JP4272299B2 - Lead frame flutter prevention mechanism and lead frame inspection device - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a lead frame fluttering prevention mechanism and a lead frame inspection device that are suitably used for an inspection device that inspects for the presence or absence of surface conditions such as dents, scratches, and discoloration of a lead frame after punching.
[0002]
[Background]
Conventionally, in a pressing process for punching a lead frame to form a lead frame, for example, in the case of a strip-shaped lead frame, a worker has confirmed large dents, burrs, and the like with the naked eye when conveyed from the press. Moreover, the lead frame to be conveyed was arbitrarily extracted after pressing, and inspection and measurement were performed with a microscope.
In addition, since the lead frame wound on the reel cannot be subjected to a sampling inspection in the middle, the worker must rely on the naked eye of the operator, and the precise inspection must be inspected for the presence of a dent or the like at the end of the reel. It was.
[0003]
In order to improve the inspection efficiency and accuracy of the lead frame, the present applicant has proposed a lead frame inspection apparatus shown in Japanese Patent Application No. 9-278713. This inspection device irradiates the lead frame conveyed after press processing with light from a ring-shaped illumination, inputs the reflected light with a CCD camera, analyzes the luminance of the input image, and pre-teaches the obtained analysis value with the obtained analysis value. Thus, the abnormality of the lead frame is detected by comparing with the stored value stored in the storage unit.
[0004]
The inspection device is disposed after the press device, for example, and a lead frame continuous in a strip shape is continuously carried into the inspection device after press working, and an imaging means such as a CCD camera for inputting an image to inspect the lead frame And is passed through an imaging position provided with ring-shaped illumination.
A plurality of guide rollers for guiding the lead frame conveyance are rotatably provided on the upstream side and the downstream side in the lead frame conveyance direction of the imaging position. For example, a cylindrical roller for guiding the inspection front and back surfaces of the lead frame, a roller having a V-groove for guiding both side surfaces in the width direction of the lead frame, and a cylindrical roller are rotatably provided. Yes.
[0005]
[Problems to be solved by the invention]
However, in the lead frame transport mechanism described above, in a belt-like lead frame having low rigidity, distortion due to stress acting during press working occurs. As a result, when the lead frame is carried into the inspection apparatus, a vertical wobbling vibration phenomenon, so-called fluttering easily occurs at the imaging position. When the lead frame flutter increases, when analyzing the input image captured from the CCD camera, if the allowable value indicating the amount of variation in luminance data between images is not set to a large value to some extent, abnormality determination frequently occurs and Detection performance is degraded.
In addition, even if the lead frame is normal, the flickering of the lead frame is often determined to be abnormal when analyzing the luminance of the input image captured by a CCD camera or the like, and the inspection apparatus must be frequently stopped. , Inspection efficiency decreases.
In addition, there is processing oil that always adheres to the lead frame during press working, and various oil removing means are provided upstream from the imaging surface, but an oil block may remain on the imaging surface. In this case, even if the lead frame is normal, it is often determined as abnormal when analyzing the luminance of the input image captured by a CCD camera or the like, and the inspection apparatus must be frequently stopped, resulting in a decrease in inspection efficiency. To do.
[0006]
The object of the present invention is to solve the above-mentioned problems of the prior art, and to perform a high-precision and efficient inspection using the lead frame flutter prevention mechanism that prevents fluttering and oil mass adhesion at the imaging position and the lead frame flutter prevention mechanism. An object of the present invention is to provide a lead frame inspection apparatus capable of performing this.
[0007]
[Means for Solving the Problems]
In order to achieve the above object, the present invention comprises the following arrangement.
That is, in the lead frame fluttering prevention mechanism, at least the imaging position of the guide means that guides the continuous lead frame in a strip shape conveyed to the imaging position and the lead frame that is guided by the guide means and passes through the imaging position Air blowing means for suppressing fluttering by blowing air to the imaging surface of the lead frame on the upstream side, Oil suction means for sucking and removing processing oil adhering to the guide means on the upstream side of the imaging position; It is provided with.
