JP4395429B2 - Contact unit and inspection system using contact unit - Google Patents

Description

  The present invention relates to a contact unit that electrically connects a terminal formed on a predetermined inspection object and a signal generation device that generates an electric signal to be input to and output from the inspection object, and an inspection system using the contact unit It is about.

  2. Description of the Related Art Conventionally, an inspection system for inspecting electrical characteristics of an inspection target such as an LCD (Liquid Crystal Display) is known. Since the terminals formed on the inspection object such as an LCD have a structure that is arranged in a small number and at a small interval, the inspection system has conductive contacts arranged corresponding to the many terminals formed on the inspection object. The structure which electrically connects with a test object through the made contact unit is employ | adopted (for example, refer patent document 1).

  FIG. 6 is a schematic diagram showing a configuration of a contact unit provided in a conventional inspection system. As shown in FIG. 6, the conventional contact unit includes a conductive contact 101 for physically contacting a terminal formed on an inspection target, a holding substrate 102 for holding the conductive contact 101, A contact block 105 including a wiring structure 103 and a block member 104 for electrically connecting an electronic circuit for generating a signal and the conductive contact 101, and the contact block 105 to the holding substrate 102 The fixing member 106 and a screw member 107 that fixes the fixing member 106 to the holding substrate 102 are provided. By using the contact unit having such a configuration, the electrical signal purified by the signal processing device is input to the terminal to be inspected via the wiring structure 103 and the conductive contact 101, and the response signal from the inspection target is also received. The signal is input to the signal processing device via the conductive contact 101 and the wiring structure 103.

Japanese Patent No. 3442137

  However, the conventional inspection system has a problem that it is difficult to align the conductive contact provided in the contact unit and the terminal formed on the inspection target. Hereinafter, this problem will be described.

  FIG. 7 is a schematic diagram showing an inspection mode using a conventional inspection system. Since a large number of terminals 110 are usually formed on an inspection target such as an LCD, the conductive contacts 101 corresponding to the large number of terminals 110 prior to input / output of an electric signal in an actual inspection. It is necessary to accurately align the position with the.

  In performing the alignment, it is most certain that the positional relationship between the terminal 110 formed on the inspection target and the conductive contact 101 is directly or visually observed through a predetermined camera. Specifically, the alignment is performed by visually observing the gap between the holding substrate 102 and the inspection target 109, and the input / output of electric signals is performed after the position of the contact unit is moved as necessary. It becomes.

  However, as shown in FIG. 7, the conventional inspection system has a structure in which the holding substrate 102 extends to the inspection object side in order to secure a screwing region by the screw member 107 in the contact unit. Therefore, in the conventional inspection system, the extended portion of the holding substrate 102 is a factor that hinders visual inspection for alignment, and there is a problem that it is difficult to perform rapid alignment.

  Here, it is conceivable that the position of the screw member 107 on the holding substrate 102 is set to a position in the direction perpendicular to the paper surface in FIG. 7 with respect to the region where the conductive contact 101 is held. However, with such a configuration, a new problem arises that it becomes difficult to dispose the contact block 105 corresponding to the terminals formed on the inspection target. That is, the contact unit has a configuration in which a plurality of contact blocks 105 are arranged in the direction perpendicular to the paper surface in FIG. 7 in response to an increase in terminals to be inspected in recent years. Therefore, in the case of the above-described configuration, the screw member 107 is positioned between the adjacent contact blocks 105, the interval between the contact blocks 105 is increased, and the wiring structure 103 is arranged corresponding to the terminal to be inspected. Difficult to do.

  In addition, a configuration in which the screw member 107 is disposed on the center side (left direction in FIG. 7) of the holding substrate 102 with respect to the region where the conductive contact 101 is held is not preferable. As shown in FIG. 7, the wiring structure 103 extends from the surface of the holding substrate 102 in the left direction in FIG. 7. Therefore, when the screw member 107 is disposed at such a position, the screw member 107 and the wiring structure 103 This is because a new device for maintaining the electrical insulation is required.

The present invention was made in view of the above, with a contact unit and such contact unit which can easily perform alignment between the terminal and the electrically conductive contacts formed on the test object The purpose is to realize an inspection system.

