JP3296108B2 - Electronic board container - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an electronic board which keeps an internal space confidential by pressing a first seal member provided on a lid member against a projecting portion formed at the periphery of an opening of a container body. It is about container for use.

[0002]

2. Description of the Related Art For example, in a semiconductor manufacturing process, the adhesion of dust to an electronic substrate such as a wafer, a liquid crystal display substrate, and a disk causes a reduction in yield. As shown in FIG. 5, an electronic substrate 55 is housed together with a cassette 55 in an electronic substrate container 51 capable of holding the internal space in a confidential state.

The above-mentioned electronic board container 51 is provided on the container body 52, a cover member 53 for opening and closing the opening of the container body 52, and the cover member 53 so as to abut the periphery of the opening of the container body 52. And a sealing member 54. Then, on the periphery of the opening of the container body 52,
A projecting portion 52a is formed, and the projecting portion 52a
When the lid member 53 closes the opening of the container body 52, the top space is cut into the sealing member 54, so that the internal space is kept in a good confidential state.

Since the electronic board container 51 is required to be lightweight and inexpensive, at least the container body 52 is made of resin. However, in recent years, the requirements for the environment of the internal space during transportation and storage have become strict with the advancement of functions and integration of semiconductor devices, and the gas permeability of the resin constituting the electronic substrate container 51 and Outgas from resin is not negligible.

Therefore, as shown in FIG. 6, a conventional container 51 for an electronic substrate has a film 5 made of metal, silicon oxide, resin or the like having a high gas barrier property and a small amount of outgas.
7 is formed on at least the inner wall surface (Japanese Patent Laid-Open No. 4-180248), or a countermeasure for fitting an inner seal 58 such as a metal plate or a metal stay on the inner wall surface is taken. .

[0006]

However, when the measures for forming the film 57 are taken as in the prior art, when the cover member 53 is opened and closed with respect to the container main body 52, the film 57 of the projecting portion 52a is closed. It is directly pressed strongly by the seal member 54 and is rubbed. Therefore, when the lid member 53 is repeatedly opened and closed with respect to the container main body 52, the adhesion strength of the film 57 to the resin is lower than the adhesion strength to the metal, so that the projecting portion 52 is formed.
There is a problem that the film 57 located at a is peeled off, the wall surface made of the resin at the peeled portion is exposed, the gas barrier properties and the performance against outgas are reduced, and the peeled film pieces contaminate the internal space as particles.

Further, when measures are taken to insert and insert the inner seal 58, it is necessary to form the inner seal 58 so as to follow a complicated shape such as the protruding portion 52a.
It becomes difficult to reliably cover the surface of the projecting portion 52a with the inner seal 58, and the projecting portion 5
2a may be insufficiently inserted. Therefore, when the opening and closing of the lid member 53 is repeated, the inner seal 58 located at the projecting portion 52a peels off, and as a result, the projecting portion 52
There is a problem that a is exposed and gas barrier properties and performance against outgas are reduced.

Accordingly, an object of the present invention is to prevent the projecting portion 52a from being exposed due to peeling of the film 57 and the inner seal 58 of the projecting portion 52a when the opening and closing by the lid member 53 are repeated.

[0009]

In order to solve the above object, when an opening of a container body is closed by a lid member, a first seal member provided on the lid member is attached to a periphery of the opening of the container body. The inner space is made confidential by being pressed against the formed projecting portion, and has the following features.

That is, a film having a high gas barrier property and a small amount of outgas is formed on at least the inner wall surface to the projecting portion on the container body, and the second sealing member is fixed so as to cover the film at the projecting portion. It is characterized by being established. The second seal member is preferably formed of a material having a smaller coefficient of friction than the first seal member, and the first seal member and the second seal member are such that the second seal member is the first seal member. It is desirable that they are formed of the same material so as to have higher hardness.

An inner seal having a high gas barrier property and a small amount of outgas is formed on the inner wall surface of the container body, and an end of the inner seal has a third portion formed in advance in the shape of a projecting portion. It is characterized in that a sealing member is fixedly provided so as to cover the projecting portion.

