JP4346629B2 - シリコン結晶中の窒素濃度測定方法、シリコン結晶内窒素濃度算出用の換算係数の決定方法、シリコンウエハの製造方法、及び半導体装置の製造方法 - Google Patents

シリコン結晶中の窒素濃度測定方法、シリコン結晶内窒素濃度算出用の換算係数の決定方法、シリコンウエハの製造方法、及び半導体装置の製造方法 Download PDF

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JP4346629B2
JP4346629B2 JP2006173071A JP2006173071A JP4346629B2 JP 4346629 B2 JP4346629 B2 JP 4346629B2 JP 2006173071 A JP2006173071 A JP 2006173071A JP 2006173071 A JP2006173071 A JP 2006173071A JP 4346629 B2 JP4346629 B2 JP 4346629B2
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克人 棚橋
寛 金田
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Fujitsu Ltd
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JP2006173071A 2001-08-29 2006-06-22 シリコン結晶中の窒素濃度測定方法、シリコン結晶内窒素濃度算出用の換算係数の決定方法、シリコンウエハの製造方法、及び半導体装置の製造方法 Expired - Fee Related JP4346629B2 (ja)

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JP2006173071A JP4346629B2 (ja) 2001-08-29 2006-06-22 シリコン結晶中の窒素濃度測定方法、シリコン結晶内窒素濃度算出用の換算係数の決定方法、シリコンウエハの製造方法、及び半導体装置の製造方法

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JP2006173071A JP4346629B2 (ja) 2001-08-29 2006-06-22 シリコン結晶中の窒素濃度測定方法、シリコン結晶内窒素濃度算出用の換算係数の決定方法、シリコンウエハの製造方法、及び半導体装置の製造方法

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JP2006270127A5 JP2006270127A5 (https=) 2006-11-16
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US12584869B2 (en) * 2021-02-26 2026-03-24 Honeywell Limited Boehmite detection and warning system, and concentration indicator for LiB separator sheet manufacturing
CN113884462A (zh) * 2021-09-28 2022-01-04 西安奕斯伟材料科技有限公司 一种氮掺杂单晶硅中氮元素的测量方法及系统

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