JP4392205B2 - Inkjet printer head manufacturing method - Google Patents

Inkjet printer head manufacturing method Download PDF

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JP4392205B2
JP4392205B2 JP2003282052A JP2003282052A JP4392205B2 JP 4392205 B2 JP4392205 B2 JP 4392205B2 JP 2003282052 A JP2003282052 A JP 2003282052A JP 2003282052 A JP2003282052 A JP 2003282052A JP 4392205 B2 JP4392205 B2 JP 4392205B2
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pressure chamber
pressure
mold
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梅谷　　誠
領内　　博
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Panasonic Corp
Panasonic Holdings Corp
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Matsushita Electric Industrial Co Ltd
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本発明は、インクジェットプリンターヘッドの製造方法に関するものである。
The present invention relates to the production how an inkjet printer head.

従来のインクジェットプリンターヘッドの構成は、主に下記特許文献１に示されているように、図８（ａ）（ｂ）のような、インクを溜めて圧力を印加する圧力室５４をいくつも並べた圧力室基板５１とインクを吐出させるためのノズル５５をそれぞれの圧力室に設けるためのノズル板５２とそれぞれの圧力室に圧力を印加するための、圧電体などからなる圧力印加板５３で構成されている。圧力室基板の製造方法としては、前記特許文献１に示されているように、セラミックスの射出成形法や、下記特許文献２に示されているように、樹脂の射出成形法（インサート成形）を用いた方法や、下記特許文献３〜４に示されているようにＳｉ基板をエッチングする方法が提案されている。また、ガラス基板に孔あけ加工を施す方法としては、回転砥石、ドリル、超音波加工、ブラスト加工などの機械加工法や、化学的処理によるエッチング加工法や、バーナーなどで焼き切る熱加工法（下記特許文献５〜６）や、イオンビーム、レーザー、電子ビームなどによるエネルギービーム加工法（下記特許文献７）や、加熱軟化したガラスを金型によってプレス成形する方法（下記特許文献８）などがある。
特開平５−８３９４号公報 特開平８−３９７９９号公報 特開平１０−１８１０１０号公報 特開２０００−７９６８９号公報 特開２０００−１６８１５号公報 特開２０００−５３４３５号公報 特開２０００−６１６６７号公報 特開２０００−３１９０２６号公報 The configuration of a conventional ink jet printer head is composed of a number of pressure chambers 54 for storing ink and applying pressure as shown in FIGS. The pressure chamber substrate 51 and the nozzle 55 for ejecting ink are provided in the respective pressure chambers, and the pressure applying plate 53 made of a piezoelectric material for applying pressure to the respective pressure chambers. Has been. As a manufacturing method of the pressure chamber substrate, as shown in Patent Document 1, ceramic injection molding method or resin injection molding method (insert molding) as shown in Patent Document 2 below. The method used and the method of etching a Si substrate are proposed as shown in Patent Documents 3 to 4 below. In addition, as a method of drilling a glass substrate, mechanical processing methods such as a rotating grindstone, drill, ultrasonic processing, blast processing, etching processing by chemical processing, and thermal processing method that burns with a burner (described below) Patent Documents 5 to 6), an energy beam processing method using an ion beam, a laser, an electron beam, or the like (Patent Document 7 below), or a method of press-molding heat-softened glass with a mold (Patent Document 8 below). .
Japanese Patent Laid-Open No. 5-8394 JP-A-8-39799 Japanese Patent Laid-Open No. 10-181010 JP 2000-79589 A JP 2000-16815 A JP 2000-53435 A JP 2000-61667 A JP 2000-319026 A

しかし、より高精細なインクジェットプリンターヘッドを製造する場合、圧力室間隔は非常に小さくなり、従来のセラミックスや樹脂の射出成形による圧力室の製造方法では、成形後の熱収縮により成形品の間隔精度が悪く、圧力印加板やノズル板との位置合わせができなくなると言う問題があった。また、セラミックスや樹脂はインクとの濡れ性が悪く、気泡が入ったりする問題もある。従来のガラス基板の精密孔あけ方法を用いて圧力室を製造した場合も、機械加工法、エッチング加工法、熱加工法は、サブミクロンオーダーの高精度な孔あけ加工が困難であり、特に微細な孔あけを必要とする場合には、これらの工法では困難である。エネルギービーム加工法は一般に装置が高価であり、加工速度も遅く、量産性がない。前記特許文献７に提案されている方法では、ＹＡＧレーザーの吸収率の高い成分をガラス材料に含ませることで、ＹＡＧレーザーの吸収率を上げて、加工効率を上げているが、ガラス材料に吸収率の良い成分を予め含ませる必要がある。   However, when manufacturing a higher-definition inkjet printer head, the pressure chamber spacing becomes very small, and in the conventional method of manufacturing a pressure chamber by injection molding of ceramics or resin, the accuracy of the spacing between molded products due to thermal shrinkage after molding. However, there was a problem that it was impossible to align with the pressure application plate or the nozzle plate. In addition, ceramics and resins have poor wettability with ink and have the problem of bubbles. Even when the pressure chamber is manufactured using the conventional precision drilling method for glass substrates, the machining method, etching method, and thermal processing method are difficult to drill with high precision on the order of submicron. When it is necessary to drill a hole, these methods are difficult. In general, the energy beam processing method is expensive, the processing speed is low, and there is no mass productivity. In the method proposed in Patent Document 7, the glass material contains a component having a high absorption rate of the YAG laser, thereby increasing the absorption rate of the YAG laser and increasing the processing efficiency. It is necessary to include a component having a high rate in advance.

