JP2012117918A - Device and method for observation and evaluation of end part of sheet material - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a device and a method for observation which constantly maintains an optimal condition of an observation image of an end part of a sheet material without installing an expensive position sensor and to provide a device and a method for observation and evaluation capable of preventing variations in evaluation results based on the observation images.SOLUTION: In a device and a method for observing and evaluating an end part of a continuously conveyed sheet material by using first and second observation means, the first observation means includes the end part of the sheet material in the width direction in its field of view and is mounted on a first observation means position change mechanism which is capable of changing the distance from the end part of the sheet material in the thickness direction, and the second observation means includes the end part of the sheet material in the thickness direction in its field of view and is mounted on a second observation means position change mechanism which is capable of changing the distance from the end part of the sheet material in the width direction. Based on observation information from the first and the second observation means, the positions of the end parts of the sheet material in the width and thickness directions are detected, and the first and the second observation means position change mechanisms are controlled.

Description

  The present invention relates to an apparatus and a method for observing and evaluating an end portion of a thin sheet material, a thinned semiconductor wafer or a liquid crystal glass substrate used for, for example, a printed wiring circuit or a secondary battery.

  In recent years, as electronic devices such as notebook computers, mobile phones, and digital cameras have become smaller, lighter, and cordless, thin parts and thin plates are often used. For example, as a driving power source used for a small electronic device, a sealed secondary battery that is small and lightweight, has a high energy density, and can be repeatedly charged and discharged has become widespread. In addition, a large-sized secondary battery is also becoming popular as a driving power source for automobiles in consideration of the environment. The secondary battery has various shapes such as a coin shape, a cylindrical shape, a box shape, and an oval shape.

  By the way, in the case of a large battery used as a battery for vehicles such as automobiles and trains, from the viewpoint of battery performance and productivity, a positive electrode plate rather than a roll-up structure used for a cylindrical battery. Use a rectangular battery rather than a cylindrical one because the structure in which the negative electrode plate and the negative electrode plate are alternately stacked is more suitable, and the space where the battery is installed is more efficient. Has been proposed (for example, Patent Document 1).

  In the case of a secondary battery having a laminated structure, a material called an active material is applied to a sheet material that serves as a positive electrode and a negative electrode, and an insulating sheet material called a separator is sandwiched between them. It is.

  Each of the electrode plates described above is manufactured by cutting a sheet material into a predetermined shape with a cutter or the like. During this cutting, an elongated burr with a sharp tip may be formed on the cut end surface of the electrode plate. Although such burrs are generally minute, if such burrs are formed so as to protrude in the stacking direction, the negative electrode plate that penetrates the adjacent separator and faces the positive electrode plate is electrically connected. There is also a possibility of connecting to lead to short circuit failure of the battery. For this reason, it is necessary to inspect for the presence or absence of burrs at the end of the sheet material, which is performed using various apparatuses (for example, Patent Document 2).

  Although burrs extend to near the surface layer of the active material, it is difficult to reliably detect burrs when buried in the active material or when the exposure of burrs is very small. Further, in the case of contact-type automatic inspection, there is a possibility that the active material may be peeled off due to variations in the film thickness of the coating film or shaking during conveyance. Therefore, non-contact automatic inspection using observation means such as a camera is desirable.

  However, when the inspection is continuously performed, the sheet material being conveyed may flutter or the position may change, causing the observation image to be out of focus. In order to eliminate a focus change caused by camera observation, a technique using a position change mechanism capable of adjusting a focus position and a distance sensor is disclosed (for example, Patent Document 3).

JP 2003-272593 A JP 2010-1114011 A JP 2003-4643 A

  Therefore, when observing burrs and chips that may exist at the edge of the sheet material that is continuously conveyed and making an evaluation based on the observation, a camera or the like from two directions orthogonal to the conveying direction, that is, the width direction and the thickness direction, etc. It is suitable to observe using the observation means. However, the continuously conveyed sheet material tends to meander in the width direction and the thickness direction. Therefore, if the observation field is narrowed and the observation magnification is increased for strict evaluation, the surface of the sheet material to be observed moves, the observation image is out of focus, and proper observation cannot be performed. It was happening.

  In addition, in order to focus the observation image, it is necessary to install a position sensor such as a distance sensor or an edge sensor separately from the observation means in each of the two directions. Therefore, it was necessary to use an expensive position detector.

  Therefore, the present invention has been made in view of the above-described problems, and an observation apparatus and method in which an observation image of an end portion of a sheet material is always in an optimum state without attaching an expensive position detector, and an observation image It is an object of the present invention to provide an evaluation apparatus and method that can prevent variations in evaluation results using the.

In order to solve the above problems, the invention described in claim 1
In the observation device for the sheet material end, which observes the continuously conveyed sheet material end using the first observation means and the second observation means,
The first observing means is attached to a first observing means position changing mechanism that includes a width direction end portion of the sheet material in a visual field and capable of changing a distance from the sheet material end portion in a thickness direction of the sheet material. And
The second observation means is attached to a second observation means position changing mechanism that includes a thickness direction end portion of the sheet material in a visual field, and is capable of changing a distance from the sheet material end portion in the width direction of the sheet material. And
A width direction end position detection unit that detects a position of the width direction end of the sheet material based on observation information in an observation field of view of the first observation unit;
A thickness direction end position detection unit that detects the position of the thickness direction end of the sheet material based on observation information in the observation field of view of the second observation means;
Based on the detection result of the thickness direction end position detection unit, to control the first observation means position change mechanism,
An observation apparatus for an end portion of a sheet material, comprising: an observation means position control section that controls the second observation means position changing mechanism based on a detection result of the width direction end position detection section. It is.

