JP4303539B2 - Multiple wiring board - Google Patents

Multiple wiring board Download PDF

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JP4303539B2
JP4303539B2 JP2003303727A JP2003303727A JP4303539B2 JP 4303539 B2 JP4303539 B2 JP 4303539B2 JP 2003303727 A JP2003303727 A JP 2003303727A JP 2003303727 A JP2003303727 A JP 2003303727A JP 4303539 B2 JP4303539 B2 JP 4303539B2
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wiring board
wiring
inner layer
plating
region
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JP2005072510A (en
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陽介 森山
英樹 川畑
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Kyocera Corp
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Description

本発明は、広面積の母基板中に各々が半導体素子や水晶振動子等の電子部品を搭載するための配線基板となる配線基板領域を多数個配列形成して成る多数個取り配線基板に関するものである。   The present invention relates to a multi-cavity wiring board formed by arranging a large number of wiring board regions each serving as a wiring board for mounting electronic components such as semiconductor elements and crystal resonators in a large-area mother board. It is.

従来、半導体素子や水晶振動子等の電子部品を搭載するための配線基板は、例えば酸化アルミニウム質焼結体等の電気絶縁材料から成る絶縁基体の表面に、タングステンやモリブデン等の高融点金属粉末メタライズから成る配線導体を配設することにより形成されている。   Conventionally, wiring boards for mounting electronic components such as semiconductor elements and crystal resonators have a high melting point metal powder such as tungsten or molybdenum on the surface of an insulating base made of an electrically insulating material such as an aluminum oxide sintered body. It is formed by disposing a wiring conductor made of metallization.

そして、配線基板上に電子部品を搭載するとともに、この電子部品の各電極を半田やボンディングワイヤ等の電気的接続手段を介して配線導体に電気的に接続し、しかる後、この配線基板上に金属やセラミックスから成る蓋体あるいはポッティング樹脂を電子部品を覆うようにして接合することによって電子部品を気密に封止し、製品としての電子装置が製作される。   And while mounting an electronic component on a wiring board, each electrode of this electronic component is electrically connected to a wiring conductor through electrical connection means such as solder or bonding wire, and then, on this wiring board. A lid made of metal or ceramics or a potting resin is joined so as to cover the electronic component, whereby the electronic component is hermetically sealed, and an electronic device as a product is manufactured.

ところで、このような配線基板は、近時の電子装置の小型化の要求に伴いその大きさが数mm角程度の極めて小さなものとなってきている。   By the way, such a wiring board has become extremely small with a size of about several mm square in accordance with the recent demand for miniaturization of electronic devices.

そこで、このような小型の配線基板は、その取り扱いを容易なものとするために、また配線基板やこれを使用した電子装置の製作を効率良いものとするために、いわゆる多数個取り配線基板の形態で製作される。   Therefore, in order to facilitate the handling of such a small-sized wiring board and to efficiently manufacture the wiring board and an electronic device using the wiring board, a so-called multi-cavity wiring board is used. Made in form.

このような多数個取り配線基板は、各々が配線導体を有する多数の配線基板領域を1枚の広面積の母基板中に縦横に一体に配列形成して成り、各配線基板領域に電子部品を搭載して封止した後、母基板を各配線基板領域毎に分割することにより、多数の電子装置を同時集約的に得るようにしたものである。   Such a multi-piece wiring board is formed by arranging a large number of wiring board regions each having wiring conductors in a single large-area mother board vertically and horizontally, and in which electronic components are arranged in each wiring board region. After mounting and sealing, the mother board is divided into each wiring board region, so that a large number of electronic devices can be obtained simultaneously and collectively.

なお、かかる多数個取り配線基板の各配線基板領域に形成された配線導体には、配線導体が酸化腐食するのを防止するとともに、配線導体と電子部品の各電極との電気的接続性を良好なものとするために、その露出する表面にニッケルや金等から成るめっき金属層が例えば電解めっき法により被着されている。   In addition, the wiring conductor formed in each wiring board region of the multi-cavity wiring board prevents the wiring conductor from being oxidatively corroded and has good electrical connectivity between the wiring conductor and each electrode of the electronic component. Therefore, a plating metal layer made of nickel, gold or the like is applied to the exposed surface by, for example, an electrolytic plating method.

ここで、このような多数個取り配線基板の例を図5に平面図で示す。図5に示すように、多数個取り配線基板は、例えば略長方形の母基板11の中央部に各々が配線基板となる多数の配線基板領域12が縦横に一体に配列形成されており、母基板11の外周部には縦横に配列形成された配線基板領域12を取り囲むように捨て代領域13が形成されている。   Here, an example of such a multi-piece wiring board is shown in a plan view in FIG. As shown in FIG. 5, the multi-cavity wiring board has, for example, a large number of wiring board regions 12, each of which is a wiring board, arranged in a central portion of a substantially rectangular mother board 11. 11 is formed with a margin area 13 so as to surround the wiring board areas 12 arranged vertically and horizontally.

そして、各配線基板領域12には、例えば配線導体15a,15bが形成されている。各配線基板領域12の配線導体15a同士および配線導体15b同士は、それぞれ複数の列に並んでおり、かつ各列毎にめっき導通用のパターン14を介して電気的に接続されている。このパターン14は、母基板11の対向する2辺に導出しており、母基板11の2辺に端子部14aを形成し、端子部14aをめっき用電源に接続することにより、めっき導通用のパターン14を介して各列の配線導体15a,15bの全てに電解めっきのための電圧が印加される。   For example, wiring conductors 15 a and 15 b are formed in each wiring board region 12. The wiring conductors 15a and the wiring conductors 15b in each wiring board region 12 are arranged in a plurality of columns, and are electrically connected to each column via a pattern 14 for plating conduction. This pattern 14 is led out on two opposite sides of the mother board 11, and terminal portions 14a are formed on the two sides of the mother board 11, and the terminal parts 14a are connected to a plating power source, thereby enabling plating conduction. A voltage for electrolytic plating is applied to all the wiring conductors 15a and 15b in each column via the pattern 14.