本発明のインクジェットプリンターヘッドの製造方法は、インクを収納するための圧力室を有する圧力室基板と、前記圧力室からインクを吐出するノズル用貫通孔と、前記圧力室に振動を与える圧力印加板とを含むインクジェットプリンターヘッドの製造方法であって、
平面金型上に離型剤を形成したガラスからなる成形用素材を載せ、全体を加熱し、圧力室に相当する突起形状を有する圧力室成形用金型により、完全に貫通させず裏面が残るようになるまでプレス成形する工程と、
前記成形用素材に前記圧力室成形用金型の突起形状を転写する工程と、
冷却せず前記圧力室成形用金型のみ離型する工程と、
冷却後、前記離型剤を除去し、成形された前記成形用素材の裏面より、研磨することで圧力室となる貫通孔を形成する工程と、
前記貫通孔が形成された前記成形用素材を圧力室基板としてそれぞれ前記圧力室に対応した前記ノズル用貫通孔を形成したノズル板を貼付し、それぞれ前記圧力室に対応した圧力印加板を付加する工程とを備えることを特徴とする。
The inkjet printer head manufacturing method of the present invention includes a pressure chamber substrate having a pressure chamber for containing ink, a nozzle through-hole for ejecting ink from the pressure chamber, and a pressure applying plate that vibrates the pressure chamber. A method of manufacturing an inkjet printer head comprising:
Place the molding material made of glass to form a release agent on a plane mold, heating the whole, the pressure chambers mold having a projection shape corresponding to the pressure chamber, the back surface without completely through Press molding until it remains ,
A step of transferring the pressure chamber mold projections shape to the molding material,
A step of releasing only said pressure chamber forming mold without cooling,
After cooling and forming the removal of the release agent, from the rear surface of the molding material is molded, the through holes serving as pressure chambers by polishing,
Using the molding material with the through holes formed as a pressure chamber substrate , a nozzle plate having the nozzle through holes corresponding to the pressure chambers is affixed, and pressure applying plates corresponding to the pressure chambers are respectively added. And a process .

本発明の別のインクジェットプリンターヘッドの製造方法は、インクを収納するための圧力室を有する圧力室基板と、前記圧力室からインクを吐出するノズル用貫通孔と、前記圧力室に振動を与える圧力印加板とを含むインクジェットプリンターヘッドの製造方法であって、
平面金型上にガラスからなる成形用素材を載せ、全体を加熱し、離型膜を形成した圧力室に相当する突起形状を有する圧力室成形用金型により、完全に貫通させず裏面が残るようになるまでプレス成形する工程と、
前記成形用素材に前記圧力室成形用金型の突起形状を転写する工程と、
冷却せずに前記圧力室成形用金型のみ離型する工程と、
冷却後、成形された前記成形用素材の裏面より、研磨することで圧力室となる貫通孔を形成する工程と、
前記貫通孔が形成された前記成形用素材を圧力室基板にとしてそれぞれ前記圧力室に対応した前記ノズル用貫通孔を形成したノズル板を貼付し、それぞれ前記圧力室に対応した圧力印加板を付加する工程とを備えることを特徴とする。
Another method of manufacturing an ink jet printer head according to the present invention includes a pressure chamber substrate having a pressure chamber for containing ink, a nozzle through-hole for discharging ink from the pressure chamber, and a pressure that vibrates the pressure chamber. An ink jet printer head manufacturing method including an application plate,
Place the molding material made of glass on a plane mold, heating the whole, the pressure chambers mold having a projection shape corresponding to the pressure chamber forming the release film, the back surface without completely through Press molding until it remains ,
A step of transferring the pressure chamber mold projections shape to the molding material,
A step of releasing without cooling only the pressure chamber forming mold,
After cooling, from the rear surface of the molded material for the molding, and forming a through hole as a pressure chamber by polishing,
Using the molding material with the through-holes as a pressure chamber substrate, affixing nozzle plates with the nozzle through-holes corresponding to the pressure chambers , respectively, and adding pressure application plates corresponding to the pressure chambers , respectively. And a step of performing .

本発明のインクジェットプリンターヘッドの製造方法によれば、成形により高精度に圧力室となる窪みをガラス基板に形成し、裏面より平面研磨する事で、バリの発生が無く、高精度な圧力室となる貫通孔を、非常に低コストで形成できるようになり、ノズル板と圧力印加板を形成することで高精度で低コストなインクジェットプリンターヘッドが製造できる。更に、本発明のインクジェットプリンターヘッド圧力室はガラス製であり、インクとの濡れ性も良く気泡が入りにくい圧力室ができる。   According to the method for manufacturing an inkjet printer head of the present invention, a depression that becomes a pressure chamber with high precision is formed on a glass substrate by molding, and by polishing the surface from the back surface, there is no generation of burrs, The through-hole can be formed at a very low cost. By forming the nozzle plate and the pressure applying plate, a high-precision and low-cost inkjet printer head can be manufactured. Further, the pressure chamber of the ink jet printer head of the present invention is made of glass, and a pressure chamber that has good wettability with ink and is difficult to contain bubbles can be formed.

本発明は、第１に、平面金型上に離型剤を形成したガラスからなる成形用素材を載せ、全体を加熱し、圧力室に相当する突起形状を有する圧力室成形用金型により、完全に貫通させず、わずかに裏面が残るようになるまでプレス成形し、成形用素材に圧力室成形用金型の突起形状を完全に転写した後、冷却せず圧力室成形用金型のみに離型し、冷却後、離型剤を除去し、成形された成形用素材の裏面より、研磨することで圧力室となる貫通孔を形成した圧力基板に、レーザ加工またはプレス成形によりノズル用貫通孔を形成したノズル板を貼付し、圧力室上に圧力印加板を形成するというインクジェットプリンターヘッドの製造方法を提供し、容易に高精度なインクジェットプリンタヘッドの製造を可能としたものである。前記において「わずかに裏面が残る」とは、厚さが０．１ｍｍ以上をいう（以下においても同じ。）。   The present invention firstly places a molding material made of glass on which a release agent is formed on a flat mold, heats the whole, and a pressure chamber molding mold having a projection shape corresponding to a pressure chamber, Press-mold until the back surface remains slightly without penetrating completely, completely transfer the protrusion shape of the pressure chamber molding die to the molding material, and then only cool the pressure chamber molding die without cooling After releasing and cooling, the release agent is removed, and through the nozzle for laser processing or press molding, the pressure substrate is formed with a through hole that becomes a pressure chamber by polishing from the back of the molded molding material. The present invention provides a method for manufacturing an ink jet printer head in which a nozzle plate having holes formed therein is attached and a pressure applying plate is formed on a pressure chamber, thereby enabling easy manufacture of a highly accurate ink jet printer head. In the above description, “slightly leaving the back surface” means that the thickness is 0.1 mm or more (the same applies below).

