JP4260524B2 - Metal seal assembly structure and assembly method - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a metal seal assembly structure and an assembly method thereof.
[0002]
[Prior art]
As an annular sealing material for sealing a fluid, a substantially S-shaped seal having a square cross section is known (for example, see Patent Document 1). As the assembly posture of the seal in the apparatus, not only when the annular seal (including a plane) is used as the horizontal direction but also when it is used as the vertical direction, there are many cases.
[0003]
[Patent Document 1]
Japanese Patent Laid-Open No. 2001-324021
[Problems to be solved by the invention]
When using an annular seal (including a flat surface) in a vertical orientation --- When the flange mating surface is in the vertical direction --- there is a risk of dropping the seal during assembly. There is a problem that it is difficult to place the seal at an appropriate position. That is, as shown in the enlarged cross-sectional view of the main part in FIG. 6, when attaching / removing the seal S, the main body member 41 and the lid member 42 in which the housing recess 40 (sealing groove) for housing the seal S is formed. If the seal S is in a free state where the seal S is not elastically deformed (the state where the seal S attached to the housing recess 40 and the lid member 42 are separated), as shown by an arrow a, the seal S Falls off from the seal accommodating recess 40 (position shift).
Further, since the seal S is slightly elastically deformed in the diameter-expanding direction in the assembled state and is used, the outer peripheral edge 43 of the seal S and the inner peripheral surface 44 of the housing recess 40 are assembled during the assembly. It is necessary to provide a gap between them. However, it is difficult to secure the gap around the inner peripheral surface 44 of the housing recess 40 and install the seal S, and the center of the body member 41 is very difficult to position. When the outer peripheral edge 43 of the seal S is in contact with the inner peripheral surface 44 and assembled, the inner peripheral surface 44 prevents the diameter of the seal S from expanding, and the seal S is uniform over the entire circumference. The surface pressure cannot be obtained and the sealing force (sealability) becomes uneven. As a result, the fluid may leak from a portion where the sealing force is weak, particularly when sealing a high-pressure fluid. Further, when a part of the outer peripheral edge 43 of the seal S is in contact with the inner peripheral surface 44, the seal S is deformed to the side not in contact with the inner peripheral surface 44. There is a possibility that the seal surface will be damaged due to large movement.
[0005]
Accordingly, the present invention provides a metal seal assembling structure capable of easily assembling a seal at a predetermined position without being influenced by the assembling direction of the metal seal, and capable of sufficiently exhibiting the sealing performance, and the assembling thereof. It aims to provide a method.
[0006]
[Means for Solving the Problems]
In order to achieve the above-described object, a metal seal assembling structure according to the present invention includes a first flat surface and a second flat surface parallel to the first flat surface, which are attached to an accommodation recess having a first flat surface. A metal seal assembly structure in which the whole is interposed between the first flat surface and the second flat surface. A second contact portion having a convex cross section close to the inner periphery that contacts the metal recess, and the metal seal comes into contact with the metal seal when the metal seal is attached to the storage recess. e Bei a stopper member for preventing, the falling-off preventing member has an abutting inclined surfaces on the outer peripheral edge of the metal seal.
An assembly structure of a metal seal that is mounted in an accommodation recess having a first flat surface and interposed between the first flat surface and a second flat surface parallel to the first flat surface is an annular shape. The metal seal has a convex outer cross-section first contact portion that contacts the first flat surface and a convex second cross-section contact portion near the inner periphery that contacts the second flat surface. A drop-off prevention member that comes into contact with the metal seal and prevents the metal seal from falling out of the storage recess when the metal seal is attached to the storage recess, the drop-off prevention member comprising: The metal seal is held so that the outer peripheral edge has a predetermined distance from the inner peripheral surface of the housing recess, and the metal seal is attached to the housing recess and the first flat surface and the second flat surface approach each other. The inner peripheral edge of the drop-off prevention member is Those that are configured to escape to a flat surface.
[0007]
In order to achieve the above-mentioned object, the metal seal assembling method according to the present invention includes a second flat surface that is mounted in an accommodation recess having a first flat surface and is parallel to the first flat surface and the first flat surface. A method of assembling a metal seal that is annularly interposed between the first flat surface and the second flat surface, which is close to the outer periphery and is in contact with the first flat surface. The metal seal having a convex-shaped second contact portion close to the inner periphery in contact with the metal recess is mounted in the housing recess, has a sloped surface that contacts the outer peripheral edge of the metal seal, and is provided in the housing recess. The member prevents the metal seal from dropping from the receiving recess, brings the first flat surface and the second flat surface closer, and the first contact portion of the metal seal presses against the first flat surface. The second contact portion is pressed against the second flat surface.