In order to solve the above-described problems and achieve the object, a contact unit according to the present invention includes a terminal formed on a predetermined inspection object and a signal generation device that generates an electric signal to be input to and output from the inspection object. A contact unit for electrically connecting the terminals, and having a conductive contact in contact with the terminal and a through hole penetrating in a thickness direction in a region near the end, and the conductive contact to the through hole A holding substrate for penetrating and holding a predetermined wiring structure, a contact block disposed on the holding substrate so that the wiring structure is electrically connected to the conductive contact, and the conductive contact Is fixed to the holding substrate at the center side of the holding substrate with respect to the region where the holding substrate is held, and the contact block is sandwiched between the holding substrate and the holding substrate with respect to the contact block. And a block fixing member for fixing the contact block to the holding substrate by applying a pressing force in a direction coming close to the holding substrate a viewing direction, the block fixing member is fixed to said holding substrate It has a part which contacts the said holding | maintenance board surface over a predetermined distance toward the edge part on the opposite side to the side by which the said electroconductive contactor is arrange | positioned from a location .

According to the present invention, the contact block electrically connected to the conductive contact is fixed on the holding substrate by the fixing member fixed to the holding substrate at the center side of the holding substrate with respect to the conductive contact. Because of the configuration, there is no need to extend the end of the holding substrate in order to secure an area for fixing the contact block, and the terminal and the conductive contact are made when aligning the terminal to be inspected and the conductive contact. It is possible to easily visually check the positional relationship with the sex contacts.

In the contact unit according to the present invention , in the above invention, the contact block has a rectangular parallelepiped shape in which one end of the wiring structure is disposed on the surface in contact with the holding substrate in correspondence with the conductive contact. A block member is provided, and the block fixing member applies a pressing force in a direction approaching the holding substrate to a surface of the block member facing the surface on which the wiring structure is disposed.

In the contact unit according to the present invention as set forth in the invention described above, the block fixing member has an opening for extending the other end of the wiring structure to the outside .

An inspection system according to the present invention is an inspection system for inspecting electrical characteristics of a predetermined inspection object, and includes a conductive contact that contacts the terminal, and a through-hole that penetrates in a thickness direction in a region near the end. A holding substrate that holds the conductive contact through the through-hole and a predetermined wiring structure, and the wiring structure is electrically connected to the conductive contact on the holding substrate. The contact block is fixed to the holding substrate at the center side of the holding substrate with respect to the region where the conductive contact is held, and the contact block is sandwiched between the holding substrate and the contact A block fixing unit for fixing the contact block on the holding substrate by applying a pressing force to the block in a thickness direction of the holding substrate and in a direction close to the holding substrate. A contact unit including a member, and a signal processing device that is electrically connected to the wiring structure and that inputs and outputs electrical signals to and from the inspection object via the wiring structure and the conductive contact. The block fixing member has a portion that comes into contact with the surface of the holding substrate over a predetermined distance from an area fixed to the holding substrate toward an end opposite to the side where the conductive contact is disposed. It is characterized by.

  In the contact unit and the inspection system according to the present invention, the contact block electrically connected to the conductive contact is held on the holding substrate by a fixing member fixed to the holding substrate on the holding substrate center side with respect to the conductive contact. Since it is configured to be fixed on the top, there is no need to extend the end of the holding substrate in order to secure an area for fixing the contact block, and alignment between the terminal to be inspected and the conductive contact In this case, the positional relationship between the terminal and the conductive contact can be easily visually confirmed, and an effect is obtained that alignment can be easily performed.

  The best mode for carrying out a contact unit and an inspection system according to the present invention (hereinafter referred to as “embodiment”) will be described in detail below with reference to the drawings. Note that the drawings are schematic, and it should be noted that the relationship between the thickness and width of each part, the ratio of the thickness of each part, and the like are different from the actual ones. Of course, the part from which the relationship and ratio of a mutual dimension differ is contained.

  FIG. 1 is a schematic diagram showing the overall configuration of the inspection system according to the present embodiment. As shown in FIG. 1, the inspection system according to the present embodiment includes a signal processing device 1 that generates and processes a predetermined electrical signal, and a contact that electrically connects the signal processing device 1 and the inspection target. And a unit 2.