[0012]

According to the above construction, since the film of the projecting portion is indirectly abutted on the first seal member via the second seal member, the lid member can be opened and closed with respect to the container body. Even if it is repeated, the peeling of the film is prevented, and as a result, it is possible to prevent the gas barrier properties due to the exposure of the protruding portions and the deterioration in the performance against outgassing.

[0013] A third preformed into the shape of the protruding portion.
Since the projecting portion is covered using the sealing member, it is possible to cover the projecting portion more easily and reliably with a sufficient force than when the projecting portion is covered using only the inner seal. Even if the cover member is repeatedly opened and closed with respect to the third member, the third seal member does not fall off, and as a result, it is possible to prevent the gas barrier properties and the performance against outgas from being deteriorated due to the exposure of the projecting portion.

[0014]

【Example】

[Embodiment 1] An embodiment of the present invention will be described with reference to FIGS. As shown in FIG. 1, the electronic substrate container according to the present embodiment accommodates a cassette 8 holding an electronic substrate 6 such as a wafer.
A lid member 3 that can move up and down with respect to the opening of the container body 2, and a first seal member 4 provided on the lid member 3 so as to abut on the periphery of the opening on the inner wall surface side of the container body 2. are doing.

The container body 2 is made by molding a resin such as polyethylene, polypropylene or polycarbonate, and the lid member 3 is made of a metal such as an aluminum alloy. In addition, the lid member 3
A metal film may be formed on a molded product made of resin by vapor deposition or plating. Further, the first seal member 4 is
It is formed of a material having high gas barrier properties and a small outgas amount, such as silicon rubber or fluorine-based rubber.

A projecting portion 2a is formed at the periphery of the opening on the inner wall surface side of the container main body 2. The projecting portion 2a
When the lid member 3 closes the opening of the container main body 2, the sealing member 4 is pressed so that the top portion bites into the first sealing member 4. In addition, container body 2
A coating 7 is formed on the inner wall surface of the container 2 by vapor deposition or plating.
a. The film 7 is made of metal (aluminum, titanium, nickel, chromium), silicon oxide (silicon oxide), fluorine-based resin, or the like.
It has characteristics of a higher gas barrier property and a smaller amount of outgas than the material constituting the container body 2.

As shown in FIG. 2, the coating 7 of the projecting portion 2a is covered by a second seal member 5, and indirectly contacts the first seal member 4 via the second seal member 5. It comes into contact. Both ends of the second seal member 5 are fixed by fixing pins 10 so that the protrusion 2a does not move in the direction of the seal surface when the protrusion 2a bites into the first seal member 4. The second seal member 5 is formed of a material having a smaller coefficient of friction than the first seal member 4, and is formed on the surface of the projecting portion 2 a when the projecting portion 2 a presses the first seal member 4. Film 7 along the parallel sealing surface
The force B in the direction of the seal surface for extending the pressure is reduced. In addition, as a material of the second seal member 5,
Examples thereof include metals (aluminum, titanium, nickel, and chromium), silicon oxides (silicon oxide), and fluorine-based resins.

The operation of the electronic substrate container 1 in the above configuration will be described. As shown in FIG. 1, when the lid member 3 rises in the direction of the opening of the container body 2 and closes the opening of the container body 2, the projecting portion 2 a of the container body 2 is closed.
Presses the second seal member 5 via the first seal member 4. As a result, the top portion of the protruding portion 2a bites into the second seal member 5, so that the electronic substrate container 1 is kept in a confidential state, thereby preventing foreign substances and moisture from entering the internal space. The coating film 7 formed on the inner wall surface of the container body 2, the cover member 3 for closing the opening of the container body 2, the first seal member 4, and the second seal member 5 are smaller than the resin forming the container body 2. It is made of a material with low gas permeability and low outgas amount. Therefore, in the electronic substrate container 1, the environment of the internal space can be maintained in an extremely stable state by the characteristics of the confidential structure and the constituent material facing the internal space.