Also, a method for assembling a metal seal that is mounted in an accommodation recess having a first flat surface and is interposed between the first flat surface and a second flat surface parallel to the first flat surface is an annular shape. The metal seal having a cross-section convex first contact portion near the outer periphery that contacts the first flat surface and a cross-section convex second contact portion near the inner periphery that contacts the second flat surface. The metal seal is prevented from dropping from the receiving recess by a drop-off preventing member disposed in the receiving recess and disposed in the receiving recess that contacts the metal seal, and the outer peripheral edge of the metal seal is The metal seal is held so as to have a predetermined distance from the inner peripheral surface, the first flat surface and the second flat surface are brought close to each other, and the first contact portion of the metal seal is pressed against the first flat surface. The second contact portion is pressed against the second flat surface and Mounting and proximity between the first planar surface and a second planar surface to said concave of the metal seal, with the deformation due to pressing, the inner peripheral edge portion of the stopper member escapes to the second planar surface.
[0008]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, the present invention will be described in detail based on the illustrated embodiment.
[0009]
FIG. 1 is a front cross-sectional view showing an example of a metal seal to be assembled. FIGS. 2 and 3 are enlarged cross-sectional views of a main part for explaining a metal seal assembly structure according to the present invention. 2 is an assembled state in which the metal seal S is in a free state (before deformation), and FIG. 3 is an assembled state in which the metal seal S is in use.
[0010]
1 to 3, S indicates a metal seal (metal seal) assembled in the present invention, which is made of spring steel, stainless steel or other metal, and is pressed from a thin plate material (plastic processing). It is preferable from the viewpoint of ease of manufacture and cost. It can also be created by cutting or grinding. Further, it may be preferable to coat the surface of the seal S with a plating coating of silver, gold, copper, tin or the like, various resin coatings such as PTFE or FEP, or coatings of various rubber materials.
[0011]
The metal seal S is attached to the housing recess 6 (seal groove) having the first flat surface 1 and is interposed between the first flat surface 1 and the second flat surface 2 parallel to the first flat surface 1. It is a sealing material to be mounted, and is entirely annular. Further, the metal seal S has a cross-section convex first contact portion 11 near the outer periphery that contacts the first flat surface 1 and a cross section near the inner periphery that contacts the second flat surface 2 in the assembled state. A convex second contact portion 12 and a compression elastically deformable intermediate wall portion 14 that gradually increases in diameter from the second contact portion 12 to the first contact portion 11 and that is continuously tapered. The one contact portion 11, the intermediate wall portion 14, and the second contact portion 12 have a substantially S-shaped cross section that is gently curved. In the present invention, the S-shape is defined as including an inverted S-shape, that is, a Z-shape.
[0012]
In the metal seal S, the first contact portion 11 and the second contact portion 12 are formed in an annular shape on one surface side and the other surface side, respectively, and are displaced in the radial direction toward the outer diameter and the inner diameter, It can be said that it has a substantially frustoconical disc spring shape constituted by a curved surface. In this way, the hole 15 is formed at the inner peripheral edge where the second contact portion 12 exists.
[0013]
The member in which the accommodating recess 6 having the first flat surface 1 is formed is a main body member 4 on the main body side of, for example, a semiconductor manufacturing apparatus or an ultraprecision device, and the second flat surface 2 is formed in the main body. A lid member (plate flange) 5 corresponding to the mating surface 9 of the member 4 is used. In this case, the metal seal S is assembled by first attaching the seal S to the housing recess 6 of the main body member 4, and then bringing the lid member 5 closer to the main body member 4 and tightening the seal S.
The housing recess 6 is an annular recess (recess) formed in the mating surface (flange surface) 9 of the main body member 4 that is in close contact with or in contact with the second flat surface 2. And it is set as the ditch | groove which the upper side (2nd flat surface 2 side) opens. The first flat surface 1 is configured to have the bottom surface of the housing recess 6, and the outer diameter side surface of the housing recess 6 can be said to be the inner circumferential surface 7.
[0014]
The assembly structure of the present invention is a drop-off prevention member that contacts the metal seal S when the metal seal S is attached to the housing recess 6 and prevents the metal seal S from dropping (displacement) from the housing recess 6. 3 is provided in the housing recess 6. In FIG. 2, the metal seal S is prevented from falling out of the housing recess 6 by contacting the outer peripheral edge 13 of the metal seal S.
