JP2004308803A - Metal seal assembling structure and its assembling method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a metal seal assembling structure capable of easily assembling a seal at a designated position without any influence of an assembling direction of a metal seal. <P>SOLUTION: An assembling structure of a circular metal seal S is mounted on a storing recessed portion 6 having a first flat surface 1 and is wholly interposed between the first flat surface 1 and a second flat surface 2 parallel to the first flat surface 1. The metal seal S has a first contact portion 11 with a cross-sectioned convex shape approached to an outer periphery, which is brought into contact with the first flat surface 1 and a second contact portion 12 with a cross-sectioned convex shape approached to an inner periphery, which is brought into contact with the second flat surface 2. A drop out prevention member 3 capable of preventing the metal seal S from coming off the recessed portion 6 by coming into contact with the metal seal S is provided. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a metal seal assembling structure and an assembling method thereof.
[0002]
[Prior art]
A substantially S-shaped seal having a square cross section has been known as an annular seal material for sealing a fluid (for example, see Patent Document 1). Regarding the assembling posture of the seal in the device, not only the case where the annular seal (including a plane) is used in the horizontal direction, but also the case where the seal is used in the vertical direction.
[0003]
[Patent Document 1]
JP 2001-324221 A
[Problems to be solved by the invention]
When an annular seal (including a plane) is used in a vertical position. When the flange mating surface is in a vertical direction. The seal may drop during assembly. However, there is a problem that it is difficult to arrange the seal at an appropriate position. That is, as shown in the main part enlarged cross-sectional view of FIG. 6, when attaching and detaching the seal S, the main body member 41 and the lid member 42 in which the accommodating recess 40 (seal groove) for accommodating the seal S are formed. Is in a free state in which the seal S is not elastically deformed (a state in which the seal S mounted on the housing recess 40 and the cover member 42 are separated), as shown by the arrow a, Are dropped from the seal accommodating recess 40 (positional displacement).
In addition, since the seal S is slightly elastically deformed in the diameter-expanding direction when the assembly is completed, and is in a used state, the outer peripheral edge 43 of the seal S and the inner peripheral surface 44 of the accommodation concave portion 40 are in the assembled state. It is necessary to provide a gap between them. However, it is difficult to secure the gap between the inner peripheral surface 44 of the accommodating recess 40 and the seal S in the entire periphery, and it is very difficult to position the center with respect to the main body member 41. If the outer peripheral edge 43 of the seal S comes into contact with the inner peripheral surface 44 and is assembled, the inner peripheral surface 44 prevents the seal S from expanding in diameter, and the seal S is uniform over the entire circumference. The surface pressure is not obtained, and the sealing force (sealing property) becomes uneven. As a result, when sealing a high-pressure fluid, there is a possibility that the fluid may leak from a portion where the sealing force is weak. Furthermore, if a part of the outer peripheral edge 43 of the seal S is in contact with the inner peripheral surface 44, the seal S is deformed to a side not in contact with the inner peripheral surface 44, so that the seal S (contact portion) The movement is large and the seal surface may be damaged.
[0005]
Therefore, the present invention provides a metal seal assembling structure capable of easily assembling a seal at a predetermined position without being influenced by an assembling direction of a metal seal, and having sufficient sealing performance, and an assembling method thereof. The aim is to provide a method.
[0006]
[Means for Solving the Problems]
In order to achieve the above object, a metal seal assembly structure according to the present invention is provided with a first flat surface and a second flat surface parallel to the first flat surface, which are mounted in an accommodation recess having a first flat surface. The metal seal is an assembly structure of an annular metal seal interposed between the first flat surface and the first flat surface. And a second contact portion having a convex section in the vicinity of the inner periphery that abuts the metal seal, and when the metal seal is attached to the accommodation recess, the metal seal comes into contact with the metal seal and the metal seal falls off from the accommodation recess. It is provided with a falling-off prevention member for prevention.
Further, the falling-off preventing member holds the metal seal such that an outer peripheral edge of the metal seal has a predetermined distance from an inner peripheral surface of the housing recess.
