JP4378140B2 - 照明光学系及び露光装置 - Google Patents

照明光学系及び露光装置 Download PDF

Info

Publication number
JP4378140B2
JP4378140B2 JP2003324636A JP2003324636A JP4378140B2 JP 4378140 B2 JP4378140 B2 JP 4378140B2 JP 2003324636 A JP2003324636 A JP 2003324636A JP 2003324636 A JP2003324636 A JP 2003324636A JP 4378140 B2 JP4378140 B2 JP 4378140B2
Authority
JP
Japan
Prior art keywords
mirror
light
optical system
mask
arc
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP2003324636A
Other languages
English (en)
Japanese (ja)
Other versions
JP2005093692A5 (enExample
JP2005093692A (ja
Inventor
俊彦 辻
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2003324636A priority Critical patent/JP4378140B2/ja
Priority to EP04001821A priority patent/EP1517338A3/en
Priority to TW93102013A priority patent/TWI247338B/zh
Priority to KR20040074099A priority patent/KR100626264B1/ko
Publication of JP2005093692A publication Critical patent/JP2005093692A/ja
Publication of JP2005093692A5 publication Critical patent/JP2005093692A5/ja
Application granted granted Critical
Publication of JP4378140B2 publication Critical patent/JP4378140B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Images

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70058—Mask illumination systems
    • G03F7/70075—Homogenization of illumination intensity in the mask plane by using an integrator, e.g. fly's eye lens, facet mirror or glass rod, by using a diffusing optical element or by beam deflection
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70058—Mask illumination systems
    • G03F7/70083—Non-homogeneous intensity distribution in the mask plane
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70058—Mask illumination systems
    • G03F7/702—Reflective illumination, i.e. reflective optical elements other than folding mirrors, e.g. extreme ultraviolet [EUV] illumination systems
    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K2201/00—Arrangements for handling radiation or particles
    • G21K2201/06—Arrangements for handling radiation or particles using diffractive, refractive or reflecting elements

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Microscoopes, Condenser (AREA)
  • Optical Elements Other Than Lenses (AREA)
JP2003324636A 2003-09-17 2003-09-17 照明光学系及び露光装置 Expired - Lifetime JP4378140B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2003324636A JP4378140B2 (ja) 2003-09-17 2003-09-17 照明光学系及び露光装置
EP04001821A EP1517338A3 (en) 2003-09-17 2004-01-28 Illumination optical system and exposure apparatus
TW93102013A TWI247338B (en) 2003-09-17 2004-01-29 Illumination optical system and exposure apparatus
KR20040074099A KR100626264B1 (ko) 2003-09-17 2004-09-16 조명광학계 및 노광장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003324636A JP4378140B2 (ja) 2003-09-17 2003-09-17 照明光学系及び露光装置

Publications (3)

Publication Number Publication Date
JP2005093692A JP2005093692A (ja) 2005-04-07
JP2005093692A5 JP2005093692A5 (enExample) 2006-10-19
JP4378140B2 true JP4378140B2 (ja) 2009-12-02

Family

ID=34191310

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003324636A Expired - Lifetime JP4378140B2 (ja) 2003-09-17 2003-09-17 照明光学系及び露光装置

Country Status (4)

Country Link
EP (1) EP1517338A3 (enExample)
JP (1) JP4378140B2 (enExample)
KR (1) KR100626264B1 (enExample)
TW (1) TWI247338B (enExample)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006303370A (ja) * 2005-04-25 2006-11-02 Canon Inc 露光装置及びそれを用いたデバイス製造方法
JP2007242775A (ja) * 2006-03-07 2007-09-20 Canon Inc 露光装置及びデバイス製造方法
JP4986754B2 (ja) * 2007-07-27 2012-07-25 キヤノン株式会社 照明光学系及びそれを有する露光装置
US8081296B2 (en) * 2007-08-09 2011-12-20 Nikon Corporation Illumination optical apparatus, exposure apparatus, and device manufacturing method
DE102010041623A1 (de) 2010-09-29 2012-03-29 Carl Zeiss Smt Gmbh Spiegel
CN113412434B (zh) * 2019-02-14 2025-02-11 索尼半导体解决方案公司 光源单元、光源装置和距离测量装置
CN116699791A (zh) * 2023-08-01 2023-09-05 长春长光智欧科技有限公司 一种主动冷却椭球反射镜及其制造方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4655592A (en) * 1983-12-30 1987-04-07 Hamamatsu Systems, Inc. Particle detection method and apparatus
JPH0776745B2 (ja) * 1989-11-03 1995-08-16 株式会社堀場製作所 顕微分光測定装置
US5737137A (en) * 1996-04-01 1998-04-07 The Regents Of The University Of California Critical illumination condenser for x-ray lithography
JP4238390B2 (ja) * 1998-02-27 2009-03-18 株式会社ニコン 照明装置、該照明装置を備えた露光装置および該露光装置を用いて半導体デバイスを製造する方法
US6186632B1 (en) * 1998-12-31 2001-02-13 The Regents Of The University Of California Condenser for ring-field deep-ultraviolet and extreme-ultraviolet lithography
US7248667B2 (en) * 1999-05-04 2007-07-24 Carl Zeiss Smt Ag Illumination system with a grating element
JP2000349009A (ja) * 1999-06-04 2000-12-15 Nikon Corp 露光方法及び装置

Also Published As

Publication number Publication date
KR100626264B1 (ko) 2006-09-21
TWI247338B (en) 2006-01-11
TW200512804A (en) 2005-04-01
KR20050028793A (ko) 2005-03-23
JP2005093692A (ja) 2005-04-07
EP1517338A3 (en) 2009-05-27
EP1517338A2 (en) 2005-03-23

Similar Documents

Publication Publication Date Title
KR100478683B1 (ko) 조명계, 투영노광장치 및 디바이스의 제조방법
JP3720788B2 (ja) 投影露光装置及びデバイス製造方法
JP3605055B2 (ja) 照明光学系、露光装置及びデバイス製造方法
US7324187B2 (en) Illumination system and exposure apparatus
JP3605053B2 (ja) 照明光学系、露光装置及びデバイス製造方法
JP4241281B2 (ja) 露光装置
JP2005317611A (ja) 露光方法及び装置
KR100917418B1 (ko) 노광장치
KR101089406B1 (ko) 조명광학계, 이것을 사용한 노광장치, 및 디바이스의 제조방법
US20050105290A1 (en) Illumination optical system and exposure apparatus
JP4378140B2 (ja) 照明光学系及び露光装置
JP5220136B2 (ja) 照明光学系、露光装置およびデバイス製造方法
JP2004140390A (ja) 照明光学系、露光装置及びデバイス製造方法
JP2011134887A (ja) 位置調整装置、位置調整方法、露光装置及び露光方法並びにデバイス製造方法

Legal Events

Date Code Title Description
A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20060904

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20060904

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20080801

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20081216

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20090206

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20090901

A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20090914

R150 Certificate of patent or registration of utility model

Free format text: JAPANESE INTERMEDIATE CODE: R150

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20120918

Year of fee payment: 3