More specifically, the drop-off prevention member 3 is an annular member having the same cross section in the circumferential direction, and the inner diameter dimension thereof is set smaller than the outer diameter dimension of the metal seal S in a free state. Therefore, as shown in FIG. 2, when the metal seal S is mounted in the housing recess 6 with the first flat surface 1 and the second flat surface 2 separated from each other, the outer peripheral edge 13 of the metal seal S is prevented from falling off. 3, the outer peripheral edge 13 of the metal seal S is sandwiched between the drop-off preventing member 3 and the first flat surface 1, and the metal seal S is held in position.
Alternatively, the drop-off preventing member 3 is not only in contact with the outer peripheral edge portion 13 of the metal seal S, but also is an intermediate contact that is on the inner peripheral side of the outer peripheral edge portion 13 and on the second flat surface 2 side of the intermediate wall portion 14. You may make it contact | abut to a contact part. In this case, after the assembly, the intermediate contact portion of the elastically deformed metal seal S and the drop-off preventing member 3 may be separated from each other.
[0015]
Further, the drop-off preventing member 3 holds the metal seal S so that the outer peripheral edge portion 13 (outer peripheral surface) of the metal seal S has a predetermined distance from the inner peripheral surface 7 of the housing recess 6. In other words, the metal seal S is attached to the receiving recess 6 with the outer peripheral edge 13 in a non-contact state over the entire inner peripheral surface 7 of the receiving recess 6 with the drop-off preventing member 3 interposed therebetween. That is, the drop-off preventing member 3 not only prevents the metal seal S from dropping and dropping, but also a spacer that holds the metal seal S in a predetermined position so as to maintain a predetermined distance from the inner peripheral surface 7 of the housing recess 6. Acts as a member. Thereby, the movement in the 1st flat surface 1 and the 2nd flat surface 2 of the 1st contact part 11 and the 2nd contact part 12 is locally biased, and does not become large, and there is no possibility of scratching a sealing surface.
[0016]
The material of the drop-off prevention member 3 may be, for example, rubber, resin, paper, metal, or a composite material thereof, and the metal seal S that is in use is not loaded as much as possible. That is, the inner peripheral edge 10 of the drop-off prevention member 3 is moved to the second flat surface 2 as the metal seal S is attached to the housing recess 6, the first flat surface 1 and the second flat surface 2 are approached and deformed by pressing. It is configured to escape to the side (upper opening side). Therefore, it can be said that the drop-off prevention member 3 needs to be disposed in the housing recess 6 in a state where it does not contact the second flat surface 2.
[0017]
More specifically, when the metal seal S is mounted in contact with the drop-off prevention member 3, the drop-off prevention member 3 is slightly deformed, and the first flat surface 1 and the second flat surface 2 approach each other. Even when the metal seal S is elastically deformed, the drop-off prevention member 3 is further deformed. Further, even when the internal pressure is applied to the metal seal S in the use state in which the metal seal S is assembled, the drop-off prevention member 3 is Is configured not to restrain. Furthermore, since the drop-off preventing member 3 is incorporated together with the metal seal S, it is difficult to influence the load characteristics of the metal seal S as a material that easily creeps.
[0018]
The outer diameter side of the drop-off preventing member 3 has an outer diameter dimension that is (substantially) the same as the inner diameter dimension of the inner peripheral surface 7 of the receiving recess 6, and the receiving recess 3 is closely fitted to the inner peripheral surface 7. 6 is attached. Alternatively, the inner peripheral surface 7 may be tightly fitted and fixed with an adhesive or the like. Alternatively, although not shown in the drawing, the outer diameter side of the drop-off preventing member 3 may be partially inserted and fixed to the recess of the inner peripheral surface 7 of the housing recess 6.
[0019]
4 and 5 show other embodiments, and as shown in these enlarged sectional views, the drop-off prevention member 3 faces (facing) the first flat surface 1 in an inclined manner. The slope 8 is formed so as to contact the outer peripheral edge 13 of the metal seal S. That is, the inner peripheral surface of the annular drop-off prevention member 3 is tapered, and the outer peripheral corner portion 16 on the opposite surface side (second contact portion 12 side) of the outer peripheral edge portion 13 of the metal seal S is the same. Is in contact with the sloped surface 8 and the drop-off prevention member 3 holds the metal seal S.
[0020]
3 and 4 is an annular thin plate member that is thinner than the thickness (plate thickness) of the metal seal S, but the fall prevention member 3 of FIG. 5 is an annular member that is thicker than the thickness of the metal seal S. The entire inner circumferential surface is a sloped surface 8, and one end surface in the axial direction, which is the narrow surface side of the drop-off prevention member 3, is disposed in the receiving recess 6 in contact with the first flat surface 1. This eliminates the need to adjust the arrangement position of the drop-off prevention member 3 in the housing recess 6 and facilitates its attachment, and ensures that the outer peripheral edge 13 (outer peripheral corner 16) of the metal seal S is attached to the inclined surface 8. Can be brought into contact with each other.