[0008]
In the lead frame inspection apparatus, the lead frame fluttering that suppresses fluttering of the lead frame at the imaging position while guiding the lead frame transported by the transporting means and the transport means for transporting the continuous lead frame in a belt shape to the imaging position. A prevention mechanism, an imaging means for inputting an image of a lead formation region of the lead frame at the imaging position, and a ring-like arrangement surrounding the optical axis of the imaging means, and a multistage in the optical axis direction between the lead frame and the imaging means Illuminating means for irradiating light to the lead frame, and control means for controlling the operation of the inspection apparatus to be paused when an abnormality is detected by analyzing the luminance data of the input image captured from the imaging means. It is characterized by that.
[0009]
DETAILED DESCRIPTION OF THE INVENTION
Preferred embodiments of a lead frame inspection apparatus according to the present invention will be described below in detail with reference to the accompanying drawings.
FIG. 1 is an explanatory view showing the overall structure of a lead frame manufacturing apparatus including a lead frame inspection apparatus, FIG. 2 is a block explanatory view showing the structure of the lead frame inspection apparatus, FIG. 3 is a cross-sectional explanatory view of the lead frame inspection apparatus, and FIG. Is a plan view of the lead frame flutter prevention mechanism, FIG. 5 is a front view of the lead frame flutter prevention mechanism, FIG. 6 is an explanatory view seen from the direction of arrow D in FIG. 4, and FIG. FIG. 8 is a cross-sectional view taken along line FF in FIG. 4, and FIG. 9 is an explanatory view showing a mounting configuration of the hole position detecting means.
[0010]
First, an overall configuration of a lead frame manufacturing apparatus including a lead frame inspection apparatus will be described with reference to FIG. Reference numerals 1 and 2 denote reels for winding the lead frame 3 which is continuous in a belt shape. In this embodiment, the lead frame is drawn from the reel 1 for feeding on the left side of the drawing. 3 And is wound around a take-up reel 2 arranged on the right side of the drawing.
[0011]
Reference numeral 4 denotes a leveler, which is a device for flattening the winding of the lead frame 3 fed from the feeding reel 1. Reference numeral 5 denotes a press device that is equipped with an upper die 5a and a lower die 5b to form leads by pressing. A lead frame inspection apparatus 6 inspects whether the surface state of the lead frame 3 punched out by the press apparatus 5 is abnormal such as dents, scratches, and discoloration. The lead frame inspection device 6 includes a transport roller 6a as a transport means, a plurality of ring lights 6b constituting a part of the illumination means, a CCD (charge coupled device) camera 6c as an image pickup means, a ring light 6b, A movable table 6d and the like on which the CCD camera 6c is mounted are provided. Reference numeral 7 denotes an interlayer paper, which is interposed between the lead frames 3 wound around the winding reel 2 to be wound up, and is protected from rubbing between the lead frames. In this embodiment, the lead frame inspection device 6 is disposed after the press device 5, but the lead frame 3 It is also possible to arrange it after the cleaning device or after other processing.
[0012]
Next, the overall configuration of the lead frame inspection apparatus 6 will be described with reference to a block diagram with reference to FIG. 8 is a control means for controlling the operation of the entire apparatus according to the control program, temporarily storing data input from the outside, and storing a RAM used as a working area for the CPU 8a and a control program for the CPU 8a. A storage unit 8b having a ROM, an input / output unit (I / O unit) 8c for inputting / outputting data, an illuminance controller 8d for controlling the illuminance of the light source device 9 of the ring illumination 6b, and an image taken by the CCD camera 6c Is equipped with an image processing board 8e for performing mask processing. An image for monitor display described later is input to the image processing board 8e from the CCD camera 6c.
[0013]
Reference numeral 10 denotes a controller as driving means, which is a driver for operating / stopping a driving motor (not shown) for driving the conveying roller 6a for conveying the lead frame 3 and a driving motor (not shown) for scanning the movable table 6d. It has a circuit. The CPU 8a receives a detection signal from the frame conveyance sensor 11 for detecting the conveyance amount of the lead frame 3 via the I / O unit 8c, and outputs a control signal for operating / stopping the press device 5. Is done.