The invention described in claim 6
In the method for observing the edge of the sheet material, the edge of the continuously conveyed sheet material is observed using the first observation means and the second observation means.
The first observing means is attached to a first observing means position changing mechanism that includes a width direction end portion of the sheet material in a visual field and capable of changing a distance from the sheet material end portion in a thickness direction of the sheet material. And
The second observation means is attached to a second observation means position changing mechanism that includes a thickness direction end portion of the sheet material in a visual field, and is capable of changing a distance from the sheet material end portion in the width direction of the sheet material. And
Obtaining observation information within the observation field of view of the first observation means, and detecting the position of the width direction end portion of the sheet material, a width direction end position detection step;
Obtaining observation information within the observation field of view of the second observation means, and detecting the position of the thickness direction end of the sheet material, and a thickness direction end position step,
A first observation means position adjustment step for controlling the first observation means position changing mechanism based on the position information of the thickness direction edge portion of the sheet material detected in the thickness direction edge position detection step; And
A second observation means position adjustment step for controlling the second observation means position changing mechanism based on the position information of the width direction edge part of the sheet material detected in the width direction edge position detection step; This is a method of observing the end portion of the sheet material.

  Since the apparatus and method for observing the edge of the sheet material are used, even if the sheet material to be moved and conveyed is displaced or fluttered in two directions orthogonal to the conveyance direction, that is, the width direction or the thickness direction, the sheet material and the observation means The distance between each other can be kept constant and in a focused state. In addition, since the focus adjustment is not performed by moving the movable lens, it is possible to prevent changes in observation conditions such as lens aberration, the size and distortion of the observation image, and the like.

The invention described in claim 2
A sheet member comprising: an evaluation unit that observes an end portion of the sheet material that is continuously conveyed by using the first observation unit and the second observation unit, and evaluates the state of the sheet material end unit based on each observation information; In the material edge evaluation device,
The first observing means is attached to a first observing means position changing mechanism that includes a width direction end portion of the sheet material in a visual field and capable of changing a distance from the sheet material end portion in a thickness direction of the sheet material. And
The second observation means is attached to a second observation means position changing mechanism that includes a thickness direction end portion of the sheet material in a visual field, and is capable of changing a distance from the sheet material end portion in the width direction of the sheet material. And
A width direction end position detection unit that detects a position of the width direction end of the sheet material based on observation information in an observation field of view of the first observation unit;
A thickness direction end position detection unit that detects the position of the thickness direction end of the sheet material based on observation information in the observation field of view of the second observation means;
Based on the detection result of the thickness direction end position detection unit, to control the first observation means position change mechanism,
An evaluation apparatus for an end portion of a sheet material, comprising: an observation means position control section that controls the second observation means position changing mechanism based on a detection result of the width direction end position detection section. It is.

The invention described in claim 7
An observation step of observing the continuously conveyed sheet material end using the first observation means and the second observation means, and the sheet using the evaluation means based on the respective observation information obtained in the observation step In the evaluation method of the sheet material end portion, including an evaluation step for evaluating the state of the material end portion,
The first observing means is attached to a first observing means position changing mechanism that includes a width direction end portion of the sheet material in a visual field and capable of changing a distance from the sheet material end portion in a thickness direction of the sheet material. And
The second observation means is attached to a second observation means position changing mechanism that includes a thickness direction end portion of the sheet material in a visual field, and is capable of changing a distance from the sheet material end portion in the width direction of the sheet material. And
Obtaining observation information within the observation field of view of the first observation means, and detecting the position of the width direction end portion of the sheet material, a width direction end position detection step;
Obtaining observation information within the observation field of view of the second observation means, and detecting the position of the thickness direction end of the sheet material, and a thickness direction end position step,
A first observation means position adjustment step for controlling the first observation means position changing mechanism based on the position information of the thickness direction edge portion of the sheet material detected in the thickness direction edge position detection step; And
A second observation means position adjustment step for controlling the second observation means position changing mechanism based on the position information of the width direction edge part of the sheet material detected in the width direction edge position detection step; It is the evaluation method of the edge part of a sheet | seat material characterized by the above-mentioned.

  Since the evaluation apparatus and method for the edge of the sheet material are used, even if the sheet material to be moved and conveyed is displaced or fluttered in two directions orthogonal to the conveying direction, that is, the width direction or the thickness direction, the sheet material and the observation means The distance between each other can be kept constant and in a focused state. In addition, since focus adjustment is not performed by moving the movable lens, it is possible to prevent changes in observation conditions such as lens aberration, observation image size, and distortion, and to prevent variations in evaluation results based on observation images. it can.

The invention according to claim 3
3. The sheet material edge evaluation apparatus according to claim 2, wherein the evaluation means evaluates the presence and size of a defect composed of burrs, chips, scratches, or foreign matter at the edge of the sheet material.

The invention according to claim 8 provides:
8. The sheet material end portion according to claim 7, wherein the evaluation step includes a step of evaluating the presence / absence and size of a defect composed of burrs, chips, scratches, or foreign matters at the end portion of the sheet material. It is an evaluation method.

  If the evaluation apparatus and method for the end portion of the sheet material are used, it is possible to prevent the evaluation results from varying in the presence and size of defects including burrs, chips, scratches, or foreign matters.

The invention according to claim 4
The first and second observation means comprise a combination of a one-dimensional sensor or a two-dimensional sensor and illumination, and the evaluation means recognizes information from the sensor as an image and performs image processing. An apparatus for evaluating an end portion of a sheet material according to claim 2 or 3.

