JP4281059B2 - マイクロ波励起を用いる堆積方法及び堆積装置 - Google Patents
マイクロ波励起を用いる堆積方法及び堆積装置 Download PDFInfo
- Publication number
- JP4281059B2 JP4281059B2 JP2003584363A JP2003584363A JP4281059B2 JP 4281059 B2 JP4281059 B2 JP 4281059B2 JP 2003584363 A JP2003584363 A JP 2003584363A JP 2003584363 A JP2003584363 A JP 2003584363A JP 4281059 B2 JP4281059 B2 JP 4281059B2
- Authority
- JP
- Japan
- Prior art keywords
- reaction chamber
- substrate
- microwave
- component
- microwave radiation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45523—Pulsed gas flow or change of composition over time
- C23C16/45525—Atomic layer deposition [ALD]
- C23C16/45527—Atomic layer deposition [ALD] characterized by the ALD cycle, e.g. different flows or temperatures during half-reactions, unusual pulsing sequence, use of precursor mixtures or auxiliary reactants or activations
- C23C16/45536—Use of plasma, radiation or electromagnetic fields
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/40—Oxides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45523—Pulsed gas flow or change of composition over time
- C23C16/45525—Atomic layer deposition [ALD]
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
- C23C16/511—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using microwave discharges
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
- C30B25/02—Epitaxial-layer growth
- C30B25/10—Heating of the reaction chamber or the substrate
- C30B25/105—Heating of the reaction chamber or the substrate by irradiation or electric discharge
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32192—Microwave generated discharge
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01Q—ANTENNAS, i.e. RADIO AERIALS
- H01Q21/00—Antenna arrays or systems
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01Q—ANTENNAS, i.e. RADIO AERIALS
- H01Q21/00—Antenna arrays or systems
- H01Q21/0087—Apparatus or processes specially adapted for manufacturing antenna arrays
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Plasma & Fusion (AREA)
- Physics & Mathematics (AREA)
- Analytical Chemistry (AREA)
- Electromagnetism (AREA)
- Manufacturing & Machinery (AREA)
- Crystallography & Structural Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Chemical Vapour Deposition (AREA)
Description
Claims (11)
- 堆積方法であって、該方法は、
マイクロ波放射が通過可能な窓を有する反応チャンバと、該反応チャンバの外側に設けられマイクロ波放射を発生するマイクロ波源とを有する装置を提供する過程と、
前記反応チャンバ内に半導体基板を載置する過程と、
前記窓を通して前記反応チャンバ内にマイクロ波放射を送る過程と、
1つ以上の材料を前記マイクロ波放射に曝しながら前記反応チャンバ内に流入する過程と、
前記半導体基板上に前記1つ以上の材料の少なくとも1つの成分を堆積する過程と、を具備し、
前記マイクロ波源は位相アレイアンテナを備え、該位相アレイアンテナは、前記半導体基板の表面に対し実質的に垂直な第1の軸に沿って前記反応チャンバ内に放出されると共に前記半導体基板の表面に対し実質的に平行な第2の軸に沿って掃引されるビームとして、前記マイクロ波放射を放出することを特徴とする堆積方法。 - 請求項1に記載の方法において、前記第2の軸は、直線的な軸であることを特徴とする堆積方法。
- 請求項1に記載の方法において、前記第2の軸は、回転状の軸であることを特徴とする堆積方法。
- 請求項1に記載の方法において、前記反応チャンバ内に流入される材料は、1つ以上のマイクロ波誘導成分と1つ以上の前駆物質からなり、前記方法は更に、
前記半導体基板と前記1つ以上のマイクロ波誘導成分が前記反応チャンバ内にある間に、前記少なくとも1つのマイクロ波誘導成分を前記マイクロ波放射で活性化して、少なくとも1つの活性種を形成する過程と、
前記半導体基板上に前記1つ以上の前駆物質の少なくとも1つの少なくとも1つの成分を堆積する過程と、
前記堆積する過程の前、後、間のうちの1つ以上で行なわれる、前記1つ以上の前駆物質の少なくとも1つを前記活性種と反応させる過程と、