[0014]
The CPU 8a of the control means 8 controls the illuminance of the light source device 9 with the illuminance controller 8d and irradiates the lead frame 3 with the light having the same brightness by the ring-shaped illumination 6b. In this embodiment, one IC piece is photographed as a region having substantially the same brightness by the CCD camera 6c, and is captured as luminance data via the image processing board 8e and stored in the storage unit 8b. At this time, luminance data is captured by performing mask processing with an image processing board 8e as necessary on a portion (for example, a hole) that does not require inspection when capturing an image while conveying the lead frame 3.
When the inspection image area centered on the inspection image point is designated, the CPU 8a inspects the area for each pixel. When the inspection image area is not designated, the CPU 8a inspects the entire screen for each pixel. If an abnormality is detected as a result of the inspection, the controller 10 controls the drive of the transport roller 6a via the input / output unit 8c to stop the transport operation.
[0015]
Next, a specific apparatus configuration of the lead frame inspection apparatus 6 will be described with reference to FIG. Hereinafter, description will be given according to the transport path of the lead frame 3 after pressing. The lead frame 3 hangs down in a U shape downward from the left side of the drawing and enters the inspection device 6, and is conveyed vertically upward along a lead frame flutter prevention mechanism 12 described later.
[0016]
A plurality of sensors are provided at positions where the lead frame 3 enters the inspection device 6. Reference numeral 6e denotes an inspection side stop sensor which stops the operation of the conveying roller 6a when a slack portion of the lead frame 3 is detected. That is, when the pressing device 5 is stopped due to an abnormality, if the conveying roller 6a continues to rotate, winding of the slack portion of the lead frame 3 proceeds and reaches the A position. At this time, when the inspection side stop sensor 6e detects a slack portion of the lead frame 3, the inspection device 6 stops the rotation of the transport roller 6a.
Reference numerals 6f and 6g denote speed control sensors, which control the rotational speed of the transport roller 6a so that the slack portion of the lead frame 3 is maintained within a predetermined range. That is, when the slack portion of the lead frame 3 is detected by the speed control sensor 6f, the take-up speed of the transport roller 6a is too fast than the transport speed of the press device 5, so that the controller is configured to slow down the rotation speed of the transport roller 6a. 10, when the slack portion of the lead frame 3 is detected by the speed control sensor 6 g, the winding speed of the transport roller 6 a is too slow than the transport speed of the press device 5, so the rotational speed of the transport roller 6 a is increased. Thus, the controller 10 controls the speed so that the slack portion of the lead frame 3 is kept between the speed control sensors 6f and 6g.
Reference numeral 6h denotes a press-side stop sensor, which stops the operation of the press device 5 when a slack portion of the lead frame 3 is detected. That is, when an abnormality occurs in the inspection device 6 and the transport roller 6a stops or the rotation operation is delayed, the lead frame 3 is not wound up and the slack portion increases and reaches the C position. At this time, when the press-side stop sensor 6h detects a slack portion of the lead frame 3, the press device 5 stops the press operation.
[0017]
Further, the lead frame 3 is positioned in the width direction and the height direction by the lead frame flutter prevention mechanism 12, and the lead frame 3 is led by the ring-shaped illumination 6b attached to the movable table 6d movable in the YZ axis direction indicated by the arrows in the figure. A predetermined area of the frame 3 is irradiated with light, and the surface image is captured by the CCD camera 6c. The ring-shaped illumination 6b surrounds the optical axis of the CCD camera 6c, and is multistage along the optical axis direction between the lead frame 3 and the CCD camera 6c (in this example, it is two stages, but may be three or more stages). Is arranged. The movable table 6d is configured to be able to scan in the YZ-axis direction of FIG. 3 by a drive motor (not shown). The illuminance of the ring-shaped illumination 6b is adjusted by the light source device 9 provided below the movable table 6d in accordance with the brightness of the lead formation region of the lead frame 3. The focal point of the CCD camera 6c is manually adjusted by a knob 6j on the rear end side of the movable table 6d. In FIG. 3, the Y-axis direction is a direction perpendicular to the paper surface.
