JP4325004B2 - Drip-proof device in the firing furnace - Google Patents

Drip-proof device in the firing furnace Download PDF

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Publication number
JP4325004B2
JP4325004B2 JP00137199A JP137199A JP4325004B2 JP 4325004 B2 JP4325004 B2 JP 4325004B2 JP 00137199 A JP00137199 A JP 00137199A JP 137199 A JP137199 A JP 137199A JP 4325004 B2 JP4325004 B2 JP 4325004B2
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JP
Japan
Prior art keywords
drip
furnace
proof plate
firing furnace
heater
Prior art date
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JP00137199A
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Japanese (ja)
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JP2000203946A (en
Inventor
昭彦 内藤
勝也 川上
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Murata Manufacturing Co Ltd
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Murata Manufacturing Co Ltd
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Priority to JP00137199A priority Critical patent/JP4325004B2/en
Publication of JP2000203946A publication Critical patent/JP2000203946A/en
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Publication of JP4325004B2 publication Critical patent/JP4325004B2/en
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Description

【0001】
【発明の属する技術分野】
本発明は、未焼成セラミックをヒータにより加熱して焼成する焼成炉に関するものである。
【0002】
【従来の技術】
従来より、例えば低温焼成セラミック基板等を焼成する焼成炉は、図3に示すように、未焼成セラミック基板1を焼成支持体7に乗せた状態でコンベア2によって焼成炉内に搬送し、この焼成炉の入口3をエアカーテン4で外気と遮断した状態で、焼成炉のヒータ5で未焼成セラミック基板1を加熱して焼成するようにしている。この際、未焼成セラミック基板1に含まれたバインダーの分解・除去(脱バインダー)を促進するために、エア配管6から焼成炉内に外気を送り込むと共に、バインダーの分解ガスを排気管(図示せず)等から外部へ排出するようにしている。
【0003】
【発明が解決しようとする課題】
ところで、上記構成の焼成炉では、エア配管6から焼成炉内への空気の吹出しにより焼成炉の内圧が外気圧よりも少し高いため、焼成炉内の空気が少しずつ入口3のエアカーテン4から外部へ漏れ、それに伴って、バインダーの分解ガスの一部がヒータ5側から入口3側に逆流していく。焼成炉内のヒータ5よりも入口3側(ヒータ5の上流側)の領域では、焼成炉内のエア配管6や炉内壁の温度がヒータ5周辺の雰囲気温度と比べて低いため、ヒータ5の上流側に逆流したバインダー分解ガスは、焼成炉内のエア配管6や炉内壁等に触れて冷やされて液化(凝縮)し、それらの表面に付着していく。このため、焼成炉内のエア配管6や炉内壁天井等から分解ガス液化分が滴となって搬送中の未焼成セラミック基板1の表面に落下することがあり、これが原因で、焼成品の表面にクラック、汚れ等の不良が発生することがある。
【0004】
本発明はこのような事情を考慮してなされたものであり、従ってその目的は、焼成炉内でバインダー分解ガスの液化分が未焼成セラミック表面に落下することを防止でき、焼成品の歩留まりを向上することができる焼成炉を提供することにある。
