JP3273921B2 - Mold for glass optical element, method for manufacturing glass optical element, and method for reproducing mold - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a mold using a ceramic base material used for molding a glass optical element such as a lens. More specifically, the present invention relates to a recyclable mold and a method for reclaiming the mold.

[0002]

2. Description of the Related Art In a molding die used for press molding of a glass molded body which is not subjected to cold grinding or polishing, the molding surface of the mold is transferred to the glass surface as it is at the time of press molding. Therefore, the molding surface of the mold can be processed into an optical mirror surface, that it does not cause surface roughness due to oxidation even at high temperatures, that it does not easily fuse with glass when it comes into contact with the glass to be molded, and that it is used during press molding. It is required to have mechanical strength to withstand impact.

[0003] Various such molds have been developed. For example, Japanese Patent Application Laid-Open No. 63-45135 discloses that, in a mold having an upper mold and a lower mold for press-molding a glass to be molded, a surface of a mold base of the molding die opposed to a surface of the glass to be molded. A glass mold having a beta silicon carbide film mainly having a 111-plane orientation is provided thereon.

Japanese Patent Application Laid-Open No. 1-83529 discloses that "a base material of a glass forming die is processed into a shape corresponding to the shape of a glass formed body to be manufactured, and then the base material temperature is 250 to 4".
At 50 ° C., an inert gas as a sputter gas, a method for manufacturing a glass mold, comprising forming a hard carbon film on the base material by a sputtering method using graphite as a sputter target. '' I have.

This publication discloses the following. After using a silicon carbide sintered body as a base material and roughly processing it into a shape corresponding to the shape of the glass molded body to be manufactured, a CVD (Chemical Vapor Depositio
A silicon carbide film (500 μm thick) is formed by the method n). Next, after finishing the surface of the silicon carbide film into a shape of a glass molded body to be manufactured, a hard carbon film is formed thereon by a sputtering method. In the case where the hard carbon film is not provided, fusion of the glass is observed by several times of press molding, but in the case where the hard carbon film (1000 mm thick) is provided, there is no fusion of the glass in 150 times, and 200 to 300 It is stated that fusion was recognized for the first time. There is also a description that since the hard carbon film can be easily removed by oxygen plasma ashing, there is also an advantage that a mold can be recycled by repeating film removal and film formation. Further, JP-A-2-38
No. 330, after removing the hard carbon film by oxygen plasma ashing, before forming a new hard carbon film,
It is disclosed that an excellent adhesive force can be obtained by treating a molding surface of a mold with an aqueous solution of hydrogen fluoride or a salt thereof.

[0006]

The silicon carbide film formed by the CVD method has a feature that it is dense and can be optically mirror-finished, and the surface layer is oxidized, but the oxidation hardly proceeds at high temperatures, so that the surface is not roughened. However, when the glass material is pressed as it is so that the silicon carbide film and the glass material are in direct contact, the glass is fused to the silicon carbide film and the silicon carbide layer is locally removed (hereinafter referred to as “pull-out”). ").)

Therefore, a release film such as a hard carbon film is formed to improve the releasability. However, the hard carbon film is not a permanent film, but is repeatedly removed and formed about every 200 times. There is a need. For example, when film formation is not uniform or when film formation that does not last long is performed due to fluctuations in film formation conditions, pull-out occurs due to press molding.
If a pull-out occurs, the appearance of the lens becomes poor, and such a mold cannot be used as it is. In removing the film, the carbon film is removed by ashing with oxygen plasma. At this time, the surface of the silicon carbide is also oxidized. When the surface of silicon carbide is oxidized, the adhesion of the carbon film in the next film formation is reduced. Therefore, this oxide layer is dissolved and removed with an aqueous solution of hydrogen fluoride or a salt thereof before the next film formation. This repetition causes roughening of the surface of the silicon carbide. When a glass optical material is pressed using a mold having such roughened surface, a glass molding (lens) is formed.
Cloudiness occurs on the surface.

As described above, the life of the surface of silicon carbide formed by the CVD method is relatively short. Therefore, it is desired that only the molding surface of the mold that can no longer be used is reworked and the mold can be reused. However, the thickness of the silicon carbide film by the CVD method is usually several hundred (several hundred) μm
The remaining thickness after processing is about 200 to 300 μm, and when the skin becomes rough, it can be reproduced once or twice. However, since the pull-out is formed deeply, if the forming surface is ground to remove the pull-out, the silicon carbide film is almost completely removed.

In addition, the mold to be regenerated has a CVD
It is conceivable to newly add a silicon carbide film by the method. However, in this case, in the CVD method, not only the molding surface of the molding die composed of the silicon carbide sintered body as the base,
A silicon carbide film is also deposited on the side and bottom. When the silicon carbide film is reformed on the entire surface of the mold to be regenerated,
It is necessary to rework the side and back surfaces of the mold with high precision, and the cost of the mold increases. Further, even if the side and bottom portions are protected so that the silicon carbide film is not formed, it is difficult to completely protect the gas because the gas enters the gap. For this reason, a step of processing and removing the silicon carbide film deposited on the side surface and the bottom is required, and it is not possible to regenerate the mold simply by forming the silicon carbide film only on the molding surface.

[0010] Therefore, an object of the present invention is to provide a molding method in which even if deterioration such as pullout occurs on a molding surface due to repeated use,
An object of the present invention is to provide a mold that can be reused easily and a method for reusing the mold. Another object of the present invention is to provide a method for manufacturing an optical element using a molding die whose molding surface can be reworked.