  The signal processing apparatus 1 is for performing input / output and signal processing of a predetermined electric signal. Specifically, the signal processing device 1 has a function of generating an electrical signal for inspection used in the inspection of the inspection target and inputting and processing the electrical signal from the inspection target.

  The contact unit 2 includes a conductive contact 3 arranged in an array pattern corresponding to a signal input / output terminal formed on an inspection target, a holding substrate 4 holding the conductive contact 3, and a holding substrate 4 The contact block 5 is disposed in a region corresponding to the holding region of the conductive contact 3 and the fixing member 6 fixes the contact block 5 on the holding substrate 4. Further, the contact unit 2 includes an adjustment mechanism 8 that adjusts the height of the conductive contact 3 with respect to the inspection target, and a frame substrate 9 that holds the adjustment mechanism 8.

  FIG. 2 is a top view of the contact unit 2. As shown in FIG. 2, the contact unit 2 includes a plurality of adjustment mechanisms 8 and a fixing member 6 corresponding to the adjustment mechanism 8, a contact block 5, and a holding substrate 4 (shown in FIG. 2) with respect to a single frame substrate 9. And a conductive contact 3 (not shown) is arranged. The inspection system according to the present embodiment realizes electrical connection to a large number of terminals formed on the inspection target by adopting such a structure. Of course, the single holding substrate 4, the contact block 5, and the fixing member are realized. 6 may constitute the contact unit 2.

  The conductive contact 3 is for making physical contact with a terminal formed on the inspection object. Specifically, the conductive contact 3 includes, for example, a spring member, and is formed of an elastic needle-shaped conductive member. The conductive contact 3 is held so as to penetrate the holding substrate 4, and is formed so as to be in physical contact with the terminal on the inspection target at the lower end and to be electrically connected to the wiring structure 12 (described later) at the upper end. The

  The holding substrate 4 is for holding the conductive contact 3. Specifically, the holding substrate 4 has a structure in which a large number of through holes 10 are formed in the vicinity of the end corresponding to the arrangement of terminals to be inspected, and the conductive contact 3 is held in the through holes 10.

  The contact block 5 is for electrical connection with the conductive contact 3. Specifically, the contact block 5 includes a block member 11 formed of an insulating material and having a rectangular parallelepiped shape, and a wiring structure 12 having one end fixed on the surface of the block member 11.

  The wiring structure 12 is for electrically connecting the conductive contact 3 and the signal processing device 1. Specifically, the wiring structure 12 has one end fixed on the surface of the block member 11 facing the holding substrate 4, and the block member 11 is disposed at a predetermined position on the holding substrate 4. Thus, one end is configured to come into contact with the upper end portion of the conductive contact 3. In addition, as the structure of the wiring structure 12 itself, it may be formed by a large number of conductive wires or the like corresponding to a large number of conductive contacts 3, but in this embodiment, an FPC (Flexible Printed Circuit), It is assumed that each of the multiple conductive contacts 3 and the signal processing device 1 are electrically connected to each other by TAB (Tape Automated Bonding) or the like.

  The fixing member 6 is for fixing the contact block 5 on the holding substrate 4. Specifically, the fixing member 6 is attached to the holding substrate 4 on the holding substrate center side (left side in FIG. 1) rather than the region where the conductive contact 3 is held (that is, the region where the through hole 10 is formed). In addition to having a fixed configuration, it has a structure in which a pressing surface 11 a that contacts the upper surface of the block member 11 when formed on the holding substrate 4 is formed. More specifically, as shown in FIG. 1, the fixing member 6 is fixed to the holding substrate 4 by being screwed by a screw member 13 at the center of the holding substrate rather than the region where the conductive contact 3 is held. In this fixing manner, the contact block 5 is fixed by applying a pressing force to the block member 11 in the direction approaching the holding substrate 4 via the pressing surface 11a.

  The fixing member 6 has a structure in which an opening 16 is formed between a region where the pressing surface 11a is formed and a region fixed to the holding substrate 4 (that is, a region where the screw member 13 is disposed). Have The opening 16 is for extending the wiring structure 12 provided in the contact block 5 to the outside. The wiring structure 12 extends to the outside of the contact unit 2 via the opening 16, and the signal processing device 1. Will be electrically connected.