【0005】
【課題を解決するための手段】
バインダー分解ガスの液化現象は、焼成炉の入口付近からヒータ付近までの雰囲気温度の比較的低い領域で発生することを考慮して、本発明の請求項1では、焼成炉の入口付近からヒータ付近までの領域に、未焼成セラミック及び焼成支持体を搬送するコンベアの上方を覆う防滴板を設けるとともに、防滴板と焼成炉の炉内壁天井との間に空間を存在させるようにしたものである。このようにすれば、焼成炉の入口からヒータまでの雰囲気温度の比較的低い領域で、エア配管や炉内壁天井等から分解ガス液化分が滴となって落下しても、その分解ガス液化分は、防滴板の上面で受けられ、搬送中の未焼成セラミック表面に落下することが防止される。
【0006】
この場合、請求項2のように、防滴板を、中央部が高く、コンベアの両側に向かって低くなるように形成すると良い。このようにすれば、バインダー分解ガスが防滴板の下面で液化したとしても、その分解ガス液化分が防滴板の下面の傾斜に沿って側方に流れるようになる。その結果、防滴板の下面から分解ガス液化分が落下する場合には、防滴板の下面中央部付近からは落下せず、防滴板の側縁部から落下するようになり、防滴板の下面から未焼成セラミック表面への分解ガス液化分の落下が防止される。
【0007】
更に、請求項3のように、防滴板を、焼成炉の内側壁に設けられた装着部に、入口側から着脱自在に装着するようにすると良い。このようにすれば、防滴板を容易に脱着することが可能となり、防滴板の清掃作業が容易となる。
【0008】
【発明の実施の形態】
以下、本発明を低温焼成セラミック基板の焼成炉に適用した一実施形態を図1及び図2に基づいて説明する。低温焼成セラミックのグリーンシートにより形成された未焼成セラミック基板11は、耐熱性の焼成支持体19に乗せられてコンベア12によって焼成炉の炉芯20内を搬送される。この未焼成セラミック基板11を形成するグリーンシートは、低温焼成セラミック粉末にバインダー(樹脂)、溶剤等を混合したスラリーをテープ成形して作られる。
【0009】
炉芯20の入口13は、エアカーテン14によって外気と遮断されている。炉芯20の外周部には、炉芯20内の搬送方向の温度分布を所定の温度分布(ピーク温度800〜1000℃)に温度調節するための複数のヒータ15が設置されている。また、炉芯20内に外気を送り込むための複数のエア配管16が、エアカーテン14とヒータ15との間から炉芯20内に引き込まれ、炉芯20の天井面に沿って搬送方向に配管されている。
【0010】
更に、入口13のエアカーテン14付近から最初のヒータ15付近までの間には、例えばステンレス、炉心材等により形成された防滴板17がコンベア12の上方を覆うように設置されている。この防滴板17は、図2に示すように、中央部が高く、コンベア12の両側に向かって低くなるように湾曲面状に形成されている。この防滴板17は、炉芯20の内側壁に固定されたフック状の装着部18に入口13側から搬送方向に着脱自在に嵌合装着されている。
【0011】
以上のように構成した焼成炉では、入口13をエアカーテン14で外気と遮断した状態で、エア配管16から炉芯20内に外気を送り込み、炉芯20の外周部に搬送方向に沿って配置した複数のヒータ15によって炉芯20内の搬送方向の温度分布を所定の温度分布(ピーク温度800〜1000℃)に温度調節する。この状態で、コンベア12により炉芯20内を搬送される未焼成セラミック基板11は、その搬送過程で、バインダーが分解・除去(脱バインダー)された後、800〜1000℃で焼結される。
【0012】
この際、炉芯20内で、脱バインダーにより生じた分解ガスは排気管(図示せず)から外部へ排出されるが、一部の分解ガスが炉芯20内を入口13側(ヒータ15の上流側)に逆流する。炉芯20内でも、入口13から最初のヒータ15までの領域は、雰囲気温度が比較的低いため、ヒータ15の上流側に逆流した分解ガスは、炉芯20内のエア配管16や炉内壁に触れて冷やされて液化し、それらの表面に付着していく。このため、炉芯20内のエア配管16や炉芯20の天井等から分解ガス液化分が滴となって落下することがあるが、本実施形態では、エアカーテン14から最初のヒータ15付近までの領域に、防滴板17がコンベア12の上方を覆うように設置されているため、炉芯20内でエア配管16や天井等から落下する分解ガス液化分は、防滴板17の上面で受けられ、防滴板17の傾斜に沿って側方へ流れ、炉芯20の内側壁を伝って下方に流れる。
【0013】
また、バインダーの分解ガスが防滴板17の下面で液化した場合でも、その分解ガス液化分は防滴板17の下面の傾斜に沿って側方へ流れ、炉芯20の内側壁を伝って下方に流れる。これによって、分解ガス液化分が搬送中の未焼成セラミック基板11表面に落下することを防止でき、焼成品の歩留まりを向上することができる。また、防滴板17の設置位置は、入口13から最初のヒータ15までの雰囲気温度が低い領域のみであるため、炉芯20内の空気の流れや温度分布にも、ほとんど影響を与えることがなく、脱バインダー性、焼結性を損なうことがない。