[0018]
The lead frame fluttering prevention mechanism 12 flutters the lead frame 3 which is continuous in a strip shape conveyed to the imaging position P by blowing air to the imaging surface (inspection surface side) of the lead frame 3 at least upstream of the imaging position. suppress. The lead frame 3 is subjected to image inspection by inputting an image from the CCD camera 6c while being continuously conveyed. At this time, image input by the CCD camera 6c is preferably performed in units of one piece in synchronization with a detection signal (permission flag) output from the frame conveyance sensor 11. The frame transport sensor 11 detects the position and transport speed of the lead frame 3 and determines the image capture position.
The transport roller 6a is rotationally driven by a drive motor (not shown), and transports the lead frame 3 wound around a part of its arc surface. At this time, the position of the slack portion of the lead frame 3 is detected by the speed control sensors 6f and 6g, and the drive operation of the drive motor (not shown) is controlled to control the transport operation of the lead frame 3 by the transport roller 6a. Is done.
[0019]
A conveyance guide 13 guides the conveyance of the lead frame 3 through the conveyance roller 6a. In the conveyance path of the conveyance guide 13, there are provided a plurality of auxiliary rollers 14 that rotate in contact with one or both of the upper and lower sides of the lead frame 3. The lead frame 3 that has passed through the transport guide 13 is guided out of the apparatus and transported to the winding side.
[0020]
In addition, a control panel 15 having a control unit 8, a power supply unit, and the like is disposed at the lower part of the apparatus. Further, a control monitor 16a for controlling control data and a display monitor 16b for displaying an image captured from the CCD camera 6c in real time are provided on the upper part of the apparatus. It should be noted that one monitor may be used for control for control data control and for image display while switching.
[0021]
Here, the configuration of the lead frame fluttering prevention mechanism 12 will be described in detail with reference to FIGS.
4 and 5, the lead frame fluttering prevention mechanism 12 includes a plurality of feed rods as guide means for guiding the lead frame 3 that is conveyed through the imaging position P in order to inspect the lead frame 3 that is continuous in a band shape. And a feed roller.
Reference numeral 17 denotes a first base member. The first base member 17 is provided with a plurality of upper and lower feed rods 18 at a plurality of locations on the upstream side and the downstream side of the imaging position P along the conveyance direction of the lead frame 3. It has been. The feed rod 18 is made of steel. As shown in FIG. 6, the rod is fixed to a feed rod support member 19 that is formed upright from the first base member 17 with a predetermined clearance between the rods. It is supported rotatably. The feed rod 18 prevents the lead frame 3 from coming off from the V groove 21 a of the feed roller 21.
[0022]
Reference numeral 20 denotes a second base member, which is disposed so as to be superimposed on both sides of the first base member 17 in the width direction. The second base member 20 is provided with feed rollers 21 at a plurality of locations facing each other on the upstream side and the downstream side of the imaging position P along the conveyance direction of the lead frame 3. A steel material is used for the feed roller 21, and as shown in FIG. 5, V-grooves 21 a are formed on the circumferential surface of the roller and guide both side surfaces of the lead frame 3. The feed roller 21 is rotatably supported by a support member 22 provided on the second base member 20. The second base member 20 is supported so as to be movable by fitting a linear guide 20a provided on the back side thereof into a guide rail 17a provided in the width direction of the lead frame 3 on the first base member 17. Yes.
Further, the support member 22 upstream of the imaging position P is provided with oil suction portions 23 on both sides as oil suction means for sucking and removing the processing oil adhering to the feed roller 21. Further, the support member 22 on the downstream side from the imaging position P is provided so as to be slidable on the second base member 20 in the longitudinal direction of the lead frame 3.