を具備することを特徴とする堆積方法。 - 請求項4に記載の方法において、前記マイクロ波誘導成分の少なくとも1つは、O,H及びNからなる群から選択されることを特徴とする堆積方法。
- 請求項1に記載の方法において、
前記装置は前記マイクロ波源を介して前記反応チャンバ内に延びる導入口を有し、
前記導入口は前記窓を通って延びており前記窓の下の開口部で終端し、
前記装置は前記開口部の下方にガス分散板を有し、
前記チャンバ内に前記半導体基板を載置する過程は前記半導体基板を前記ガス分散板の下に載置することを含み、
前記反応チャンバ内に流入される前記1つ以上の材料は、前記導入口を介し、前記ガス分散板を横切って貫通し、前記反応チャンバ内に流入される、
ことを特徴とする堆積方法。 - 堆積方法であって、該方法は、
マイクロ波放射が通過可能な窓を有する反応チャンバと、該反応チャンバの外側のマイクロ波源とを有する装置を提供する過程と、
前記反応チャンバ内に基板を載置する過程と、
前記反応チャンバ内に1つ以上のマイクロ波誘導成分を流入する過程と、
前記反応チャンバ内に1つ以上の前駆物質を流入する過程と、
前記基板と前記1つ以上のマイクロ波誘導成分が前記反応チャンバ内にある間に、前記1つ以上のマイクロ波誘導成分の少なくとも1つを、前記マイクロ波源から放出されるマイクロ波放射で活性化して、少なくとも1つの活性種を形成する過程と、
前記基板上に前記1つ以上の前駆物質の少なくとも1つの少なくとも1つの成分を堆積する過程と、
前記堆積する過程の前、後、間のうちの1つ以上で行われる、前記1つ以上の前駆物質の少なくとも1つを前記活性種と反応させる過程と、を具備し、
前記マイクロ波源は位相アレイアンテナを備え、該位相アレイアンテナは、前記基板の表面に対し実質的に垂直な第1の軸に沿って前記反応チャンバ内に放出されると共に前記基板の表面に対し実質的に平行な第2の軸に沿って掃引されるビームとして、前記マイクロ波放射を放出することを特徴とする堆積方法。 - 堆積装置であって、該装置は、
内部に基板が載置される反応チャンバと、
前記反応チャンバの外側にあって前記反応チャンバに向かってマイクロ波放射を照射するように構成されるマイクロ波源と、
前記マイクロ波源からのマイクロ波放射が前記反応チャンバ内に通過可能な、前記反応チャンバの周囲に沿った窓と、を具備し、
前記マイクロ波源は、前記基板の表面に対し実質的に垂直な第1の軸に沿って前記反応チャンバ内に放出されると共に前記基板の表面に対し実質的に平行な第2の軸に沿って掃引されるビームとして、前記マイクロ波放射を放出するように構成された位相アレイアンテナを含むことを特徴とする堆積装置。 - 請求項8に記載の装置であって、更に、
前記マイクロ波源を介して前記反応チャンバ内まで延び、前記窓を通って延びて前記窓の下の開口部で終端する、前記基板上に堆積させる成分を含む1つ以上の材料を前記反応チャンバ内に流入するための導入口と、
前記反応チャンバ内で且つ前記導入口の前記開口部の下方に設けられたガス分散板と、
前記反応チャンバ内で且つ前記ガス分散板の下方に設けられた基板ホルダと、
を具備することを特徴とする堆積装置。 - 請求項9に記載の装置において、前記基板ホルダは、前記反応チャンバ内で前記基板としての半導体材料ウェーハを保持するように構成され、前記マイクロ波源は、前記反応チャンバ内で保持される前記半導体材料ウェーハの表面全体にわたって前記マイクロ波放射を放出するように構成されることを特徴とする堆積装置。
- 請求項9に記載の装置において、前記基板ホルダは、前記反応チャンバ内で前記基板としての半導体材料ウェーハを保持するように構成され、前記位相アレイアンテナが、前記反応チャンバ内で保持される前記半導体材料ウェーハの全体にわたって延在することを特徴とする堆積装置。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/121,320 US6845734B2 (en) | 2002-04-11 | 2002-04-11 | Deposition apparatuses configured for utilizing phased microwave radiation |
PCT/US2003/009913 WO2003087431A2 (en) | 2002-04-11 | 2003-03-31 | Deposition methods utilizing phased array microwave excitation, and deposition apparatuses |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2005526908A JP2005526908A (ja) | 2005-09-08 |
JP4281059B2 true JP4281059B2 (ja) | 2009-06-17 |
Family
ID=28790297
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2003584363A Expired - Fee Related JP4281059B2 (ja) | 2002-04-11 | 2003-03-31 | マイクロ波励起を用いる堆積方法及び堆積装置 |
Country Status (8)
Country | Link |
---|---|
US (3) | US6845734B2 (ja) |
EP (1) | EP1495156A2 (ja) |
JP (1) | JP4281059B2 (ja) |
KR (1) | KR100630014B1 (ja) |
CN (1) | CN100363536C (ja) |
AU (1) | AU2003220621A1 (ja) |
TW (1) | TW573051B (ja) |
WO (1) | WO2003087431A2 (ja) |
Families Citing this family (58)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9255329B2 (en) * | 2000-12-06 | 2016-02-09 | Novellus Systems, Inc. | Modulated ion-induced atomic layer deposition (MII-ALD) |
US6845734B2 (en) | 2002-04-11 | 2005-01-25 | Micron Technology, Inc. | Deposition apparatuses configured for utilizing phased microwave radiation |
US7374617B2 (en) * | 2002-04-25 | 2008-05-20 | Micron Technology, Inc. | Atomic layer deposition methods and chemical vapor deposition methods |