【0014】
また、本実施形態では、防滴板17を、炉芯20の内側壁の装着部18に入口13側から着脱自在に装着するようにしたので、防滴板17の清掃時に、防滴板17を簡単に炉芯20の入口13から脱着することができ、防滴板17の清掃時の作業性を向上できる。しかしながら、防滴板17は、これ以外の方法で取り付けても良く、例えば炉芯20の天井面から吊り下げるようにしたり、炉芯20の内側壁に金具等で固定するようにしても良い。また、防滴板17の両側縁部の下方に樋を設置して、防滴板17の両側縁部から流れ落ちる分解ガス液化分を樋で受けて外部に排出するようにしても良い。
【0015】
尚、本実施形態では、防滴板17を凸状に湾曲させたが、防滴板17を逆V字形に折曲しても良く、要は、防滴板17の中央部が高く、コンベア12の両側に向かって低くなるように形成すれば、防滴板17の上下両面の分解ガス液化分を側方に流すことができる。しかしながら、防滴板17の形状は、分解ガス液化分を未焼成セラミック基板11表面に落とさないような形状であれば、適宜変更しても良い。
【0016】
また、本実施形態では、防滴板17を支持する装着部18を複数箇所に分割して配置したが、これを防滴板17の全長にわたって延びる1本のレール状に形成しても良く、また、この装着部を防滴板17の全長にわたって延びる樋状に形成して、この樋状の装着部に防滴板17から流れ落ちる分解ガス液化分を受けて外部に排出するように構成しても良い。
その他、本発明は、低温焼成セラミックの焼成炉に限定されず、アルミナ等の他のセラミックの焼成炉に適用することができる。
【0017】
【発明の効果】
以上の説明から明らかなように、本発明の請求項1によれば、焼成炉の入口付近からヒータ付近までの領域に、コンベアの上方を覆う防滴板を設けるとともに、防滴板と焼成炉の炉内壁天井との間に空間を存在させるようにしたので、焼成炉内のエア配管や炉内壁天井等から落下する分解ガス液化分を防滴板の上面で受けることができて、未焼成セラミック表面への分解ガス液化分の落下を防止でき、焼成品の歩留まりを向上することができる。
【0018】
また、請求項2では、防滴板を、中央部が高く、コンベアの両側に向かって低くなるように形成したので、防滴板の下面に付着した分解ガス液化分が防滴板の下面の傾斜に沿って側方に流れるようになり、防滴板の下面から未焼成セラミック表面への分解ガス液化分の落下も防止できる。
【0019】
更に、請求項3では、防滴板を入口側から着脱自在に装着できるようにしたので、防滴板の清掃作業性を向上できる。
【図面の簡単な説明】
【図1】本発明の一実施形態の焼成炉の縦断側面図
【図2】焼成炉の縦断正面図
【図3】従来の焼成炉の縦断側面図
【符号の説明】
11…未焼成セラミック基板、13…入口、14…エアカーテン、15…ヒータ、16…エア配管、17…防滴板、18…装着部、19…焼成支持体、20…炉芯。
[0001]
BACKGROUND OF THE INVENTION
The present invention is a green ceramic relates baked Naruro baking by heating by a heater.
[0002]
[Prior art]
Conventionally, a firing furnace for firing, for example, a low-temperature fired ceramic substrate is conveyed into the firing furnace by a conveyor 2 with the unfired ceramic substrate 1 placed on a firing support 7 as shown in FIG. The unfired ceramic substrate 1 is heated and fired by the heater 5 of the firing furnace while the furnace entrance 3 is shut off from the outside air by the air curtain 4. At this time, in order to promote decomposition / removal (debinding) of the binder contained in the unfired ceramic substrate 1, outside air is sent into the firing furnace from the air pipe 6 and the binder decomposition gas is exhausted from the exhaust pipe (not shown). Etc.) to the outside.