  The adjustment mechanism 8 is for adjusting the position of the conductive contact 3 in the vertical direction. Specifically, the adjustment mechanism 8 includes a first member 14 fixed to the frame substrate 9 and a second member 15 fixed to the fixing member 6. The first member 14 and the second member The fixing member 6 to the frame substrate 9 (and the holding substrate 4 fixed to the fixing member 6 and further the conductive contact 3) by a mechanism (not shown) for adjusting the vertical positional relationship with the fixing member 15 Has a function of adjusting the position in the vertical direction. With this position adjustment function, the heights between the conductive contacts 3 held on different holding substrates 4 as shown in FIG.

  Next, an inspection using the inspection system according to the present embodiment will be described. FIG. 3 is a schematic diagram showing an inspection mode of an inspection object using the inspection system according to the present embodiment. Hereinafter, the contents of the inspection will be described with reference to FIG. 3 as appropriate.

  First, alignment of the conductive contact 3 is performed. Specifically, the horizontal direction (the horizontal direction in FIG. 3 and the direction perpendicular to the paper surface) is set so that the corresponding conductive contact 3 is positioned vertically upward with respect to the terminal 19 formed on the inspection object 18. The position of the conductive contact 3 is adjusted. Specifically, as shown in FIG. 3, the conductivity is determined by viewing from the obliquely upward direction on the inspection object 18 side in the range of the viewing angle θ with the contact point between the conductive contact 3 and the terminal 19 as a base point. Position adjustment is performed while confirming the positional relationship between the contact 3 and the terminal 19 in the horizontal direction. As a specific position adjustment mode, for example, a mechanism that finely adjusts the position of the frame substrate 9 in the horizontal direction may be used, or the adjustment mechanism 8 may have a horizontal position adjustment function. good.

  Then, after the horizontal alignment is completed, the conductive contact 3 and the terminal 19 are physically contacted by adjusting the vertical positional relationship between the conductive contact 3 and the inspection object 18. Let Specifically, for example, by moving the inspection object 18 vertically upward, the terminal 19 formed on the inspection object 18 and the conductive contact 3 are brought into physical contact. In addition, as an aspect of this physical contact, it is preferable to contact each other to the extent that a predetermined pressing force is applied from one to the other. This is because the electrical contact resistance between the conductive contact 3 and the terminal 19 can be reduced by bringing the conductive contact 3 into contact with the terminal 19 while applying a pressing force. is there.

  Thereafter, an electrical signal for inspection is output from the signal processing device 1 to the inspection object 18. Specifically, the electrical signal output from the signal processing device 1 is input to the inspection object 18 through the wiring structure 12, the conductive contact 3, and the terminal 19 that is in physical contact with the conductive contact 3. . The electrical signal is processed by an electronic circuit or the like formed in the inspection object 18, a response signal is output from the inspection object 18 to the signal processing device 1, and the signal processing device 1 based on the signal is Processing for determining whether or not the inspection target 18 has desired characteristics is performed.

  Next, advantages of the inspection system according to the present embodiment will be described. First, the inspection system according to the present embodiment can easily and quickly align the conductive contact 3 with the terminal 19. Hereinafter, such advantages will be described in detail.

  As shown in FIG. 1 and the like, in the inspection system according to the present embodiment, the fixing member 6 is fixed to the holding substrate 4 on the holding substrate center side relative to the region where the conductive contact 3 is held. It has a structure. For this reason, in this embodiment, it is not necessary to form a region for fixing the fixing member 6 near the end of the holding substrate 4, and the conductive contact 3 is held near the end of the holding substrate 4. It becomes possible.

Therefore, in the inspection system according to the present embodiment, the holding substrate 4 is not configured to extend to the inspection object side (the right side in FIGS. 1 and 3) rather than the region holding the conductive contact 3. It is possible to prevent the substrate 4 from being obstructed by visual observation at the time of alignment. That is, the inspection system according to the present embodiment is quicker because the visual field range in which a portion where the conductive contact 3 and the terminal 19 are in contact with each other when the inspection target 18 is inspected is expanded more than in the past. In addition, there is an advantage that easy alignment can be performed. It should be noted that the visual field range in which the portion where the conductive contact 3 and the terminal 19 are in contact with each other can be seen larger than in the prior art is obvious by comparing FIG. 3 and FIG. The viewing angle θ in the embodiment is wider than the conventional viewing angle θ ₀ shown in FIG.