JP4354908B2 (ja) * | 2002-06-10 | 2009-10-28 | 東京エレクトロン株式会社 | 処理装置 |
US6821347B2 (en) * | 2002-07-08 | 2004-11-23 | Micron Technology, Inc. | Apparatus and method for depositing materials onto microelectronic workpieces |
US6955725B2 (en) * | 2002-08-15 | 2005-10-18 | Micron Technology, Inc. | Reactors with isolated gas connectors and methods for depositing materials onto micro-device workpieces |
US7527706B2 (en) * | 2002-10-10 | 2009-05-05 | Tokyo Electron Limited | Plasma processing apparatus, process vessel for plasma processing apparatus and dielectric plate for plasma processing apparatus |
US7022605B2 (en) * | 2002-11-12 | 2006-04-04 | Micron Technology, Inc. | Atomic layer deposition methods |
US7097782B2 (en) | 2002-11-12 | 2006-08-29 | Micron Technology, Inc. | Method of exposing a substrate to a surface microwave plasma, etching method, deposition method, surface microwave plasma generating apparatus, semiconductor substrate etching apparatus, semiconductor substrate deposition apparatus, and microwave plasma generating antenna assembly |
US6926775B2 (en) * | 2003-02-11 | 2005-08-09 | Micron Technology, Inc. | Reactors with isolated gas connectors and methods for depositing materials onto micro-device workpieces |
US7335396B2 (en) * | 2003-04-24 | 2008-02-26 | Micron Technology, Inc. | Methods for controlling mass flow rates and pressures in passageways coupled to reaction chambers and systems for depositing material onto microfeature workpieces in reaction chambers |
US7344755B2 (en) * | 2003-08-21 | 2008-03-18 | Micron Technology, Inc. | Methods and apparatus for processing microfeature workpieces; methods for conditioning ALD reaction chambers |
US7235138B2 (en) * | 2003-08-21 | 2007-06-26 | Micron Technology, Inc. | Microfeature workpiece processing apparatus and methods for batch deposition of materials on microfeature workpieces |
US7422635B2 (en) * | 2003-08-28 | 2008-09-09 | Micron Technology, Inc. | Methods and apparatus for processing microfeature workpieces, e.g., for depositing materials on microfeature workpieces |
US7056806B2 (en) * | 2003-09-17 | 2006-06-06 | Micron Technology, Inc. | Microfeature workpiece processing apparatus and methods for controlling deposition of materials on microfeature workpieces |
US7581511B2 (en) * | 2003-10-10 | 2009-09-01 | Micron Technology, Inc. | Apparatus and methods for manufacturing microfeatures on workpieces using plasma vapor processes |
US7311947B2 (en) * | 2003-10-10 | 2007-12-25 | Micron Technology, Inc. | Laser assisted material deposition |
US7258892B2 (en) * | 2003-12-10 | 2007-08-21 | Micron Technology, Inc. | Methods and systems for controlling temperature during microfeature workpiece processing, e.g., CVD deposition |
US20050249873A1 (en) * | 2004-05-05 | 2005-11-10 | Demetrius Sarigiannis | Apparatuses and methods for producing chemically reactive vapors used in manufacturing microelectronic devices |
US8133554B2 (en) * | 2004-05-06 | 2012-03-13 | Micron Technology, Inc. | Methods for depositing material onto microfeature workpieces in reaction chambers and systems for depositing materials onto microfeature workpieces |