そして、この多数個取り配線基板では、母基板11をニッケルめっきや金めっきのための電解めっき浴中に浸漬するとともに、めっき導通用のパターン14をめっき用電源に接続することによって、全ての配線導体15a,15bに電解めっきによるめっき金属層が被着される。   In this multi-cavity wiring board, all the wiring is achieved by immersing the mother board 11 in an electrolytic plating bath for nickel plating or gold plating, and by connecting the pattern 14 for plating conduction to a power source for plating. A plated metal layer by electrolytic plating is deposited on the conductors 15a and 15b.

そして、多数個取り配線基板を各配線基板領域12ごとに分割することにより、個々の配線基板を得ることができる。個々の配線基板領域12の分割方法としては、多数個取り配線基板の各配線基板領域12毎に分割溝を形成しておき、これに沿って分割する方法、またはスライシング法等により各配線基板領域12毎に切断する方法等があり、これらの方法により、個々の配線基板を得ることができる。
特開2000−165003号公報
Each wiring board can be obtained by dividing the multi-piece wiring board into each wiring board region 12. As a method for dividing each wiring board region 12, each wiring board region is formed by forming a dividing groove for each wiring board region 12 of the multi-piece wiring board and dividing along each of the wiring board regions 12, or by a slicing method or the like. There is a method of cutting every 12 or the like, and by these methods, individual wiring boards can be obtained.
JP 2000-165003 A

しかしながら、従来の多数個取り配線基板においては、配線導体15a,15bは、全て一つのめっき導通用のパターン14に電気的に接続されているために、電解めっき法により配線導体15a,15bにめっき層を被着する場合、めっき層が被着される部位に同じ厚みおよび同じ種類のめっき層しか被着することができなかった。このため、配線導体15a,15bに被着するめっき層の厚みを異ならせたり、種類の異なるめっき層を被着する場合には、配線導体15a,15b上にフィルム等によりマスキングを行ったりして、配線導体15a,15bにめっき層が被着しないようにするなどの必要があり、非常に手間がかかるものであった。また、配線基板が非常に小型なものであったり、配線基板の表面に凹凸を有するようなものであれば、マスキング等を正確かつ迅速に行うのが困難であるという問題点を有していた。   However, in the conventional multi-cavity wiring board, since the wiring conductors 15a and 15b are all electrically connected to the single plating conduction pattern 14, the wiring conductors 15a and 15b are plated by the electrolytic plating method. When depositing a layer, only the same thickness and the same type of plating layer could be deposited at the site where the plating layer was deposited. For this reason, when the thickness of the plating layer to be applied to the wiring conductors 15a and 15b is different, or when different types of plating layers are to be applied, the wiring conductors 15a and 15b are masked with a film or the like. In addition, it is necessary to prevent the plating layer from being deposited on the wiring conductors 15a and 15b, which is very troublesome. Also, if the wiring board is very small or has irregularities on the surface of the wiring board, there is a problem that it is difficult to perform masking etc. accurately and quickly. .

本発明は、かかる上記従来の問題点に鑑み完成されたものであり、その目的は、配線基板の配線導体に被着される厚みや種類の異なるめっき層を容易かつ効率的に被着することができる多数個取り配線基板を提供することにある。   The present invention has been completed in view of the above-described conventional problems, and an object of the present invention is to easily and efficiently deposit plating layers of different thicknesses and types deposited on the wiring conductor of the wiring board. An object of the present invention is to provide a multi-piece wiring board capable of achieving the above.

本発明の多数個取り配線基板は、複数の絶縁層が積層されて成り主面に複数の配線基板領域が縦横に配列されて成るとともに、前記配線基板領域に形成された配線導体の露出する表面に電解めっき法によりめっき層を被着するためのめっき導通用のパターンが内部に形成されている四角形状の多数個取り配線基板であって、前記パターンはそれぞれ異なる絶縁層に形成された複数の第1および第2の内層パターンを有しており、該第1および第2の内層パターンはそれぞれ前記配線導体を1列ずつ接続して平面視で互いに縦横に直交する方向に延びるように形成されているとともに両端が前記配線基板領域の外周部に前記配線基板領域を取り囲むように形成された枠状部に接続されており、該枠状部からの導出部が前記四角形状の対向する一対の辺の各辺の異なる端部の対角位置にそれぞれ導出されていることを特徴とする。 The multi-cavity wiring board of the present invention is formed by laminating a plurality of insulating layers, a plurality of wiring board regions are arranged vertically and horizontally on the main surface, and the exposed surface of the wiring conductor formed in the wiring board region A square multi-cavity wiring board in which a plating conduction pattern for depositing a plating layer by an electrolytic plating method is formed, wherein the pattern is formed on a plurality of different insulating layers . has first and second inner layer pattern, said first and second inner layer pattern is formed to extend in a direction perpendicular to the vertical and horizontal to each other in a plan view by connecting the wiring conductor column by column, respectively ends with and is connected to the frame-like portion formed so as to surround the wiring board region on an outer peripheral portion of the wiring substrate region, one of deriving unit from the frame-shaped portion is opposed the quadrangular Wherein the of the diagonal positions of the different ends of each side edge being respectively derived.