The invention according to claim 9 is:
The first and second observation means comprise a combination of a one-dimensional sensor or a two-dimensional sensor and illumination. In the evaluation step, information from the sensor obtained in the observation step is recognized as an image, and an image 9. The sheet material end portion evaluation method according to claim 7, further comprising a step of performing processing.

  If the evaluation apparatus and method for the sheet material end are used, it is easy to calculate the actual shift amount from the number of pixels obtained by the one-dimensional sensor or the two-dimensional sensor, and the focus position can be adjusted at high speed.

The invention described in claim 5
The sheet material end evaluation device according to claim 2, wherein the sheet material is a battery electrode foil material.

The invention according to claim 10 is:
The sheet material end foil evaluation method according to claim 7, wherein the sheet material is a battery electrode foil material.

  If the evaluation apparatus and method for the edge of the sheet material are used, minute burrs can be automatically detected, so that the productivity of the battery electrode foil material is improved.

  Even if the location of the end of the sheet material changes, the observation image is always in focus, and changes in the observation conditions can be prevented.

It is a perspective view which shows an example of the form which embodies this invention. It is a system configuration figure showing an example of the form which embodies the present invention. It is a flowchart which shows an example of the form which embodies this invention. It is the observation image of the width direction obtained in the initial position based on this invention. It is the observation image of the thickness direction obtained in the initial position based on this invention. It is the observation image of the width direction obtained at a certain time based on this invention. It is the observation image of the thickness direction obtained at a certain time based on this invention. It is the observation image of the width direction obtained in the observation process based on this invention. It is the image of the width direction obtained in the evaluation process based on this invention. It is a burr | flash extraction image of the width direction obtained in the evaluation process based on this invention. It is a chip | tip extraction image of the width direction obtained in the evaluation process based on this invention. It is the observation image of the thickness direction obtained in the observation process based on this invention. It is the image of the thickness direction obtained in the evaluation process based on this invention. It is a burr | flash extraction image of the thickness direction obtained in the evaluation process based on this invention. It is a chip | tip extraction image of the thickness direction obtained in the evaluation process based on this invention. It is a perspective view which shows the 2nd example of the form which embodies this invention.

DESCRIPTION OF EMBODIMENTS Embodiments for carrying out the present invention will be described with reference to the drawings. In the following description, as an example of observation of the present invention, description will be given focusing on observing one side of a sheet material.
FIG. 1 is a perspective view showing an example of a form embodying the present invention.
In each figure, the three axes of the orthogonal coordinate system are X, Y, and Z, the XY plane is the horizontal plane, and the Z direction is the vertical direction. In particular, in the Z direction, the direction of the arrow is represented as the top, and the opposite direction is represented as the bottom.

  The observation device 1 includes a transport unit 2, an observation unit 3, an observation means position changing mechanism 4, an observation illumination unit 5, and a control unit 9. Each component is attached via a device frame (not shown), a fixing bracket, or the like so as to be arranged at a position as shown in FIG.

  The transport unit 2 includes transport rollers 21 to 24. The conveying rollers 21 to 24 are attached to the frame of the observation apparatus 1 so as to be rotatable about the longitudinal direction as a rotation axis, and can convey the sheet material 10 to be observed in the direction of the arrow 11. Driving motors 21m to 24m (not shown) are attached to the conveying rollers 21 to 24.

The observation unit 3 includes a first observation unit 31 and a second observation unit 32. Lenses 33 and 34 are attached to the observation means of the first observation means 31 and the second observation means 32, and the directions of the arrows 35 and 36 can be observed.
The range observed by the first observation means 31 is the portion indicated by the broken line 37 at the end of the sheet material 10 and is the xz plane.
The range observed by the second observation means 32 is a portion indicated by a broken line 38 at the end of the sheet material 10 and is a yz plane.

  The first observation means 31 is attached on the Y-axis stage 41 and can move in the Y direction. The second observation means 32 is attached on the X-axis stage 42 and can move in the X direction. The Y-axis stage 41 and the X-axis stage 42 constitute the observation means position changing mechanism 4 in the present invention, and are movable in two directions (X direction and Y direction) orthogonal to the Z direction that is the transport direction. is there.

  The observation illumination unit 5 is attached so as to face the observation unit 3 with the sheet material 10 interposed therebetween. Specifically, the second observation illumination 52 is the second observation illumination so that the first observation illumination 51 faces the first observation means 31 with the light 53 emitted from the first observation illumination 51. Light 54 emitted from 52 is attached so as to face the second observation means 32.

  As the first and second observation means 31 and 32, an imaging camera using a CCD, CMOS, or other imaging element can be exemplified, and the captured image can be output to the control unit 9 as a video signal. I just need it.

  Examples of the lenses 33 and 34 include those using optical elements such as lenses and mirrors, and any lenses that can form images in the observation visual fields 37 and 38 on the imaging elements of the observation means 31 and 32 may be used. .

  Examples of the Y-axis stage 41 and the X-axis stage 42 include a combination of a guide rail and a slide mechanism with a ball screw and a servo motor, a combination of a guide rail and a slide mechanism with a linear motor, and a piezo actuator. Based on the control signal from the unit 9, any mechanism can be used as long as it has a mechanism capable of positioning and moving in the Y and X directions.

  Examples of the first and second observation illuminations 51 and 52 include LEDs, halogens, incandescent lamps, fluorescent lamps, and other light emitting means. The observation means 31 and 32 can observe the end surface of the sheet material 10. As long as it can emit light including a predetermined wavelength in accordance with the sensitivity wavelength and sensitivity characteristics of the first and second observation means 31 and 32, it is sufficient.

  As will be described in detail later, the control unit 9 includes an information input unit 91, an information output unit 92, a notification unit 93, and other control devices.