US7699932B2 (en) * | 2004-06-02 | 2010-04-20 | Micron Technology, Inc. | Reactors, systems and methods for depositing thin films onto microfeature workpieces |
US20060165873A1 (en) * | 2005-01-25 | 2006-07-27 | Micron Technology, Inc. | Plasma detection and associated systems and methods for controlling microfeature workpiece deposition processes |
AU2006272634B2 (en) | 2005-07-26 | 2013-01-24 | Sangamo Therapeutics, Inc. | Targeted integration and expression of exogenous nucleic acid sequences |
US7892978B2 (en) * | 2006-07-10 | 2011-02-22 | Micron Technology, Inc. | Electron induced chemical etching for device level diagnosis |
US7791055B2 (en) | 2006-07-10 | 2010-09-07 | Micron Technology, Inc. | Electron induced chemical etching/deposition for enhanced detection of surface defects |
US7807062B2 (en) * | 2006-07-10 | 2010-10-05 | Micron Technology, Inc. | Electron induced chemical etching and deposition for local circuit repair |
US7718080B2 (en) | 2006-08-14 | 2010-05-18 | Micron Technology, Inc. | Electronic beam processing device and method using carbon nanotube emitter |
US7833427B2 (en) | 2006-08-14 | 2010-11-16 | Micron Technology, Inc. | Electron beam etching device and method |
US7791071B2 (en) | 2006-08-14 | 2010-09-07 | Micron Technology, Inc. | Profiling solid state samples |
US8053372B1 (en) | 2006-09-12 | 2011-11-08 | Novellus Systems, Inc. | Method of reducing plasma stabilization time in a cyclic deposition process |
US7871678B1 (en) * | 2006-09-12 | 2011-01-18 | Novellus Systems, Inc. | Method of increasing the reactivity of a precursor in a cyclic deposition process |
EP1918967B1 (en) * | 2006-11-02 | 2013-12-25 | Dow Corning Corporation | Method of forming a film by deposition from a plasma |
EP1921178A1 (en) * | 2006-11-02 | 2008-05-14 | Dow Corning Corporation | Film deposition of amorphous films by electron cyclotron resonance |
EP1918966A1 (en) | 2006-11-02 | 2008-05-07 | Dow Corning Corporation | Method for forming a film with a graded bandgap by deposition of an amorphous material from a plasma |
EP1918965A1 (en) * | 2006-11-02 | 2008-05-07 | Dow Corning Corporation | Method and apparatus for forming a film by deposition from a plasma |
EP1919264A1 (en) * | 2006-11-02 | 2008-05-07 | Dow Corning Corporation | Device for forming a film by deposition from a plasma |
EP1923483A1 (en) * | 2006-11-02 | 2008-05-21 | Dow Corning Corporation | Deposition of amorphous silicon films by electron cyclotron resonance |
EP1918414A1 (en) * | 2006-11-02 | 2008-05-07 | Dow Corning Corporation | Film deposition of amorphous films with a graded bandgap by electron cyclotron resonance |
CN101191201B (zh) * | 2006-12-01 | 2010-12-15 | 广东昭信半导体装备制造有限公司 | 金属有机物化学气相沉积设备的反应腔体 |
US7947128B2 (en) * | 2007-06-28 | 2011-05-24 | Siemens Energy, Inc. | Atomic layer epitaxy processed insulation |
SE532505C2 (sv) * | 2007-12-12 | 2010-02-09 | Plasmatrix Materials Ab | Förfarande för plasmaaktiverad kemisk ångdeponering och plasmasönderdelningsenhet |