本発明の多数個取り配線基板は、複数の絶縁層が積層されて成り主面に複数の配線基板領域が縦横に配列されて成るとともに、前記配線基板領域に形成された配線導体の露出する表面に電解めっき法によりめっき層を被着するためのめっき導通用のパターンが内部に形成されている四角形状の多数個取り配線基板であって、前記パターンはそれぞれ異なる絶縁層に形成された複数の第1および第2の内層パターンを有しており、該第1および第2の内層パターンはそれぞれ前記配線導体を1列ずつ接続して平面視で互いに縦横に直交する方向に延びるように形成されているとともに両端が前記配線基板領域の外周部に前記配線基板領域を取り囲むように形成された枠状部に接続されており、該枠状部からの導出部が前記四角形状の対向する一対の辺で互いに異なる前記一対の辺にそれぞれ導出されていることを特徴とする。 The multi-cavity wiring board of the present invention is formed by laminating a plurality of insulating layers, a plurality of wiring board regions are arranged vertically and horizontally on the main surface, and the exposed surface of the wiring conductor formed in the wiring board region A square multi-cavity wiring board in which a plating conduction pattern for depositing a plating layer by an electrolytic plating method is formed, wherein the pattern is formed on a plurality of different insulating layers . has first and second inner layer pattern, said first and second inner layer pattern is formed to extend in a direction perpendicular to the vertical and horizontal to each other in a plan view by connecting the wiring conductor column by column, respectively ends with and is connected to the frame-like portion formed so as to surround the wiring board region on an outer peripheral portion of the wiring substrate region, one of deriving unit from the frame-shaped portion is opposed the quadrangular Characterized in that the different said pair of sides to each other at the sides are respectively derived.

本発明の多数個取り配線基板は、めっき導通用のパターンはそれぞれ異なる絶縁層に形成された複数の第1および第2の内層パターンを有しており、第1および第2の内層パターンはそれぞれ配線導体を1列ずつ接続して平面視で互いに縦横に直交する方向に延びるように形成されているとともに両端が配線基板領域の外周部に配線基板領域を取り囲むように形成された枠状部に接続されており、枠状部からの導出部が四角形状の対向する一対の辺の各辺の異なる端部の対角位置にそれぞれ導出されていることから、多数個取り配線基板内の配線導体の露出する表面の、第1の内層パターンに電気的に接続される部位と、第2の内層パターンに電気的に接続される部位とに、それぞれ良好にめっき層を被着することができる。また、複数の第1および第2の内層パターンは、それぞれ配線導体を1列ずつ接続して平面視で互いに縦横に直交する方向に形成されているので、複数の第1および第2の内層パターンが一方向に偏って形成されず、その結果配線基板に反りや変形が発生するのを抑制することができる。また、複数の第1および第2の内層パターンは両端が配線基板領域の外周部に配線基板領域を取り囲むように形成された枠状部に接続されており、枠状部からの導出部が四角形状の対向する一対の辺の各辺の異なる端部の対角位置にそれぞれ導出されていることから、各配線基板領域毎の配線長の差を小さくし、配線基板領域毎に形成される配線導体のめっき層の厚みばらつきを小さくすることができる。 Multiple patterning wiring board of the present invention, the pattern for plating conductive has a plurality of first and second inner layer patterns formed on different insulating layers, respectively, first and second inner layer patterns respectively the frame-like portion formed so as to surround the wiring board region on the outer peripheral portion of both ends wiring substrate region with connecting wiring conductors column by column is formed so as to extend in a direction perpendicular to the vertical and horizontal to each other in a plan view The connection conductors and the lead-out portions from the frame-like portions are respectively led to the diagonal positions of the different ends of each of the pair of opposing sides of the quadrangular shape, so that the wiring conductor in the multi-cavity wiring board The plating layer can be satisfactorily applied to the portion of the exposed surface of the substrate and the portion electrically connected to the first inner layer pattern and the portion electrically connected to the second inner layer pattern. The plurality of first and second inner layer patterns, since they are formed respectively interconnect conductors in a direction perpendicular to the vertical and horizontal to each other in plan view connected column by column, a plurality of first and second inner layer pattern Are not formed in one direction, and as a result, warpage and deformation of the wiring board can be suppressed. Further, both ends of the plurality of first and second inner layer patterns are connected to a frame-shaped portion formed so as to surround the wiring substrate region at the outer peripheral portion of the wiring substrate region, and a lead-out portion from the frame-shaped portion has a square shape The wiring formed in each wiring board area is reduced by reducing the difference in wiring length in each wiring board area because it is derived to the diagonal position of the different end of each side of the pair of opposing sides. Variation in the thickness of the plating layer of the conductor can be reduced.

また、本発明の多数個取り配線基板は、めっき導通用のパターンはそれぞれ異なる絶縁層に形成された複数の第1および第2の内層パターンを有しており、第1および第2の内層パターンはそれぞれ配線導体を1列ずつ接続して平面視で互いに縦横に直交する方向に延びるように形成されているとともに両端が配線基板領域の外周部に配線基板領域を取り囲むように形成された枠状部に接続されており、枠状部からの導出部が四角形状の対向する一対の辺で互いに異なる一対の辺にそれぞれ導出されていることから、多数個取り配線基板内の配線導体の露出する表面の、第1の内層パターンに電気的に接続される部位と、第2の内層パターンに電気的に接続される部位とに、それぞれ容易かつ良好にめっき層を被着することができる。また、複数の第1および第2の内層パターンは、それぞれ配線導体を1列ずつ接続して平面視で互いに縦横に直交する方向に形成されているので、複数の第1および第2の内層パターンが一方向に偏って形成されず、その結果配線基板に反りや変形が発生するのを抑制することができる。 Further, the multi-cavity wiring board of the present invention has a plurality of first and second inner layer patterns formed in different insulating layers, and the first and second inner layer patterns. frame shape is formed so as to surround the wiring board region on the outer peripheral portion of both ends wiring substrate region with is formed so as to extend in a direction perpendicular to the vertical and horizontal to each other in a plan view to connect each wiring conductor by one column Since the lead-out portion from the frame-like portion is led to a pair of sides that are different from each other by a pair of opposite sides of the quadrangular shape, the wiring conductor in the multi-piece wiring board is exposed. The plating layer can be easily and satisfactorily applied to the portion of the surface that is electrically connected to the first inner layer pattern and the portion that is electrically connected to the second inner layer pattern. The plurality of first and second inner layer patterns, since they are formed respectively interconnect conductors in a direction perpendicular to the vertical and horizontal to each other in plan view connected column by column, a plurality of first and second inner layer pattern Are not formed in one direction, and as a result, warpage and deformation of the wiring board can be suppressed.