Further, the falling-off preventing member has a sloped surface that comes into contact with the outer peripheral edge of the metal seal.
[0007]
Further, in order to achieve the above-mentioned object, a method for assembling a metal seal according to the present invention includes the steps of: mounting a first flat surface and a second flat surface parallel to the first flat surface; A method of assembling an annular metal seal interposed between the first flat surface and the first flat surface, wherein the first flat flat surface has a cross-sectional convex first contact portion and the second flat surface. The metal seal having the second contact portion having a convex section in contact with the inner periphery is mounted in the housing recess, and the metal seal is attached to the housing recess by a drop-off preventing member disposed in the housing recess in contact with the metal seal. To prevent the first flat surface and the second flat surface from approaching, the first contact portion of the metal seal is pressed against the first flat surface, and the second contact portion is Pressed against the second flat surface.
[0008]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, the present invention will be described in detail based on the illustrated embodiments.
[0009]
FIG. 1 is a front cross-sectional view showing an example of a metal seal to be mounted, and FIGS. 2 and 3 are enlarged cross-sectional views of a main part illustrating a mounting structure of the metal seal according to the present invention. 2 shows a state in which the metal seal S is in the free state (before the deformation) and is in the middle of assembling, and FIG.
[0010]
In FIGS. 1 to 3, S indicates a metal seal (metal seal) assembled in the present invention, which is made of steel for spring, stainless steel, or other metal, and is pressed from a thin plate (plastic processing). It is preferable to form them from the viewpoint of ease of production and cost. In addition, it can also be created by cutting, grinding, or the like. It may also be preferable to coat the surface of the seal S with a plating coating of silver, gold, copper, tin, or the like, a coating of various resin such as PTFE or FEP, or a coating of various rubber materials.
[0011]
Then, the metal seal S is mounted on the accommodation recess 6 (seal groove) having the first flat surface 1, and is interposed between the first flat surface 1 and the second flat surface 2 parallel to the first flat surface 1. Sealing material to be mounted, which is entirely annular. Further, in a state where the metal seal S has been assembled, the first convex contact portion 11 near the outer periphery in contact with the first flat surface 1 and the cross section near the inner periphery in contact with the second flat surface 2 are provided. A convex second contact portion 12, and a compression elastically deformable intermediate wall portion 14 that is gradually increased in diameter from the second contact portion 12 to the first contact portion 11 and that can be elastically deformed. The one contact portion 11, the intermediate wall portion 14, and the second contact portion 12 have a gently curved substantially S-shaped cross section. In the present invention, the S-shape is defined to include an inverted S-shape {Z-shape}.
[0012]
In this metal seal S, the first contact portion 11 and the second contact portion 12 are formed annularly on one surface side and the other surface side, respectively, and are displaced in the radial direction toward the outer diameter and toward the inner diameter, so that It can be said that it is a substantially truncated conical disk spring having a curved surface. Thus, the hole 15 is formed at the inner peripheral edge where the second contact portion 12 exists.
[0013]
The member in which the accommodation recess 6 having the first flat surface 1 is formed is, for example, a main body member 4 which is a main body side of a semiconductor manufacturing apparatus or an ultra-precision device, and the second flat surface 2 is formed in the main body member. A lid member (plate flange) 5 or the like corresponding to the mating surface 9 of the member 4 is provided. In this case, when assembling the metal seal S, the seal S is first mounted on the housing recess 6 of the main body member 4, and then the lid member 5 is brought close to the main body member 4 to tighten the seal S.
The accommodation concave portion 6 is an annular concave groove (recess) formed in a mating surface (flange surface) 9 of the main body member 4 in an approaching state or in contact with the second flat surface 2, and in FIGS. And a concave groove that opens on the upper side (the second flat surface 2 side). The first flat surface 1 is configured to have the bottom surface of the accommodation recess 6, and the outer diameter side surface of the accommodation recess 6 can be said to be the inner peripheral surface 7.