  FIG. 2 is a system configuration diagram showing an example of a form embodying the present invention. As shown in FIG. 2, each device of the transport unit 2, the observation unit 3, the observation unit position changing mechanism 4, and the observation illumination unit 5 described above is connected to each device of the control unit 9.

  The control unit 9 includes a control computer 90, an information input unit 91, an information output unit 92, a notification unit 93, an information recording unit 94, and a device control unit 95 connected to each other.

Examples of the control computer 90 include a computer equipped with a numerical operation unit such as a microcomputer, a personal computer, or a workstation.
Examples of the information input unit 91 include a keyboard, a mouse, and a switch.
Examples of the information output unit 92 include an image display display and a lamp.

Examples of the reporting means 93 include a buzzer, a speaker, and a lamp that can alert the worker.
Examples of the information recording means 94 include a semiconductor recording medium, a magnetic recording medium, a magneto-optical recording medium, such as a memory card and a data disk.
Examples of the device control unit 95 include devices called programmable controllers and motion controllers.

  Video signals output from the first and second observation means 31 and 32 are input to the control computer 90 via the image processing unit 96. The image processing unit 96 is generally called a GPU (graphic processing unit), and is installed outside the control computer 90, connected to the housing of the control computer 90, or the control computer 90. The one using the image processing unit can be exemplified.

  As will be described in detail later, the observation image input to the image processing unit 96 is compared with a reference image for pass / fail judgment by a control computer 90 and is judged and evaluated whether it is within a specified value range or not. Can do.

  The device control unit 95 is connected to drive motors 21 m to 24 m, an X-axis stage 42, and a Y-axis stage 41. Further, the device control unit 95 is connected with light amount adjustment units 55 and 56 for individually adjusting the light amounts of the observation lights 51 and 52. Examples of the method of adjusting the amount of illumination light in the light amount adjustment unit include a method of adjusting an applied voltage or current, or adjusting a voltage or current application time.

  The device control unit 95 is connected to other control devices (not shown), and by giving control signals to them, each device can be operated or stopped. Yes.

[End face observation flow by observation means]
FIG. 3 is a flowchart showing an example of a form embodying the present invention. In FIG. 3, a series of flows for observing the end portion of the sheet material 10 is shown for each step.

First, the sheet material 10 is placed on the transport unit 2 of the observation apparatus 1 (s101). In the apparatus configuration of the form shown in FIG.
Next, in a state where the sheet material 10 is stationary, the width direction end portion 10a of the sheet material 10 overlaps the visual field center 37c of the observation visual field 37, and the intermediate position between the thickness direction end portions 10b and 10c of the sheet material 10 is the observation visual field 38. The positions of the X-axis table 42 and the Y-axis table 41 are adjusted so that the first and second observation means 31 and 32 are both in focus with the visual field center 38c (s102). This position is set as the initial position of the X-axis table 42 and the Y-axis table 41 (FIGS. 4A and 4B).

Next, the sheet material 10 is continuously conveyed at a predetermined speed (s103).
In this state, the first observation means 31 observes the end portion including the width direction end portion 10a of the sheet material 10 (s111).
It is detected where in the width direction end portion 10a of the sheet material 10 and the observation visual field 37 and how much it is displaced in the X direction from the initial position (s112).
Based on the detected amount of deviation information, the X-axis stage 42 to which the second observation means 32 is attached is controlled (s113), and the position of the second observation means 32 is adjusted. By doing so, the distance of the 2nd observation means 32 and the width direction edge part 10a of the sheet | seat material 10 is maintained appropriately.

In parallel, the second observation means 32 observes the end portion including the thickness direction end portions 10b and 10c of the sheet material 10 (s121).
It is detected where the thickness direction ends 10b and 10c of the sheet material 10 are in the observation visual field 38 and how much they are shifted in the Y direction with respect to the initial position (s122).
Based on the detected amount of deviation information, the Y-axis stage 41 to which the first observation means 31 is attached is controlled (s123), and the position of the first observation means 31 is adjusted. By doing so, the distance of the 1st observation means 31 and the thickness direction edge part 10b, 10c of the sheet | seat material 10 is maintained appropriately.

  Then, evaluation is performed based on the observation image as necessary (s131).

Thereafter, it is determined whether or not the observation of the end portion of the sheet material 10 is continued (s132). If the observation is finished, the sheet material 10 is taken out (s135).
When the observation is continued, the above steps s111 to s123 are repeated.

FIG. 4A is an observation image in the width direction obtained at the initial position according to the present invention.
FIG. 4A shows a state where the sheet material 10 observed by the first observation means 31 in the above-described step s102 is reflected in the visual field 37. The visual field center 37c and the width direction end portion 10a of the sheet material 10 overlap.

FIG. 4B is an observation image in the thickness direction obtained at the initial position according to the present invention.
FIG. 4B shows a state where the sheet material 10 observed by the second observation unit 32 in the above-described step s102 is reflected in the visual field 38. The visual field center 38c and the straight line 60d indicating the intermediate position between the thickness direction end portions 10b, 10c of the sheet material 10 overlap.
4A and 4B, since the illuminations 51 and 52 are arranged so as to illuminate the sheet material 10 so as to face the first and second observation means 31 and 32, the sheet material 10 is black in the observation image. The background 10z appears white.

FIG. 4C is an observation image in the width direction obtained at a certain time according to the present invention.
FIG. 4C shows a state in which the sheet material 10 observed by the first observation means 31 in the above-described step s111 is reflected in the visual field 37. The width direction end portion 10a of the sheet material 10 is at a position shifted by Dx in the X direction with respect to the visual field center 37c.
Based on the distance information corresponding to Dx, the X-axis stage 42 to which the second observation means 32 is attached is controlled as shown in step s123.