第２に、平面金型上にガラスからなる成形用素材を載せ、全体を加熱し、ガラスとの濡れ性が悪く、高温時に容易に離型できる離型膜を形成した圧力室に相当する突起形状を有する圧力室成形用金型により、完全に貫通させず、わずかに裏面が残るようになるまでプレス成形し、成形用素材に圧力室成形用金型の突起形状を完全に転写した後、冷却せずに圧力室成形用金型のみ離型し、冷却後、成形された成形用素材の裏面より、研磨することで圧力室となる貫通孔を形成した圧力基板に、レーザ加工またはプレス成形によりノズル用貫通孔を形成したノズル板を貼付し、圧力室上に圧力印加板を形成するというインクジェットプリンターヘッドの製造方法を提供し、容易に高精度なインクジェットプリンターヘッドの製造を可能としたものである。   Second, a projection corresponding to a pressure chamber in which a molding material made of glass is placed on a flat mold and the whole is heated to form a release film that has poor wettability with glass and can be easily released at high temperatures. After the pressure chamber molding die has a shape, press molding until the back surface remains slightly without penetrating completely, and after completely transferring the projection shape of the pressure chamber molding die to the molding material, Only the pressure chamber molding die is released without cooling, and after cooling, it is laser-processed or press-molded on the pressure substrate that has a through-hole that becomes the pressure chamber by polishing from the back side of the molded molding material. Provides a method of manufacturing an ink jet printer head in which a nozzle plate having a nozzle through-hole is pasted and a pressure applying plate is formed on the pressure chamber, thereby enabling easy manufacture of a high-precision ink jet printer head. A.

また、平面金型上にガラスからなる成形用素材を載せ、全体を加熱し、離型剤あるいは離型膜を形成することで、圧力室に相当する突起形状を有する圧力室成形用金型により、完全に貫通させず、わずかに裏面が残るようになるまでプレス成形し、成形用素材に圧力室成形用金型の突起形状を完全に転写した後、冷却せずに圧力室成形用金型のみ離型し、冷却後、成形された成形用素材の裏面より、研磨することで圧力室となる貫通孔を形成したインクジェットプリンターヘッド圧力室はガラス製であり、インクとの濡れ性も良く気泡が入りにくい圧力室ができる。   Moreover, by placing a molding material made of glass on a flat mold, heating the whole and forming a release agent or a release film, a pressure chamber molding mold having a projection shape corresponding to a pressure chamber Press molding until the back surface remains slightly without penetrating completely, completely transfer the protrusion shape of the pressure chamber molding die to the molding material, and then cool the pressure chamber molding die without cooling The ink jet printer head pressure chamber is made of glass and has good wettability with ink. Creates a pressure chamber that is difficult to contain.

以下、本発明の各実施例について図面を参照しながら説明する。   Embodiments of the present invention will be described below with reference to the drawings.

本発明の実施例１のインクジェットプリンターヘッドの製造方法を図１、〜図６を用いて説明する。   A method of manufacturing the ink jet printer head according to the first embodiment of the present invention will be described with reference to FIGS.

図１（ａ）〜（ｄ）は本発明の概略工程図を示し、図２（ａ）〜（ｂ）は本発明の１実施例に用いた成形装置の概略図を示し、図３（ａ）〜図６（ｄ）は本発明の１実施例の各成形工程での状態図を示したものである。   1 (a) to (d) show schematic process diagrams of the present invention, and FIGS. 2 (a) to (b) show schematic diagrams of a molding apparatus used in one embodiment of the present invention. ) To FIG. 6 (d) show state diagrams in the respective molding steps of one embodiment of the present invention.

図１（ａ）〜（ｄ）に示したように、本発明の概略工程は、平面金型１３上に離型剤１４を形成した成形用素材１２を載せ、全体を加熱することで、圧力室に相当する突起形状を有する成形用金型１１により、完全に貫通させず、少しだけ裏面が残るようになるまでプレス成形し（図１（ａ））、成形用素材１２に成形用金型１１の突起形状を完全に転写する（図１（ｂ））。次に、冷却せずに離型し（図１（ｃ））、冷却後、離型剤１４を除去し、成形された成形用素材１２の裏面１５を研磨する（図１（ｄ））。これにより、圧力室１６を形成した基板を製造する。   As shown in FIGS. 1 (a) to 1 (d), the general process of the present invention is carried out by placing a molding material 12 on which a release agent 14 is formed on a flat mold 13 and heating the whole so that the pressure is increased. A molding die 11 having a projection shape corresponding to the chamber is press-molded until the back surface remains a little (FIG. 1A) without completely penetrating, and the molding die 12 is formed on the molding material 12. 11 is completely transferred (FIG. 1B). Next, the mold is released without cooling (FIG. 1 (c)), and after cooling, the release agent 14 is removed, and the back surface 15 of the formed molding material 12 is polished (FIG. 1 (d)). Thereby, the substrate on which the pressure chamber 16 is formed is manufactured.

具体的な実施例を図２を用いて説明する。   A specific embodiment will be described with reference to FIG.