[0011]

SUMMARY OF THE INVENTION The present invention relates to a molding die including an upper die and a lower die for obtaining a glass optical element by pressure-molding a glass material to be molded which has been softened by heating, wherein the upper die and the lower die are provided. At least one of a lower mold and a lower mold is made of a ceramic base material, and the base material does not have a surface hole of 300 μm or more on a forming surface (hereinafter, referred to as a first forming die). Further, the present invention provides a molding die including an upper mold and a lower mold for obtaining a glass optical element by press-molding a heat-softened molded glass material, wherein at least one of the upper mold and the lower mold is molded. A molding part characterized in that a part forming a surface has a thickness enough to regenerate a molding surface by grinding and is made of β-type silicon carbide having a density of 3.20 g / cm ³ or more. (Hereinafter, referred to as a second mold). Further, the present invention is a method for manufacturing a glass optical element, wherein a step of obtaining a glass optical element by press-molding a heat-softened glass material to be molded by a molding die to obtain a glass optical element, wherein the molding die is made of a ceramic base material Become
The mold has at least a molding surface regenerated by grinding, and the regenerated molding surface is 300 μm
The present invention relates to a method characterized by having no surface hole. In addition, the present invention is a method for manufacturing a glass optical element, which comprises repeating a step of obtaining a glass optical element by press-molding a heat-softened glass material to be molded using a molding die. At least one of the mold and the lower mold, which forms a molding surface, has such a thickness that the molding surface can be regenerated by grinding, and the molding die has at least the molding surface regenerated by grinding. And 3.
The present invention relates to a method comprising β-type silicon carbide having a density of 20 g / cm ³ or more, but comprising a ceramic base material. The present invention also provides a molding die including an upper mold and a lower mold for obtaining a glass optical element by pressure-molding a heat-softened glass material to be molded, wherein at least one of the upper mold and the lower mold is molded. A method for regenerating a mold comprising a β-type silicon carbide having a thickness such that a surface forming portion can regenerate a molded surface by grinding and having a density of 3.20 g / cm ³ or more, Molding surface deteriorated by repeated pressure molding
The present invention relates to a method for regenerating by a method including a step of grinding a molding surface.

[0012]

BEST MODE FOR CARRYING OUT THE INVENTION The mold of the present invention is a mold including an upper mold and a lower mold for obtaining a glass optical element by press-molding a heat-softened glass material to be molded. A method for directly obtaining a high-precision glass optical element by pressure-molding a heat-softened glass material to be molded is known, and the molding die of the present invention can be applied regardless of molding conditions and types of glass. it can. The mold of the present invention includes an upper mold and a lower mold, and the shapes of the upper mold and the lower mold are not particularly limited. In addition, the molding die of the present invention includes a member other than the upper die and the lower die, for example, a sleeve capable of positioning (centering) without hindering the movement of the upper die and the lower die, and a press for pressing the upper die or the lower die. It can have a mold or the like.

A first molding die of the present invention is characterized in that at least one of the upper die and the lower die is made of a ceramic base material, and the base material does not have a surface hole of 300 μm or more on a forming surface. I do. In the present invention, the ceramic base material is not particularly limited as long as it has sufficient density and strength to withstand as a base material of the molding die, such that the molding surface of the molding die can be constituted only by grinding and polishing. No restrictions. For example, SiC, Si ₃ N ₄ , Al ₂ O ₃ , mullite, Zr
O ₂ and Al ₂ O ₃ —TiO ₂ can be exemplified. Not only ceramics manufactured by sintering but also ceramics manufactured by a CVD method or another deposition method can be used, but those made by the CVD method are preferable in consideration of denseness, strength and hardness. The ceramic base material includes not only a case where the entire mold is made of ceramic, but also a case where a part of the mold including the molding surface is made of ceramic and the strength and the like of the mold depend on the ceramic. According to the first molding die of the present invention made of such a ceramic base material, even when surface roughness or pull-out occurs due to repeated use, a part of the ceramic base material is ground to form a molding surface. It is possible to regenerate and reuse the mold. When part of the upper mold and the lower mold are made of ceramic, the thickness of the part made of ceramic is such that the molded surface can be regenerated by grinding, and the minimum thickness is
For example, it is preferable to be in the range of 3 mm to 50 mm. Further, when the entire upper mold or lower mold is made of ceramic, the thickness of the upper mold or lower mold made of ceramic is also preferably in the range of 3 mm to 50 mm.

In the first mold of the present invention, the ceramic base material does not have a surface hole of 300 μm or more on the molding surface.
The size and presence / absence of the surface pores are indices indicating the denseness of the ceramic base material. The surface pores are so-called spots, and unlike pores, pores and crystal grain boundaries in the base material often appear on the surface. In the mold of the present invention, it is necessary that the molding surface obtained after grinding and polishing the molding surface of the ceramic base material is in the following state 1, the preferred state is 2 to 21, and the more preferred Is states 14 to 21, particularly preferably 17 to 21.

