sintered body can be significantly smaller than a sintered body obtained by CIP molding (hydrostatic press molding) using powder dried by a spray dryer or the like. A zirconia sintered body having wear and durability can be obtained. When water is contained in the solution used during molding as described above, an appropriate second phase is formed at or near the crystal grain boundary, and the grain boundary strength is increased, resulting in wear resistance and impact resistance. In addition to improving, there is an effect of showing excellent durability.

成形時に使用する溶液としては水を含有させたアルコール類、パラフィン系炭化水素類等の有機溶媒、可溶性高分子などまたは水を用いる。成形時に使用する溶液に水が含有されていると、結晶粒界または近傍に適度な第2相を形成し、結晶粒界強度が高くなって耐摩耗性及び耐衝撃性が向上するだけでなく、優れた耐久性を示す効果がある。   As a solution used at the time of molding, an alcohol containing water, an organic solvent such as paraffinic hydrocarbons, a soluble polymer, or the like is used. When water is contained in the solution used at the time of molding, an appropriate second phase is formed at or near the crystal grain boundary, and the grain boundary strength is increased to improve wear resistance and impact resistance. It has the effect of exhibiting excellent durability.

次いで得られた成形体を大気中1200〜1550℃程度で焼成することによって焼結体を得る。   Next, the obtained compact is fired at about 1200 to 1550 ° C. in the atmosphere to obtain a sintered body.

さらに、必要に応じてHIP(Hot isostatic press)処理を施すことにより焼結体内部に欠陥が有る場合にこれらの欠陥を低減もしくは小さくすることができ、摩擦、衝撃、圧壊等に対する抵抗性を高くすることができ、耐摩耗性を向上、さらには耐久性の向上ができる。HIP処理は常圧焼結後、ArやNなどの不活性雰囲気、またはO雰囲気下で1150〜1550℃、500〜2000気圧の圧力下で処理することが好ましい。 Furthermore, if there is a defect inside the sintered body by performing HIP (hot isostatic press) treatment as necessary, these defects can be reduced or reduced, and resistance to friction, impact, crushing, etc. is increased. It is possible to improve wear resistance and durability. The HIP treatment is preferably carried out under pressure of 1150 to 1550 ° C. and 500 to 2000 atmospheres in an inert atmosphere such as Ar or N 2 or an O 2 atmosphere after atmospheric pressure sintering.

このようにして得られたジルコニア質焼結体の焼成過程で汚染された表面は研磨などにより除去することができる。   The surface contaminated in the firing process of the zirconia sintered body thus obtained can be removed by polishing or the like.

(1)本発明のジルコニア質焼結体は、100℃程度かそれ以下の温水または高湿度雰囲
気中でもすぐれた耐摩耗性と耐久性を有するため、公知の粉砕・分散用メディアとし
ての用途に従来のメディアに比し、有効に用いることができ、さらには温水中または
高湿度雰囲気中で耐摩耗性が要求される分野にも有効に用いることができる。
(2)本発明のすぐれた耐摩耗性及び耐久性を有するジルコニア質焼結体は、粉砕・分散
用メディアだけでなく、ベアリングボール等の産業用耐摩耗構造部材として広い分野
に利用できる。
(1) Since the zirconia sintered body of the present invention has excellent wear resistance and durability even in warm water or high humidity atmosphere of about 100 ° C. or lower, it can be used as a known grinding and dispersion medium. Compared to conventional media, it can be used effectively, and can also be used effectively in fields where wear resistance is required in warm water or high humidity atmospheres.
(2) The zirconia sintered body having excellent wear resistance and durability according to the present invention can be used not only for pulverizing / dispersing media but also for a wide range of industrial wear-resistant structural members such as bearing balls.

以下に実施例を示し、本発明を説明するが、本発明はこれにより何ら限定されるものではない。   Hereinafter, the present invention will be described with reference to examples, but the present invention is not limited thereto.

