JP4353962B2 - 試料解析方法及び試料作製方法 - Google Patents

試料解析方法及び試料作製方法 Download PDF

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Publication number
JP4353962B2
JP4353962B2 JP2006159234A JP2006159234A JP4353962B2 JP 4353962 B2 JP4353962 B2 JP 4353962B2 JP 2006159234 A JP2006159234 A JP 2006159234A JP 2006159234 A JP2006159234 A JP 2006159234A JP 4353962 B2 JP4353962 B2 JP 4353962B2
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sample
piece
ion beam
focused ion
preparation
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JP2006159234A
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Japanese (ja)
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JP2006294632A5 (enExample
JP2006294632A (ja
Inventor
馨 梅村
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Hitachi Ltd
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Hitachi Ltd
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/30—Electron or ion beam tubes for processing objects
    • H01J2237/317—Processing objects on a microscale
    • H01J2237/3174—Etching microareas
    • H01J2237/31745—Etching microareas for preparing specimen to be viewed in microscopes or analyzed in microanalysers

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  • Sampling And Sample Adjustment (AREA)
JP2006159234A 2006-06-08 2006-06-08 試料解析方法及び試料作製方法 Expired - Lifetime JP4353962B2 (ja)

Priority Applications (1)

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JP2006159234A JP4353962B2 (ja) 2006-06-08 2006-06-08 試料解析方法及び試料作製方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006159234A JP4353962B2 (ja) 2006-06-08 2006-06-08 試料解析方法及び試料作製方法

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2004167933A Division JP4096916B2 (ja) 2004-06-07 2004-06-07 試料解析方法および装置

Related Child Applications (5)

Application Number Title Priority Date Filing Date
JP2008058632A Division JP4185961B2 (ja) 2008-03-07 2008-03-07 集束イオンビーム装置
JP2008058689A Division JP4185962B2 (ja) 2008-03-07 2008-03-07 試料作製装置
JP2008129457A Division JP4185963B2 (ja) 2008-05-16 2008-05-16 試料解析方法、及び試料作製方法
JP2008208441A Division JP4354002B2 (ja) 2008-08-13 2008-08-13 試料作製装置及び集束イオンビーム装置
JP2008208445A Division JP4589993B2 (ja) 2008-08-13 2008-08-13 集束イオンビーム装置

Publications (3)

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JP2006294632A JP2006294632A (ja) 2006-10-26
JP2006294632A5 JP2006294632A5 (enExample) 2009-02-19
JP4353962B2 true JP4353962B2 (ja) 2009-10-28

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JP2006159234A Expired - Lifetime JP4353962B2 (ja) 2006-06-08 2006-06-08 試料解析方法及び試料作製方法

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103983490A (zh) * 2014-05-26 2014-08-13 中国科学院武汉岩土力学研究所 一种反映原岩应力状态的错动带试样制备方法
CN106910665A (zh) * 2017-03-01 2017-06-30 聚束科技（北京）有限公司 一种全自动化的扫描电子显微镜及其探测方法

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103822933A (zh) * 2012-11-16 2014-05-28 哈尔滨飞机工业集团有限责任公司 碳纤维复丝纤维根数测定方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103983490A (zh) * 2014-05-26 2014-08-13 中国科学院武汉岩土力学研究所 一种反映原岩应力状态的错动带试样制备方法
CN106910665A (zh) * 2017-03-01 2017-06-30 聚束科技（北京）有限公司 一种全自动化的扫描电子显微镜及其探测方法
CN106910665B (zh) * 2017-03-01 2019-07-12 聚束科技（北京）有限公司 一种全自动化的扫描电子显微镜及其探测方法

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JP2006294632A (ja) 2006-10-26

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