State 1: There is no surface pore having a diameter of 300 μm or more. State 2: In state 1, the diameter is 200 μm or more and 30
There are no more than 5 (including 0) surface holes less than 0 μm. State 3: In state 1, the diameter is 200 μm or more and 30
The number of surface pores less than 0 μm is 2 or less (including 0). State 4: In state 1, the diameter is 200 μm or more and 30
There are no surface pores smaller than 0 μm. State 5: In states 2 to 4, the number of surface holes having a diameter of 150 μm or more and less than 200 μm is 5 or less (including 0). State 6: In states 2 to 4, the number of surface pores having a diameter of 150 μm or more and less than 200 μm is 2 or less (including 0). State 7: In states 2 to 4, there is no surface pore having a diameter of 150 μm or more and less than 200 μm. State 8: In states 2 to 7, the number of surface holes having a diameter of 100 μm or more and less than 150 μm is 5 or less (including 0). State 9: In states 2 to 7, the number of surface holes having a diameter of 100 μm or more and less than 150 μm is 2 or less (including 0). State 10: In states 2 to 7, there are no surface pores having a diameter of 100 μm or more and less than 150 μm. State 11: In states 2 to 10, the number of surface holes having a diameter of 50 μm or more and less than 100 μm is 5 or less (including 0). State 12: In states 2 to 10, the number of surface holes having a diameter of 50 μm or more and less than 100 μm is 2 or less (including 0). State 13: In states 2 to 10, there is no surface pore having a diameter of 50 μm or more and less than 100 μm. State 14: In states 2 to 13, the number of surface holes having a diameter of 30 μm or more and less than 50 μm is 5 or less (including 0). State 15: In states 2 to 13, the number of surface holes having a diameter of 30 μm or more and less than 50 μm is 2 or less (including 0). State 16: In states 2 to 13, there is no surface pore having a diameter of 30 μm or more and less than 50 μm. State 17: In states 2 to 16, the number of surface holes having a diameter of 3 μm or more and less than 30 μm is 5 or less (including 0). State 18: In states 2 to 16, the number of surface holes having a diameter of 3 μm or more and less than 30 μm is 2 or less (including 0). State 19: In states 2 to 16, there is no surface pore having a diameter of 3 μm or more and less than 30 μm. State 20: In states 1 to 19, the total diameter of the surface holes is 200 μm or less. State 21: In states 1 to 19, the total diameter of the surface holes is 200 μm or less.

The surface hole having a diameter of 30 μm or more has a size of 60 W
The presence can be confirmed with the naked eye under a light bulb. Ma
The diameters of the surface holes in the closed states 17 and 18 are outside the surface holes.
The diameter of the tangent circle. Furthermore, the mold base material is
In this case, the hardness is preferably high. For example, from room temperature
In a temperature range of 100 ° C., Vickers hardness is 700
kg / mm ²Or more, and within the same temperature range.
1000kg / mm²More preferred
2000kg / mm in the same temperature range²Above
More preferably, 3000 kg / mm²that's all
Is most preferred. In addition, ceramic matrix
Has an elastic modulus of 400 GPa or more and a deformation resistance of 120 ×
10⁶MN / kg or more, thermal conductivity 200W / m · K or less
It is preferably above. Further, the molding die base material is a CD.
It is preferably β-type silicon carbide formed by the V method. C
Β-type silicon carbide formed by the DV method has a theoretical density of 3.2
1g / cm³3.20g / cm close to³Vicker with higher density
This is because physical properties such as hardness are satisfied with the above conditions.

The first molding die of the present invention can have a carbon thin film immediately above the molding surface. As the carbon thin film, for example, at least one layer of a carbon-based release film having an amorphous and / or crystalline structure having a graphite structure and / or a diamond structure and containing no C—H bond, or Examples thereof include a carbon-based release film containing a -H bond. Such a carbon film can be formed directly on the molding surface of the ceramic base material by means such as a sputtering method, a plasma CVD method, a CVD method, and an ion plating method. Details of the carbon thin film will be described in a second mold described later.

In the second mold of the present invention, at least one of the upper mold and the lower mold, which forms the molding surface, has such a thickness that the molding surface can be regenerated by grinding, and 3. It is characterized by comprising β-type silicon carbide having a density of 20 g / cm ³ or more. In the second mold of the present invention, the portions forming the molding surfaces of the upper mold and the lower mold, that is, a part of the upper mold and the lower mold are made of β-type silicon carbide, or the upper mold and / or the lower mold Can consist entirely of β-type silicon carbide. According to the second mold of the present invention having such a portion composed of β-type silicon carbide, even when the surface is roughened or a pull-out occurs due to repeated use, the layer of β-type silicon carbide is ground to form the mold. By regenerating the surface, the mold can be reused.

When a part of the upper mold and the lower mold is composed of β-type silicon carbide, the thickness of the part composed of β-type silicon carbide is as follows:
It is possible to regenerate the molded surface by grinding,
Preferably, the minimum thickness is, for example, in the range of 3 mm to 50 mm. When the entire upper mold or lower mold is made of β-type silicon carbide, the thickness of the upper mold or lower mold made of β-type silicon carbide is also preferably in the range of 3 mm to 50 mm. The greater the thickness, the more the number of times of reproduction can be made. However, the larger the thickness, the more difficult it is to manufacture, so that the above range is preferable from a practical viewpoint. That is, if the thickness (minimum thickness) of the portion made of β-type silicon carbide is 3 mm, even if a pull-out with a depth of about 100 μm occurs, even if the molding surface is cut off by about 200 μm for reproduction, The mold can be reused about 10 times. Also, for example, when forming β-type silicon carbide by CVD, if the thickness exceeds 50 mm, the grown grains become coarse and it becomes difficult to obtain a desired density. For the same reason, the thickness is more preferably 3 to 40 mm. However, even in the case where the grown grains are coarse, it is possible to use the present invention in the present invention by turning the coarse end to the molding surface side (that is, inverting).