[0023]
Reference numeral 24 denotes a third base member, which is supported on the first base member 17 in an area corresponding to the imaging position P. The third base member 24 is supported by being biased upward by a support spring 25 that is elastically mounted between the third base member 17 and the first base member 17. Further, as shown in FIG. 8, the third base member 24 supports a lower feed roller 27 a rotatably at a plurality of locations upstream and downstream of the imaging position P. The third base member 24 is supported by an up / down rod 30 provided through the first base member 17 so as to be movable up and down.
In addition, stopper blocks 31 are provided at the center in the width direction of the first base member 17 and on the upstream side and the downstream side of the imaging position P. The stopper block 31 is provided with a stopper pin 31a. It is installed vertically. The third base member 24 is provided with a stopper plate 24a. The third base member 24 is positioned with respect to the first base member 17 by bringing the stopper plate 24a into contact with the stopper pin 31a. Yes.
[0024]
In FIG. 8, the first base member 17 is provided with guide rails 17b in the width direction of the lead frame 3, and support members 26 are fitted on both sides of the guide rails 17b so as to be movable. Yes. On the support member 26, an upper feed roller 27b is rotatably supported at a plurality of locations on the upstream side and the downstream side of the imaging position P. As the vertical feed rollers 27a and 27b, rollers in which a soft material such as rubber is formed in a cylindrical shape are preferably used. Of the pair of upper and lower feed rollers 27a and 27b, those upstream of the imaging position P are arranged with a slight separation between the rollers, and those downstream of the imaging position P form a nip portion between the rollers. Then, guide the lead frame 3 while biting it up and down. This is for guiding the lead frame 3 while suppressing the fluttering of the lead frame 3 on the upstream side from the imaging position P, as will be described later.
[0025]
The support member 26 is provided with a feed roller 28 that guides both side surfaces of the lead frame 3 on the upstream side and the downstream side of the imaging position P. As the feed roller 28, a roller formed of a steel material in a cylindrical shape is preferably used. Further, an inclined feed roller 29 shown in FIG. 7 is supported on the support member 26 on the upstream side of the imaging position P so as to be rotatable on both sides. The inclined feed rollers 29 are provided so as to be inclined with respect to the center in the width direction of the lead frame 3, and are in contact with both side edges in the width direction of the lead frame 3 to guide while suppressing fluttering. The inclination angle of the inclined feed roller 29 and the interval between the rollers can be arbitrarily set by adjusting the mounting member 29a, but the inclination angle is inclined about 70 ° with respect to the inspection surface of the lead frame 3. Is preferred.
[0026]
In FIG. 4, the support member 26 on the upstream side of the imaging position P is provided with an air blowing portion 32 as air blowing means. The air blowing portion 32 is disposed in the vicinity of the center in the width direction from above the inspection surface of the lead frame 3, and air is blown from one or more nozzles to the inspection surface of the lead frame 3 to suppress fluttering. The air blowing unit 32 is desirably provided at least on the upstream side of the imaging position P, but may be provided on the downstream side of the imaging position P.
[0027]
In FIG. 9, on the stopper block 31 on the downstream side of the imaging position P, a concave mounting block 33 having an open top is provided. Feed rod support members 34 are respectively attached to the outsides of the standing walls on both sides of the attachment block 33, and a pair of upper and lower feed rods 18 are supported by the feed rod support member 34 so as to be fixed or rotatable.
[0028]
A columnar mounting block 35 is erected on the second base member 20, and a mounting plate 36 is installed on the upper end surface of the mounting block 35. The mounting plate 36 is formed with a mounting hole 36 a for the frame conveyance sensor 11 and a positioning pin hole 36 b for positioning the second base member 20. As shown in FIGS. 4 and 5, the frame transport sensor 11 is suspended in the mounting hole 36 a of the mounting plate 36. Further, a positioning pin 37a described later is inserted into the positioning pin hole 36b, and the position of the second base member 20 is adjusted on the downstream side of the imaging position P in accordance with the width of the lead frame 3.
