JP4370990B2 - 圧電発振器及びその製造方法 - Google Patents

圧電発振器及びその製造方法 Download PDF

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Publication number
JP4370990B2
JP4370990B2 JP2004205118A JP2004205118A JP4370990B2 JP 4370990 B2 JP4370990 B2 JP 4370990B2 JP 2004205118 A JP2004205118 A JP 2004205118A JP 2004205118 A JP2004205118 A JP 2004205118A JP 4370990 B2 JP4370990 B2 JP 4370990B2
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JP
Japan
Prior art keywords
chip
piezoelectric
vibration element
silicon wafer
piezoelectric oscillator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2004205118A
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English (en)
Japanese (ja)
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JP2006033093A (ja
JP2006033093A5 (https=
Inventor
大輔 大石
誠 駒井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Miyazaki Epson Corp
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Epson Toyocom Corp
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Publication date
Application filed by Epson Toyocom Corp filed Critical Epson Toyocom Corp
Priority to JP2004205118A priority Critical patent/JP4370990B2/ja
Priority to US11/329,237 priority patent/US20060197619A1/en
Publication of JP2006033093A publication Critical patent/JP2006033093A/ja
Publication of JP2006033093A5 publication Critical patent/JP2006033093A5/ja
Application granted granted Critical
Publication of JP4370990B2 publication Critical patent/JP4370990B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03B—GENERATION OF OSCILLATIONS, DIRECTLY OR BY FREQUENCY-CHANGING, BY CIRCUITS EMPLOYING ACTIVE ELEMENTS WHICH OPERATE IN A NON-SWITCHING MANNER; GENERATION OF NOISE BY SUCH CIRCUITS
    • H03B5/00—Generation of oscillations using amplifier with regenerative feedback from output to input
    • H03B5/30—Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element being electromechanical resonator
    • H03B5/32—Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element being electromechanical resonator being a piezoelectric resonator

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  • Oscillators With Electromechanical Resonators (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
JP2004205118A 2004-07-12 2004-07-12 圧電発振器及びその製造方法 Expired - Fee Related JP4370990B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2004205118A JP4370990B2 (ja) 2004-07-12 2004-07-12 圧電発振器及びその製造方法
US11/329,237 US20060197619A1 (en) 2004-07-12 2006-01-11 Piezoelectric oscillator and manufacturing method thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004205118A JP4370990B2 (ja) 2004-07-12 2004-07-12 圧電発振器及びその製造方法

Publications (3)

Publication Number Publication Date
JP2006033093A JP2006033093A (ja) 2006-02-02
JP2006033093A5 JP2006033093A5 (https=) 2006-04-27
JP4370990B2 true JP4370990B2 (ja) 2009-11-25

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ID=35898961

Family Applications (1)

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JP2004205118A Expired - Fee Related JP4370990B2 (ja) 2004-07-12 2004-07-12 圧電発振器及びその製造方法

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US (1) US20060197619A1 (https=)
JP (1) JP4370990B2 (https=)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7994877B1 (en) 2008-11-10 2011-08-09 Hrl Laboratories, Llc MEMS-based quartz hybrid filters and a method of making the same
US8766745B1 (en) 2007-07-25 2014-07-01 Hrl Laboratories, Llc Quartz-based disk resonator gyro with ultra-thin conductive outer electrodes and method of making same
US7830074B2 (en) * 2006-08-08 2010-11-09 Hrl Laboratories, Llc Integrated quartz oscillator on an active electronic substrate
JP2006245098A (ja) * 2005-03-01 2006-09-14 Seiko Epson Corp 電子部品及びその製造方法、並びに電子機器
US10266398B1 (en) 2007-07-25 2019-04-23 Hrl Laboratories, Llc ALD metal coatings for high Q MEMS structures
US8151640B1 (en) 2008-02-05 2012-04-10 Hrl Laboratories, Llc MEMS on-chip inertial navigation system with error correction
US7802356B1 (en) 2008-02-21 2010-09-28 Hrl Laboratories, Llc Method of fabricating an ultra thin quartz resonator component
JP5381304B2 (ja) * 2009-05-08 2014-01-08 株式会社Ｓｕｍｃｏ シリコンエピタキシャルウェーハの製造方法
US8176607B1 (en) 2009-10-08 2012-05-15 Hrl Laboratories, Llc Method of fabricating quartz resonators
US20110215465A1 (en) * 2010-03-03 2011-09-08 Xilinx, Inc. Multi-chip integrated circuit
US8912711B1 (en) 2010-06-22 2014-12-16 Hrl Laboratories, Llc Thermal stress resistant resonator, and a method for fabricating same
JP5626450B2 (ja) * 2011-03-18 2014-11-19 富士通株式会社 電子部品の製造方法及びチップ集合体
US9599470B1 (en) 2013-09-11 2017-03-21 Hrl Laboratories, Llc Dielectric high Q MEMS shell gyroscope structure
US9977097B1 (en) 2014-02-21 2018-05-22 Hrl Laboratories, Llc Micro-scale piezoelectric resonating magnetometer
US9991863B1 (en) 2014-04-08 2018-06-05 Hrl Laboratories, Llc Rounded and curved integrated tethers for quartz resonators
US10308505B1 (en) 2014-08-11 2019-06-04 Hrl Laboratories, Llc Method and apparatus for the monolithic encapsulation of a micro-scale inertial navigation sensor suite
US10031191B1 (en) 2015-01-16 2018-07-24 Hrl Laboratories, Llc Piezoelectric magnetometer capable of sensing a magnetic field in multiple vectors
US10175307B1 (en) 2016-01-15 2019-01-08 Hrl Laboratories, Llc FM demodulation system for quartz MEMS magnetometer

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5214261A (en) * 1990-09-10 1993-05-25 Rockwell International Corporation Method and apparatus for dicing semiconductor substrates using an excimer laser beam
US6245677B1 (en) * 1999-07-28 2001-06-12 Noor Haq Backside chemical etching and polishing
US6304151B1 (en) * 1999-12-07 2001-10-16 Nihon Dempa Kogyo Co., Ltd. Crystal oscillator and method of fabricating the same

Also Published As

Publication number Publication date
JP2006033093A (ja) 2006-02-02
US20060197619A1 (en) 2006-09-07

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