The β-type silicon carbide forming the mold has a density of 3.20 g / cm ³ or more. Β having such a density
The type silicon carbide can be formed, for example, by a CVD method. However, the present invention is not limited to β-type silicon carbide manufactured using CVD, and may be manufactured using another method as long as the density is 3.20 g / cm ³ or more. The theoretical density of β-type silicon carbide is 3.21 g / cm ³ ,
Those close to this theoretical density are preferred.

In a further preferred embodiment of the present invention, at least one carbon-based release film having an amorphous and / or crystalline graphite structure and / or diamond structure on a molding surface, C-
A carbon-based release film that does not include an H bond or that includes a C—H bond is formed. Such a carbon film is formed by sputtering, plasma CVD, C
The film can be formed by means such as a VD method and an ion plating method.

This carbon-based release film is disclosed in, for example,
-83529, a hard carbon film described in JP-A-2-1529,
An i-carbon film described in 99036 can be used. Such a film can be formed into a film / removed film as described in the above-mentioned publication, whereby the mold can be repeatedly used.

When a film is formed by the sputtering method disclosed in the above-mentioned Japanese Patent Application Laid-Open No. 1-83529, a substrate temperature of 250-6
Sputtering is preferably performed using graphite as a sputtering gas at a temperature of 00 ° C., an RF power density of 5 to 15 W / cm ² , and a degree of vacuum during sputtering of 5 × 10 ^{−4 to} 5 × 10 ⁻¹ torr. Using a sputtering method, for example, 500
A hard carbon film of about 1000 mm can be formed. Also,
When forming a film by a microwave plasma CVD method,
It is preferable to form a film using methane gas and hydrogen gas as source gases under the conditions of a substrate temperature of 650 to 1000 ° C., a microwave power of 200 W to 1 kW, and a gas pressure of 10 ^{−2 to} 600 torr.
Further, when forming by the ion plating method disclosed in Japanese Patent Application Laid-Open No.
It is preferable to ionize benzene gas at a temperature of 0 to 450 ° C. Using the ion plating method, for example, 50
An i-carbon film having a thickness of 0 to 1000 ° can be formed.

As described above, the hard carbon film or i
-Using a molding die having a carbon film formed thereon a predetermined number of times, pressing a glass material, forming a glass optical element, using the method disclosed in JP-A-2-38330, removing the film, After forming the film, the mold can be regenerated. At this time, for example, after removing the carbon thin film, the mold is regenerated by grinding or the like, and then the carbon thin film can be formed.

[0025] The molding die of the present invention is designed so that the base material including the molding surface deteriorated by the repetition of pressure molding can be regenerated by a method including a step of grinding the molding surface.
It is formed from a ceramic such as silicon carbide. That is, as described above, the molding surface is made of a ceramic such as β-type silicon carbide having a thickness capable of regenerating the molding surface by grinding, so that the molding surface is reproduced by a method including a step of grinding the molding surface. It becomes possible to do. The degradation that has occurred on the molding surface can be, for example, rough skin, flaws, pullouts, or glass fusing.

The molding die of the present invention can also be used to mold a glass optical element having a different shape from a molding surface made of ceramic such as β-type silicon carbide. That is,
After the molding die of the present invention is used for molding a glass optical element of a certain shape, in order to mold a glass optical element of another shape, the molding surface is processed by grinding or the like to form a glass optical element of a different shape. It can also be processed for molding and resealed.

The molding die of the present invention is, for example, one having an end surface of a disk as a molding surface (for example, an upper die in the molding die shown in FIG. 2) and an end surface of a disk having a molding surface and being opposite to the molding surface. It may be one having a protrusion protruding in the outer peripheral direction of the mold at the end (for example, the upper mold and the lower mold in the molds of FIGS. 3 and 4). However, the shapes of the upper mold and the lower mold are not limited to a disk (column). Further, in the latter case, the surface having the same orientation as the molding surface of the projection can be ground to the same thickness as the molding surface. The protrusion serves as a lock between the sleeve and the sleeve. When the upper mold surface or the lower mold surface is shaved and reworked, the height of the upper mold or the lower mold becomes shorter, and the center thickness of the resulting glass molded body increases. The surface of the same orientation as the molding surface of the protrusion provided on the upper mold or the lower mold can be ground to the same thickness as the molding surface, so that the thickness of the glass molded body due to the decrease in the thickness of the molding die is reduced. The increase can be adjusted. Further, as will be described in detail in the embodiment, the same thickness adjustment can be performed by adjusting the height of the sleeve, not by grinding the protrusion. Further, if necessary, the pressing stop position of the upper die (determining the thickness of the glass after the pressing) can be maintained by using a spacer in the same manner as before the grinding for regeneration.