用いた成形装置は図２（（ａ）は正面から見た図、（ｂ）は側面から見た図）に示したように、成形機内の雰囲気を非酸化雰囲気（窒素雰囲気など）に保つために全体を密閉できるチャンバー２１１、平面金型２２に成形用素材２３を載せたものを成形機内に投入するための入り口シャッター２９、ヒーターを内蔵した予熱ステージ２５、同じくヒーターを内蔵したプレスステージ２６、冷却ステージ２７、圧力室成形用金型２１を固定し、ヒーターを内蔵し、上下に稼動し圧力を加えることができるプレスシリンダー２８、成形完了した成形用素材２３を平面金型２２に載せたまま外部に取り出すための出口シャッター２１０、平面金型２２と成形用素材２３を成形機内の各ステージに順次搬送し、圧力室成形用金型２１との位置あわせを行い、プレス終了時に強制的にプレスシリンダー２８を上方に引き上げたとき、成形用素材２３が圧力室成形用金型２１にくっついてしまうことを防止するために平面金型２２のストッパーとなるガイド２４、そして、酸化防止用のガスを送り込むためのガス導入口２１２から構成されている。   As shown in FIG. 2 ((a) is a view from the front, (b) is a view from the side), the molding apparatus used is for maintaining the atmosphere in the molding machine in a non-oxidizing atmosphere (such as a nitrogen atmosphere). A chamber 211 that can be hermetically sealed, an entrance shutter 29 for putting a molding material 23 on a flat mold 22 into a molding machine, a preheating stage 25 with a built-in heater, a press stage 26 with a built-in heater, The cooling stage 27 and the pressure chamber molding die 21 are fixed, the heater is built in, the press cylinder 28 that can be operated up and down to apply pressure, and the molding material 23 that has been molded are placed on the planar die 22. The exit shutter 210 for taking out to the outside, the flat mold 22 and the molding material 23 are sequentially conveyed to each stage in the molding machine, and aligned with the pressure chamber molding mold 21. In order to prevent the molding material 23 from sticking to the pressure chamber molding die 21 when the press cylinder 28 is forcibly pulled up at the end of pressing, the guide 24 serving as a stopper for the flat die 22 is used. In addition, the gas inlet 212 is configured to feed in an antioxidant gas.

まず、４０ｍｍ×４０ｍｍ、厚さ１０ｍｍのＷＣを主成分とする超硬合金（熱膨張係数；５０×１０-7／Ｋ）素材を放電加工法により、中心部分に高さ２００μｍ、巾１３０μｍ、長さ１．３ｍｍ、テーパ角度約１０度の突起をピッチ３４０μｍで５０個一列に並べた形状に加工し、表面にスパッタリング法により、Ｉｒ−Ｗ合金薄膜を１μｍ形成することで圧力室成形用金型２１を作製し、プレスシリンダー２８に固定した。続いて、４０ｍｍ×４０ｍｍ、厚さ１０ｍｍのＷＣを主成分とする超硬合金素材を平面研磨した後、表面にスパッタリング法により、Ｉｒ−Ｗ合金薄膜を１μｍ形成することで平面金型２２を作製した。平面金型２２を下金型とし、平面金型２２上に、圧力室成形用金型２１と接する面にＢＮ粉の離型剤を塗布した、２５ｍｍ×２５ｍｍ、厚さ１ｍｍのガラス（ＰＢＫ４０；ホウ珪酸ガラス）からなる成形用素材２３（熱膨張係数；７３×１０-7／Ｋ）をのせ、その状態で、窒素をガス導入口２１２より送り込み非酸化雰囲気となっている成形機中に入り口シャッター２９を開けて投入した（図３（ａ））。 First, a cemented carbide (coefficient of thermal expansion: 50 × 10 −7 / K) mainly composed of 40 mm × 40 mm and 10 mm thick WC is used for the center part by height 200 μm, width 130 μm, long Pressure chamber molding die by processing 50 protrusions with a thickness of 1.3 mm and taper angle of about 10 degrees into a line with 50 pitches of 340 μm and forming 1 μm of Ir—W alloy thin film on the surface by sputtering. 21 was prepared and fixed to the press cylinder 28. Subsequently, after planarizing a cemented carbide material mainly composed of WC having a size of 40 mm × 40 mm and a thickness of 10 mm, a planar mold 22 is manufactured by forming an Ir—W alloy thin film to a thickness of 1 μm on the surface by sputtering. did. The flat mold 22 is a lower mold, and a release agent of BN powder is applied onto the flat mold 22 on the surface in contact with the pressure chamber molding mold 21. The glass is 25 mm × 25 mm and 1 mm thick (PBK40; A molding material 23 (thermal expansion coefficient; 73 × 10 −7 / K) made of borosilicate glass is placed, and in that state, nitrogen is fed from the gas inlet 212 into the non-oxidizing atmosphere in the molding machine. The shutter 29 was opened and turned on (FIG. 3A).

そして、金型全体をガイド２４に沿って、予熱ステージ２５に搬送し、予備加熱を行い５００℃まで加熱した（図３（ｂ））。   And the whole metal mold | die was conveyed to the preheating stage 25 along the guide 24, preheated and heated to 500 degreeC (FIG.3 (b)).

続いて、５５０℃以上の温度に保持したプレスステージ２６へそのまま搬送し（図４（ａ））、全体が５５０℃以上の温度になるまで加熱し、プレスシリンダー２８を下方に降ろし、圧力室成形用金型２１が成形用素材２３に接するところで、さらに、成形用素材２３の表面が５５０℃以上の温度になるまで加熱した（図４（ｂ））。   Subsequently, it is directly conveyed to the press stage 26 maintained at a temperature of 550 ° C. or higher (FIG. 4A), heated until the whole reaches a temperature of 550 ° C. or higher, the press cylinder 28 is lowered, and the pressure chamber is formed. When the mold 21 was in contact with the molding material 23, the surface of the molding material 23 was further heated until the temperature reached 550 ° C. or higher (FIG. 4B).

そして、成形用素材２３がプレス圧力により変形可能な温度（５５０℃以上；粘度１０10.35ポアズ以下）に達したところで、平面金型２２側まで貫通させず、０．２ｍｍだけ成形用素材２３であるガラスの厚みが残るように、圧力室成形用金型２１の形状を完全に転写するまで、圧力室成形用金型２１の上方より、２０００Ｎの圧力を加え、プレス成形した（図５（ａ））。 When the molding material 23 reaches a temperature (550 ° C. or more; viscosity of 10.1035 poise or less) that can be deformed by the pressing pressure, the molding material 23 is not penetrated to the flat mold 22 side and is only 0.2 mm. A pressure of 2000 N was applied from above the pressure chamber molding die 21 until the shape of the pressure chamber molding die 21 was completely transferred so that the thickness of the glass remained, and press molding was performed (FIG. 5A). ).