[0003]
[Problems to be solved by the invention]
By the way, in the baking furnace of the said structure, since the internal pressure of a baking furnace is a little higher than external pressure by the blowing of the air from the air piping 6 in a baking furnace, the air in a baking furnace is little from the air curtain 4 of the inlet 3 little by little. As a result of leakage to the outside, part of the binder decomposition gas flows back from the heater 5 side to the inlet 3 side. In the region on the inlet 3 side (upstream side of the heater 5) from the heater 5 in the firing furnace, the temperature of the air pipe 6 and the furnace inner wall in the firing furnace is lower than the ambient temperature around the heater 5. The binder decomposition gas that has flowed back to the upstream side is cooled and liquefied (condensed) by touching the air piping 6 in the firing furnace, the inner wall of the furnace, and the like, and adheres to these surfaces. For this reason, the decomposed gas liquefied component may drop from the air piping 6 in the firing furnace or the ceiling of the furnace inner wall and drop onto the surface of the unfired ceramic substrate 1 being transported. Defects such as cracks and dirt may occur.
[0004]
The present invention has been made in view of such circumstances. Therefore, the object of the present invention is to prevent the liquefied portion of the binder decomposition gas from falling on the unfired ceramic surface in the firing furnace, and to improve the yield of fired products. The object is to provide a firing furnace that can be improved.
[0005]
[Means for Solving the Problems]
In consideration of the fact that the liquefaction phenomenon of the binder decomposition gas occurs in a region where the atmospheric temperature is relatively low from the vicinity of the entrance of the firing furnace to the vicinity of the heater, in claim 1 of the present invention, from the vicinity of the entrance of the firing furnace to the vicinity of the heater. in the region of up to, those so as to present a space between the green ceramic and fired support Rutotomoni provided drip plate covering the upper side of the conveyor for conveying a drip-proof plate and the furnace inner wall ceiling calciner It is. In this way, even if the cracked gas liquefaction drops as drops from the air piping, the furnace inner wall ceiling, etc. in the region where the ambient temperature from the furnace inlet to the heater is relatively low, the cracked gas liquefaction Is received on the top surface of the drip-proof plate and is prevented from falling on the surface of the unfired ceramic being conveyed.
[0006]
In this case, as in the second aspect, the drip-proof plate is preferably formed so that the central portion is high and becomes low toward both sides of the conveyor. In this way, even if the binder decomposition gas is liquefied on the lower surface of the drip-proof plate, the decomposed gas liquefaction component flows laterally along the inclination of the lower surface of the drip-proof plate. As a result, when the decomposed gas liquefied component falls from the bottom surface of the drip-proof plate, it does not fall from the vicinity of the center of the bottom surface of the drip-proof plate, but falls from the side edge of the drip-proof plate, Falling of the decomposed gas liquefaction from the lower surface of the plate to the unfired ceramic surface is prevented.
[0007]
Further, as in claim 3, it is preferable that the drip-proof plate is detachably mounted on the mounting portion provided on the inner wall of the firing furnace from the inlet side. In this way, the drip-proof plate can be easily detached and the drip-proof plate can be easily cleaned.
[0008]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, an embodiment in which the present invention is applied to a low-temperature fired ceramic substrate firing furnace will be described with reference to FIGS. 1 and 2. An unfired ceramic substrate 11 formed of a low-temperature fired ceramic green sheet is placed on a heat-resistant fired support 19 and conveyed by the conveyor 12 through the core 20 of the firing furnace. The green sheet forming the green ceramic substrate 11 is made by tape-molding a slurry in which a low-temperature fired ceramic powder is mixed with a binder (resin), a solvent, and the like.
[0009]
The inlet 13 of the furnace core 20 is blocked from the outside air by an air curtain 14. A plurality of heaters 15 for adjusting the temperature distribution in the conveying direction in the furnace core 20 to a predetermined temperature distribution (peak temperature 800 to 1000 ° C.) are installed on the outer periphery of the furnace core 20. A plurality of air pipes 16 for feeding outside air into the furnace core 20 are drawn into the furnace core 20 from between the air curtain 14 and the heater 15, and are piped in the conveying direction along the ceiling surface of the furnace core 20. Has been.