The molding die of the present invention may further have a height adjusting member for adjusting a dimension between two molding surfaces generated by regeneration or processing of the molding surface. As described above, when a process such as grinding is performed on the molding surface for regeneration, the height of the molding die is reduced. Therefore, a height adjusting member for adjusting the decrease in the height dimension can be provided. This makes it possible to maintain the glass optical element at a predetermined thickness. The height adjusting member can be, for example, a spacer that can be attached to at least one of the upper mold and the lower mold. The height adjusting member is a sleeve that accommodates the upper die and the lower die and defines the movement of a pressing member that presses at least one of the upper die and the lower die. The length of the sleeve is adjusted. It can be anything that is possible. The spacer may be a foil or a plate, and the material thereof is not particularly limited, but may be a metal, a ceramic, or the like. Here, for example, when the spacer is a foil, the height can be adjusted by inserting one or two or more foils into the upper part of the upper mold or the lower part of the lower mold, so that the In this case, the height can be adjusted by inserting a plate having a thickness greater than that of the plate before the reproduction. At this time, the ceramic is not limited to the same material as the dense object including the molding surface.

The present invention relates to a molding die including an upper die and a lower die for obtaining a glass optical element by pressure-molding a heat-softened glass material to be molded, wherein at least one of the upper die and the lower die is provided. The portion forming the molding surface has a thickness such that the molding surface can be regenerated by grinding, and 3.
A method for regenerating a molding die made of β-type silicon carbide having a density of 20 g / cm ³ or more, including a method for regenerating a molded surface deteriorated by repeated pressure molding by a method including a step of grinding the molded surface. I do. Deterioration that has occurred on the molding surface can be, for example, rough skin, flaws, pullouts or glass fusion.

Further, according to the present invention, there is provided a mold including an upper mold and a lower mold for obtaining a glass optical element by pressure-molding a heat-softened glass material to be molded, wherein the upper mold and the lower mold are provided. The portion forming at least one molding surface of
Forming a mold made of β-type silicon carbide having a thickness that enables the molding surface to be regenerated by grinding and having a density of 3.20 g / cm ³ or more for molding glass optical elements of different shapes Can also. That is, at least one of the upper mold and the lower mold may be partially or entirely ground to form a glass optical element having a different shape.

Further, according to the present invention, there is provided a method for manufacturing a glass optical element, comprising repeating a step of obtaining a glass optical element by press-molding a heat-softened glass material to be molded with a molding die. Is formed of a ceramic base material, and the mold has at least a molding surface regenerated by grinding, and the regenerated molding surface does not have a surface hole of 300 μm or more. Can be provided.

[0032] In addition, according to the present invention, there is provided a method for manufacturing a glass optical element, wherein a step of obtaining a glass optical element by press-molding a heat-softened glass material to be molded with a molding die is repeated. A portion forming at least one molding surface of the upper mold and the lower mold constituting the mold has such a thickness that the molding surface can be regenerated by grinding, and the molding die is regenerated by at least grinding. A method comprising: forming a β-type silicon carbide having a molded surface and having a density of 3.20 g / cm ³ or more, but using a ceramic base material. The mold to be regenerated is the second mold of the present invention. A method of manufacturing a glass optical element by repeating the process of obtaining a glass optical element by press-molding a heat-softened glass material to be molded with a molding die is known, and a known method (for example, Japanese Patent Application Laid-Open No. Hei 9-118530)
And the methods described in JP-A-9-12317 and the like can be used as they are. In the method of manufacturing an optical element according to the present invention, the optical element is manufactured using a mold of the present invention having a formed surface regenerated by grinding at least after being used for manufacturing a glass optical element. For the regeneration of the mold by grinding and polishing, a usual method used in the processing of β-type silicon carbide can be used.

According to the present invention, β-SiC
Is formed and ground (in some cases, polished) to obtain a forming die having a desired forming surface and made of a ceramic such as β-SiC as a base material. Therefore, even if pull-out occurs on the molding surface by repeating pressing, the molding die can be regenerated by shaving off the molding surface by a predetermined thickness. In addition, it is possible to change the shape of the molding surface to regenerate a molding die for molding another glass element. Further, according to the present invention, a hard carbon film or the like is formed on a molding surface of a mold having a ceramic such as β-SiC as a base material. This makes it possible to ensure good releasability.

[0034]

Embodiments of the present invention will be further described below with reference to the accompanying drawings. Example 1 FIG. 1 shows a CV for forming β-type silicon carbide (β-SiC) to be used in a mold according to an embodiment of the present invention.
It is a figure explaining D device. As shown in FIG.
The VD apparatus includes a vertical quartz glass reaction tube 1, one of which is provided with a gas supply system 2 and the other with a vacuum exhaust system 3. A work coil 4 is provided in the quartz glass reaction tube 1. Further, a carbon heater (not shown) is disposed inside the quartz glass reaction tube 1 and is heated to a predetermined temperature by high frequency induction heating of 15 kw and 400 kHz. By indirect heating from the carbon heater,
A carbon disk (C) as a base is heated.

Source gas H in gas supply system 2₂, C₃H₈
Pass through the flow meters 5a, 5b and 5c, respectively, and
Supplied to the reaction tube 1. On the other hand, the raw material SiC
l₄Bubbler 6 is set in thermostat 7 at 20 ° C.
Source gas SiCl₄Is H passing through the flow paths 8 and 9₂Moth
The carrier is carried into the reaction tube 1 by the heat. SiCl₄, H
₂And C₃H₈Is mixed in the mixer 10,
It is introduced into the reaction tube 1. In the present embodiment,
Is the total H₂To keep the amount constant, separate H ₂La
And supply it directly to the quartz reaction tube
You.