実施例と比較例
純度99.6%のオキシ塩化ジルコニウムと純度99.9%の硝酸イットリウムを表1および3の組成となるように水溶液にして混合した。次に、この水溶液を加熱環流下で加水分解し、脱水、乾燥し、Yが固溶した水和ジルコニウムを得、600〜1200℃で1時間仮焼し、得られたジルコニア粉体を湿式で粉砕・分散した。なお、Y以外の成分については、酸化物もしくは塩の形態で粉砕時に所定量添加混合した。次いで、得られたスラリーを乾燥、整粒し、成形用粉体とし、これらの粉体を用いて水を使用して転動造粒成形した。試料No.12は粉砕・分散したスラリーにワックスエマルジョンを粉体に対し、3wt%添加し、スプレードライヤー乾燥し、70MPaの圧力でCIP成形した。得られた成形粉体の比表面積及び含有塩素量を表1および表3に示す。次いで、1200〜1600℃で焼成し、放冷して、直径1mmの球状のジルコニア質焼結体を得た。これらのジルコニア質焼結体をバレル研磨によって仕上げ、評価用試料とした。
Examples and Comparative Examples Zirconium oxychloride having a purity of 99.6% and yttrium nitrate having a purity of 99.9% were mixed in an aqueous solution so as to have the compositions shown in Tables 1 and 3. Next, this aqueous solution is hydrolyzed under heating reflux, dehydrated and dried to obtain hydrated zirconium in which Y 2 O 3 is dissolved, and calcined at 600 to 1200 ° C. for 1 hour, and the obtained zirconia powder is obtained. Was wet crushed and dispersed. Note that the components other than Y 2 O 3, and mixed a predetermined amount added during the pulverization in the form of oxides or salts. Next, the obtained slurry was dried and sized to obtain powders for molding, and these powders were used for rolling granulation molding using water. Sample No. In No. 12, the wax emulsion was added to the pulverized and dispersed slurry by 3 wt% with respect to the powder, spray-dried, and CIP molded at a pressure of 70 MPa. Tables 1 and 3 show the specific surface area and the chlorine content of the obtained molded powder. Next, it was fired at 1200 to 1600 ° C. and allowed to cool to obtain a spherical zirconia sintered body having a diameter of 1 mm. These zirconia sintered bodies were finished by barrel polishing and used as samples for evaluation.

これらのジルコニア質焼結体の化学組成、特性を表1〜4に示す。試料No.1〜10は本発明のジルコニア質焼結体であり、試料No.11〜22は本発明の要件の少なくとも1つを満たしていない比較品である。なお、試料No.18およびNo.20については、得られたジルコニア質焼結体のかさ密度が低いため、かさ密度以外の特性については測定しなかった。 The chemical compositions and characteristics of these zirconia sintered bodies are shown in Tables 1 to 4. Sample No. 1 to 10 are zirconia sintered bodies of the present invention. 11 to 22 are comparative products that do not satisfy at least one of the requirements of the present invention. Sample No. 18 and no. For No. 20, since the bulk density of the obtained zirconia sintered body was low, properties other than the bulk density were not measured.

次いで上記で得た試料ジルコニア質焼結体(メディア)1200ccを内容積1400ccのダイノーミル(シンマルエンタープライゼス社製:タイプKDL−PILOT、ベッセル及びディスクは株式会社ニッカトー製高強度ジルコニア:YTZ)に入れ、60℃に保持した10リットルの温水を600cc/minで60〜65℃の範囲内に温度調整をしながら循環させ、ディスク周速8m/secで10時間を1サイクルとして10サイクル運転するテストを行い、各サイクル毎の時間当たりのジルコニア質焼結体の摩耗率を測定した。ジルコニア質焼結体摩耗率はテスト前後の時間当たりの重量変化率として算出した。サイクル毎のジルコニア質焼結体摩耗率の最大値を表2および4に示す。また、図1に試料No.4、14、16の各サイクルの摩耗率とテスト時間との関係を示す。   Next, 1200 cc of the sample zirconia sintered body (media) obtained above is put into a dyno mill (Shinmaru Enterprises Co., Ltd .: type KDL-PILOT, vessel and disk are made of Nikkato Co., Ltd. high strength zirconia: YTZ) having an internal volume of 1,400 cc. A test that circulates 10 liters of hot water held at 60 ° C. at 600 cc / min while adjusting the temperature within the range of 60 to 65 ° C., and operates 10 cycles with a disk peripheral speed of 8 m / sec and 10 hours as one cycle. The wear rate of the zirconia sintered body per hour for each cycle was measured. The wear rate of the zirconia sintered body was calculated as the weight change rate per hour before and after the test. Tables 2 and 4 show the maximum values of the wear rate of the zirconia sintered body for each cycle. In addition, in FIG. The relationship between the wear rate of each cycle of 4, 14, and 16 and the test time is shown.