US20100183825A1 (en) * | 2008-12-31 | 2010-07-22 | Cambridge Nanotech Inc. | Plasma atomic layer deposition system and method |
CN102414795B (zh) | 2009-05-01 | 2015-06-24 | 国立大学法人东京大学 | 化合物半导体的沉积方法和装置 |
WO2011026064A1 (en) * | 2009-08-31 | 2011-03-03 | The Penn State Research Foundation | Improved plasma enhanced atomic layer deposition process |
JP5457109B2 (ja) * | 2009-09-02 | 2014-04-02 | 東京エレクトロン株式会社 | プラズマ処理装置 |
US20110100554A1 (en) * | 2009-09-09 | 2011-05-05 | Applied Materials, Inc. | Parallel system for epitaxial chemical vapor deposition |
CN101921994B (zh) * | 2010-07-30 | 2011-12-21 | 北京印刷学院 | 一种原子层沉积超薄氧化铝薄膜的装置及方法 |
KR101881181B1 (ko) | 2010-11-04 | 2018-08-16 | 노벨러스 시스템즈, 인코포레이티드 | 탄탈륨의 이온 유도 원자층 증착 |
TWI490362B (zh) * | 2013-02-04 | 2015-07-01 | Adpv Technology Ltd Intetrust | Window having self-cleaning of the vapor deposition apparatus |
CN104752275B (zh) * | 2013-12-29 | 2018-01-09 | 北京北方华创微电子装备有限公司 | 工艺腔室以及半导体加工设备 |
US20170133202A1 (en) * | 2015-11-09 | 2017-05-11 | Lam Research Corporation | Computer addressable plasma density modification for etch and deposition processes |
JP6694736B2 (ja) * | 2016-03-14 | 2020-05-20 | 東京エレクトロン株式会社 | プラズマ処理装置及びプラズマ処理方法 |
US11823870B2 (en) | 2019-08-13 | 2023-11-21 | Applied Materials, Inc. | PEALD titanium nitride with direct microwave plasma |
CN110581184A (zh) * | 2019-09-12 | 2019-12-17 | 营口金辰机械股份有限公司 | 异质结太阳能电池及其制作工艺 |
CN111378960B (zh) * | 2020-04-27 | 2021-11-16 | 复旦大学 | 一种微波辅助原子层沉积方法及反应器 |
US20210381107A1 (en) * | 2020-06-03 | 2021-12-09 | Micron Technology, Inc. | Material deposition systems, and related methods and microelectronic devices |
USD967081S1 (en) | 2020-10-30 | 2022-10-18 | Applied Materials, Inc. | Microwave transmission window assembly |
US11362404B2 (en) | 2020-10-30 | 2022-06-14 | Applied Materials, Inc. | Microwave window including first and second plates with vertical stepped areas configured for pressure sealing a dielectric plate between the first and second plates |
Family Cites Families (27)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CH652902A5 (de) * | 1980-11-21 | 1985-12-13 | Syntech Sa | Steuerkopf zur betaetigung der steuerstange der ventilanordnung einer gasfeder. |
US4805876A (en) | 1983-01-06 | 1989-02-21 | Joseph W. Blake, III | Surgical staple remover |
US4778561A (en) * | 1987-10-30 | 1988-10-18 | Veeco Instruments, Inc. | Electron cyclotron resonance plasma source |
US5134965A (en) * | 1989-06-16 | 1992-08-04 | Hitachi, Ltd. | Processing apparatus and method for plasma processing |
GB9114014D0 (en) | 1991-06-28 | 1991-08-14 | De Beers Ind Diamond | Plasma assisted diamond synthesis |
US5327150A (en) * | 1993-03-03 | 1994-07-05 | Hughes Aircraft Company | Phased array antenna for efficient radiation of microwave and thermal energy |
US5387288A (en) | 1993-05-14 | 1995-02-07 | Modular Process Technology Corp. | Apparatus for depositing diamond and refractory materials comprising rotating antenna |
KR0153842B1 (ko) * | 1994-06-14 | 1998-12-01 | 나카무라 다메아키 | 마이크로파 플라즈마 처리장치 |
US5653841A (en) * | 1995-04-13 | 1997-08-05 | Martin Marietta Corporation | Fabrication of compact magnetic circulator components in microwave packages using high density interconnections |