The evacuation system 3 includes oil rotary pumps 12a, 1
2b, whereby exhaust from the reaction tube 1 is performed. Between the oil rotary pumps 12a and 12b and the reaction tube 1,
Traps 13 and 13 are provided to remove unreacted SiCl ₄ and HCl as a reaction by-product, respectively.
The pressure in the reaction tube 1 is controlled by a manometer 14.

In this embodiment, SiCl ₄ + H
₂ (SiCl ₄ : H ₂ = 1: 2 in molar ratio) at 900 ml /
min and C ₃ H ₈ are supplied at a rate of 60 ml / min from the supply pipe 15, while H ₂ is supplied at a rate of 450 ml / min at the supply pipe 1.
Supplied from 1. Also, the substrate heating temperature is 1300-1650 ° C,
The total pressure in the furnace is 5 to 300 Torr, and β-SiC
Was synthesized. The obtained β-SiC has a thickness of 30 to 35 mm. Table 1 shows the conditions of the substrate heating temperature and the total pressure in the furnace, the observation results, and the results of X-ray diffraction analysis of the orientation of the deposition surface.
Shown in The thickness is controlled by time. However, if the thickness is too large, the growth grains become coarse, which is not preferable. Therefore, the thickness is more preferably up to about 40 mm as described above. The density of β-SiC was 3.20 g / cm ³ or more.

[0038]

[Table 1]

In the above embodiment, the CVD apparatus was an experimental furnace. When a mass production furnace is used, productivity can be improved by arranging a large number of carbon substrates in a reaction tube and synthesizing a large number of β-SiC. Next, the production of a β-SiC disk obtained by CVD in a mold as described above will be described.

First, from the reaction tube 1, a carbon substrate C
Take out and crush this, β of 30-35mm thickness
-A disk of SiC is removed. By grinding this disk, for example, the upper die 21 and the lower die 22 shown in FIG. 2 having an outer diameter of about 25 mm and a height of about 33 mm can be manufactured. The forming surfaces (surfaces forming the surface of the glass optical element) 21a and 22a are subjected to finish grinding with high shape accuracy and then slightly polished to obtain a surface roughness of 50%.
鏡 Finished with a mirror surface of Rmax or less. In FIG.
The surface shape of the molding surface 21a is aspherical, and
The surface shape of the molding surface 22a is spherical.

Further, in this embodiment, it is preferable to form a carbon-based release film on the molding surface of the β-SiC molding die (upper die 21 and lower die 22). As the carbon-based release film, at least one layer of an amorphous carbon-based release film having a graphite structure and / or a diamond structure was formed. Hereinafter, examples relating to a mold, its rework and reuse will be described.

EXAMPLE 2 FIG. 2A shows a molding apparatus comprising an upper die 21, a lower die 22, and a sleeve (body type) 23 (here, a silicon carbide sintered body) in Example 2, and a glass material to be molded (barium). It is a figure which shows the state which set borosilicate glass (transition point 545 degreeC, deformation point 585 degreeC) G. The upper mold 21 and the lower mold 22 have a density of 3.21 g / cm ³ using CVD as in the first embodiment.
Was formed and ground to a predetermined shape. Further, the same carbon thin film as in Example 1 was formed on the upper and lower mold surfaces.

In the example of FIG. 2, the molds and the like are heated from around the molds 21 and 22 by using a resistance heater (not shown). When heated to 640 ° C., the press head 25 is lowered to pressurize the glass material to be molded, and when the glass material has grown to a predetermined thickness, the pressurization is stopped (FIG. 2).
(See (b)), the press head 25 was raised. Then, immediately after cooling to below the glass transition point, the mold was transferred and taken out of the entrance, the mold was disassembled, and the glass optical element (lens) was taken out. Press molding was performed in a non-oxidizing atmosphere. The above operation was repeated to continuously produce glass optical elements.
A 200 μm, 100 μm deep pullout occurred. Therefore, the molding surface was shaved off by about 200 μm, reworked, and regenerated into a molding die. The lens molded in Example 1 is a biconvex lens having an outer diameter of 17 mm at the time of pressing, and is used with a center of 15 mm. In addition, the surface pores having a diameter of 30 μm or more (the limit that can be observed with the naked eye) are not formed on the SiC molding surface of the above mold during production and after regeneration.
There was no one. After this mold was used in the press 10,000 times, only a few small holes having a diameter of 30 μm were found.

Third Embodiment FIG. 3 is a view showing a structure of a molding apparatus according to a third embodiment. As shown in FIG. 3, in this embodiment, the downward movement of the press head 35 is restricted by the contact of the press head 35 with the sleeve 33, and thereby the thickness of the formed glass optical element is reduced. Is to be determined. The upper mold 31 and the lower mold 32 were formed by the same method as in the first embodiment by using CVD to obtain a β having a density of 3.21 g / cm ³ .
-It is obtained by forming SiC and grinding it into a predetermined shape.

In this embodiment, when the glass optical element was continuously produced by repeating pressing, the upper mold 3 was produced.
Pull-out occurred on the molding surface 31a of No. 1. Therefore, the upper mold forming surface was shaved and reworked. By this rework, the height dimension (L1) of the upper die 31 was shortened.
The bottom portion 33a was similarly scraped off, and the molded product (glass optical element) was adjusted to have a predetermined thickness, thereby regenerating the molding die. Alternatively, the bottom 3 of the sleeve 33
Instead of shaving off 3a, it is also possible to adjust so as to have a predetermined thickness by shaving off the surface 32b of the protrusion of the lower die 32 that contacts the bottom 33a of the sleeve 33.