[0029]
The mounting plate 36 is also used to adjust the position of the second base member 20 on the upstream side of the imaging position P. That is, the positioning block 37 is provided on the first base member 17 on the upstream side from the imaging position P, and the positioning pin 37a is fitted on the upper end surface thereof. The mounting plate 36 adjusts the position of the second base member 20 according to the width of the lead frame 3 by inserting the positioning pins 37a into the positioning pin holes 36b.
When the type of the lead frame 3 is changed in this way, the second base member 20 can be positioned in the width direction using the common mounting plate 36 on the upstream side and the downstream side of the imaging position P. In addition, the width of the second base member 20 can be adjusted by using a common positioning pin 37a on the upstream side and the downstream side of the imaging position P.
[0030]
Next, the inspection operation of the lead frame inspection apparatus 6 configured as described above will be described. In this embodiment, the surface state is detected for each IC piece while the lead frame 3 is continuously conveyed. In FIG. 1, the lead frame 3 that is continuously processed and conveyed through the press device 5 enters the lead frame inspection device 6, and an image is captured from the CCD camera 6 c for each IC piece of the lead frame 3. A difference in luminance data between inspection images obtained by analyzing the input image is compared for each pixel in consideration of an inter-image variation amount (allowable value), and abnormality determination is performed. When an abnormality is detected, the inspection operation is temporarily stopped, the recovery process is performed, and the inspection is started again.
[0031]
According to the above configuration, air is blown from the air blowing unit 32 to the imaging surface of the lead frame 3 at least upstream of the lead frame 3 passing through the imaging position P, so that fluttering can be effectively suppressed at the imaging position P. Therefore, it is not determined that the lead frame 3 in the normal state is abnormal. In particular, when an inclined feed roller 29 is provided on the upstream side of the image pickup position P so as to be inclined and turnable toward the center in the width direction of the lead frame 3, the width of the lead frame 3 in addition to air is provided. Fluttering can be suppressed by abutting against both side edges in the direction.
In this way, by suppressing the fluttering of the lead frame 3 at the imaging position P, the lead frame inspection device 6 can set a lower allowable value indicating the fluctuation of the luminance data of the input image captured from the CCD camera 6c. The detection performance of the trace can be improved and the fine dent can be detected with high accuracy.
In addition, when the oil suction portion 23 that sucks and removes the processing oil attached to the feed roller 21 is provided on the upstream side of the imaging position P, the oil lump that adheres to the imaging surface of the lead frame 3 is reduced, and fluttering and oil In a normal state such as dirt, the frequency of stoppage of the apparatus is reduced, and inspection efficiency can be improved.
[0032]
The lead frame flutter prevention mechanism of the present invention is not limited to the above-described embodiment, but the installation angle, height position and width direction position of the feed rollers 21, 28, 29, etc., as guide means, and these leads The arrangement configuration in the frame conveyance direction, the arrangement configuration of the air blowing unit 32, and the like can be arbitrarily changed. Further, the installation location of the lead frame inspection device is not limited to the location after the press device 5, and may be installed after cleaning the lead frame or after other processing, and so on, so that many modifications are made without departing from the spirit of the invention. Of course you get.
[0033]
【The invention's effect】
Since the present invention blows air from the air blowing means to the imaging surface of the lead frame at least upstream of the lead frame passing through the imaging position as described above, flutter can be effectively suppressed at the imaging position, and the normal state No abnormal determination is made on the lead frame. In particular, in the case where a pressing member that is tilted toward the center in the width direction of the lead frame and supported rotatably is provided on the upstream side of the imaging position, both edges in the width direction of the lead frame in addition to air blowing The fluttering can be suppressed by abutting against the part.
In this way, by suppressing the lead frame fluttering at the imaging position, the lead frame inspection apparatus can set a lower allowable value indicating the fluctuation of the luminance data of the input image captured from the imaging means, so that particularly the detection performance of the dent is detected. This makes it possible to detect fine dents with high accuracy.