本発明の多数個取り配線基板を以下に詳細に説明する。図1(a)は、本発明の多数個取り配線基板の平面図、(b)は、めっき導通用の第1の内層パターンが形成された内部平面図、(c)はめっき導通用の第2の内層パターンが形成された内部平面図、(d)は配線導体にめっき層を被着した後の平面図であり、図2は図1の多数個取り配線基板の断面図である。これらの図において、1は母基板、2は配線基板領域、3は捨て代領域、4はめっき導通用の第1の内層パターン、5はめっき導通用の第2の内層パターンを示している。 The multi-piece wiring board of the present invention will be described in detail below. FIG. 1A is a plan view of a multi-piece wiring board of the present invention, FIG. 1B is an internal plan view in which a first inner layer pattern for plating conduction is formed, and FIG. 2 is an internal plan view in which an inner layer pattern 2 is formed, FIG. 2D is a plan view after a plating layer is deposited on the wiring conductor, and FIG. 2 is a cross-sectional view of the multi-cavity wiring board of FIG. In these figures, 1 is a mother board, 2 is a wiring board area, 3 is a margin area, 4 is a first inner layer pattern for plating conduction, and 5 is a second inner layer pattern for plating conduction.

本発明の多数個取り配線基板は、複数の絶縁層が積層されて成り主面に複数の配線基板領域2が縦横に配列されて成るとともに、配線基板領域2に形成された配線導体に電解めっき法によりめっき層を被着するためのめっき導通用のパターンが内部に形成されている四角形状の多数個取り配線基板であって、パターンはそれぞれ異なる絶縁層に形成された第1および第2の内層パターン4,5を有しており、第1および第2の内層パターン4,5は平面視で互いに直交する方向に延びるように形成されているとともに四角形状の対向する一対の辺の各辺の異なる端部にそれぞれ導出されている。   The multi-cavity wiring board of the present invention is formed by laminating a plurality of insulating layers, and a plurality of wiring board regions 2 are arranged vertically and horizontally on the main surface, and electroplating is performed on the wiring conductor formed in the wiring substrate region 2. A rectangular multi-cavity wiring board in which a plating conduction pattern for depositing a plating layer by a method is formed, wherein the patterns are formed on different insulating layers, respectively. It has inner layer patterns 4, 5, and the first and second inner layer patterns 4, 5 are formed so as to extend in directions orthogonal to each other in plan view, and each side of a pair of opposing sides in a square shape Are respectively derived at different ends.

本発明の母基板1は、セラミックスや樹脂等から成り、セラミックスからなる場合は、酸化アルミニウム質焼結体や窒化アルミニウム質焼結体,ムライト質焼結体,窒化珪素質焼結体,炭化珪素質焼結体,ガラスセラミックス等の電気絶縁材料から成る四角形状の平板であり、その中央部には多数の配線基板領域2が縦横に一体に配列形成されており、その外周部には四角枠状の捨て代領域3が形成されている。   The mother substrate 1 of the present invention is made of ceramics, resin, or the like, and when made of ceramics, an aluminum oxide sintered body, an aluminum nitride sintered body, a mullite sintered body, a silicon nitride sintered body, silicon carbide. This is a rectangular flat plate made of an electrically insulating material such as a sintered material and glass ceramics. A large number of wiring board regions 2 are integrally formed vertically and horizontally at the center, and a square frame is formed at the outer periphery. A shaped margin area 3 is formed.

このような母基板1は、例えば酸化アルミニウム質焼結体からなる場合であれば、酸化アルミニウム,酸化珪素,酸化カルシウム,酸化マグネシウム等の原料粉末に適当な有機バインダおよび溶剤を添加混合して泥漿状となすとともに、これを従来周知のドクターブレード法を採用してシート状に形成して複数枚のセラミックグリーンシートを得、しかる後、これらのセラミックグリーンシートに適当な打ち抜き加工を施すとともに上下に複数枚積層し、最後に、この積層体を還元雰囲気中、約1600℃の温度で焼成することによって製作される。   When such a mother substrate 1 is made of, for example, an aluminum oxide sintered body, a suitable organic binder and solvent are added to and mixed with raw material powders such as aluminum oxide, silicon oxide, calcium oxide, magnesium oxide and the like. This is formed into a sheet by using a conventionally known doctor blade method to obtain a plurality of ceramic green sheets, and thereafter, these ceramic green sheets are appropriately punched and moved up and down. A plurality of layers are laminated, and finally, this laminated body is manufactured by firing at a temperature of about 1600 ° C. in a reducing atmosphere.