そして、そのままの状態で冷却せずに圧力を解放し、圧力室成形用金型２１を上方に引き上げた。圧力室成形用金型２１と成形用素材２３であるガラスの面には離型剤が塗布してあり、圧力室成形用金型２１と成形用素材２３であるガラスは容易に離型し、さらに、圧力室成形用金型２１と成形用素材２３であるガラスが真空吸着により、上方へ持ち上がるのを防ぐためにガイド２４に平面金型２２が引っかかって、成形用素材２３と平面金型２２との間には離型剤を塗布していないので、くっついたまま、そのままの状態でプレスステージ２６に残る（図５（ｂ））。   Then, the pressure was released without cooling as it was, and the pressure chamber molding die 21 was pulled upward. A mold release agent is applied to the surfaces of the pressure chamber molding die 21 and the molding material 23, and the pressure chamber molding die 21 and the molding material 23 glass are easily released. Further, in order to prevent the pressure chamber molding die 21 and the molding material glass from being lifted upward by vacuum suction, the planar die 22 is caught by the guide 24, and the molding material 23 and the planar die 22 are Since no release agent is applied between the two, it remains on the press stage 26 as it is (FIG. 5B).

その後、平面金型２２と成形したガラス２３を冷却ステージ２７に移動させて３００℃まで冷却すると、成形したガラス２３は平面金型２２より、熱収縮差により発生する応力により離型した（図６（ａ））。   Thereafter, when the planar mold 22 and the molded glass 23 are moved to the cooling stage 27 and cooled to 300 ° C., the molded glass 23 is released from the planar mold 22 by the stress generated by the thermal shrinkage difference (FIG. 6). (A)).

そして、出口シャッター２１０を開けて、平面金型２２に成形したガラス２３を載せたまま外部に取り出し、室温まで冷却して成形したガラス２３を平面金型２２から引き離し成形工程は完了した（図６（ｂ））。   Then, the outlet shutter 210 is opened, and the glass 23 formed on the flat mold 22 is taken out to the outside, cooled to room temperature, and the formed glass 23 is pulled away from the flat mold 22 to complete the molding process (FIG. 6). (B)).

続いて、図１に示したように、成形転写性の良好な成形物の表面に残った離型剤を洗浄及び研磨により除去し、表面を樹脂接着剤で覆い、平面基板に張り付けた後、成形物の裏面１５より、酸化セリウム及びダイヤモンド砥粒を用いて、平面研磨して、５０個の圧力室に相当する貫通孔１６を得た。貫通孔の深さは全て０．１８ｍｍとした。作製した圧力室ガラス基板の圧力室部分の断面顕微鏡写真（倍率１００）を図７に示した。圧力室となる貫通孔４２が高精度に形成された圧力室ガラス基板４１が得られていることが解った。このようにして製造した圧力室の加工にかかる製造コストは、従来の機械加工による孔あけ加工を施した圧力室に比べて、約１／３程度であった。また、各圧力室の間隔の位置精度は、０．２％の誤差範囲内であり、セラミックスあるいは樹脂の成形法を用いた圧力室の位置精度数％に比べて１０倍以上の高精度にできていることがわかった。   Subsequently, as shown in FIG. 1, the release agent remaining on the surface of the molded article having good molding transferability is removed by washing and polishing, the surface is covered with a resin adhesive, and attached to a flat substrate. From the back surface 15 of the molded product, surface polishing was performed using cerium oxide and diamond abrasive grains to obtain through holes 16 corresponding to 50 pressure chambers. The depths of the through holes were all 0.18 mm. FIG. 7 shows a cross-sectional micrograph (magnification 100) of the pressure chamber portion of the produced pressure chamber glass substrate. It was found that the pressure chamber glass substrate 41 in which the through-hole 42 serving as the pressure chamber was formed with high accuracy was obtained. The manufacturing cost for the processing of the pressure chamber manufactured in this way was about 1/3 compared with the pressure chamber subjected to the drilling by conventional machining. In addition, the positional accuracy of the intervals between the pressure chambers is within an error range of 0.2%, which can be more than 10 times higher than the positional accuracy of the pressure chambers using ceramic or resin molding methods. I found out.

また、成形温度（ガラスの粘度）と転写性及び離型性との関係を調べたところ、５６０℃以下の温度では成形転写性が得られず、未転写部分、特に圧力室との間の転写が甘くなり、６１０℃以上の温度ではガラスが付着して離型しなかった。   Further, when the relationship between the molding temperature (glass viscosity), transferability and mold release properties was examined, molding transferability could not be obtained at a temperature of 560 ° C. or lower, and transfer between untransferred portions, particularly between pressure chambers. Became sweet, and at a temperature of 610 ° C. or higher, the glass adhered and did not release.

以上のように、本実施例によれば、成形工程と平面研磨工程のみで、低コストで、高精度に整列させたインクジェットプリンターヘッド圧力室の製造が可能となった。   As described above, according to the present embodiment, it is possible to manufacture an ink jet printer head pressure chamber that is aligned with high accuracy at low cost only by a molding process and a planar polishing process.

このようにして製造した圧力室基板に、レーザ加工またはプレス成形によりノズル用貫通孔（直径φ５０μｍ、厚さ０．１ｍｍ）を形成したノズル板を研磨面側に紫外線（ＵＶ）硬化樹脂で貼付し、さらに圧力室上に圧電体などからなる圧力印加板を形成してインクジェットプリンターヘッドを完成させた。その構成は図８と同様になる。   A nozzle plate in which through holes for nozzles (diameter: φ50 μm, thickness: 0.1 mm) are formed by laser processing or press molding is pasted on the polishing surface side with ultraviolet (UV) curable resin on the pressure chamber substrate thus manufactured. Further, a pressure applying plate made of a piezoelectric material or the like was formed on the pressure chamber to complete the ink jet printer head. The configuration is the same as in FIG.

本発明の実施例２のインクジェットプリンターヘッドの製造方法を図３〜図６を用いて説明する。   A method of manufacturing the ink jet printer head according to the second embodiment of the present invention will be described with reference to FIGS.