[0014]
The mounting structure according to the present invention is a drop-off preventing member that abuts against the metal seal S when the metal seal S is mounted on the housing recess 6 and prevents the metal seal S from dropping (displacement) from the housing recess 6. 3 is provided in the accommodation recess 6. In FIG. 2, the metal seal S comes into contact with the outer peripheral edge 13 of the metal seal S to prevent the metal seal S from dropping out of the housing recess 6.
More specifically, the falling-off preventing member 3 is an annular member having the same cross section in the circumferential direction, and its inner diameter is set smaller than the outer diameter of the metal seal S in a free state. Therefore, as shown in FIG. 2, when the metal seal S is mounted in the housing recess 6 in a state where the first flat surface 1 and the second flat surface 2 are separated from each other, the outer peripheral edge 13 of the metal seal S is prevented from falling off. 3, the outer peripheral edge 13 of the metal seal S is sandwiched between the fall prevention member 3 and the first flat surface 1, and the position of the metal seal S is maintained.
Alternatively, the falling-off preventing member 3 may be in contact with the outer peripheral edge 13 of the metal seal S, or may be located on the inner peripheral side of the outer peripheral edge 13 and on the second flat surface 2 side of the intermediate wall 14. You may make it contact | abut on a contact part. In this case, after the assembling, the intermediate contact portion of the elastically deformed metal seal S may be separated from the falling-off preventing member 3.
[0015]
Further, the falling-off preventing member 3 holds the metal seal S such that the outer peripheral edge portion 13 (outer peripheral surface) of the metal seal S has a predetermined distance from the inner peripheral surface 7 of the housing recess 6. That is, the outer periphery 13 of the metal seal S is in a non-contact state with the inner peripheral surface 7 of the accommodation recess 6 over the entire circumference, and is attached to the accommodation recess 6 with the falling-off preventing member 3 interposed therebetween. That is, the falling-off preventing member 3 not only prevents the metal seal S from falling off and falls, but also holds the metal seal S at a predetermined position so as to keep a predetermined distance from the inner peripheral surface 7 of the housing recess 6. Acts as a member. Thereby, the movement of the first contact portion 11 and the second contact portion 12 on the first flat surface 1 and the second flat surface 2 is not locally biased and increased, and there is no possibility of damaging the sealing surface.
[0016]
The material of the falling-off preventing member 3 may be, for example, rubber, resin, paper, metal, or a composite material thereof, and a load is not applied to the metal seal S in use as much as possible. In other words, the inner peripheral edge 10 of the falling-off preventing member 3 is deformed by the second flat surface 2 due to the mounting of the metal seal S in the accommodation recess 6 and the deformation due to the approach between the first flat surface 1 and the second flat surface 2 and the pressing. It is configured to escape to the side (upper opening side). Therefore, it can be said that it is necessary to dispose the falling-off preventing member 3 in the accommodation recess 6 without contacting the second flat surface 2.
[0017]
More specifically, in a state in which the metal seal S is attached to the falling-off preventing member 3 in contact with the falling-off preventing member 3, the falling-off preventing member 3 is slightly deformed, and the first flat surface 1 and the second flat surface 2 approach each other. Even when the metal seal S is elastically deformed, the falling-off preventing member 3 is further deformed. Further, even when an internal pressure is applied to the metal seal S in a use state in which the metal seal S is assembled, the falling-off preventing member 3 is not deformed. Is not restricted. Further, since the falling-off preventing member 3 is incorporated together with the metal seal S, the material is easy to creep, so that it does not easily affect the load characteristics of the metal seal S.
[0018]
The outer diameter side of the fall prevention member 3 has an outer diameter dimension (substantially) equal to the inner diameter surface of the inner peripheral surface 7 of the accommodation recess 6, and the accommodation recess is formed so that the fall prevention member 3 is tightly fitted to the inner peripheral surface 7. 6 is attached. Alternatively, it may be tightly fitted to the inner peripheral surface 7 and fixed with an adhesive or the like. Alternatively, although not shown, the outer diameter side of the falling-off preventing member 3 may be partially inserted and fixed to the concave portion of the inner peripheral surface 7 of the housing concave portion 6.