US5698036A (en) | 1995-05-26 | 1997-12-16 | Tokyo Electron Limited | Plasma processing apparatus |
US5645644A (en) * | 1995-10-20 | 1997-07-08 | Sumitomo Metal Industries, Ltd. | Plasma processing apparatus |
KR970071945A (ko) * | 1996-02-20 | 1997-11-07 | 가나이 쯔도무 | 플라즈마처리방법 및 장치 |
WO1997036461A1 (fr) * | 1996-03-28 | 1997-10-02 | Sumitomo Metal Industries, Ltd. | Procede et dispositif de traitement plasmique |
JP2921499B2 (ja) * | 1996-07-30 | 1999-07-19 | 日本電気株式会社 | プラズマ処理装置 |
DE19634795C2 (de) * | 1996-08-29 | 1999-11-04 | Schott Glas | Plasma-CVD-Anlage mit einem Array von Mikrowellen-Plasmaelektroden und Plasma-CVD-Verfahren |
US5788778A (en) * | 1996-09-16 | 1998-08-04 | Applied Komatsu Technology, Inc. | Deposition chamber cleaning technique using a high power remote excitation source |
JPH10237662A (ja) | 1996-12-24 | 1998-09-08 | Sony Corp | 金属膜のプラズマcvd方法、および金属窒化物膜の形成方法ならびに半導体装置 |
JPH11274805A (ja) * | 1998-03-20 | 1999-10-08 | Ricoh Co Ltd | 高周波スイッチ並びに製造方法、及び集積化高周波スイッチアレイ |
JP3813741B2 (ja) * | 1998-06-04 | 2006-08-23 | 尚久 後藤 | プラズマ処理装置 |
JP2000299198A (ja) * | 1999-02-10 | 2000-10-24 | Tokyo Electron Ltd | プラズマ処理装置 |
EP1115147A4 (en) | 1999-05-26 | 2007-05-02 | Tadahiro Ohmi | DEVICE FOR PLASMA TREATMENT |
JP3668079B2 (ja) * | 1999-05-31 | 2005-07-06 | 忠弘 大見 | プラズマプロセス装置 |
JP3501715B2 (ja) * | 2000-03-21 | 2004-03-02 | シャープ株式会社 | プラズマプロセス装置 |
US6416822B1 (en) * | 2000-12-06 | 2002-07-09 | Angstrom Systems, Inc. | Continuous method for depositing a film by modulated ion-induced atomic layer deposition (MII-ALD) |
US6454912B1 (en) * | 2001-03-15 | 2002-09-24 | Micron Technology, Inc. | Method and apparatus for the fabrication of ferroelectric films |
AU2002322654A1 (en) | 2001-07-24 | 2003-02-17 | Walker Digital, Llc | Method and apparatus for guaranteeing a win |
US6845734B2 (en) | 2002-04-11 | 2005-01-25 | Micron Technology, Inc. | Deposition apparatuses configured for utilizing phased microwave radiation |
-
2002
- 2002-04-11 US US10/121,320 patent/US6845734B2/en not_active Expired - Fee Related
-
2003
- 2003-03-31 WO PCT/US2003/009913 patent/WO2003087431A2/en active Application Filing
- 2003-03-31 JP JP2003584363A patent/JP4281059B2/ja not_active Expired - Fee Related
- 2003-03-31 KR KR1020047016189A patent/KR100630014B1/ko not_active IP Right Cessation
- 2003-03-31 EP EP03716936A patent/EP1495156A2/en not_active Withdrawn
- 2003-03-31 CN CNB038136902A patent/CN100363536C/zh not_active Expired - Fee Related
- 2003-03-31 AU AU2003220621A patent/AU2003220621A1/en not_active Abandoned
- 2003-04-10 TW TW92108238A patent/TW573051B/zh not_active IP Right Cessation
- 2003-10-30 US US10/699,013 patent/US7105208B2/en not_active Expired - Lifetime
-
2006
- 2006-09-11 US US11/519,430 patent/US7422986B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
US7422986B2 (en) | 2008-09-09 |
WO2003087431A2 (en) | 2003-10-23 |
US20040089233A1 (en) | 2004-05-13 |
US7105208B2 (en) | 2006-09-12 |
KR100630014B1 (ko) | 2006-09-27 |
KR20040108723A (ko) | 2004-12-24 |