  Note that the inspection system according to the present embodiment effectively prevents problems that may occur by expanding the visual field range in which a portion where the conductive contact 3 and the terminal 19 are in contact can be visually observed. That is, as shown in FIG. 2, in the present embodiment, the spring member is disposed in the vicinity of the end in the arrangement direction of the conductive contacts 3 (direction perpendicular to the paper surface in FIGS. 1 and 3). It has a configuration that is not different from the conventional one. Therefore, even though the screw member is positioned at a position different from the vicinity of the end of the holding substrate, the interval between the plurality of contact blocks is widened, and conductive contacts are disposed corresponding to minute terminals. There is no new problem that makes it difficult.

  As shown in FIG. 1 and the like, the fixing member 6 has a configuration in which the fixing member 6 is fixed to the holding substrate 4 on the holding substrate center side with respect to the region where the block member 11 is disposed. Therefore, the wiring structure 12 extending from the lower surface of the block member 11 and the screw member 13 used for fixing the fixing member 6 are not in contact with each other, and the screw member 13 is arranged at a position different from the vicinity of the end of the holding substrate 4. Despite this configuration, the function of the wiring structure 12 is not hindered. In particular, since the structure in which the opening 16 is formed in the fixing member 6 is adopted in the present embodiment, the wiring structure 12 can be extended to the outside from the lower surface of the block member 11 through the opening 16. From this point of view, the function of the wiring structure 12 is not hindered by the presence of the fixing member 6.

  Furthermore, the inspection system according to the present embodiment has an advantage that wear at the tip of the conductive contact can be suppressed. FIG. 4 is a schematic diagram for explaining such advantages, and will be described below with reference to FIG.

  As already described, when the inspection object 18 is inspected, the tip of the conductive contact 3 is physically connected to the terminal 19 by moving the inspection object 18 vertically after positioning. Contact. At this time, from the viewpoint of reducing the electrical contact resistance between the conductive contact 3 and the terminal 19, in the present embodiment, from one to the other between the conductive contact 3 and the terminal 19. On the other hand, contact is made to apply a certain amount of pressing force in the vertical direction (vertical direction in FIGS. 3 and 4). As a reaction of the pressing force, the conductive contact 3 receives a pressing force vertically upward from the terminal 19, and as a result, the holding substrate 4 holding the conductive contact 3 is near the end. In the conventional inspection system or the like, the holding substrate 4 is warped, and the tip of the conductive contact 3 held by the holding substrate 4 is kept in contact with the terminal 19. However, the position changes. Therefore, when the inspection is repeated a plurality of times, the tip of the conductive contact 3 is gradually worn, which has a problem of adversely affecting the performance of the inspection system.

  On the other hand, in the present embodiment, the fixing member 6 is fixed to the holding substrate 4 at the center side of the holding substrate with respect to the conductive contact 3, and the contact block 5 is interposed between the holding substrate 4 and the holding substrate 4. It has a structure to be sandwiched. For this reason, the fixing member 6 applies a pressing force to the holding substrate 4 in the vertically downward direction in the region where the conductive contact 3 is held via the contact block 5. It is possible to function as a reinforcing member that cancels the vertical upward pressing force applied. That is, in the inspection system according to the present embodiment, the fixing member 6 functions as a reinforcing member for preventing the holding substrate 4 from warping, so that the warping of the holding substrate 4 is suppressed. The occurrence of fluctuations in the position of the front end portion is suppressed, and wear of the front end portion can be prevented.