[0019]
FIGS. 4 and 5 show other embodiments. As shown in the enlarged sectional views of these main parts, the falling-off preventing member 3 faces (faces) the first flat surface 1 in an inclined manner. It has a sloped surface 8 formed so as to abut the outer peripheral edge 13 of the metal seal S. That is, the inner peripheral surface of the annular drop-prevention member 3 is tapered, and the outer peripheral edge portion 16 of the outer peripheral edge portion 13 of the metal seal S opposite to the first contact portion 11 (the second contact portion 12 side). Is in contact with the inclined surface 8, and the falling-off preventing member 3 holds the metal seal S.
[0020]
3 and 4 is an annular thin plate member that is thinner than the thickness (plate thickness) of the metal seal S, but the fall prevention member 3 in FIG. 5 is an annular member that is thicker than the thickness of the metal seal S. The entire inner peripheral surface is a sloped surface 8, and one end surface in the axial direction, which is the narrow surface side of the falling-off prevention member 3, is disposed in the housing recess 6 so as to be in contact with the first flat surface 1. This makes it unnecessary to adjust the disposition position of the falling-off preventing member 3 in the housing concave portion 6, thereby facilitating its attachment, and ensures that the outer peripheral edge portion 13 (the outer peripheral corner portion 16) of the metal seal S is formed on the inclined surface 8. Can be abutted.
Furthermore, even when the metal seal S is deformed in the radially expanding direction, the inner peripheral edge 10 of the falling-off preventing member 3 moves in the direction of the second flat surface 2 while the inclined surface 8 and the outer peripheral corner 16 of the metal seal S slide. Escape and secure the metal seal S at a predetermined position without restraint.
[0021]
Next, a method of assembling the metal seal S will be described. This assembling method is performed by mounting the first flat surface 1 and the second flat surface parallel to the first flat surface 1 by being attached to the housing recess 6 having the first flat surface 1. This is a method of assembling a metal seal S interposed between the surface 2. As described above, the metal seal S has an annular shape as a whole, and has a convex section in the vicinity of the outer periphery in contact with the first flat surface 1 and a convex section in the vicinity of the inner periphery in contact with the second flat surface 2. And a second contact portion 12.
The assembling method is such that the metal seal S is attached to the housing recess 6, and the metal seal S is dropped from the housing recess 6 by the falling-off preventing member 3 disposed in the housing recess 6 that is in contact with the outer peripheral edge 13 of the metal seal S. To prevent The falling-off prevention member 3 is the same as that described above.
[0022]
Then, the first flat surface 1 and the second flat surface 2 are gradually made closer to each other, and the distance (dimension) between them is reduced {pressing the metal seal S}. Is gradually elastically deformed, the first contact portion 11 of the metal seal S is pressed against the first flat surface 1, and the second contact portion 12 is pressed against the second flat surface 2, and has the first flat surface 1. The mating surface 9 of the main body member 4 in which the accommodation recess 6 is formed and the mating surface (second flat surface 2) of the lid member 5 having the second flat surface 2 are closed and tightened to complete the assembly. The seal S seals the (high-pressure) fluid on the inner peripheral side.
[0023]
【The invention's effect】
The present invention has the following effects by the above configuration.
[0024]
According to the first aspect, when the metal seal S is assembled, even when the mounting surface is not horizontal, the metal seal S can be easily incorporated into a predetermined position of the housing recess 6 without dropping or displacing. That is, the metal seal S can be accurately mounted in the housing recess 6 without being influenced by the mounting direction of the metal seal S. Therefore, when the first flat surface 1 and the second flat surface 2 that are parallel to each other are brought close to each other, the metal seal S is elastically deformed uniformly over the entire circumference, and is uniformly formed in the first contact portion 11 and the second contact portion 12. A suitable surface pressure is secured, and the sealing performance can be reliably exhibited.
[0025]
(According to claim 2) Since the metal seal S is not brought into contact with the inner peripheral surface 7 of the accommodation recess 6, the deformation of the metal seal S in the radially expanding direction is not restricted, and the metal seal S is elastically deformed uniformly in the circumferential direction. be able to.