さらに、100℃程度かそれ以下の温水または高湿度雰囲気中での耐久性と200〜300℃での熱劣化との違いを明確にするため試料を250℃で1500時間保持するテストを行い、テスト後のクラックの有無を調べた結果を表2および4において、熱劣化/クラックの有無の項に併せて示す。   Furthermore, in order to clarify the difference between the durability in hot water or high humidity atmosphere of about 100 ° C. or lower and the thermal deterioration at 200 to 300 ° C., a test is performed by holding the sample at 250 ° C. for 1500 hours. The results of examining the presence or absence of subsequent cracks are also shown in Tables 2 and 4 in the section of thermal degradation / presence / absence of cracks.

表2および4に示す結果から、100℃程度かそれ以下の温水または高湿度雰囲気中での耐久性と200〜300℃での熱劣化とは全くことなることが明らかである。
さらに、本発明によるジルコニア質焼結体は、摩耗率が50ppm/h以下であり、温水中でもすぐれた耐摩耗性を示すことが明らかである。
From the results shown in Tables 2 and 4, it is clear that durability in warm water or high humidity atmosphere of about 100 ° C. or lower and thermal deterioration at 200 to 300 ° C. are completely different.
Furthermore, it is clear that the zirconia sintered body according to the present invention has a wear rate of 50 ppm / h or less and exhibits excellent wear resistance even in hot water.

Figure 0004410044
Figure 0004410044

Figure 0004410044
*熱劣化テストによるクラックの有無を示す。
Figure 0004410044
* Indicates the presence or absence of cracks in the thermal degradation test.