Further, the opening of the container body 2 is
When is closed, as shown in FIG. 2, a force A in the pressing direction and a force B in the sealing surface direction are generated by the top of the protruding portion 2 a biting into the first seal member 4. However, since the force A in the pressing direction and the force B in the sealing surface direction are indirectly in contact with the first seal member 4 via the second seal member 5, the coating 7 of the projecting portion 2 a It will be applied to the second seal member 5. Therefore, even when the lid member 3 is repeatedly opened and closed with respect to the container main body 2, the first sealing member 4 is pressed in the force A in the pressing direction.
In addition, since the film 7 is not directly rubbed by the force B in the direction of the sealing surface, it is difficult to peel off.

Further, the force A in the pressing direction and the coefficient of friction of the second seal member 5 against the first seal member 4 determine the force B in the seal surface direction.
It is formed of a material having a smaller coefficient of friction than the first seal member 4. Therefore, the force B in the direction of the seal surface is reduced by the small coefficient of friction of the second seal member 5. In addition, both ends of the second seal member 5 are fixed by fixing pins 10 so as not to move in the seal surface direction. Thereby, the second sealing member 5 does not move in the sealing surface direction due to the small force B in the sealing surface direction, and the second sealing member 5 does not rub the coating 7,
The peeling of the film 7 is further prevented.

As described above, in the electronic substrate container 1 of this embodiment, when the opening of the container body 2 is closed by the cover member 3, the first seal member 4 provided on the cover member 3 The inner space is kept confidential by being pressed against the projecting portion 2a formed on the periphery of the opening of the container body 2. The container 7 has a coating 7 having a high gas barrier property and a small outgas amount at least from the inner wall surface. The second sealing member is formed so as to cover the projecting portion, and is fixed so as to cover the film of the projecting portion 2a.

As a result, the coating 7 of the projecting portion 2a is indirectly abutted on the first seal member 4 via the second seal member 5, so that the cover member 3 Even if opening and closing are repeated, exposure of the protruding portion 2a due to peeling of the film 7 is prevented, and it is possible to prevent deterioration in gas barrier properties and performance against outgassing and contamination of the internal space.

Further, the container 1 for an electronic substrate of the present embodiment
Is that the second seal member 5 is formed of a material having a smaller coefficient of friction than the first seal member 4, so that the force B in the direction of the seal surface is reduced by the small coefficient of friction of the second seal member 5, and the film 7 Can be further prevented from peeling off.

Incidentally, the second sealing member 5 in this embodiment is used.
Is formed of a material different from the material of the first seal member 4 so as to reduce the coefficient of friction and thus more effectively prevent the peeling of the film 7, but is not limited to this. . That is, in general, the lower the hardness, the higher the friction coefficient. Therefore, the second seal member 5 is made of the same material as the first seal member 4 so that the second seal member 5 has a higher hardness than the first seal member 4. Also by using a material, the coefficient of friction of the second seal member 5 with respect to the first seal member 4 can be reduced, and peeling of the film 7 can be more effectively prevented.

[Embodiment 2] Another embodiment of the present invention will be described with reference to FIGS. The same members as those in the first embodiment are denoted by the same reference numerals, and description thereof will be omitted. As shown in FIG. 3, the electronic substrate container according to the present embodiment has an inner seal 11 made of a metal plate, a metal pad, or the like. The inner seal 11 is formed by being attached to the inner wall surface of the container main body 2 so that the end is located near the opening of the container main body 2. A portion 11a is formed. In addition, the engaging portion 11
“a” may be a through hole formed in the inner seal 11.

At the end of the inner seal 11, an upper end of the third seal member 13 is fixed so as to cover the engaging portion 11a.
1a prevents falling off. As shown in FIG. 4, the third seal member 13 is formed using silicon rubber, urethane rubber, fluorine rubber, or the like so as to conform to the shape of the projecting portion 2a of the container body 2. When the lid member 3 closes the opening of the container body 2, it comes into contact with the first seal member 4.

In the above structure, when the electronic substrate container 1 is manufactured, the third seal member 13 is formed in advance along the projecting portion 2a of the container body 2, and the inner seal 11 is After cutting and joining along the inner wall surface of the inner seal 2, the third seal member 13 is attached to the end of the inner seal 11 and fixed to the protruding portion 2a.