  In addition, since the fixing member 6 also functions as a reinforcing member for the holding substrate 4, the present embodiment has an advantage that the degree of freedom in selecting the material for forming the holding substrate 4 is improved. That is, the holding substrate 4 needs to be formed of a substrate having a thickness that is reduced in accordance with the length of the conductive contact 3 to be held. Therefore, in order to suppress a change in shape such as warpage in the conventional structure to some extent, It was necessary to use a material having a high rigidity as a material for forming 4. However, in the inspection system according to the present embodiment, since the rigidity of the holding substrate 4 is enhanced by the fixing member 6 functioning as a reinforcing member, it is less necessary to consider the rigidity of the holding substrate 4. Therefore, the degree of freedom of selection of the material constituting the holding substrate 4 is improved, and the holding substrate 4 in which characteristics other than manufacturing cost and rigidity are emphasized can be used. Note that there is no particular limitation on the thickness of the fixing member 6 due to the length of the conductive contact 3 or the like. Therefore, the material forming the fixing member 6 may be a material having a high rigidity, or the thickness of the fixing member 6. It is good also as giving desired rigidity as the whole fixing member 6 by enlarging.

  In the first embodiment, the structure of the fixing member 6 is devised in order to suppress the occurrence of warping of the holding substrate 4 more reliably. That is, as shown in FIG. 4, the fixing member 6 is fixed to the holding substrate 4 by the screw member 13 at the center side of the holding substrate relative to the region where the conductive contact 3 is held. In this embodiment, the fixing member 6 is positioned on the holding substrate center side relative to the fixing portion (that is, the region where the screw member 13 is disposed), and further on the substrate end side facing the end portion where the conductive contact 3 is held. The structure extended to is adopted. By adopting such a configuration, the fixing member 6 functions as a reinforcing member even in a region located further on the center side of the holding substrate than the fixing portion with respect to the holding substrate 4, and more effectively warps the holding substrate 4. It is possible to suppress.

  Furthermore, the inspection system according to the present embodiment has an advantage that the contact block 5 can be easily replaced. FIG. 5 is a schematic diagram for explaining such advantages, which will be described below with reference to FIG.

  In the conventional inspection system, as shown in FIG. 6, the screw member for fixing is arranged so as to penetrate not only the reinforcing member but also the contact block. Had to be removed once. On the other hand, as described above, the contact block 5 in the present embodiment is disposed at a predetermined position on the holding substrate 4, and the fixing member 6 holds the upper surface of the block member 11 forming the contact block 5. It is fixed by applying a pressing force in a direction close to the substrate. Therefore, even when the contact block 5 is fixed on the holding substrate 4 by the fixing member 6, it can move relatively freely in the horizontal direction (the horizontal direction in FIG. 5 and the direction perpendicular to the paper surface). It is. That is, in this embodiment, when the contact block 5 is replaced, only the contact block 5 is removed from the holding substrate 4 while the fixing member 6 is fixed to the holding substrate 4 by the screw member 13. The contact block 5 can be easily replaced.

As another configuration, the upper surface and / or the lower surface of the block member 11 forming the contact block 5 may be a surface having minute irregularities. In such a configuration, when the fixing member 6 is fixed to the holding substrate 4, a frictional force is generated between the surface of the holding substrate 4 and the like. It becomes difficult to move to. On the other hand, when the screw member 13 is loosened, the pressing force applied by the fixing member 6 is reduced, so that the frictional force is lowered and the movement of the contact block 5 in the horizontal direction is relatively easy. For this reason, it becomes possible to adjust the degree of fixation of the contact block 5 by adjusting the degree of screwing by the screw member 13, and for example, the contact block 5 is positioned in the horizontal direction during the inspection using the inspection system. While it is possible to prevent displacement, the contact block 5 can be easily moved during replacement. In addition, it is also preferable that the block member 11 is positioned with respect to the holding substrate 4 and the fixing member 6 by using a knock pin.

  Although the present invention has been described with reference to the embodiments, the present invention should not be construed as being limited to the above-described embodiments, and those skilled in the art can easily conceive examples, modifications, and the like. Is possible. For example, in the above-described embodiment, the LCD for the inspection object 18 has been described as an example, but it is obvious that the inspection object can have an arbitrary circuit structure. For example, the present invention is applied to a semiconductor element / wafer. It can be applied to an inspection system.