FIG. 4D is an observation image in the thickness direction obtained at a certain time according to the present invention.
FIG. 4D shows a state in which the sheet material 10 observed by the second observation means 32 in the above-described step s121 is reflected in the visual field 38. The straight line 60d indicating the center position of the sheet material 10 is at a position shifted by Dy in the Y direction with respect to the visual field center 38c.
Based on the distance information corresponding to Dy, as shown in step s113, the Y-axis stage 41 to which the first observation means 31 is attached is controlled.

[End position detection based on observation image, burr / chip extraction, evaluation flow]
The procedure for detecting the end position using the image processing unit 96 based on the image acquired in the above-described step 131 in the above-described step 131, and the burr and chip extraction and evaluation flow will be described. In this description, one image will be described for each of the images obtained from the first observation means 31 and the second observation means 32 at a certain time. Here, an example of a procedure in which the control computer 90 automatically determines whether or not the size of the burr or chip is larger than the reference value by performing image processing by binarization.

FIG. 5A is an observation image in the width direction obtained in the observation process based on the present invention.
The first observation means 31 is attached so that the horizontal direction of the visual field 37 is aligned with the width direction (that is, the X direction) of the sheet material 10 and the vertical direction of the visual field 37 is aligned with the flow direction of the sheet material 10 (that is, the Z direction). FIG. 5A shows the sheet material 10 including the width direction end portion 10a and the background 10z, which are observed in the visual field 37 of the first observation means 31. Furthermore, it is shown that the width direction end portion 10a of the sheet material 10 includes burrs 15a and chips 17a that are desired to be detected. At this time, since the illumination 51 is arranged so as to oppose the first observation means 31 and illuminate the sheet material 10, the sheet material 10 is black and the background 10z is white in the observation image.

  The vertical and horizontal dimensions of the visual field 37 of the first observation means 31 are measured in advance. At this time, for example, if the field of view 37 in the horizontal direction (X direction) is 1.024 mm and the number of pixels of the camera is 1024 pixels, the pixel resolution in the horizontal direction (X direction) is 1 μm. Further, if the field of view in the vertical direction (Z direction) is 1.024 mm and the number of pixels of the camera is 1024 pixels, the pixel resolution in the vertical direction (Z direction) is also 1 μm.

FIG. 5B is an image in the width direction obtained in the evaluation process according to the present invention.
In order to detect the position of the width direction end portion 10a of the sheet material 10, a straight line 60a that defines the width direction end portion of the sheet material is defined. The straight line 60a is subjected to correction processing such as brightness correction and contour correction on the acquired observation image, and is defined so as to approximately fit the width direction end portion 10a based on the brightness and contrast information of the image. And the said straight line 60a is made into the width direction edge part of the sheet | seat material 10, and the area | region 61A inside the said linear part is handled as a sheet | seat material part.

  The detected position information in the width direction (X direction) of the straight line 60a is handled as the position in the width direction end of the sheet material in the present invention, and is used for position adjustment of the second observation means 32. For example, in the initial state, it is assumed that the end position 10a of the sheet material observed by the first observation unit 31 overlaps the visual field center 37c of the visual field 37 and is the optimum focal position of the second observation unit 32. . Then, at a certain time, it is assumed that the straight line 60a handled as the end portion of the sheet material observed by the first observation means 31 is shifted from the visual field center 37c of the visual field 37 by the length Dx in the X direction.

If the shift amount Dx in the width direction is 100 pixels by the first observation means, Dx is 100 μm. Therefore, the X-axis stage 42 to which the second observation means 32 is attached is controlled by using the control computer 90 and the control unit 95 so that the second observation means 32 moves 100 μm in the X direction.
By doing so, even if the sheet material is displaced by 100 μm in the width direction (X direction), the position of the second observation means can be controlled so as to move 100 μm in the width direction (X direction). It is possible to maintain the optimum focal position between the observation means 32 and the end of the sheet material in the width direction.

  When detecting the burr, a portion protruding outside the region 61A in the visual field 37 is extracted as a burr protruding from the end of the sheet material.

FIG. 5C is a burr extraction image in the width direction obtained in the evaluation process based on the present invention.
The calculation is performed so that the area 61A in the field of view 37 becomes a white image, and the portion remaining as a black image is handled as a burr.

  Then, the number of pixels of the portion treated as the burr portion is calculated and obtained, and the apparent area of the burr is obtained from the pixel resolution. Then, according to the apparent area of the burr, the control computer 90 determines whether the portion is within the allowable range or outside the allowable range. Those having an area larger than the reference value are extracted large burrs 65a and are determined to be burrs. On the other hand, if the area is smaller than the reference value, the extracted small burr 65b is determined to be not a burr.

  When detecting the chipping, the recessed portion inside the area 61A in the visual field 37 is extracted as a chipping lurking at the end of the sheet material.

FIG. 5D is a chipped extracted image in the width direction obtained in the evaluation process according to the present invention.
The calculation is performed so that the region 61B outside the region 61A in the visual field 37 becomes a black image, and the portion remaining as a white image in the visual field 37 is handled as a chip.

  Then, the number of pixels of the portion treated as the missing portion is calculated and obtained, and the apparent area of the missing portion is obtained from the pixel resolution. Then, according to the apparent area of the chip, the control computer 90 determines whether the portion is within the allowable range or out of the allowable range. If the area is larger than the reference value, the extracted large chip 67a is determined to be a chip. On the other hand, the one having an area smaller than the reference value is the extracted small chip 67b, and is determined not to be a chip.

