JP4329146B2 - 位置検出装置及び方法、並びに露光装置 - Google Patents

位置検出装置及び方法、並びに露光装置 Download PDF

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Publication number
JP4329146B2
JP4329146B2 JP02770199A JP2770199A JP4329146B2 JP 4329146 B2 JP4329146 B2 JP 4329146B2 JP 02770199 A JP02770199 A JP 02770199A JP 2770199 A JP2770199 A JP 2770199A JP 4329146 B2 JP4329146 B2 JP 4329146B2
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position detection
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wafer
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Japanese (ja)
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JP2000228345A5 (OSRAM
JP2000228345A (ja
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綾子 中村
英夫 水谷
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Nikon Corp
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Nikon Corp
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  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP02770199A 1999-02-04 1999-02-04 位置検出装置及び方法、並びに露光装置 Expired - Fee Related JP4329146B2 (ja)

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JP02770199A JP4329146B2 (ja) 1999-02-04 1999-02-04 位置検出装置及び方法、並びに露光装置

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Application Number Priority Date Filing Date Title
JP02770199A JP4329146B2 (ja) 1999-02-04 1999-02-04 位置検出装置及び方法、並びに露光装置

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JP2000228345A JP2000228345A (ja) 2000-08-15
JP2000228345A5 JP2000228345A5 (OSRAM) 2008-02-28
JP4329146B2 true JP4329146B2 (ja) 2009-09-09

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JP02770199A Expired - Fee Related JP4329146B2 (ja) 1999-02-04 1999-02-04 位置検出装置及び方法、並びに露光装置

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10350219B2 (en) 2013-05-02 2019-07-16 Medical Technology Research Inc Antimicrobial compositions and methods of making the same

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW200303978A (en) * 2002-03-05 2003-09-16 Nikon Corp Position detection device, exposure device and exposure method
JP5084239B2 (ja) * 2006-12-06 2012-11-28 キヤノン株式会社 計測装置、露光装置並びにデバイス製造方法
JP7161322B2 (ja) * 2018-06-26 2022-10-26 キヤノン株式会社 検出方法、リソグラフィー方法、物品製造方法、光学装置および露光装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10350219B2 (en) 2013-05-02 2019-07-16 Medical Technology Research Inc Antimicrobial compositions and methods of making the same

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Publication number Publication date
JP2000228345A (ja) 2000-08-15

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