母基板1の中央部に形成された各配線基板領域2には、配線導体6a,6b,6cが被着形成されており、配線導体6a〜6cは、タングステン(W)やモリブデン(Mo),銅(Cu),銀(Ag)等の金属から成り、配線基板上に搭載される図示しない電子部品の各電極が半田バンプ等の電気的接続手段を介して接続されたり、配線基板に形成される凹部の側壁に形成されたり、配線基板と金属部材等との接合部等として用いられる
そして、本発明の多数個取り配線基板によれば、それぞれ異なる絶縁層に形成された第1および第2の内層パターン4,5を有しており、第1および第2の内層パターン4,5は平面視で互いに直交する方向に延びるように形成されているとともに四角形状の対向する一対の辺の各辺の異なる端部にそれぞれ導出されている。母基板1内で、第1の内層パターン4は配線導体6a,6bに電気的に接続されており、第2の内層パターン5は配線導体6cに電気的に接続されている。
Wiring conductors 6a, 6b, 6c are deposited on each wiring board region 2 formed in the center of the mother board 1, and the wiring conductors 6a-6c are made of tungsten (W), molybdenum (Mo), Each electrode of an electronic component (not shown) made of a metal such as copper (Cu) or silver (Ag) is connected to the wiring board via an electrical connection means such as a solder bump or formed on the wiring board. Formed on the side wall of the recess or used as a joint between the wiring board and the metal member, etc. And according to the multi-cavity wiring board of the present invention, the first and second formed on different insulating layers, respectively. The first and second inner layer patterns 4 and 5 are formed so as to extend in directions orthogonal to each other in plan view, and each of a pair of opposing sides in a square shape Each on a different edge It has been derived. In the mother board 1, the first inner layer pattern 4 is electrically connected to the wiring conductors 6a and 6b, and the second inner layer pattern 5 is electrically connected to the wiring conductor 6c.

そして、第1の内層パターン4および第2の内層パターン5をそれぞれ、母基板1の相対向する2辺に導出し、母基板1の外辺にめっき用電源に接続するための端子部4a,5aをそれぞれ形成している。   Then, the first inner layer pattern 4 and the second inner layer pattern 5 are led out to two opposite sides of the mother substrate 1, respectively, and terminal portions 4a for connecting to the plating power source on the outer side of the mother substrate 1; 5a is formed.

また、第1の内層パターン4および第2の内層パターン5は、捨て代領域3となる母基板1の外周部に、各配線基板領域2を取り囲むように枠状に形成されていても構わない。   Further, the first inner layer pattern 4 and the second inner layer pattern 5 may be formed in a frame shape so as to surround each wiring board region 2 on the outer peripheral portion of the mother substrate 1 that becomes the discard margin region 3. .

これらの第1の内層パターン4および第2の内層パターン5は、例えば、母基板1となるセラミックグリーンシートにWペースト等により配線導体a,b,cにそれぞれ接続するように所定のパターンに印刷塗布し、母基板1となるセラミックグリーンシート積層体とともに焼成することによって、母基板1の所定の位置に被着形成される。 These first inner layer pattern 4 and second inner layer pattern 5 are, for example, predetermined so as to be connected to the wiring conductors 6 a, 6 b, 6 c by a W paste or the like on a ceramic green sheet serving as the mother substrate 1. The pattern is printed and applied, and fired together with the ceramic green sheet laminate to be the mother substrate 1, thereby being deposited on a predetermined position of the mother substrate 1.

そして、母基板1を電解めっき浴中に浸漬するとともに、第1の内層パターン4の端子部4aおよび第2の内層パターン5の端子部5aをそれぞれめっき用電源に接続することによって、配線導体6a,6b,6cの露出する表面に第1めっき層7および第2めっき層8が被着される。例えば、配線導体6aの露出する表面に銀めっき層を被着し、配線導体6b,6cの露出する表面に金めっき層を被着する場合であれば、母基板1を電解銀めっき浴中に浸漬し、第1の内層パターン4の端子部4aをめっき用電源に接続させるとともに、母基板1を電解金めっき浴中に浸漬し、第2の内層パターン5の端子部5aをめっき用電源に接続させる。これにより、配線導体6aの露出する表面に第1のめっき層7である銀めっき層を被着するとともに、配線導体6の露出する表面に第2のめっき層8である金めっき層を被着することができる。 Then, the mother substrate 1 is immersed in the electrolytic plating bath, and the terminal portions 4a of the first inner layer pattern 4 and the terminal portions 5a of the second inner layer pattern 5 are respectively connected to the power source for plating, thereby providing the wiring conductor 6a. , 6b, the first plating layer 7 and the second plating layer 8 is deposited on the exposed surfaces of 6c. For example, when a silver plating layer is applied to the exposed surface of the wiring conductor 6a and a gold plating layer is applied to the exposed surfaces of the wiring conductors 6b and 6c, the mother substrate 1 is placed in an electrolytic silver plating bath. The terminal part 4a of the first inner layer pattern 4 is connected to a power source for plating, and the mother substrate 1 is immersed in an electrolytic gold plating bath, and the terminal part 5a of the second inner layer pattern 5 is used as a power source for plating. Connect. As a result, the silver plating layer as the first plating layer 7 is deposited on the exposed surface of the wiring conductor 6a, and the gold plating layer as the second plating layer 8 is deposited on the exposed surface of the wiring conductor 6. can do.

なお、銀めっき層および金めっき層は一例であり、他の異なるめっき層であっても良いし、厚みの異なる同じ材料のめっき層であっても構わない。   The silver plating layer and the gold plating layer are examples, and may be other different plating layers or plating layers of the same material having different thicknesses.