FIG. 6A is an observation image in the thickness direction obtained in the observation process based on the present invention.
The second observation means 32 is attached so that the lateral direction of the visual field 38 is aligned with the thickness direction (that is, the Y direction) of the sheet material 10 and the vertical direction of the visual field 38 is aligned with the flow direction of the sheet material 10 (that is, the Z direction). 6A shows the sheet material 10 including the thickness direction end portions 10b and 10c and the background 10z, which are observed in the visual field 38 of the second observation means 32. FIG. Further, it is shown that the thickness width direction end portions 10b and 10c of the sheet material 10 include burrs 15a and chips 17a to be detected. At this time, since the illumination 52 is arranged so as to oppose the second observation means 32 and illuminate the sheet material 10, the sheet material 10 is black and the background 10z is white in the observation image.

  The vertical and horizontal dimensions of the visual field 38 of the second observation means 32 are measured in advance. At this time, for example, if the field of view 38 in the horizontal direction (Y direction) is 1.024 mm and the number of pixels of the camera is 1024 pixels, the pixel resolution in the horizontal direction (Y direction) is 1 μm. Further, if the field of view in the vertical direction (Z direction) is 1.024 mm and the number of pixels of the camera is 1024 pixels, the pixel resolution in the vertical direction (Z direction) is also 1 μm.

FIG. 6B is an image in the thickness direction obtained in the evaluation process based on the present invention.
In order to detect the positions of the thickness direction end portions 10b and 10c of the sheet material 10, straight lines 60b and 60c are defined as the thickness direction end portions of the sheet material. The straight lines 60b and 60c are subjected to correction processing such as brightness correction and contour correction on the acquired observation image so as to be approximately fitted to the thickness direction end portions 10b and 10c based on the brightness and contrast information of the image. Stipulate. Then, the straight lines 60b and 60c are used as the end portions in the thickness direction of the sheet material 10, and a region 62A sandwiched between the straight portions is handled as a sheet material cross section. Further, the center between the straight lines 60b and 60c is the center 60d in the thickness direction of the sheet material 10.

  The detected position information in the thickness direction (Y direction) of the straight lines 60b, 60c, and 60d is handled as the position in the width direction end of the sheet material in the present invention, and is used for adjusting the position of the first observation means 31. It is done. For example, in the initial state, the center 60d in the thickness direction of the sheet material observed by the second observation unit 32 is in a state where it overlaps the visual field center 38c of the visual field 38, and is the optimum focal position of the first observation unit 31. To do. At a certain time, it is assumed that the center 60d in the thickness direction of the sheet material observed by the second observation means 32 is located at a position shifted from the visual field center 38c of the visual field 38 by the length Dy in the Y direction.

If the displacement amount Dy in the thickness direction is 100 pixels by the second observation means, Dy is 100 μm. Therefore, the Y-axis stage 41 to which the first observation means 31 is attached is controlled by using the control computer 90 and the control unit 95 so that the first observation means 31 moves 100 μm in the Y direction.
By doing so, even if the sheet material is displaced by 100 μm in the thickness direction (Y direction), the position of the first observation means can be controlled so as to move 100 μm in the thickness direction (Y direction). It is possible to maintain the optimum focal position between the observation means 31 and the end portion in the thickness direction of the sheet material.

  In the case of detecting burrs, a portion protruding outside the region 62A in the visual field 38 is extracted as a burr protruding from the end of the sheet material.

FIG. 6C is a burr extraction image in the thickness direction obtained in the evaluation process based on the present invention.
Calculation is performed so that the region 62A in the field of view 38 becomes a white image, and the portion remaining as a black image is handled as a burr.

  Then, the number of pixels of the portion treated as the burr portion is calculated and obtained, and the apparent area of the burr is obtained from the pixel resolution. Then, according to the apparent area of the burr, the control computer 90 determines whether the portion is within the allowable range or outside the allowable range. Those having an area larger than the reference value are extracted large burrs 65a and are determined to be burrs. On the other hand, if the area is smaller than the reference value, the extracted small burr 65b is determined to be not a burr.

  In the case of detecting a chip, a recessed portion inside the region 62A in the visual field 38 is extracted as a chip lurking at the end of the sheet material.

FIG. 6D is a chipped extracted image in the width direction obtained in the evaluation process based on the present invention.
The calculation is performed so that the regions 62B and 62C outside the region 62A in the field of view 38 become black images, and the portion remaining as a white image in the field of view 38 is handled as a chip.

  Then, the number of pixels of the portion treated as the missing portion is calculated and obtained, and the apparent area of the missing portion is obtained from the pixel resolution. Then, according to the apparent area of the chip, the control computer 90 determines whether the portion is within the allowable range or out of the allowable range. If the area is larger than the reference value, the extracted large chip 67a is determined to be a chip. On the other hand, the one having an area smaller than the reference value is the extracted small chip 67b, and is determined not to be a chip.

  If the apparent area of the burr or chip is outside the predetermined tolerance, the production is stopped, only that part is instructed to be discarded later, or the part is later re-evaluated.

  The allowable range can be set using a limit sample based on a test result performed in advance. The limit sample is observed under the same observation conditions as described above, and an apparent area of burrs or chips that are limit samples included in the obtained observation image is obtained. The apparent area of burrs and chips extracted by the above procedure is an acceptable area reference value.

  Accordingly, the burr and chipping area extracted by observing the actual sheet edge is compared with the reference value, so that the control computer 90 can automatically determine the burr and chipping.

In the above description, the case where the area is determined and determined based on one image processing of an image observed from two directions has been described. However, a common end portion is observed from two directions, and an image of burrs or chips of corresponding parts is obtained. Can be determined by calculating the volume. Then, small burrs and chips can be extracted with high accuracy.
Moreover, although one side in the width direction of the sheet material has been described, the present invention can be similarly applied to the opposite side.