まず、４０ｍｍ×４０ｍｍ、厚さ１０ｍｍのＷＣを主成分とする超硬合金（熱膨張係数；５０×１０-7／Ｋ）素材を放電加工法により、中心部分に高さ２００μｍ、巾１３０μｍ、長さ１．３ｍｍ、テーパ角度約１０度の突起をピッチ３４０μｍで５０個一列に並べた形状に加工し、表面にスパッタリング法により、Ｐｔ−Ｔａ合金薄膜を１μｍ形成し、さらに、高温時にガラスとの濡れ性を悪くするために炭素（Ｃ）膜をスパッタリング法により、約０．２μｍ形成することで圧力室成形用金型２１を作製し、プレスシリンダー２８に固定した。続いて、４０ｍｍ×４０ｍｍ、厚さ１０ｍｍのＷＣを主成分とする超硬合金素材を平面研磨した後、表面にスパッタリング法により、Ｐｔ−Ｔａ合金薄膜を１μｍ形成することで平面金型２２を作製した。平面金型２２を下金型とし、平面金型２２上に、２５ｍｍ×２５ｍｍ、厚さ１ｍｍのガラス（ＳＦ８；重フリントガラス）からなる成形用素材２３（熱膨張係数；９０×１０-7／Ｋ）をのせ、その状態で、窒素をガス導入口２１２より送り込み非酸化雰囲気となっている成形機中に入り口シャッター２９を開けて投入した（図３（ａ））。 First, a cemented carbide (coefficient of thermal expansion: 50 × 10 −7 / K) mainly composed of 40 mm × 40 mm and 10 mm thick WC is used for the center part by height 200 μm, width 130 μm, long Processed into a shape in which 50 protrusions with a thickness of 1.3 mm and a taper angle of about 10 degrees are arranged in a line at a pitch of 340 μm, a 1 μm Pt-Ta alloy thin film is formed on the surface by sputtering, In order to deteriorate the wettability, a pressure chamber molding die 21 was produced by forming a carbon (C) film to a thickness of about 0.2 μm by sputtering, and was fixed to the press cylinder 28. Subsequently, after planarizing a cemented carbide material mainly composed of 40 mm × 40 mm and 10 mm thick WC, a planar mold 22 is formed by forming a Pt—Ta alloy thin film on the surface by 1 μm by sputtering. did. The planar mold 22 is a lower mold, and a molding material 23 (thermal expansion coefficient: 90 × 10 −7 / 9) made of glass (SF8; heavy flint glass) having a thickness of 25 mm × 25 mm and a thickness of 1 mm is formed on the planar mold 22. In this state, nitrogen was fed from the gas inlet 212 and the entrance shutter 29 was opened and placed in a non-oxidizing atmosphere (FIG. 3A).

そして、金型全体をガイド２４に沿って、予熱ステージ２５に搬送し、予備加熱を行い４００℃まで加熱した（図３（ｂ））。   And the whole metal mold | die was conveyed to the preheating stage 25 along the guide 24, preheated and heated to 400 degreeC (FIG.3 (b)).

続いて、４６０℃以上の温度に保持したプレスステージ２６へそのまま搬送し（図４（ａ））、全体が４６０℃以上の温度になるまで加熱し、プレスシリンダー２８を下方に降ろし、圧力室成形用金型２１が成形用素材２３に接するところで、さらに、成形用素材２３の表面が４６０℃以上の温度になるまで加熱した（図４（ｂ））。   Subsequently, the sheet is conveyed as it is to the press stage 26 maintained at a temperature of 460 ° C. or higher (FIG. 4A), heated until the whole reaches a temperature of 460 ° C. or higher, the press cylinder 28 is lowered, and a pressure chamber is formed. When the mold 21 was in contact with the molding material 23, the surface of the molding material 23 was further heated until the temperature reached 460 ° C. or higher (FIG. 4B).

そして、成形用素材２３がプレス圧力により変形可能な温度（４６０℃以上；粘度１０10.35ポアズ以下）に達したところで、平面金型２２側まで貫通させず、０．２ｍｍだけ成形用素材２３であるガラスの厚みが残るように、圧力室成形用金型２１の形状を完全に転写するまで、圧力室成形用金型２１の上方より、２０００Ｎの圧力を加え、プレス成形した（図５（ａ））。 When the molding material 23 reaches a temperature (460 ° C. or higher; viscosity 10 10.35 poise or less) that can be deformed by the pressing pressure, the molding material 23 is not penetrated to the flat mold 22 side and is only 0.2 mm. A pressure of 2000 N was applied from above the pressure chamber molding die 21 until the shape of the pressure chamber molding die 21 was completely transferred so that the thickness of the glass remained, and press molding was performed (FIG. 5A). ).

そして、そのままの状態で冷却せずに圧力を解放し、圧力室成形用金型２１を上方に引き上げた。圧力室成形用金型２１と成形用素材２３であるガラスの面には離型膜が形成してあり、圧力室成形用金型２１と成形用素材２３であるガラスは容易に離型し、さらに、圧力室成形用金型２１と成形用素材２３であるガラスが真空吸着により、上方へ持ち上がるのを防ぐためにガイド２４に平面金型２２が引っかかって、成形用素材２３と平面金型２２は離型膜を形成していないので、くっついたまま、そのままの状態でプレスステージ２６に残る（図５（ｂ））。   Then, the pressure was released without cooling as it was, and the pressure chamber molding die 21 was pulled upward. A release film is formed on the surface of the glass that is the pressure chamber molding die 21 and the molding material 23, and the pressure chamber molding die 21 and the glass that is the molding material 23 are easily released from the mold, Further, in order to prevent the pressure chamber molding die 21 and the molding material 23 glass from being lifted upward by vacuum suction, the planar die 22 is caught on the guide 24, and the molding material 23 and the planar die 22 are Since the release film is not formed, it remains attached to the press stage 26 as it is (FIG. 5B).