Figure 0004410044
Figure 0004410044

Figure 0004410044
Figure 0004410044

以下に、本発明の実施態様項を列記する。
1.(a)ZrO結晶が主として正方晶であるZrO−Y系ジルコニア質焼結体であって、(b)Y/ZrOモル比が1.5/98.5〜2.8/97.2の範囲にあり、(c)Al 含有量が0.1〜5.0wt%であり、(d)SiO 含有量が0.15wt%以上であり、(e)SiOとTiOの合計量が0.15wt%を越え、3.0wt%以下であり、(f)平均結晶粒径が0.20〜0.70μmであり、(g)媒体撹拌ミルを用いた60℃温水中で、ディスク周速8m/secで1サイクル10時間運転で10サイクル運転した時のサイクル毎のジルコニア質焼結体摩耗率の最大値が50ppm/h以下であることを特徴とする耐摩耗性及び耐久性に優れたジルコニア質焼結体。
2.前記Y/ZrOモル比が1.7/98.3〜2.7/97.3の範囲にある前項1記載の耐摩耗性及び耐久性に優れたジルコニア質焼結体。
3.前記Y/ZrOモル比が1.8/98.2〜2.5/97.5の範囲にある前項1記載の耐摩耗性及び耐久性に優れたジルコニア質焼結体。
4.前記Y添加量の30モル%までがCeO、Nd、Yb、Dyよりなる群から選ばれた他の希土類酸化物で置換されたものである前項1〜3いずれか記載の耐摩耗性及び耐久性に優れたジルコニア質焼結体。
5.前記SiOの含有量が0.2wt%以上である前項1〜4いずれか記載の耐摩耗性及び耐久性に優れたジルコニア質焼結体。
6.前記SiOとTiOの合計量が0.25〜2.5wt%である前項1〜5いずれか記載の耐摩耗性及び耐久性に優れたジルコニア質焼結体。
7.前記TiOの含有量が2.0wt%以下である前項6記載の耐摩耗性及び耐久性に優れたジルコニア質焼結体。
8.前項1〜7いずれか記載のジルコニア質焼結体からなる粉砕・分散用メディア。
9.(A)Y/ZrOモル比が1.5/98.5〜2.8/97.2の範囲にあり、Al 含有量が0.1〜5.0wt%であり、SiO 含有量が0.15wt%以上であり、SiOとTiOの合計量が0.15wt%を越え、3.0wt%以下であって、比表面積が3〜30m/g、含有塩素量が50ppm以下であるZrOを主成分とする成形用粉体を用いて、(B)湿式で成形し、(C)大気中1200〜1550℃で焼成することを特徴とする前項1記載の耐摩耗性及び耐久性に優れたジルコニア質焼結体の製造方法。
10.前項9の(C)工程にひきつづいて、(D)不活性雰囲気下または酸素含有雰囲気下で、1150〜1550℃、500〜2000気圧で処理するものである前項9記載の耐摩耗性及び耐久性に優れたジルコニア質焼結体の製造方法。
11.前記比表面積が5〜20m/gである前項9または10記載の耐摩耗性及び耐久性に優れたジルコニア質焼結体の製造方法。
The embodiment items of the present invention are listed below.
1. (A) ZrO 2 crystal is a predominantly tetragonal structure is ZrO 2 -Y 2 O 3 zirconia sintered body, (b) Y 2 O 3 / ZrO 2 molar ratio of 1.5 / 98.5~ in the range of 2.8 / 97.2, a 0.1 to 5.0% is (c) Al 2 O 3 content is at (d) SiO 2 content of more than 0.15 wt%, ( e) The total amount of SiO 2 and TiO 2 is more than 0.15 wt% and not more than 3.0 wt%, (f) the average crystal grain size is 0.20 to 0.70 μm, and (g) the medium stirring mill The maximum wear rate of the zirconia sintered body for each cycle when 10 cycles of 10-hour operation for 1 hour at a disk peripheral speed of 8 m / sec in warm water at 60 ° C. using JIS is 50 ppm / h or less. Zirconia-based sintered body with excellent wear resistance and durability.
2. 2. The zirconia sintered body excellent in wear resistance and durability according to item 1 above, wherein the Y 2 O 3 / ZrO 2 molar ratio is in the range of 1.7 / 98.3 to 2.7 / 97.3.
3. 2. The zirconia sintered body having excellent wear resistance and durability according to item 1, wherein the Y 2 O 3 / ZrO 2 molar ratio is in the range of 1.8 / 98.2 to 2.5 / 97.5.
4). The preceding item wherein up to 30 mol% of the Y 2 O 3 addition amount is substituted with another rare earth oxide selected from the group consisting of CeO 2 , Nd 2 O 3 , Yb 2 O 3 , and Dy 2 O 3. A zirconia sintered body having excellent wear resistance and durability according to any one of 1 to 3.
5). 5. The zirconia sintered body having excellent wear resistance and durability according to any one of 1 to 4 above, wherein the content of SiO 2 is 0.2 wt% or more.
6). 6. The zirconia sintered body excellent in wear resistance and durability according to any one of 1 to 5 above, wherein the total amount of SiO 2 and TiO 2 is 0.25 to 2.5 wt%.
7). 7. The zirconia sintered body having excellent wear resistance and durability according to item 6, wherein the content of TiO 2 is 2.0 wt% or less.
8). A pulverizing / dispersing medium comprising the zirconia sintered body according to any one of 1 to 7 above.
9. (A) Y 2 O 3 / ZrO 2 molar ratio is in the range of 1.5 / 98.5 to 2.8 / 97.2, and Al 2 O 3 content is 0.1 to 5.0 wt% . The SiO 2 content is 0.15 wt% or more , the total amount of SiO 2 and TiO 2 exceeds 0.15 wt% and is 3.0 wt% or less, and the specific surface area is 3 to 30 m 2 / g. Item 1. The above item 1 characterized in that (B) wet molding is performed using a molding powder mainly composed of ZrO 2 having a chlorine content of 50 ppm or less, and (C) firing at 1200 to 1550 ° C in the atmosphere. Of producing a zirconia sintered body having excellent wear resistance and durability.
10. Following the step (C) of the previous item 9, (D) wear resistance and durability according to the previous item 9, which is processed at 1150 to 1550 ° C. and 500 to 2000 atm in an inert atmosphere or an oxygen-containing atmosphere. Method for producing a zirconia sintered body excellent in performance.
11. 11. The method for producing a zirconia sintered body having excellent wear resistance and durability according to item 9 or 10, wherein the specific surface area is 5 to 20 m 2 / g.