In addition, when an oil suction means is provided on the upstream side of the imaging position to suck and remove the processing oil adhering to the imaging surface of the lead frame, the oil mass adhering to the imaging surface of the lead frame is reduced, causing flapping and oil contamination. In the normal state such as the above, the frequency of stopping the apparatus is reduced, and the inspection efficiency can be improved.
[Brief description of the drawings]
FIG. 1 is an explanatory diagram showing an overall configuration of a lead frame manufacturing apparatus including a lead frame inspection apparatus.
FIG. 2 is a block diagram illustrating a configuration of a lead frame inspection apparatus.
FIG. 3 is a cross-sectional explanatory view of a lead frame inspection apparatus.
FIG. 4 is a plan view of a lead frame flutter prevention mechanism.
FIG. 5 is a front view of a lead frame flutter prevention mechanism.
6 is an explanatory view of the lead frame flutter prevention mechanism of FIG. 4 as viewed from the direction of arrow D. FIG.
7 is an explanatory view of the lead frame flutter prevention mechanism of FIG. 4 as viewed from the direction of arrow E. FIG.
8 is a cross-sectional view of the lead frame flutter prevention mechanism of FIG.
FIG. 9 is an explanatory view showing a mounting configuration of hole position detecting means.
[Explanation of symbols]
1 Reel for feeding
2 Reel for take-up
3 Lead frame
4 Leveler
5 Press equipment
6 Lead frame inspection equipment
6a Transport roller
6b Ring lighting
6c CCD camera
6d movable table
6e Inspection side stop sensor
6f, 6g Speed control sensor
6h Stop sensor for press side
7 Interlayer paper
8 Control means
8a CPU
8b storage unit
8c Input / output section
8d Illuminance controller
8e Image processing board
9 Light source device
10 Controller
11 Frame transport sensor
12 Lead frame flutter prevention mechanism
13 Transport guide
14 Auxiliary roller
15 Control panel
16a Control monitor
16b Display monitor
G Optical axis
17 First base member
17a, 17b Guide rail
18 Feed rod
19, 34 Feed rod support member
20 Second base member
20a Linear guide
21, 28 Feed roller
21a V groove
22, 26 Support member
23 Oil suction part
24 Third base member
24a Stopper plate
25 Support spring
27a Bottom feed roller
27b Top feed roller
29 Inclined feed roller
30 Vertical rod
31 Stopper block
31a Stopper pin
32 Air spraying part
33, 35 Mounting block
36 Mounting plate
36a Mounting hole
36b Positioning pin hole
37 Positioning block
37a Positioning pin

Claims (4)

Guide means for guiding a continuous lead frame in a strip shape conveyed to the imaging position;
Air blowing means for suppressing flutter by blowing air to the imaging surface of the lead frame at least upstream of the imaging position of the lead frame guided by the guide means and upstream of the imaging position; and upstream of the imaging position And an oil suction means for sucking and removing the processing oil adhering to the guide means .   The guide means includes a plurality of guide rollers for guiding the imaging front and back surfaces of the lead frame and both side surfaces of the lead frame, and the installation angle, height position, and width direction position are each variably provided. The lead frame fluttering prevention mechanism according to claim 1.   The lead frame fluttering prevention mechanism according to claim 1 or 2, further comprising a pressing member that abuts against both edge portions in the width direction of the lead frame and suppresses the floating on the upstream side of the imaging position. Transport means for transporting a continuous lead frame in a belt shape to the imaging position;
The lead frame fluttering prevention mechanism according to any one of claims 1 to 3, wherein fluttering of the lead frame is suppressed at the imaging position while guiding the lead frame transported by the transport means.
Imaging means for inputting an image of a lead formation region of the lead frame at the imaging position;
Illuminating means for irradiating light to the lead frame, arranged in a ring shape so as to surround the optical axis of the imaging means, and arranged in multiple stages in the optical axis direction between the lead frame and the imaging means;
Control means for controlling to temporarily stop the operation of the inspection device when analyzing the luminance data of the input image captured from the imaging means and detecting an abnormality;
A lead frame inspection apparatus comprising:

Images