JP4377433B2 - スニッファプローブを備えた漏れ検出器 - Google Patents

スニッファプローブを備えた漏れ検出器 Download PDF

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Publication number
JP4377433B2
JP4377433B2 JP2007515790A JP2007515790A JP4377433B2 JP 4377433 B2 JP4377433 B2 JP 4377433B2 JP 2007515790 A JP2007515790 A JP 2007515790A JP 2007515790 A JP2007515790 A JP 2007515790A JP 4377433 B2 JP4377433 B2 JP 4377433B2
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Japan
Prior art keywords
sniffer
tube
leak detector
section
cross
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
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JP2007515790A
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English (en)
Japanese (ja)
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JP2008502885A (ja
JP2008502885A5 (https=
Inventor
ヴェツィッヒ ダニエル
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Inficon GmbH Deutschland
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Inficon GmbH Deutschland
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Publication of JP2008502885A publication Critical patent/JP2008502885A/ja
Publication of JP2008502885A5 publication Critical patent/JP2008502885A5/ja
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
    • G01M3/202—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material using mass spectrometer detection systems
    • G01M3/205—Accessories or associated equipment; Pump constructions

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Examining Or Testing Airtightness (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
JP2007515790A 2004-06-18 2005-03-11 スニッファプローブを備えた漏れ検出器 Expired - Lifetime JP4377433B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102004029637A DE102004029637A1 (de) 2004-06-18 2004-06-18 Lecksuchgerät mit Schnüffelsonde
PCT/EP2005/002614 WO2005124309A1 (de) 2004-06-18 2005-03-11 Lecksuchgerät mit schnüffelsonde

Publications (3)

Publication Number Publication Date
JP2008502885A JP2008502885A (ja) 2008-01-31
JP2008502885A5 JP2008502885A5 (https=) 2008-03-27
JP4377433B2 true JP4377433B2 (ja) 2009-12-02

Family

ID=34962043

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007515790A Expired - Lifetime JP4377433B2 (ja) 2004-06-18 2005-03-11 スニッファプローブを備えた漏れ検出器

Country Status (6)

Country Link
US (1) US20080006080A1 (https=)
EP (1) EP1756540A1 (https=)
JP (1) JP4377433B2 (https=)
CN (1) CN1969176A (https=)
DE (1) DE102004029637A1 (https=)
WO (1) WO2005124309A1 (https=)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE202005011372U1 (de) * 2005-07-20 2006-11-30 Inficon Gmbh Schnüffellecksuchgerät
DE102008011686A1 (de) * 2008-02-28 2009-09-03 Inficon Gmbh Heliumsensor
WO2011132365A1 (ja) * 2010-04-22 2011-10-27 株式会社アルバック 漏洩検知方法及び真空処理装置
DE102013218506A1 (de) * 2013-09-16 2015-03-19 Inficon Gmbh Schnüffellecksucher mit mehrstufiger Membranpumpe
DE102013021313A1 (de) 2013-12-17 2015-06-18 Robert Brockmann Schnüffelsonde mit einer Fremdgasbarriere
DE102016217891A1 (de) * 2016-09-19 2018-03-22 Inficon Gmbh Füllsondenaufsatz mit langgestrecktem gasleitendem Element
CN106500916A (zh) * 2016-12-02 2017-03-15 广州供电局有限公司 Sf6带电检漏仪
FR3069639B1 (fr) * 2017-07-26 2019-08-30 Pfeiffer Vacuum Sonde de reniflage, detecteur de fuites et procede de detection de fuites
EP3567356B1 (en) * 2018-05-07 2021-02-24 Inficon GmbH Sniffing leak detector with switching valve and buffer chamber
CN110071031B (zh) * 2019-05-05 2020-05-05 东北大学 一种蛇形线式质谱仪连续性变压取样装置及方法
CN110672281A (zh) * 2019-09-26 2020-01-10 大族激光科技产业集团股份有限公司 一种气体泄露检测探针及气密性检测装置
FR3106765B1 (fr) * 2020-02-04 2022-12-30 Eveon Buse de pulvérisation de liquide sous forme de brouillard
CN112362720B (zh) * 2020-10-29 2022-12-27 河南中烟工业有限责任公司 箱装烟叶霉变检测方法

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1246278B (de) * 1961-01-12 1967-08-03 Kernforschung Gmbh Ges Fuer Verfahren und Vorrichtung zur Auffindung von Leckstellen in mit Fluessigkeit gefuellten Anlagen und Rohrleitungen
US3999065A (en) * 1974-06-05 1976-12-21 Varian Associates Leak detection system with wire probe
DE2441124B2 (de) 1974-08-28 1979-07-19 Leybold-Heraeus Gmbh, 5000 Koeln Lecksucheinrichtung
DE2826605A1 (de) * 1978-06-19 1980-01-03 Leybold Heraeus Gmbh & Co Kg Schnueffelspitze fuer lecksucheinrichtungen
DE3272437D1 (en) * 1981-05-08 1986-09-11 Bl Tech Ltd Method of, and apparatus for, detecting leaks
US4583394A (en) * 1984-08-07 1986-04-22 Japan Atomic Energy Research Institute Device and method for leak location
JPS63163133A (ja) * 1986-12-24 1988-07-06 Tokin Corp 真空漏れ検査方法
FR2681688B1 (fr) * 1991-09-24 1993-11-19 Alcatel Cit Installation de detection de fuites de gaz utilisant la technique de reniflage.
DE4445829A1 (de) * 1994-12-22 1996-06-27 Leybold Ag Gegenstrom-Schnüffellecksucher
JPH11153507A (ja) * 1997-11-20 1999-06-08 Shimadzu Corp リークデテクタ
JP3698108B2 (ja) * 2002-02-20 2005-09-21 株式会社デンソー 気密漏れ検査方法及び装置

Also Published As

Publication number Publication date
WO2005124309A1 (de) 2005-12-29
US20080006080A1 (en) 2008-01-10
DE102004029637A1 (de) 2006-01-05
EP1756540A1 (de) 2007-02-28
JP2008502885A (ja) 2008-01-31
CN1969176A (zh) 2007-05-23

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