JP4334327B2 - 対象物の大きさおよび位置を測定するためのホログラフィ光学素子およびその使用方法ならびに当該ホログラフィ光学素子を有する装置 - Google Patents

対象物の大きさおよび位置を測定するためのホログラフィ光学素子およびその使用方法ならびに当該ホログラフィ光学素子を有する装置 Download PDF

Info

Publication number
JP4334327B2
JP4334327B2 JP2003406381A JP2003406381A JP4334327B2 JP 4334327 B2 JP4334327 B2 JP 4334327B2 JP 2003406381 A JP2003406381 A JP 2003406381A JP 2003406381 A JP2003406381 A JP 2003406381A JP 4334327 B2 JP4334327 B2 JP 4334327B2
Authority
JP
Japan
Prior art keywords
optical element
holographic optical
hoe
interference fringes
wavefront
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2003406381A
Other languages
English (en)
Japanese (ja)
Other versions
JP2004191977A5 (US07576130-20090818-C00114.png
JP2004191977A (ja
Inventor
シュトゥーダー ウルス−ペーター
ケーザー ベダ
Original Assignee
ツムバッハ エレクトロニク アクチェンゲゼルシャフト
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from EP02027560A external-priority patent/EP1429111A1/de
Application filed by ツムバッハ エレクトロニク アクチェンゲゼルシャフト filed Critical ツムバッハ エレクトロニク アクチェンゲゼルシャフト
Publication of JP2004191977A publication Critical patent/JP2004191977A/ja
Publication of JP2004191977A5 publication Critical patent/JP2004191977A5/ja
Application granted granted Critical
Publication of JP4334327B2 publication Critical patent/JP4334327B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/08Measuring arrangements characterised by the use of optical techniques for measuring diameters
    • G01B11/10Measuring arrangements characterised by the use of optical techniques for measuring diameters of objects while moving
    • G01B11/105Measuring arrangements characterised by the use of optical techniques for measuring diameters of objects while moving using photoelectric detection means
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/24Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/2433Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures for measuring outlines by shadow casting
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/32Holograms used as optical elements

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Diffracting Gratings Or Hologram Optical Elements (AREA)
JP2003406381A 2002-12-09 2003-12-04 対象物の大きさおよび位置を測定するためのホログラフィ光学素子およびその使用方法ならびに当該ホログラフィ光学素子を有する装置 Expired - Fee Related JP4334327B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP02027560A EP1429111A1 (de) 2002-12-09 2002-12-09 Holographisches optisches Element mit mehreren Interferenzmustern
EP03026493.1A EP1429112B1 (de) 2002-12-09 2003-11-21 Holographisches optisches Element mit mehreren Interferenzmustern

Publications (3)

Publication Number Publication Date
JP2004191977A JP2004191977A (ja) 2004-07-08
JP2004191977A5 JP2004191977A5 (US07576130-20090818-C00114.png) 2006-12-28
JP4334327B2 true JP4334327B2 (ja) 2009-09-30

Family

ID=32327846

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003406381A Expired - Fee Related JP4334327B2 (ja) 2002-12-09 2003-12-04 対象物の大きさおよび位置を測定するためのホログラフィ光学素子およびその使用方法ならびに当該ホログラフィ光学素子を有する装置

Country Status (3)

Country Link
EP (1) EP1429112B1 (US07576130-20090818-C00114.png)
JP (1) JP4334327B2 (US07576130-20090818-C00114.png)
CA (1) CA2452600C (US07576130-20090818-C00114.png)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100616744B1 (ko) 2005-02-25 2006-08-28 (주)모비솔 홀로그래픽 광학 소자를 이용한 포인팅 장치
DE102019206374A1 (de) 2019-05-03 2020-11-05 Audi Ag Erfassungsvorrichtung mit zumindest einer Sensoreinrichtung, einer Auswerteeinrichtung, einer Lichtquelle sowie einem Trägermedium

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5018803A (en) * 1985-02-04 1991-05-28 Robotic Vision Systems, Inc. Three-dimensional volumetric sensor
CH674774A5 (US07576130-20090818-C00114.png) * 1986-04-03 1990-07-13 Zumbach Electronic Ag
CH683370A5 (de) * 1992-04-10 1994-02-28 Zumbach Electronic Ag Verfahren und Vorrichtung zur Messung der Abmessung eines Objekts.
DE19647613C2 (de) * 1996-11-18 1998-11-12 Laser Applikationan Gmbh Verfahren und Vorrichtung zur Messung der Dicke von unrunden länglichen und in Richtung ihrer Längsachse vorgeschobenen Werkstücken mit beliebiger und sich ändernder Winkellage

Also Published As

Publication number Publication date
CA2452600A1 (en) 2004-06-09
EP1429112B1 (de) 2018-03-21
EP1429112A1 (de) 2004-06-16
JP2004191977A (ja) 2004-07-08
CA2452600C (en) 2012-05-15

Similar Documents

Publication Publication Date Title
US7433052B2 (en) Systems and methods for tilt and range measurement
JP2014522981A (ja) 空間光変調器を用いて物体の三次元座標を求める装置および方法
US20170371251A1 (en) Projection exposure tool for microlithography and method for microlithographic imaging
JPH0151801B2 (US07576130-20090818-C00114.png)
JP2005333141A (ja) ダイナミックピューピルフィルシアリング干渉計
US7602502B2 (en) Methods of testing and manufacturing optical elements
TWI551952B (zh) Euv微影系統
JP4286002B2 (ja) 干渉計におけるコヒーレントアーティファクトの低減
CN108474642B (zh) 使用倾斜物光波和具有菲索干涉仪物镜的干涉仪
US7675631B2 (en) Holographic optical element
JPH0422442B2 (US07576130-20090818-C00114.png)
KR890003295B1 (ko) 홀로그램 구성 및 재구성 방법
JP2019521352A (ja) 光学面の形状を干渉法により求める測定装置
KR101879898B1 (ko) 광학 장치
JP4334327B2 (ja) 対象物の大きさおよび位置を測定するためのホログラフィ光学素子およびその使用方法ならびに当該ホログラフィ光学素子を有する装置
JPH04212120A (ja) 線に沿って面を光学的に走査する走査装置
JP3238453B2 (ja) ダハ面の測定方法
JPH1031154A (ja) 物体の反射率の測定用光学システム
JPH01242033A (ja) 計測内視鏡装置
JP2004525381A (ja) 干渉計におけるコヒーレントアーティファクトの低減
JP2000097657A (ja) 干渉計
JPH08124830A (ja) 投影露光装置
JPH06310404A (ja) 投影露光装置
JPS63298107A (ja) 斜入射干渉計装置
JPH04204032A (ja) レンズ光学性能測定装置

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20061113

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20061113

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20081226

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20090109

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20090406

A602 Written permission of extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A602

Effective date: 20090409

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20090511

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20090604

A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20090623

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20120703

Year of fee payment: 3

R150 Certificate of patent or registration of utility model

Ref document number: 4334327

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

Free format text: JAPANESE INTERMEDIATE CODE: R150

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20120703

Year of fee payment: 3

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20130703

Year of fee payment: 4

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

LAPS Cancellation because of no payment of annual fees