その後、平面金型２２と成形したガラス２３を冷却ステージ２７に移動させて３００℃まで冷却すると、成形したガラス２３は平面金型２２より、熱収縮差により発生する応力により離型した（図６（ａ））。   Thereafter, when the planar mold 22 and the molded glass 23 are moved to the cooling stage 27 and cooled to 300 ° C., the molded glass 23 is released from the planar mold 22 by the stress generated by the thermal shrinkage difference (FIG. 6). (A)).

そして、出口シャッター２１０を開けて、平面金型２２に成形したガラス２３を載せたまま外部に取り出し、室温まで冷却して成形したガラス２３を平面金型２２から引き離し成形工程は完了した（図６（ｂ））。   Then, the outlet shutter 210 is opened, and the glass 23 formed on the flat mold 22 is taken out to the outside, cooled to room temperature, and the formed glass 23 is pulled away from the flat mold 22 to complete the molding process (FIG. 6). (B)).

続いて、図１に示したように、成形転写性の良好な成形物の表面を樹脂接着剤で覆い、平面基板に張り付けた後、成形物の裏面１５より、酸化セリウム及びダイヤモンド砥粒を用いて、平面研磨して、５０個の圧力室に相当する貫通孔１６を得た。貫通孔の深さは全て０．１８ｍｍとした。作製した圧力室ガラス基板の圧力室部分の断面を顕微鏡観察したところ、図７と全く同じ圧力室基板ができていることが解った。このようにして製造した圧力室の加工にかかる製造コストは、従来の機械加工による孔あけ加工を施した圧力室に比べて、約１／３程度であった。また、各圧力室の間隔の位置精度は、０．２％の誤差範囲内であり、セラミックスあるいは樹脂の成形法を用いた圧力室の位置精度数％に比べて１０倍以上の高精度にできていることがわかった。   Subsequently, as shown in FIG. 1, the surface of the molded article having good molding transferability is covered with a resin adhesive and attached to a flat substrate, and then cerium oxide and diamond abrasive grains are used from the back surface 15 of the molded article. Then, the surface was polished to obtain through holes 16 corresponding to 50 pressure chambers. The depths of the through holes were all 0.18 mm. When the cross section of the pressure chamber portion of the produced pressure chamber glass substrate was observed with a microscope, it was found that the same pressure chamber substrate as that in FIG. 7 was formed. The manufacturing cost for the processing of the pressure chamber manufactured in this way was about 1/3 compared with the pressure chamber subjected to the drilling by conventional machining. In addition, the positional accuracy of the intervals between the pressure chambers is within an error range of 0.2%, which can be more than 10 times higher than the positional accuracy of the pressure chambers using ceramic or resin molding methods. I found out.

また、成形温度（ガラスの粘度）と転写性及び離型性との関係を調べたところ、４７０℃以下の温度では成形転写性が得られず、未転写部分、特に圧力室との間の転写が甘くなり、５３０℃以上の温度ではガラスが付着して離型しなかった。   Further, when the relationship between the molding temperature (glass viscosity), transferability and mold release properties was examined, molding transferability could not be obtained at temperatures of 470 ° C. or lower, and transfer between untransferred parts, particularly pressure chambers. Became sweet, and the glass adhered and did not release at a temperature of 530 ° C. or higher.

このようにして製造した圧力室基板に、レーザ加工またはプレス成形によりノズル用貫通孔（直径φ５０μｍ、厚さ０．１ｍｍ）を形成したノズル板を研磨面側に紫外線（ＵＶ）硬化樹脂で貼付し、さらに圧力室上に圧電体などからなる圧力印加板を形成してインクジェットプリンターヘッドを完成させた。その構成は図８と同様になる。   A nozzle plate in which through holes for nozzles (diameter: φ50 μm, thickness: 0.1 mm) are formed by laser processing or press molding is pasted on the polishing surface side with ultraviolet (UV) curable resin on the pressure chamber substrate thus manufactured. Further, a pressure applying plate made of a piezoelectric material or the like was formed on the pressure chamber to complete the ink jet printer head. The configuration is the same as in FIG.

以上のように、本発明によれば、ガラスの成形工程と平面研磨工程のみで、低コストで、高精度に整列させたガラス製インクジェットプリンターヘッド圧力室の製造が可能となった。   As described above, according to the present invention, it is possible to manufacture a glass ink jet printer head pressure chamber that is aligned with high accuracy at low cost only by a glass forming process and a plane polishing process.

以上の実施例に示したように、ガラスの種類を変えてもほぼ同じ様な成形結果が得られた。すなわち、本実施例の方法では、ガラスの粘度が１０7.65ポアズ以上１０10.35ポアズ以下の温度領域で成形することが望ましい。 As shown in the above examples, almost the same molding results were obtained even if the type of glass was changed. That is, in the method of the present embodiment, it is desirable to form the glass in a temperature range of 10 7.65 poise or more and 10 10.35 poise or less.

本発明の一実施例におけるインクジェットプリンタヘッド圧力室の製造方法を示す概略工程図。FIG. 3 is a schematic process diagram illustrating a method for manufacturing an ink jet printer head pressure chamber according to an embodiment of the present invention. 本発明の一実施例におけるインクジェットプリンタヘッド圧力室の製造方法に用いた成形機の概略図（（ａ）正面図、（ｂ）側面図）。BRIEF DESCRIPTION OF THE DRAWINGS Schematic of the molding machine used for the manufacturing method of the inkjet printer head pressure chamber in one Example of this invention ((a) front view, (b) side view). （ａ）〜（ｂ）は、本発明の一実施例におけるインクジェットプリンタヘッド圧力室の製造方法を示す工程図。(A)-(b) is process drawing which shows the manufacturing method of the inkjet printer head pressure chamber in one Example of this invention. （ａ）〜（ｂ）は、本発明の一実施例におけるインクジェットプリンタヘッド圧力室の製造方法を示す工程図。(A)-(b) is process drawing which shows the manufacturing method of the inkjet printer head pressure chamber in one Example of this invention. （ａ）〜（ｂ）は、本発明の一実施例におけるインクジェットプリンタヘッド圧力室の製造方法を示す工程図。(A)-(b) is process drawing which shows the manufacturing method of the inkjet printer head pressure chamber in one Example of this invention. （ａ）〜（ｂ）は、本発明の一実施例におけるインクジェットプリンタヘッド圧力室の製造方法を示す工程図。(A)-(b) is process drawing which shows the manufacturing method of the inkjet printer head pressure chamber in one Example of this invention. 本発明の一実施例において製造したインクジェットプリンタヘッド圧力室の断面顕微鏡写真（倍率１００）。1 is a cross-sectional photomicrograph (magnification 100) of an ink jet printer head pressure chamber manufactured in one embodiment of the present invention. 従来のインクジェットプリンタヘッドの構成図（（ａ）正面図、（ｂ）側面図）。The block diagram of the conventional inkjet printer head ((a) front view, (b) side view).