(According to claim 3) By the contact between the inclined surface 8 and the outer peripheral edge 13 of the metal seal S, the center of the axis of the annular metal seal S can be easily centered (centered) in the accommodation recess 6. . In other words, the work of centering becomes extremely easy when assembling, and the assembling accuracy can be improved and stabilized. Further, the floating of the first contact portion 11 of the metal seal S can be suppressed, and particularly, the sealing performance can be maintained even when the sealing fluid on the inner side is at a high pressure.
[0026]
(Embodiment 4) Even when the mounting surface is not horizontal, the metal seal S can be easily incorporated into the predetermined position of the housing recess 6 without dropping or displacing, and the workability is extremely good. That is, the metal seal S can be accurately mounted in the housing recess 6 without being affected by the mounting direction of the metal seal S. Accordingly, the first flat surface 1 and the second flat surface 2 which are parallel to each other are brought close to each other, and the metal seal S is elastically deformed uniformly over the entire circumference, so that the first contact portion 11 and the second contact portion 12 are uniform. Surface pressure can be secured and sealing performance can be reliably exhibited.
[Brief description of the drawings]
FIG. 1 is a front sectional view showing an example of a metal seal to be assembled.
FIG. 2 is an enlarged sectional view of a main part for explaining an assembly structure of the present invention.
FIG. 3 is an enlarged sectional view of a main part for explaining an assembly structure in an assembly completed state.
FIG. 4 is an enlarged sectional view of a main part showing another embodiment of the present invention.
FIG. 5 is an enlarged sectional view of a main part showing still another embodiment of the present invention.
FIG. 6 is an enlarged sectional view of a main part for explaining a conventional assembling structure.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 1st flat surface 2 2nd flat surface 3 Fall prevention member 6 Housing recess 7 Inner peripheral surface 8 Slope surface 11 First contact part 12 Second contact part 13 Outer peripheral edge S Metal seal

Claims (4)

Interposed between the first flat surface (1) and a second flat surface (2) parallel to the first flat surface (1), which is mounted in the receiving recess (6) having the first flat surface (1). The metal seal (S) is an assembling structure of a ring-shaped metal seal (S), and the metal seal (S) is a first contact portion (11) having a convex section in the vicinity of the outer periphery in contact with the first flat surface (1). ) And a second contact portion (12) having a convex section in the vicinity of the inner periphery in contact with the second flat surface (2), and when the metal seal (S) is attached to the accommodation recess (6). A metal seal assembling structure, further comprising a falling-off preventing member (3) for contacting the metal seal (S) and preventing the metal seal (S) from falling off from the housing recess (6). The falling-off prevention member (3) holds the metal seal (S) such that the outer peripheral edge (13) of the metal seal (S) has a predetermined distance from the inner peripheral surface (7) of the accommodation recess (6). The metal seal assembling structure according to claim 1. 3. The metal seal assembly structure according to claim 1, wherein the falling-off prevention member has a sloped surface that comes into contact with an outer peripheral edge of the metal seal. 4. Interposed between the first flat surface (1) and a second flat surface (2) parallel to the first flat surface (1), which is mounted in the receiving recess (6) having the first flat surface (1). A method of assembling a metal seal (S) that is entirely annular, comprising: a first contact portion (11) having a convex section in the vicinity of an outer periphery contacting the first flat surface (1); and the second flat surface. The metal seal (S) having the second contact portion (12) near the inner periphery and in contact with (2) is attached to the accommodation recess (6), and the metal seal (S) is brought into contact with the metal seal (S). The metal seal (S) is prevented from falling off from the housing recess (6) by a fall prevention member (3) arranged in the housing recess (6), and the first flat surface (1) and the second flat surface are prevented. The first contact portion (11) of the metal seal (S) is pressed against the first flat surface (1), and the second contact portion ( Metal seal assembly wherein it is pressed against the 2) is the second flat surface (2).

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