また、配線導体6a〜6cの露出する表面に同一のめっき層を被着したい場合には、母基板1を電解めっき浴中に浸漬するとともに、第1の内層パターン4の端子部4aおよび第2の内層パターンの端子部5aをめっき用電源に接続させることによって、配線導体6の露出する領域にめっき層を被着することができる。例えば、2層以上のめっき層を有する場合において、内側のめっき層の厚みや種類が同じで、外側のめっき層の厚みや種類が異なる場合等に用いることができる。また、単層および複数層の層数の異なるめっき層にも用いることができる。その結果、多数個取り配線基板内の配線導体6a〜6cの、第1の内層パターン4に電気的に接続される部位と、第2の内層パターン5に電気的に接続される部位とに、それぞれ良好にめっき層を被着することができる。また、第1および第2の内層パターン4,5は、互いに直交する方向に形成されており、第1および第2の電解内層パターン4,5が一方向に偏って形成されていないので、配線基板に反りや変形が発生するのを抑制することができる。   Further, when it is desired to deposit the same plating layer on the exposed surfaces of the wiring conductors 6a to 6c, the mother substrate 1 is immersed in an electrolytic plating bath, and the terminal portions 4a and the second inner layer pattern 4 are secondly connected. By connecting the terminal portion 5a of the inner layer pattern to a power source for plating, the plating layer can be applied to the exposed region of the wiring conductor 6. For example, in the case of having two or more plating layers, the inner plating layer has the same thickness and type, and the outer plating layer has a different thickness and type. It can also be used for plating layers having different numbers of single layers and plural layers. As a result, the portions of the wiring conductors 6a to 6c in the multi-piece wiring board that are electrically connected to the first inner layer pattern 4 and the portions that are electrically connected to the second inner layer pattern 5 are: Each can satisfactorily deposit the plating layer. Further, the first and second inner layer patterns 4 and 5 are formed in directions orthogonal to each other, and the first and second electrolytic inner layer patterns 4 and 5 are not formed so as to be biased in one direction. It is possible to suppress the warpage and deformation of the substrate.

図1の例において、複数の第1および第2の内層パターン4,5は両端が配線基板領域2の外周部に配線基板領域2を取り囲むように形成された枠状部に接続されており、枠状部からの導出部が四角形状の対向する一対の辺の各辺の異なる端部にそれぞれ導出されており、また、第1の内層パターン4の2つの導出部は四角形状の対向する一対の辺の各辺にそれぞれ存在するとともに対角位置にあ、第2の内層パターン5についても同様である。この場合、各配線基板領域毎の配線長の差を小さくし、配線基板領域2毎に形成される配線導体6a〜6cのめっき層の厚みばらつきを小さくすることができるという利点がある。 In the example of FIG. 1, the plurality of first and second inner layer patterns 4, 5 are connected to a frame-like portion formed at both ends so as to surround the wiring substrate region 2 at the outer peripheral portion of the wiring substrate region 2, Derived portions from the frame-shaped portion are respectively led to different end portions of a pair of opposing sides having a quadrangular shape, and two derived portions of the first inner layer pattern 4 are a pair of opposing quadrangular shapes. near diagonal positions with each present in the respective sides of the side is, the same applies to the second internal layer patterns 5. In this case, there is an advantage that the difference in the wiring length for each wiring board region 2 can be reduced and the thickness variation of the plating layer of the wiring conductors 6a to 6c formed for each wiring board region 2 can be reduced.

また、本発明の多数個取り配線基板は、複数の絶縁層が積層されて成り主面に複数の配線基板領域2が縦横に配列されて成るとともに、配線基板領域2に形成された配線導体6a〜6cの露出する表面に電解めっき法によりめっき層を被着するためのめっき導通用のパターンが内部に形成されている四角形状の多数個取り配線基板であって、パターンはそれぞれ異なる絶縁層に形成された複数の第1および第2の内層パターン4,5を有しており、第1および第2の内層パターン4,5はそれぞれ配線導体6a〜6cを1列ずつ接続して平面視で互いに縦横に直交する方向に延びるように形成されているとともに両端が配線基板領域2の外周部に配線基板領域2を取り囲むように形成された枠状部に接続されており、枠状部からの導出部が四角形状の対向する一対の辺で互いに異なる一対の辺にそれぞれ導出されている。 Further, the multi-piece wiring board of the present invention is formed by laminating a plurality of insulating layers, and a plurality of wiring board regions 2 are arranged vertically and horizontally on the main surface, and a wiring conductor 6a formed in the wiring substrate region 2 is formed. A square multi-cavity wiring board in which a plating conduction pattern for depositing a plating layer by an electrolytic plating method is formed on the exposed surface of -6c , and the patterns are formed on different insulating layers. A plurality of first and second inner layer patterns 4 and 5 are formed, and the first and second inner layer patterns 4 and 5 connect the wiring conductors 6a to 6c one column at a time in a plan view. is connected to the frame-shaped portion with both ends formed so as to surround the wiring substrate region 2 to the outer peripheral portion of the wiring substrate region 2 with is formed so as to extend in a direction perpendicular to the vertical and horizontal to each other, from the frame-shaped portion deriving unit a four A pair of opposing sides of the shape are led to different pair of sides to each other.

図3は上記構成の多数個取り配線基板を示すものであり、図3の(a)は本発明の多数個取り配線基板の平面図、(b)はめっき導通用の第1の内層パターン4が形成された内部平面図、(c)はめっき導通用の第2の内層パターン5が形成された内部平面図、(d)は配線導体6a〜6cにめっき層を被着した後の平面図を示している。 FIG. 3 shows a multi-cavity wiring board having the above-described configuration. FIG. 3A is a plan view of the multi-cavity wiring board of the present invention, and FIG. 3B is a first inner layer pattern 4 for plating conduction. (C) is an internal plan view in which the second inner layer pattern 5 for plating conduction is formed, and (d) is a plan view after the plating layer is deposited on the wiring conductors 6a to 6c. Is shown.