符号の説明Explanation of symbols

１１，２１ 圧力室成形金型
１２，２３ 成形用素材
１３，２２ 平面金型
１４ 離型剤
１５ 研磨する面
１６ 形成された圧力室
２４ ガイド
２５ 予熱ステージ
２６ プレスステージ
２７ 冷却ステージ
２８ プレスシリンダー
２９ 入り口シャッター
２１０ 出口シャッター
２１１ チャンバー
２１２ ガス導入口
４１ 製造した圧力室基板
４２ 圧力室となる貫通孔
５１ 圧力室基板
５２ ノズル板
５３ 圧力印加板
５４ 圧力室
５５ ノズル 11, 21 Pressure chamber molding dies 12, 23 Molding material 13, 22 Plane mold 14 Mold release agent 15 Surface to be polished 16 Pressure chamber 24 formed Guide 25 Preheating stage 26 Press stage 27 Cooling stage 28 Press cylinder 29 Entrance Shutter 210 Exit shutter 211 Chamber 212 Gas inlet 41 Manufactured pressure chamber substrate 42 Through hole 51 to be pressure chamber Pressure chamber substrate 52 Nozzle plate 53 Pressure application plate 54 Pressure chamber 55 Nozzle

Claims (2)

インクを収納するための圧力室を有する圧力室基板と、前記圧力室からインクを吐出するノズル用貫通孔と、前記圧力室に振動を与える圧力印加板とを含むインクジェットプリンターヘッドの製造方法であって、
平面金型上に離型剤を形成したガラスからなる成形用素材を載せ、全体を加熱し、圧力室に相当する突起形状を有する圧力室成形用金型により、完全に貫通させず裏面が残るようになるまでプレス成形する工程と、
前記成形用素材に前記圧力室成形用金型の突起形状を転写する工程と、
冷却せず前記圧力室成形用金型のみ離型する工程と、
冷却後、前記離型剤を除去し、成形された前記成形用素材の裏面より、研磨することで圧力室となる貫通孔を形成する工程と、
前記貫通孔が形成された前記成形用素材を圧力室基板としてそれぞれ前記圧力室に対応した前記ノズル用貫通孔を形成したノズル板を貼付し、それぞれ前記圧力室に対応した圧力印加板を付加する工程とを備えることを特徴とするインクジェットプリンターヘッドの製造方法。 An ink jet printer head manufacturing method comprising: a pressure chamber substrate having a pressure chamber for containing ink; a nozzle through-hole that discharges ink from the pressure chamber; and a pressure applying plate that vibrates the pressure chamber. And
Place the molding material made of glass to form a release agent on a plane mold, heating the whole, the pressure chambers mold having a projection shape corresponding to the pressure chamber, the back surface without completely through Press molding until it remains ,
A step of transferring the pressure chamber mold projections shape to the molding material,
A step of releasing only said pressure chamber forming mold without cooling,
After cooling and forming the removal of the release agent, from the rear surface of the molding material is molded, the through holes serving as pressure chambers by polishing,
Using the molding material with the through holes formed as a pressure chamber substrate , a nozzle plate having the nozzle through holes corresponding to the pressure chambers is affixed, and pressure applying plates corresponding to the pressure chambers are respectively added. And a process for producing an ink jet printer head. インクを収納するための圧力室を有する圧力室基板と、前記圧力室からインクを吐出するノズル用貫通孔と、前記圧力室に振動を与える圧力印加板とを含むインクジェットプリンターヘッドの製造方法であって、
平面金型上にガラスからなる成形用素材を載せ、全体を加熱し、離型膜を形成した圧力室に相当する突起形状を有する圧力室成形用金型により、完全に貫通させず裏面が残るようになるまでプレス成形する工程と、
前記成形用素材に前記圧力室成形用金型の突起形状を転写する工程と、
冷却せずに前記圧力室成形用金型のみ離型する工程と、
冷却後、成形された前記成形用素材の裏面より、研磨することで圧力室となる貫通孔を形成する工程と、
前記貫通孔が形成された前記成形用素材を圧力室基板にとしてそれぞれ前記圧力室に対応した前記ノズル用貫通孔を形成したノズル板を貼付し、それぞれ前記圧力室に対応した圧力印加板を付加する工程とを備えることを特徴とするインクジェットプリンターヘッドの製造方法。
An ink jet printer head manufacturing method comprising: a pressure chamber substrate having a pressure chamber for containing ink; a nozzle through-hole that discharges ink from the pressure chamber; and a pressure applying plate that vibrates the pressure chamber. And
Place the molding material made of glass on a plane mold, heating the whole, the pressure chambers mold having a projection shape corresponding to the pressure chamber forming the release film, the back surface without completely through Press molding until it remains ,
A step of transferring the pressure chamber mold projections shape to the molding material,
A step of releasing without cooling only the pressure chamber forming mold,
After cooling, from the rear surface of the molded material for the molding, and forming a through hole as a pressure chamber by polishing,
Using the molding material with the through-holes as a pressure chamber substrate, affixing nozzle plates with the nozzle through-holes corresponding to the pressure chambers , respectively, and adding pressure application plates corresponding to the pressure chambers , respectively. A method for manufacturing an ink jet printer head.
JP2003282052A 2003-07-29 2003-07-29 Inkjet printer head manufacturing method Expired - Fee Related JP4392205B2 (en)

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