[Other variations]
As shown in FIG. 1, the observation visual field 37 of the first observation means 31 and the observation visual field 38 of the second observation means 32 are such that the common end of the sheet material 10 can be observed simultaneously from two directions. You may attach, but you may attach so that the visual fields 37 and 38 may offset.

FIG. 7 is a perspective view showing another example of a form embodying the present invention.
As shown in FIG. 7, when the field of view is offset, the amount of deviation is grasped in advance, and the observation result is displayed with the deviation corrected. If it does so, even if a visual field has shifted | deviated on account of apparatus attachment, the mode of an edge part can be observed from the recorded observation image, without being conscious of it.

  In addition, when the depth of field of the observation means is shallow and the focus position needs to be adjusted severely, and the direction in which the sheet material 10 is easily displaced is known, the observation means for detecting the displacement is arranged upstream of the conveyance direction. The side is preferred. By doing so, the upstream position detection information can be immediately used for the downstream focal position adjustment, so that it is easy to maintain the in-focus state of the observation means that wants to severely adjust the focal position. For example, when the sheet material 10 is likely to be displaced in the thickness direction, the second observation means 32 for observing the thickness direction of the sheet material 10 is arranged on the upstream side in the transport direction, and the first observation means 31 is arranged on the downstream side. To do.

How to lay out the first and second cameras may be appropriately selected in consideration of evaluation conditions and convenience.
If the field of view is not deviated, the initial positions of the first and second observation means 31 and 32 can be easily adjusted, and the images corresponding to the positions can be compared when displayed in real time. It is easy to judge where the burr in is growing.
When the field of view is deviated, it is not possible to compare the common edges by comparing the observation images obtained in real time, but first the upstream image is recorded in the recording means, and the downstream image and position are If they are displayed so as to correspond, it is possible to compare common end portions.

In the above-described embodiment, the conveyance rollers 21 to 24 are controlled via the control controller 95. However, all of them may be driven to rotate, or some of them may be free rollers. Further, the quantity may be changed depending on the layout of the apparatus, or prevention of flow in the width direction may be taken, and any form that can implement the present invention is acceptable.
The prevention of the flow prevention can be realized by making at least one of the conveying rollers 21 to 24 a stepped roller, a flanged roller, or installing a guide roller between the rollers.

In the above-described embodiment, the transport unit 2 is configured by the transport rollers 21 to 24 and the drive motors 21m to 24. However, the number of rollers and the number of motors may be changed as appropriate. Moreover, you may employ | adopt forms other than roller conveyance. For example, a grip feed mechanism that grips the sheet material 10 and conveys the sheet 10 in a predetermined direction may be used. Further, the inner side of the end portion in the width direction of the sheet material 10 may be transported by suction holding or air blowing with a flat plate material or the like.
Further, the sheet material is not limited to a case where a long sheet is conveyed in a straight line, but may be a form in which a substantially circular sheet including a straight portion is included in a circular shape or a part of the outer periphery thereof. In this case, if the diameter direction and the thickness direction of the sheet material end surface are observed by the first and second observation means 31 and 32 of the present invention while rotating the circular or substantially circular sheet material once, The present invention can be applied.

As described above, based on the present invention, obtaining a clear observation image, observing and measuring the uneven state from the acquired observation image, the measurement result and a preset reference In light of this, the presence and size of defects consisting of flashes, chips, scratches or foreign matters can be evaluated. Observation objects to be observed, measured, evaluated, etc. are paper and film sheets, metal foils, electrode sheets for lithium ion batteries coated with active materials on both sides of a metal stay, film substrates for electronic circuits, It can be applied to a thinned semiconductor wafer, a glass substrate, or the like.

DESCRIPTION OF SYMBOLS 1 Observation apparatus 2 Conveyance part 3 Observation part 4 Observation means position adjustment mechanism 5 Illumination part 6 Image processing part 9 Control part 10 Sheet material 10a Width direction edge part 10b Thickness direction edge part 10c Thickness direction edge part 10z Background 11 Arrow 15 Burr 15a Burr of desired size 15b Burr of allowable size 17 Chip 17a Chip of desired size 17b Chip of allowable size 21 Conveying roller 22 Conveying roller 23 Conveying roller 24 Conveying roller 21m Driving Motor 22m Driving motor 23m Driving motor 24m Driving motor 31 First observation means (thickness direction)
32 Second observation means (width direction)
33 Lens 34 Lens 35 Arrow 36 Arrow 37 Thickness direction observation field of view 37c Field of view center 38 Width direction observation field of view 38c Field of view center 41 Y-axis stage (thickness direction)
42 X-axis stage (width direction)
51 First Observation Illumination 52 Second Observation Illumination 53 Light-Emitting Unit 54 Light-Emitting Unit 55 Light-amount Adjusting Unit 56 Light-amount Adjusting Unit 60 Sheet Material Image after Image Processing 60a Straight Line as End in the Width Direction 60b Straight Line as End in the Thickness Direction 60c A straight line as an end in the thickness direction 60d A straight line indicating an intermediate position 61A Image processing area 61B Image processing area 62A Image processing area 62B Image processing area 62C Image processing area 65a Extracted large burr 65b Extracted small burr 67 Missing Portion 67a Extracted large chip 67b Extracted small chip 90 Control computer 91 Information input means 92 Information output means 93 Reporting means 94 Information recording means 95 Control unit 96 Image processing unit Dx Width direction deviation Dy Thickness direction Deviation amount

Claims (10)