Furthermore, even when the metal seal S is deformed in the diameter increasing direction, the inner peripheral edge 10 of the drop-off prevention member 3 is directed in the direction of the second flat surface 2 while the sloped surface 8 and the outer peripheral corner 16 of the metal seal S slide. Escape and secure the position at a predetermined position without restraining the metal seal S.
[0021]
Next, the assembling method of the metal seal S will be described. This assembling method is attached to the housing recess 6 having the first flat surface 1 and is parallel to the first flat surface 1 and the first flat surface 1. This is a method of assembling a metal seal S interposed between the surface 2 and the surface 2. As described above, the metal seal S has an annular shape as a whole, and has a cross-section convex first contact portion 11 near the outer periphery that contacts the first flat surface 1 and a cross-section convex shape near the inner periphery that contacts the second flat surface 2. And a second contact portion 12.
In the assembling method, the metal seal S is attached to the housing recess 6, and the metal seal S is dropped from the housing recess 6 by the drop-off preventing member 3 disposed in the housing recess 6 in contact with the outer peripheral edge 13 of the metal seal S. To prevent. The dropout prevention member 3 is the same as described above.
[0022]
Then, the first flat surface 1 and the second flat surface 2 are gradually brought closer to each other, and the distance (dimension) between the two is narrowed --- the metal seal S is pressed--and the metal seal S Is gradually elastically deformed, the first contact portion 11 of the metal seal S is pressed against the first flat surface 1, the second contact portion 12 is pressed against the second flat surface 2, and has the first flat surface 1. The mating surface 9 of the main body member 4 in which the housing recess 6 is formed and the mating surface (second flat surface 2) of the lid member 5 having the second flat surface 2 are closed and tightened to complete the assembly. The seal S seals the (high-pressure) fluid on the inner peripheral side.
[0023]
【The invention's effect】
The present invention has the following effects by the above-described configuration.
[0024]
(According to Claims 1 and 2 ) When assembling the metal seal S, the metal seal S can be easily assembled at a predetermined position in the receiving recess 6 without dropping or shifting even when the mounting surface is not horizontal. it can. That is, the metal seal S can be accurately mounted in the housing recess 6 without being influenced by the assembling direction of the metal seal S. Accordingly, when the first flat surface 1 and the second flat surface 2 that are parallel to each other are brought close to each other, the metal seal S is elastically deformed uniformly over the entire circumference, and is uniform in both the first contact portion 11 and the second contact portion 12. The surface pressure is ensured, and the sealing performance can be surely exhibited. (According to claim 2) Since the metal seal S is not brought into contact with the inner peripheral surface 7 of the housing recess 6, deformation of the metal seal S in the diameter increasing direction is not restricted, and the metal seal S is elastically deformed uniformly in the circumferential direction. be able to.
[0025]
(According to Claims 1 and 3) By the contact between the inclined surface 8 and the outer peripheral edge 13 of the metal seal S, the centering (centering) of the axial center of the annular metal seal S is easily performed in the housing recess 6. Can do. That is, when assembling, the centering operation becomes extremely easy, and the assembling accuracy can be improved and stabilized. Further, the floating of the first contact portion 11 of the metal seal S can be suppressed, and in particular, the sealing performance can be maintained even when the inner sealing fluid is at a high pressure.
[0026]
(According to Claims 3 and 4) Even when the mounting surface is not horizontal, the metal seal S can be easily incorporated into a predetermined position of the housing recess 6 without dropping and being displaced, and the workability is very good. That is, the metal seal S can be accurately mounted in the housing recess 6 without being influenced by the assembling direction of the metal seal S. Accordingly, the first flat surface 1 and the second flat surface 2 which are parallel to each other are brought close to each other, and the metal seal S is elastically deformed uniformly over the entire circumference, so that both the first contact portion 11 and the second contact portion 12 are uniform. The surface pressure can be secured and the sealing performance can be surely exhibited.
[Brief description of the drawings]
FIG. 1 is a front sectional view showing an example of a metal seal to be assembled.
FIG. 2 is an enlarged sectional view of a main part for explaining an assembly structure of the present invention.
FIG. 3 is an enlarged cross-sectional view of a main part for explaining an assembly structure in an assembly completed state.
FIG. 4 is an enlarged cross-sectional view of a main part showing another embodiment of the present invention.
