JP4371236B2 - アライメント用光学系及び半導体装置の搭載装置 - Google Patents

アライメント用光学系及び半導体装置の搭載装置 Download PDF

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Publication number
JP4371236B2
JP4371236B2 JP2005197335A JP2005197335A JP4371236B2 JP 4371236 B2 JP4371236 B2 JP 4371236B2 JP 2005197335 A JP2005197335 A JP 2005197335A JP 2005197335 A JP2005197335 A JP 2005197335A JP 4371236 B2 JP4371236 B2 JP 4371236B2
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imaging
semiconductor device
alignment
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marks
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JP2005197335A
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JP2007019147A (ja
JP2007019147A5 (enExample
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淳 斧城
正臣 武田
光義 小泉
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Hitachi High-Tech Corp
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Hitachi High Technologies Corp
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JP2005197335A 2005-07-06 2005-07-06 アライメント用光学系及び半導体装置の搭載装置 Expired - Fee Related JP4371236B2 (ja)

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JP2005197335A JP4371236B2 (ja) 2005-07-06 2005-07-06 アライメント用光学系及び半導体装置の搭載装置

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Application Number Priority Date Filing Date Title
JP2005197335A JP4371236B2 (ja) 2005-07-06 2005-07-06 アライメント用光学系及び半導体装置の搭載装置

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JP2007019147A JP2007019147A (ja) 2007-01-25
JP2007019147A5 JP2007019147A5 (enExample) 2009-04-09
JP4371236B2 true JP4371236B2 (ja) 2009-11-25

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JP2005197335A Expired - Fee Related JP4371236B2 (ja) 2005-07-06 2005-07-06 アライメント用光学系及び半導体装置の搭載装置

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Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012054357A (ja) * 2010-08-31 2012-03-15 Panasonic Corp 部品実装装置、および、部品実装方法
KR101774019B1 (ko) * 2010-12-02 2017-09-01 엘지전자 주식회사 영상굴절렌즈를 구비하는 본딩장치
KR102800849B1 (ko) * 2020-11-05 2025-04-29 삼성디스플레이 주식회사 표시 장치용 패널 정렬 장치 및 패널 정렬 방법

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