US20030194508A1 (en) | 2003-10-16 |
AU2003220621A1 (en) | 2003-10-27 |
US6845734B2 (en) | 2005-01-25 |
CN100363536C (zh) | 2008-01-23 |
AU2003220621A8 (en) | 2003-10-27 |
WO2003087431B1 (en) | 2004-05-27 |
TW200307762A (en) | 2003-12-16 |
TW573051B (en) | 2004-01-21 |
EP1495156A2 (en) | 2005-01-12 |
WO2003087431A3 (en) | 2004-04-08 |
JP2005526908A (ja) | 2005-09-08 |
US20070036895A1 (en) | 2007-02-15 |
CN1659309A (zh) | 2005-08-24 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP4281059B2 (ja) | マイクロ波励起を用いる堆積方法及び堆積装置 | |
KR102588666B1 (ko) | 기판 상의 구조물 형성 방법 | |
KR102076000B1 (ko) | 반도체 프로세싱을 위한 유동성 탄소 | |
US6689220B1 (en) | Plasma enhanced pulsed layer deposition | |
US10513777B2 (en) | Film formation device | |
JP5587325B2 (ja) | 化学蒸着堆積のための方法および装置 | |
KR20200143254A (ko) | 개질 가스를 사용하여 전자 구조를 형성하는 방법, 상기 방법을 수행하기 위한 시스템, 및 상기 방법을 사용하여 형성되는 구조 | |
US20040129212A1 (en) | Apparatus and method for delivery of reactive chemical precursors to the surface to be treated | |
US20110212625A1 (en) | Substrate processing apparatus and method of manufacturing semiconductor device | |
US20100041213A1 (en) | Vapor Deposition Reactor For Forming Thin Film | |
US20040115365A1 (en) | Method for forming a film | |
JP2003508932A (ja) | 薄膜を成長させる、改良された装置および方法 | |
KR20100132779A (ko) | 박막 형성 방법 및 이의 제조 장치 | |
JP2014165402A (ja) | 窒化膜を形成する方法 | |
US7763551B2 (en) | RLSA CVD deposition control using halogen gas for hydrogen scavenging | |
JP3056050B2 (ja) | 薄膜堆積方法 | |
JPH04154970A (ja) | 立方晶窒化硼素の合成方法 | |
KR20070006179A (ko) | 반도체 제조를 위한 막 형성 장치 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
RD03 | Notification of appointment of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7423 Effective date: 20060906 |
|
RD02 | Notification of acceptance of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7422 Effective date: 20070704 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20070911 |
|
RD04 | Notification of resignation of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7424 Effective date: 20071005 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20071218 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20080215 Free format text: JAPANESE INTERMEDIATE CODE: A821 Effective date: 20080215 |
|
RD02 | Notification of acceptance of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7422 Effective date: 20080215 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20090217 |
|
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20090305 |
|
R150 | Certificate of patent or registration of utility model |
Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20120327 Year of fee payment: 3 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20120327 Year of fee payment: 3 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20130327 Year of fee payment: 4 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20130327 Year of fee payment: 4 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20140327 Year of fee payment: 5 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
LAPS | Cancellation because of no payment of annual fees |