  The specific structure is not limited to that shown in FIG. That is, a conductive contact is arranged in the vicinity of an end portion of a predetermined holding substrate, and a fixing member for fixing a contact block having a wiring structure electrically connected to the conductive contact is a conductive contact. If it has a structure that is fixed to the holding substrate at the center of the holding substrate with respect to the arranged region, it becomes easy to visually observe the positional relationship between the terminal to be inspected and the conductive contact. It is possible to enjoy the advantage of the present invention that alignment between the two can be easily performed. Furthermore, regarding the manner of fixing the fixing member 6 to the holding substrate 4, a configuration other than the screw member 13 may be used. In addition, the electrical connection between the wiring structure 12 and the conductive contact 3 may be realized by physical contact between both, but for example, the lower surface of the block member 11 corresponds to the conductive contact 3. It is good also as electrically connecting between the wiring structure 12 and the electroconductive contactor 3 through this terminal.

It is a mimetic diagram showing the whole inspection system composition concerning an embodiment. It is a top view of the contact unit which comprises the inspection system concerning an embodiment. It is a schematic diagram for demonstrating the usage condition of the test | inspection system concerning embodiment. It is a schematic diagram for demonstrating the advantage of the test | inspection system concerning embodiment. It is a schematic diagram for demonstrating the advantage of the test | inspection system concerning embodiment. It is a schematic diagram which shows the structure of the contact unit with which the conventional inspection system is equipped. It is a schematic diagram for demonstrating the subject of the conventional test | inspection system.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Signal processing apparatus 2 Contact unit 3 Conductive contact 4 Holding board 5 Contact block 6 Fixing member 8 Adjustment mechanism 9 Frame board 10 Through-hole 11 Block member 11a Press surface 12 Wiring structure 13 Screw member 14 1st member 15 2nd member DESCRIPTION OF SYMBOLS 16 Opening part 17 Holding | maintenance area | region 18 Inspection object 19 Terminal 101 Conductive contactor 102 Holding substrate 103 Wiring structure 104 Block member 105 Contact block 106 Fixing member 107 Screw member 109 Inspection object 110 Terminal

Claims (4)

A contact unit that electrically connects between a terminal formed on a predetermined inspection object and a signal generation device that generates an electric signal to be input to and output from the inspection object,
A conductive contact in contact with the terminal;
A holding substrate that has a through hole penetrating in the thickness direction in a region near the end, and holds the conductive contact through the through hole; and
A contact block having a predetermined wiring structure and disposed on the holding substrate so that the wiring structure is electrically connected to the conductive contact;
It is fixed to the holding substrate at the center side of the holding substrate with respect to the region where the conductive contact is held, and the contact block is sandwiched between the holding substrate and the holding substrate. A block fixing member for fixing the contact block on the holding substrate by applying a pressing force in a thickness direction and in a direction close to the holding substrate;
Equipped with a,
The block fixing member has a portion that comes into contact with the surface of the holding substrate over a predetermined distance from an area fixed to the holding substrate toward an end opposite to the side where the conductive contact is disposed. Contact unit. The contact block includes a rectangular parallelepiped block member disposed on the surface where one end of the wiring structure is in contact with the holding substrate, corresponding to the conductive contact,
The block fixing member applies a pressing force in a thickness direction of the holding substrate and in a direction close to the holding substrate with respect to a surface of the block member facing the surface on which the wiring structure is disposed. The contact unit according to claim 1. The block fixing member, a contact unit according to claim 1 or 2, characterized in that the opening for stretching the other end of the wiring structure to the outside is formed. An inspection system for inspecting electrical characteristics of a predetermined inspection object,
A conductive contact contacting the terminal; a holding substrate having a through hole penetrating in a thickness direction in a region near the end; and holding the conductive contact through the through hole; and a predetermined wiring structure A contact block disposed on the holding substrate such that the wiring structure is electrically connected to the conductive contact, and the holding substrate is located closer to the center of the holding substrate than the region where the conductive contact is held. The contact block is fixed to the holding substrate, the contact block is sandwiched between the holding substrate, and a pressing force is applied to the contact block in the thickness direction of the holding substrate and in the direction close to the holding substrate. A contact unit comprising a block fixing member for fixing the contact block on the holding substrate by:
A signal processing device that is electrically connected to the wiring structure and inputs and outputs electrical signals to and from the inspection object via the wiring structure and the conductive contact;
With
The block fixing member has a portion that comes into contact with the surface of the holding substrate over a predetermined distance from an area fixed to the holding substrate toward an end opposite to the side where the conductive contact is disposed. And inspection system.

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