JP4301140B2 - 圧電振動片および圧電デバイス - Google Patents
圧電振動片および圧電デバイス Download PDFInfo
- Publication number
- JP4301140B2 JP4301140B2 JP2004308327A JP2004308327A JP4301140B2 JP 4301140 B2 JP4301140 B2 JP 4301140B2 JP 2004308327 A JP2004308327 A JP 2004308327A JP 2004308327 A JP2004308327 A JP 2004308327A JP 4301140 B2 JP4301140 B2 JP 4301140B2
- Authority
- JP
- Japan
- Prior art keywords
- vibrating
- width
- base
- arm
- piezoelectric
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000000463 material Substances 0.000 claims description 12
- 238000000605 extraction Methods 0.000 description 6
- 230000005284 excitation Effects 0.000 description 5
- 239000000758 substrate Substances 0.000 description 5
- 238000005452 bending Methods 0.000 description 4
- 239000010453 quartz Substances 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 235000014676 Phragmites communis Nutrition 0.000 description 3
- 239000000853 adhesive Substances 0.000 description 3
- 230000001070 adhesive effect Effects 0.000 description 3
- 230000005684 electric field Effects 0.000 description 3
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
- 230000000875 corresponding effect Effects 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- WSMQKESQZFQMFW-UHFFFAOYSA-N 5-methyl-pyrazole-3-carboxylic acid Chemical compound CC1=CC(C(O)=O)=NN1 WSMQKESQZFQMFW-UHFFFAOYSA-N 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 230000002596 correlated effect Effects 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 description 1
- 238000010295 mobile communication Methods 0.000 description 1
- 239000011224 oxide ceramic Substances 0.000 description 1
- 229910052574 oxide ceramic Inorganic materials 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 230000001902 propagating effect Effects 0.000 description 1
- 239000003566 sealing material Substances 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 238000009966 trimming Methods 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
Images
Landscapes
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004308327A JP4301140B2 (ja) | 2004-10-22 | 2004-10-22 | 圧電振動片および圧電デバイス |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004308327A JP4301140B2 (ja) | 2004-10-22 | 2004-10-22 | 圧電振動片および圧電デバイス |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2006121505A JP2006121505A (ja) | 2006-05-11 |
| JP2006121505A5 JP2006121505A5 (enrdf_load_stackoverflow) | 2007-11-22 |
| JP4301140B2 true JP4301140B2 (ja) | 2009-07-22 |
Family
ID=36538961
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2004308327A Expired - Fee Related JP4301140B2 (ja) | 2004-10-22 | 2004-10-22 | 圧電振動片および圧電デバイス |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4301140B2 (enrdf_load_stackoverflow) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4548148B2 (ja) * | 2005-02-24 | 2010-09-22 | セイコーエプソン株式会社 | 圧電振動片および圧電デバイス |
| JP4609196B2 (ja) * | 2005-06-20 | 2011-01-12 | セイコーエプソン株式会社 | 圧電振動片および圧電デバイスならびに電子機器および携帯電話装置 |
| JP5671821B2 (ja) * | 2010-03-16 | 2015-02-18 | セイコーエプソン株式会社 | 振動片及びデバイス |
| JP6375611B2 (ja) | 2013-11-16 | 2018-08-22 | セイコーエプソン株式会社 | 振動片、振動子、発振器、電子機器および移動体 |
-
2004
- 2004-10-22 JP JP2004308327A patent/JP4301140B2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JP2006121505A (ja) | 2006-05-11 |
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