実施例と比較例における試料No.4、14、16の各サイクルの摩耗率とテスト時間との関系を示すグラフである。Sample No. in Example and Comparative Example. It is a graph which shows the relationship between the abrasion rate of each cycle of 4, 14, and 16 and test time.

Claims (2)

(a)ZrO結晶が主として正方晶であるZrO−Y系ジルコニア質焼結体であって、(b)Y/ZrOモル比が1.5/98.5〜2.8/97.2の範囲にあり、(c)Al 含有量が0.1〜5.0wt%であり、(d)SiO 含有量が0.15wt%以上であり、(e)SiOとTiOの合計量が0.15wt%を越え、3.0wt%以下であり、(f)平均結晶粒径が0.20〜0.70μmであり、(g)媒体撹拌ミルを用いた60℃温水中で、ディスク周速8m/secで1サイクル10時間運転で10サイクル運転した時のサイクル毎のジルコニア質焼結体摩耗率の最大値が50ppm/h以下であることを特徴とする耐摩耗性及び耐久性に優れたジルコニア質焼結体。 (A) ZrO 2 crystal is a predominantly tetragonal structure is ZrO 2 -Y 2 O 3 zirconia sintered body, (b) Y 2 O 3 / ZrO 2 molar ratio of 1.5 / 98.5~ in the range of 2.8 / 97.2, a 0.1 to 5.0% is (c) Al 2 O 3 content is at (d) SiO 2 content higher 0.15 wt%, ( e) The total amount of SiO 2 and TiO 2 is more than 0.15 wt% and not more than 3.0 wt%, (f) the average crystal grain size is 0.20 to 0.70 μm, and (g) the medium stirring mill The maximum wear rate of the zirconia sintered body for each cycle when 10 cycles of 10-hour operation for 1 hour at a disk peripheral speed of 8 m / sec in warm water at 60 ° C. using JIS is 50 ppm / h or less. Zirconia-based sintered body with excellent wear resistance and durability. (A)Y/ZrOモル比が1.5/98.5〜2.8/97.2の範囲にあり、Al 含有量が0.1〜5.0wt%であり、SiO 含有量が0.15wt%以上であり、SiOとTiOの合計量が0.15wt%を越え、3.0wt%以下であって、比表面積が3〜30m/g、含有塩素量が50ppm以下であるZrOを主成分とする成形用粉体を用いて、(B)湿式で成形し、(C)大気中1200〜1550℃で焼成することを特徴とする請求項1記載の耐摩耗性及び耐久性に優れたジルコニア質焼結体の製造方法。 (A) The Y 2 O 3 / ZrO 2 molar ratio is in the range of 1.5 / 98.5 to 2.8 / 97.2, and the Al 2 O 3 content is 0.1 to 5.0 wt% . The SiO 2 content is 0.15 wt% or more , the total amount of SiO 2 and TiO 2 exceeds 0.15 wt% and is 3.0 wt% or less, and the specific surface area is 3 to 30 m 2 / g. the ZrO 2 chlorine content is 50ppm or less by using a molding powder mainly, (B) and molded by a wet, claim 1, characterized by firing at 1,200-1,550 ° C. (C) in the air The manufacturing method of the zirconia sintered compact excellent in abrasion resistance and durability as described .
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