[0010]
Furthermore, between the vicinity of the air curtain 14 at the inlet 13 and the vicinity of the first heater 15, a drip-proof plate 17 formed of, for example, stainless steel, a core material or the like is installed so as to cover the top of the conveyor 12. As shown in FIG. 2, the drip-proof plate 17 is formed in a curved surface shape such that the center portion is high and becomes lower toward both sides of the conveyor 12. The drip-proof plate 17 is fitted and attached to a hook-shaped mounting portion 18 fixed to the inner wall of the furnace core 20 so as to be detachable from the inlet 13 side in the transport direction.
[0011]
In the firing furnace configured as described above, outside air is sent from the air pipe 16 into the furnace core 20 in a state where the inlet 13 is shut off from the outside air by the air curtain 14, and is arranged along the conveying direction on the outer periphery of the furnace core 20. The temperature distribution in the conveying direction in the furnace core 20 is adjusted to a predetermined temperature distribution (peak temperature 800 to 1000 ° C.) by the plurality of heaters 15. In this state, the unfired ceramic substrate 11 transported in the furnace core 20 by the conveyor 12 is sintered at 800 to 1000 ° C. after the binder is decomposed and removed (debindered) in the transport process.
[0012]
At this time, cracked gas generated by debinding in the furnace core 20 is discharged to the outside through an exhaust pipe (not shown), but a part of the cracked gas passes through the furnace core 20 on the inlet 13 side (of the heater 15). Back flow upstream). Even in the furnace core 20, since the atmosphere temperature is relatively low in the region from the inlet 13 to the first heater 15, the cracked gas that has flowed back to the upstream side of the heater 15 flows into the air piping 16 and the furnace inner wall in the furnace core 20. It is cooled by touch and liquefies, and adheres to those surfaces. For this reason, the decomposed gas liquefied component may fall as a drop from the air pipe 16 in the furnace core 20 or the ceiling of the furnace core 20, but in this embodiment, from the air curtain 14 to the vicinity of the first heater 15. In this region, the drip-proof plate 17 is installed so as to cover the upper part of the conveyor 12, so that the decomposed gas liquefied component falling from the air pipe 16 or the ceiling in the furnace core 20 is on the upper surface of the drip-proof plate 17. It is received and flows to the side along the inclination of the drip-proof plate 17 and flows downward along the inner wall of the furnace core 20.
[0013]
Further, even when the decomposition gas of the binder is liquefied on the lower surface of the drip-proof plate 17, the decomposed gas liquefaction part flows sideways along the inclination of the lower surface of the drip-proof plate 17 and travels along the inner wall of the furnace core 20. Flows downward. Thereby, it is possible to prevent the decomposed gas liquefied component from falling on the surface of the unfired ceramic substrate 11 being conveyed, and to improve the yield of the fired product. In addition, since the installation position of the drip-proof plate 17 is only in the region where the ambient temperature from the inlet 13 to the first heater 15 is low, the flow of air and the temperature distribution in the furnace core 20 are almost affected. There is no loss of binder removal and sinterability.
[0014]
In this embodiment, the drip-proof plate 17 is detachably attached to the attachment portion 18 on the inner wall of the furnace core 20 from the inlet 13 side. Can be easily detached from the inlet 13 of the furnace core 20, and workability during cleaning of the drip-proof plate 17 can be improved. However, the drip-proof plate 17 may be attached by other methods. For example, the drip-proof plate 17 may be suspended from the ceiling surface of the furnace core 20 or may be fixed to the inner wall of the furnace core 20 with a metal fitting or the like. Alternatively, a soot may be provided below both side edges of the drip-proof plate 17 so that the decomposed gas liquefied portion flowing down from both side edges of the drip-proof board 17 is received by the scissors and discharged to the outside.
[0015]
In the present embodiment, the drip-proof plate 17 is curved in a convex shape, but the drip-proof plate 17 may be bent into an inverted V shape. In short, the central portion of the drip-proof plate 17 is high, and the conveyor If it forms so that it may become low toward the both sides of 12, the decomposition gas liquefied part of the upper and lower surfaces of the drip-proof board 17 can be poured to the side. However, the shape of the drip-proof plate 17 may be appropriately changed as long as it does not drop the decomposition gas liquefied component onto the surface of the unfired ceramic substrate 11.