めっき導通用のパターンは、それぞれ異なる絶縁層に形成された複数の第1および第2の内層パターン4,5を有しており、第1および第2の内層パターン4,5はそれぞれ配線導体6a〜6cを1列ずつ接続して平面視で互いに縦横に直交する方向に延びるように形成されているとともに、両端が配線基板領域2の外周部に配線基板領域2を取り囲むように形成された枠状部に接続されており、枠状部からの導出部が四角形状の対向する一対の辺で互いに異なる一対の辺にそれぞれ導出されていることから、多数個取り配線基板内の配線導体6a〜6cの露出する表面の、第1の内層パターン4に電気的に接続される部位と、第2の内層パターン5に電気的に接続される部位とに、それぞれ良好にめっき層を被着することができる。また、複数の第1および第2の内層パターン4,5は、それぞれ配線導体6a〜6cを1列ずつ接続して平面視で互いに縦横に直交する方向に形成されているので、複数の第1および第2の内層パターン4,5が一方向に偏って形成されず、その結果配線基板に反りや変形が発生するのを抑制することができる。 The pattern for plating conduction has a plurality of first and second inner layer patterns 4 and 5 formed in different insulating layers, and the first and second inner layer patterns 4 and 5 are respectively wiring conductors 6a. together they are formed to extend in a direction perpendicular to the vertical and horizontal to each other in a plan view by connecting ~6c column by column, formed to both ends surround the wiring substrate region 2 to the outer peripheral portion of the wiring substrate region 2 a frame Since the lead-out part from the frame-like part is led out to a pair of sides different from each other by a pair of opposing sides of the quadrangular shape, the wiring conductors 6a to 6 in the multi-piece wiring board are connected A plating layer is satisfactorily applied to the portion of the exposed surface of 6c that is electrically connected to the first inner layer pattern 4 and the portion that is electrically connected to the second inner layer pattern 5. Can do. Further, since the plurality of first and second inner layer patterns 4, 5 are formed respectively interconnect conductors 6a~6c in a direction perpendicular to the vertical and horizontal to each other in plan view connected column by column, plural first Further, the second inner layer patterns 4 and 5 are not formed so as to be biased in one direction, and as a result, it is possible to prevent the wiring board from being warped or deformed.

なお、本発明は上述の実施の形態に限定されるものではなく、本発明の要旨を逸脱しない範囲内であれば種々の変更は可能である。例えば、図1において、第1および第2の内層パターン4,5は多数個取り基板内に直線的に形成されているが、厳密な直線でなくとも良く、例えば、図4(a)にめっき導通用の第1の内層パターン4が形成された絶縁層の要部拡大内部平面図、(b)にめっき導通用の第2の内層パターン5が形成された絶縁層の要部拡大内部平面図に示すように、配線基板内に複数の配線導体6a〜6eが形成され、第1および第2の内層パターン4,5に複数の異なる配線導体を接続するような場合、配線基板内に形成される複数の配線導体6を電気的に接続してめっき層を被着するために、各配線基板領域2を跨るように、直線部およびその両端部に鉤状に形成された反対側に延びる直交部や、S字状等の部分を形成していても構わない。また、第1および第2の内層パターン4,5を多数個取り配線基板の主面に形成することもできる。   The present invention is not limited to the above-described embodiment, and various modifications can be made without departing from the scope of the present invention. For example, in FIG. 1, the first and second inner layer patterns 4 and 5 are linearly formed in the multi-piece substrate, but may not be a strict straight line. For example, the plating shown in FIG. The principal part expansion internal plan view of the insulating layer in which the first inner layer pattern 4 for conduction is formed, and the principal part enlarged internal plan view of the insulation layer in which the second inner layer pattern 5 for plating conduction is formed in (b). When a plurality of wiring conductors 6a to 6e are formed in the wiring board and a plurality of different wiring conductors are connected to the first and second inner layer patterns 4 and 5, as shown in FIG. In order to electrically connect a plurality of wiring conductors 6 and to deposit a plating layer, the linear part and the orthogonally extending on the opposite side formed in a bowl shape at both ends so as to straddle each wiring board region 2 A portion such as a portion or an S-shape may be formed. Also, the first and second inner layer patterns 4 and 5 can be formed on the main surface of the wiring board.