FIG. 5 is an enlarged cross-sectional view of a main part showing still another embodiment of the present invention.
FIG. 6 is an enlarged cross-sectional view of a main part for explaining a conventional assembly structure.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 1st flat surface 2 2nd flat surface 3 Drop-off prevention member 6 Housing recessed part 7 Inner peripheral surface 8 Gradient surface
11 First contact
12 Second contact area
13 Outer peripheral edge S Metal seal

Claims (4)

An interposition between the first flat surface (1) and the second flat surface (2) parallel to the first flat surface (1), which is mounted in the receiving recess (6) having the first flat surface (1). The metal seal (S) is assembled in a ring shape as a whole, and the metal seal (S) is a convex section first contact portion (11) near the outer periphery that contacts the first flat surface (1). ) And a convex second contact portion (12) having a convex section on the inner periphery that abuts against the second flat surface (2), and when the metal seal (S) is attached to the receiving recess (6) Is provided with a drop-off prevention member (3) that comes into contact with the metal seal (S) and prevents the metal seal (S) from dropping out of the receiving recess (6). The drop- off prevention member (3) metal seal assembly structure, characterized in Rukoto that Yusuke abutting inclined surfaces on the outer peripheral edge portion (13) to (8) of the seal (S). An interposition between the first flat surface (1) and the second flat surface (2) parallel to the first flat surface (1), which is mounted in the receiving recess (6) having the first flat surface (1). 11 is an assembly structure of a metal seal (S) that is annular in its entirety, and the metal seal (S) has a convex first contact section ( 11 ) that is close to the outer periphery and contacts the first flat surface (1). ) And a second convex contact portion ( 12 ) that is close to the inner periphery and abuts against the second flat surface (2 ), and when the metal seal (S) is attached to the accommodating recess (6) Provided with a drop-off preventing member (3) that contacts the metal seal (S) and prevents the metal seal (S) from dropping from the receiving recess (6).
The drop-off prevention member (3) holds the metal seal (S) so that the outer peripheral edge (13) of the metal seal (S) has a predetermined distance from the inner peripheral surface (7) of the receiving recess (6). And
Further, as the metal seal (S) is attached to the receiving recess (6), the first flat surface (1) approaches the second flat surface (2), and the deformation is caused by pressing, the drop prevention member A metal seal assembling structure characterized in that the inner peripheral edge ( 10 ) of (3) is configured to escape toward the second flat surface (2) . An interposition between the first flat surface (1) and the second flat surface (2) parallel to the first flat surface (1), which is mounted in the receiving recess (6) having the first flat surface (1). A method of assembling a metal seal (S) that is annular in its entirety, and having a cross-sectional convex first contact portion ( 11 ) near the outer periphery that contacts the first flat surface (1 ) and the second flat surface The metal seal (S) having a convex-shaped second contact portion ( 12 ) near the inner periphery in contact with (2) is attached to the accommodating recess (6), and the outer peripheral edge of the metal seal (S) The metal seal (S) is prevented from dropping from the receiving recess (6) by the drop-off preventing member (3) having the sloped surface (8) contacting the (13) and disposed in the receiving recess (6). and, said first flat surface (1) and the second flat surface and (2) is brought closer, the first contact portion of the metal seal (S) (11) is the first Pressed against the Tanmen (1), the second contact portion (12) of the metal seal assembly wherein the is pressed against the said second flat surface (2). An interposition between the first flat surface (1) and the second flat surface (2) parallel to the first flat surface (1), which is mounted in the receiving recess (6) having the first flat surface (1). A method of assembling a metal seal (S) that is annular in its entirety, wherein the first convex contact section (11) and the second flat surface are close to the outer periphery in contact with the first flat surface (1). The metal seal (S) having a convex-shaped second contact portion (12) close to the inner periphery in contact with (2) is attached to the receiving recess (6), and the metal seal (S) is in contact with the metal seal (S). The metal seal (S) is prevented from dropping from the housing recess (6) by the drop-off preventing member (3) disposed in the housing recess (6), and the outer peripheral edge ( 13 ) of the metal seal (S ). said first There holds the metal seal (S) to have a predetermined interval from the inner circumferential surface (7) of the housing recess (6), the first flat surface (1) The first contact portion (11) of the metal seal (S) is pressed against the first flat surface (1), and the second contact portion (12) is moved to the second surface. For pressing against the flat surface (2), mounting the metal seal (S) to the receiving recess (6), approaching the first flat surface (1) and the second flat surface (2), and deformation by pressing. Along with this, the inner peripheral edge portion ( 10 ) of the drop-off prevention member (3) escapes to the second flat surface (2) side .

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