[0016]
Further, in the present embodiment, the mounting portion 18 that supports the drip-proof plate 17 is divided and arranged in a plurality of locations, but this may be formed in a single rail shape that extends over the entire length of the drip-proof plate 17, Further, the mounting portion is formed in a bowl shape extending over the entire length of the drip-proof plate 17, and is configured to receive the decomposed gas liquefied portion flowing down from the drip-proof plate 17 and discharge it to the outside. Also good.
In addition, the present invention is not limited to a low-temperature fired ceramic firing furnace, and can be applied to other ceramic firing furnaces such as alumina.
[0017]
【The invention's effect】
As apparent from the above description, according to claim 1 of the present invention, in the region from near the entrance of the firing furnace to the vicinity of the heater, Rutotomoni provided drip plate covering the upper side of the conveyor, the drip-proof plate baking Since there is a space between the furnace inner wall ceiling of the furnace, the decomposed gas liquefaction falling from the air piping in the firing furnace, the ceiling of the furnace inner wall, etc. can be received on the upper surface of the drip-proof plate. The decomposition gas liquefaction drop on the surface of the fired ceramic can be prevented, and the yield of the fired product can be improved.
[0018]
Further, in claim 2, since the drip-proof plate is formed so as to have a high central portion and lower toward both sides of the conveyor, the decomposed gas liquefaction adhering to the lower surface of the drip-proof plate is reduced on the lower surface of the drip-proof plate. It flows to the side along the inclination, and the fall of the decomposed gas liquefied part from the lower surface of the drip-proof plate to the unfired ceramic surface can be prevented.
[0019]
Further, according to the third aspect, since the drip-proof plate can be detachably attached from the inlet side, the workability of cleaning the drip-proof plate can be improved.
[Brief description of the drawings]
1 is a longitudinal side view of a firing furnace according to an embodiment of the present invention. FIG. 2 is a longitudinal front view of the firing furnace. FIG. 3 is a longitudinal side view of a conventional firing furnace.
DESCRIPTION OF SYMBOLS 11 ... Unbaked ceramic substrate, 13 ... Inlet, 14 ... Air curtain, 15 ... Heater, 16 ... Air piping, 17 ... Drip-proof board, 18 ... Mounting part, 19 ... Firing support, 20 ... Furnace core.

Claims (3)

炉内に搬入されてくる未焼成セラミックを炉内のヒータにより加熱して焼成する焼成炉において、
該焼成炉の入口付近から前記ヒータ付近までの領域に、前記未焼成セラミックを搬送するコンベアの上方を覆う防滴板を配置するとともに、
前記防滴板と前記焼成炉の炉内壁天井との間に空間を存在させるようにしたこと
を特徴とする焼成炉
In a firing furnace that heats and fires an unfired ceramic that is carried into the furnace by a heater in the furnace,
In a region from the vicinity of the entrance of the firing furnace to the vicinity of the heater, a drip-proof plate is disposed that covers the top of the conveyor that conveys the unfired ceramic ,
A firing furnace characterized in that a space exists between the drip-proof plate and the ceiling of the furnace inner wall of the firing furnace .
前記防滴板は、中央部が高く、前記コンベアの両側に向かって低くなるように形成されていることを特徴とする請求項1に記載の焼成炉The firing furnace according to claim 1, wherein the drip-proof plate is formed so as to have a high central portion and become lower toward both sides of the conveyor. 前記防滴板は、前記焼成炉の内側壁に設けられた装着部に、入口側から着脱自在に装着されていることを特徴とする請求項1又は2に記載の焼成炉The Boshizukuban is the mounting portion provided on the inner wall of the firing furnace, the firing furnace according to claim 1 or 2, characterized in that it is detachably mounted from the inlet side.
JP00137199A 1999-01-06 1999-01-06 Drip-proof device in the firing furnace Expired - Lifetime JP4325004B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP00137199A JP4325004B2 (en) 1999-01-06 1999-01-06 Drip-proof device in the firing furnace

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP00137199A JP4325004B2 (en) 1999-01-06 1999-01-06 Drip-proof device in the firing furnace

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JP4325004B2 true JP4325004B2 (en) 2009-09-02

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CN114906845B (en) * 2022-05-30 2023-10-03 湖南烁科热工智能装备有限公司 Continuous carbonization and graphitization system for producing graphite felt

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