本発明の多数個取り配線基板の実施の形態の一例を示し、(a)は多数個取り基板の平面図、(b)はめっき導通用の第1の内層パターンが形成された絶縁層の多数個取り配線基板の内部平面図、(c)はめっき導通用第2の内層パターンが形成された絶縁層の多数個取り配線基板の内部平面図、(d)は配線導体にめっき層を被着後の多数個取り配線基板の平面図である。1 shows an example of an embodiment of a multi-cavity wiring board according to the present invention, where (a) is a plan view of the multi-cavity board, and (b) is a large number of insulating layers on which a first inner layer pattern for plating conduction is formed. internal plan view of patterning wiring board, (c) the internal plan view of a multi-piece wiring substrate of the second inner layer pattern is formed an insulating layer for plating conductive, a plating layer (d) of the wiring conductors to be It is a top view of the multi-piece wiring board after wearing. 本発明の多数個取り配線基板の実施の形態の一例の要部拡大断面図である。It is a principal part expanded sectional view of an example of embodiment of the multi-piece wiring board of this invention. 本発明の多数個取り配線基板の実施の形態の他の一例を示し、(a)は多数個取り基板の平面図、(b)はめっき導通用第1の内層パターンが形成された絶縁層の多数個取り配線基板の内部平面図、(c)はめっき導通用第2の内層パターンが形成された絶縁層の多数個取り配線基板の内部平面図、(d)は配線導体にめっき層を被着後の多数個取り配線基板の平面図である。Shows another example of embodiment of the multi-piece wiring substrate of the present invention, (a) is a plan view of a multi-chip substrate, (b) a first insulating layer lining pattern is formed for plating conductive internal plan view of a multi-piece wiring substrate, (c) the internal plan view of a multi-piece wiring substrate of the second inner layer pattern for plating conductive is formed an insulating layer, (d) plating layer wiring conductor It is a top view of the multi-cavity wiring board after depositing. 本発明の多数個取り配線基板の実施の形態の他の一例を示し、(a)はめっき導通用の第1の内層パターンが形成された絶縁層の要部拡大内部平面図、(b)はめっき導通用の第2の内層パターンが形成された絶縁層の要部拡大内部平面図である。The other example of embodiment of the multi-piece wiring board of this invention is shown, (a) is a principal part expansion internal top view of the insulating layer in which the 1st inner layer pattern for plating conduction was formed, (b) is It is a principal part expansion internal top view of the insulating layer in which the 2nd inner layer pattern for plating conduction | electrical_connection was formed. 従来の多数個取り配線基板の平面図である。It is a top view of the conventional multi-piece wiring board.

符号の説明Explanation of symbols

1・・・母基板
2・・・配線基板領域
3・・・捨て代領域
4・・・第1の内層パターン
5・・・第2の内層パターン
6a,6b,6c・・・配線導体
7・・・第1のめっき層
8・・・第2のめっき層
DESCRIPTION OF SYMBOLS 1 ... Mother board 2 ... Wiring board area | region 3 ... Discard allowance area | region 4 ... 1st inner layer pattern 5 ... 2nd inner layer pattern 6a, 6b, 6c ... Wiring conductor 7 * ..First plating layer 8 ... second plating layer

Claims (2)

複数の絶縁層が積層されて成り主面に複数の配線基板領域が縦横に配列されて成るとともに、前記配線基板領域に形成された配線導体の露出する表面に電解めっき法によりめっき層を被着するためのめっき導通用のパターンが内部に形成されている四角形状の多数個取り配線基板であって、前記パターンはそれぞれ異なる絶縁層に形成された複数の第1および第2の内層パターンを有しており、該第1および第2の内層パターンはそれぞれ前記配線導体を1列ずつ接続して平面視で互いに縦横に直交する方向に延びるように形成されているとともに両端が前記配線基板領域の外周部に前記配線基板領域を取り囲むように形成された枠状部に接続されており、該枠状部からの導出部が前記四角形状の対向する一対の辺の各辺の異なる端部の対角位置にそれぞれ導出されていることを特徴とする多数個取り配線基板。 A plurality of insulating layers are stacked and a plurality of wiring board regions are arranged vertically and horizontally on the main surface, and a plating layer is deposited on the exposed surface of the wiring conductor formed in the wiring board region by an electrolytic plating method. And a plurality of first and second inner layer patterns formed on different insulating layers. to which, at both ends with said first and second inner layer pattern is formed so as to extend in a direction perpendicular to the vertical and horizontal to each other in a plan view by connecting the wiring conductor column by column, each of the wiring substrate region It is connected to a frame-like part formed on the outer periphery so as to surround the wiring board region, and the lead-out part from the frame-like part is a pair of different end parts of each side of the pair of opposite sides of the square shape . Corner Multiple patterning wiring board, characterized by being derived respectively location. 複数の絶縁層が積層されて成り主面に複数の配線基板領域が縦横に配列されて成るとともに、前記配線基板領域に形成された配線導体の露出する表面に電解めっき法によりめっき層を被着するためのめっき導通用のパターンが内部に形成されている四角形状の多数個取り配線基板であって、前記パターンはそれぞれ異なる絶縁層に形成された複数の第1および第2の内層パターンを有しており、該第1および第2の内層パターンはそれぞれ前記配線導体を1列ずつ接続して平面視で互いに縦横に直交する方向に延びるように形成されているとともに両端が前記配線基板領域の外周部に前記配線基板領域を取り囲むように形成された枠状部に接続されており、該枠状部からの導出部が前記四角形状の対向する一対の辺で互いに異なる前記一対の辺にそれぞれ導出されていることを特徴とする多数個取り配線基板。 A plurality of insulating layers are stacked and a plurality of wiring board regions are arranged vertically and horizontally on the main surface, and a plating layer is deposited on the exposed surface of the wiring conductor formed in the wiring board region by an electrolytic plating method. And a plurality of first and second inner layer patterns formed on different insulating layers. to which, at both ends with said first and second inner layer pattern is formed so as to extend in a direction perpendicular to the vertical and horizontal to each other in a plan view by connecting the wiring conductor column by column, each of the wiring substrate region is connected to the frame-like portion formed so as to surround the wiring board region on the outer peripheral portion, outlet portion from the frame-shaped portion is the rectangular opposing pair sides at different pair of mutually Multi-piece wiring substrate, characterized in that it is derived, respectively.
JP2003303727A 2003-08-27 2003-08-27 Multiple wiring board Expired - Fee Related JP4303539B2 (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101419891B (en) * 2007-10-26 2012-10-03 镇江强凌电子有限公司 Fluorescent powder applying method for fluorescent lamp tube

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101419891B (en) * 2007-10-26 2012-10-03 镇江强凌电子有限公司 Fluorescent powder applying method for fluorescent lamp tube

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