In the observation device for the sheet material end, which observes the continuously conveyed sheet material end using the first observation means and the second observation means,
The first observing means is attached to a first observing means position changing mechanism that includes a width direction end portion of the sheet material in a visual field and capable of changing a distance from the sheet material end portion in a thickness direction of the sheet material. And
The second observation means is attached to a second observation means position changing mechanism that includes a thickness direction end portion of the sheet material in a visual field, and is capable of changing a distance from the sheet material end portion in the width direction of the sheet material. And
A width direction end position detection unit that detects a position of the width direction end of the sheet material based on observation information in an observation field of view of the first observation unit;
A thickness direction end position detection unit that detects the position of the thickness direction end of the sheet material based on observation information in the observation field of view of the second observation means;
Based on the detection result of the thickness direction end position detection unit, to control the first observation means position change mechanism,
An observation apparatus for an end portion of a sheet material, comprising: an observation means position control section that controls the second observation means position changing mechanism based on a detection result of the width direction end position detection section. . A sheet member comprising: an evaluation unit that observes an end portion of the sheet material that is continuously conveyed by using the first observation unit and the second observation unit, and evaluates the state of the sheet material end unit based on each observation information; In the material edge evaluation device,
The first observing means is attached to a first observing means position changing mechanism that includes a width direction end portion of the sheet material in a visual field and capable of changing a distance from the sheet material end portion in a thickness direction of the sheet material. And
The second observation means is attached to a second observation means position changing mechanism that includes a thickness direction end portion of the sheet material in a visual field, and is capable of changing a distance from the sheet material end portion in the width direction of the sheet material. And
A width direction end position detection unit that detects a position of the width direction end of the sheet material based on observation information in an observation field of view of the first observation unit;
A thickness direction end position detection unit that detects the position of the thickness direction end of the sheet material based on observation information in the observation field of view of the second observation means;
Based on the detection result of the thickness direction end position detection unit, to control the first observation means position change mechanism,
An evaluation apparatus for an end portion of a sheet material, comprising: an observation means position control section that controls the second observation means position changing mechanism based on a detection result of the width direction end position detection section. .   3. The sheet material edge evaluation apparatus according to claim 2, wherein the evaluation means evaluates the presence and size of a defect composed of burrs, chips, scratches, or foreign matters at the sheet material edge.   The first and second observation means comprise a combination of a one-dimensional sensor or a two-dimensional sensor and illumination, and the evaluation means recognizes information from the sensor as an image and performs image processing. The evaluation apparatus of the edge part of a sheet | seat material of Claim 2 or Claim 3 which does. The sheet material end evaluation device according to claim 2, wherein the sheet material is a battery electrode foil material.
In the method for observing the edge of the sheet material, the edge of the continuously conveyed sheet material is observed using the first observation means and the second observation means.
The first observing means is attached to a first observing means position changing mechanism that includes a width direction end portion of the sheet material in a visual field and capable of changing a distance from the sheet material end portion in a thickness direction of the sheet material. And
The second observation means is attached to a second observation means position changing mechanism that includes a thickness direction end portion of the sheet material in a visual field, and is capable of changing a distance from the sheet material end portion in the width direction of the sheet material. And
Obtaining observation information within the observation field of view of the first observation means, and detecting the position of the width direction end portion of the sheet material, a width direction end position detection step;
Obtaining observation information within the observation field of view of the second observation means, and detecting the position of the thickness direction end of the sheet material, and a thickness direction end position step,
A first observation means position adjustment step for controlling the first observation means position changing mechanism based on the position information of the thickness direction edge portion of the sheet material detected in the thickness direction edge position detection step; And
A second observation means position adjustment step for controlling the second observation means position changing mechanism based on the position information of the width direction edge part of the sheet material detected in the width direction edge position detection step; A method for observing an end portion of a sheet material. An observation step of observing the continuously conveyed sheet material end using the first observation means and the second observation means, and the sheet using the evaluation means based on the respective observation information obtained in the observation step In the evaluation method of the sheet material end portion, including an evaluation step for evaluating the state of the material end portion,
The first observing means is attached to a first observing means position changing mechanism that includes a width direction end portion of the sheet material in a visual field and capable of changing a distance from the sheet material end portion in a thickness direction of the sheet material. And
The second observation means is attached to a second observation means position changing mechanism that includes a thickness direction end portion of the sheet material in a visual field, and is capable of changing a distance from the sheet material end portion in the width direction of the sheet material. And
Obtaining observation information within the observation field of view of the first observation means, and detecting the position of the width direction end portion of the sheet material, a width direction end position detection step;
Obtaining observation information within the observation field of view of the second observation means, and detecting the position of the thickness direction end of the sheet material, and a thickness direction end position step,
A first observation means position adjustment step for controlling the first observation means position changing mechanism based on the position information of the thickness direction edge portion of the sheet material detected in the thickness direction edge position detection step; And
A second observation means position adjustment step for controlling the second observation means position changing mechanism based on the position information of the width direction edge part of the sheet material detected in the width direction edge position detection step; The evaluation method of the edge part of a sheet | seat material characterized by the above-mentioned.   8. The sheet material end portion according to claim 7, wherein the evaluation step includes a step of evaluating the presence / absence and size of a defect composed of burrs, chips, scratches, or foreign matters at the end portion of the sheet material. Evaluation methods.   The first and second observation means comprise a combination of a one-dimensional sensor or a two-dimensional sensor and illumination. In the evaluation step, information from the sensor obtained in the observation step is recognized as an image, and an image The sheet material edge evaluation method according to claim 7 or 8, further comprising a step of performing processing.   The sheet material edge evaluation method according to claim 7, wherein the sheet material is a battery electrode foil material.