Fourth Embodiment FIG. 4 is a view showing a structure of a molding apparatus according to a fourth embodiment. In this embodiment, the manufacturing method and the structure of the upper mold and the lower mold are the same as those of the second embodiment, but the height dimension (L1 or L2) of the upper mold 31 or the lower mold 32 is shortened by cutting off. In such a case, a molded product (glass optical element) was adjusted to have a predetermined thickness by disposing a metal or ceramic disk-shaped spacer 46 on the upper die.

Fifth Embodiment FIG. 5 is a view showing a structure of a molding apparatus according to a fifth embodiment. As can be understood from FIG. 5, also in this embodiment, the molded product (glass optical element) is formed by using the spacer 56.
The thickness of is adjusted. As shown in FIG. 5, this molding apparatus includes an upper mold 5 on the outer peripheral side of a lower mold 52 during press molding.
A sleeve 53 that fits with the sleeve 1 is arranged. The upper mold 51 is attached to upper metallic molds 57a and 57b, and the lower mold 52 is attached to metallic lower molds 58a and 58b. Further, the upper mold 57 and the lower mold 58
Are attached to the upper and lower press shafts, respectively.
In this embodiment, a glass material to be molded preheated to a strain point or lower (about 490 ° C.) is placed on a lower mold 52 below a molding chamber (not shown) accommodating the molding apparatus having the above-described configuration. Then, the upper mold 57 and the lower mold 58 are heated by high-frequency induction heating while being raised, and the upper mold 51, the lower mold 52, and the glass material G are moved to about 64 by heat conduction from the upper and lower molds.
The glass material G was heated to 0 ° C. and pressed. Then, immediately after cooling to below the glass transition point, the molded glass optical element (lens) was released from the mold and taken out below the molding chamber. In this embodiment, the upper mold 51 and the lower mold 52 each have a size of 25 mm.

Sixth Embodiment FIG. 6 is a view showing the structure of a molding apparatus according to a sixth embodiment. In this example, the mold used repeatedly in Example 3 was processed to change the shape of the molding surface, and was diverted to a lens mold having another surface shape. That is, a mold for forming a biconvex lens was processed to obtain a mold for forming a meniscus lens.

In order to change the curvature of the lower mold, the molding surface of the lower mold 32 in FIG. 3 is reworked, and the molding surface of the upper mold 31 is reworked from a concave surface to a convex surface (see reference numeral 61a in FIG. 5). did. In addition, as the height dimension of the upper mold 61 and the lower mold 62 is reduced by these reworking, and / or in order to obtain a meniscus lens having a predetermined thickness, the bottom 63a of the sleeve 63 is fixed to a predetermined position. Cut off only the length. In this way, a certain mold is regenerated into a mold having a different shape, and a carbon-based release film (for example, a hard carbon film or an i-carbon film) is formed on the molding surface thereof. A glass optical element (lens) having a diameter of 23 mm was obtained, and was centered at 21 mm in a later process.

In the above-described embodiments 2 to 6, the outer diameter of the upper and lower molds and the inner diameter of the sleeve are fixed to 25 mm, and
During pressing, the outer diameter of the finished product is determined by centering in a later step without stretching the glass so as to abut against the inner surface of the sleeve. As a result, the press diameter becomes 25
Since lenses of various shapes with various outer diameters of less than mm can be obtained with a mold having the same structure, it can be reused and used, and the mold can be standardized, reducing the total cost of the mold. It is very effective for Further, since the glass is not brought into contact with the inner surface of the sleeve, no pull-out occurs in the sleeve.

Seventh Embodiment FIG. 7 is a view schematically showing a structure of a molding apparatus according to a seventh embodiment. In this embodiment, the outer diameter is 60 m by the CVD method.
Two pieces of β-SiC disks (density: 3.21 g / cm ³ ) having a thickness of 5 mm and a thickness of 5 mm are prepared, and the opposing surfaces are polished. One of the above disks is used as the upper die 71,
On the other sheet, apply resist, expose and develop, CF
4μ width by dry etching with ₄ gases
m, a fine groove 73 having a depth of 0.1 μm was formed. This was coated with a carbon-based release film and used as a lower mold 72. The glass material to be molded polished to a flat surface is placed on the lower mold 72,
This is press-formed with an upper mold 71 and a lower mold 72,
A fine pattern transfer product having an outer diameter of about 50 mm was obtained. When molding was repeated, chipping occurred at the corners of the groove of the lower mold 72. Therefore,
The molding surface of the lower mold was reworked and used again for press molding. Thus, according to the seventh embodiment, a glass optical element other than a lens can be formed.

The present invention is not limited to the above embodiments, and various modifications can be made within the scope of the invention described in the appended claims, which are also included in the scope of the present invention. Needless to say, this is done.

[0053]

According to the present invention, it is possible to provide a mold that can be reused easily even when deterioration such as pull-out occurs on a molding surface due to repeated use, and a method for regenerating the mold. Further, according to the present invention, it is possible to provide a mold capable of reworking a molding surface for an optical element having a different shape, and a method for reproducing the mold.

[Brief description of the drawings]

FIG. 1 is a view for explaining a CVD apparatus used in Example 1 for forming β-type silicon carbide to be used for a mold.

FIG. 2 is a diagram schematically illustrating a structure of a molding apparatus according to a second embodiment.

FIG. 3 is a view schematically showing a structure of a molding apparatus according to a third embodiment.

FIG. 4 is a diagram schematically illustrating a structure of a molding apparatus according to a fourth embodiment.

FIG. 5 is a view schematically showing a structure of a molding apparatus according to a fifth embodiment.

FIG. 6 is a view schematically showing a structure of a molding apparatus according to a sixth embodiment.

FIG. 7 is a view schematically showing a structure of a molding apparatus according to a seventh embodiment.

[Explanation of symbols]

 21, 31, 41, 51, 61, 71 Upper mold 22, 32, 42, 52, 62, 72 Lower mold 23, 33, 43, 53, 63 Sleeve 46, 56 Spacer 57a, 57b Upper mold 58a, 58b Lower Mother pattern

──────────────────────────────────────────────────続 き Continued on the front page (58) Field surveyed (Int.Cl. ⁷ , DB name) C03B 11/00 C03B 11/08

Claims (21)

(57) [Claims] 1. A molding die including an upper mold and a lower mold for obtaining a glass optical element by pressure molding a glass material to be molded, wherein at least one base material of the upper mold and the lower mold is: 3.2
A molding die made of β-type silicon carbide having a density of 0 g / cm ³ or more, and having a molding surface formed by grinding the base material. 2. A mold including an upper mold and a lower mold for obtaining a glass optical element by pressure-molding a heat-softened glass material to be molded, wherein at least one of the upper mold and the lower mold is molded. A molding part characterized in that a part forming a surface has a thickness enough to regenerate a molding surface by grinding and is made of β-type silicon carbide having a density of 3.20 g / cm ³ or more. . 3. The molding die according to claim 1, wherein at least one of the upper die and the lower die is entirely made of β-type silicon carbide. 4. The method according to claim 1, wherein the minimum thickness of the portion made of β-type silicon carbide is 3 mm to 50 mm.
Mold according to Item. 5. The mold according to claim 1, wherein the β-type silicon carbide is formed by a CVD method. 6. The base material has a substrate temperature of 1300 to 165.
The mold according to any one of claims 1 to 5, wherein the mold is silicon carbide obtained by a CVD method at 0 ° C and a total pressure in a furnace of 5 to 300 Torr. 7. The mold according to claim 5, wherein the surface of the β-type silicon carbide deposited by the CVD method has a cone shape (111 plane orientation is strong). 8. A carbon-based release film having at least one amorphous and / or crystalline graphite structure and / or diamond structure on a molding surface, comprising:
The carbon-based release film, which does not contain an H bond or contains a CH bond, is further formed.
The molding die according to any one of items 7 to 7. 9. The method according to claim 1, wherein a portion made of β-type silicon carbide is formed so that the shape of the molding surface can be processed for molding glass optical elements having different shapes. The mold described. 10. The molding according to claim 1, wherein the molding surface formed by grinding the base material has no surface hole having a diameter of 300 μm or more. Type. 11. A molding surface formed by grinding the base material, wherein the number of surface holes having a diameter of 50 μm or more and less than 100 μm is five or less.
Mold according to Item. 12. A method of manufacturing an optical element by repeatedly press-molding a glass material to be formed, wherein the pressure-forming is performed such that at least one base material of an upper die and a lower die is 3.20 g / m 2. Performed in a mold made of β-type silicon carbide having a density of not less than ³ cm ³ , and having a molding surface formed on the base material. A method for manufacturing a glass optical element, comprising performing a step of regenerating a formed surface by grinding a base material including a surface. 13. The method for manufacturing a glass optical element according to claim 12, wherein said base material is formed by a CVD method. 14. A method for producing an optical element by repeatedly press-molding a glass material to be formed, wherein the pressure-forming comprises silicon carbide obtained by a CVD method, and A molding die having a molding surface is formed. The molding die is regenerated by grinding the base material including the molding surface with respect to the molding die whose molding surface is deteriorated by repeating the pressure molding. A method for producing a glass optical element, comprising the steps of: 15. The method according to claim 15, wherein the base material has a substrate temperature of 1300-16.
CVD at 50 ° C. and the total pressure in the furnace is 5 to 300 Torr
The method for producing a glass optical element according to any one of claims 12 to 14, wherein the method is β-type silicon carbide obtained by a method. 16. The glass according to claim 13, wherein the deposition surface of silicon carbide obtained by the CVD method has a cone shape (111 plane orientation is strong). A method for manufacturing an optical element. 17. The method for manufacturing a glass optical element according to claim 12, wherein at least one of the upper mold and the lower mold is entirely made of β-type silicon carbide. 18. The method for manufacturing a glass optical element according to claim 12, wherein the minimum thickness of the portion made of β-type silicon carbide is 3 mm to 50 mm. 19. The glass optical element according to claim 12, wherein a surface of the silicon carbide deposited by the CVD method has a cone shape (111 plane orientation is strong). Production method. 20. A molding surface formed by grinding the base material, wherein the molding surface has no surface hole having a diameter of 300 μm or more.
Item 13. The method for producing a glass optical element according to item 8. 21. The glass optical device according to claim 12, wherein a surface formed by grinding the base material has five or less surface holes having a diameter of 50 μm or more and less than 100 μm. Device manufacturing method.