At this time, since the inner wall surface of the container body 2 is composed of a combination of flat surfaces, the inner seal 11 can be easily cut and joined, and the third seal member 13 has a predetermined shape. Therefore, the third seal member 13 can be easily attached. Alternatively, the third seal member 13 can be additionally molded directly to the inner seal 11. Therefore, the third sealing member 13 is not
Can be easily and reliably covered with a sufficient force, so that the third seal member 13 does not fall off from the protruding portion 2a even when the opening and closing by the lid member 3 is repeated, and as a result, As a result, it is possible to prevent a decrease in gas barrier properties and performance against outgas due to exposure of the protruding portion 2a.

As described above, in the electronic substrate container 1 of the present embodiment, the inner seal 11 having a high gas barrier property and a small outgas amount is attached to the inner wall surface of the container body 2 and is formed in advance into the shape of the projecting portion 2a. The formed third seal member 13 is fixedly attached to the end of the inner seal 11 so as to cover the projecting portion 2a. This makes it possible to easily and reliably cover the projecting portion 2a with the third seal member 13 with a sufficient force.
This makes it possible to prevent the gas barrier property and the performance against outgas from deteriorating due to the exposure of a. Furthermore, when the thickness of the portion corresponding to the protruding portion 2a of the third seal member 13 is increased, the lid member 3 can be formed in a planar shape without the need for the first seal member 4. In addition, the electronic substrate container 1 can be manufactured at low cost.

[0030]

As described above, according to the present invention, a film having a high gas barrier property and a small outgas amount is formed at least from the inner wall surface of the container body to the projecting portion.
Since the second seal member is fixedly provided so as to cover the film of the projecting portion, the film of the projecting portion is indirectly in contact with the first seal member via the second seal member. Will be. Therefore, even if the lid member is repeatedly opened and closed with respect to the container body, peeling of the film is prevented, and as a result, it is possible to prevent a decrease in gas barrier properties and performance against outgas due to exposure of the protruding portion. .

Further, according to the present invention, as described above, an inner seal having a high gas barrier property and a small amount of outgas is formed on the inner wall surface of the container body, and is formed in advance at the end of the inner seal into the shape of a projecting portion. Since the third seal member is fixed so as to cover the projecting portion,
This makes it possible to cover the projecting portion more easily and reliably with a sufficient force than when the projecting portion is covered using the inner seal. Therefore, even if the lid member is repeatedly opened and closed with respect to the container body, the third seal member does not fall off, and as a result, it is possible to prevent the gas barrier property and the performance against outgas from being deteriorated due to the exposure of the projecting portion. This has the effect.

[Brief description of the drawings]

FIG. 1, showing the present invention, is a longitudinal sectional view of an electronic substrate container.

FIG. 2 is an enlarged sectional view of a main part of the electronic substrate container of FIG. 1;

FIG. 3, showing the present invention, is a longitudinal sectional view of an electronic substrate container.

FIG. 4 is an enlarged sectional view of a main part of the electronic substrate container of FIG. 3;

FIG. 5 shows a conventional example and is a longitudinal sectional view of an electronic substrate container.

FIG. 6 shows a conventional example, and is a longitudinal sectional view of an electronic substrate container.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Container for electronic boards 2 Container main body 2a Projecting part 3 Lid member 4 First seal member 5 Second seal member 6 Electronic board 7 Film 8 Cassette

──────────────────────────────────────────────────の Continuing on the front page (72) Inventor Hiroyuki Obibe 100, Takegahana-cho, Ise-shi, Mie Shinko Electric Machinery Co., Ltd.Ise Works (72) Inventor Miki Tanaka 100, Takegahana-cho, Ise-shi, Mie Prefecture Shinko Electric Machinery Co., Ltd. (56) References JP-A-6-196545 (JP, A) JP-A-6-92389 (JP, A) JP-A-4-77255 (JP, U) (58) Fields surveyed (Int .Cl. ⁷ , DB name) B65D 85/86 H01L 21/68

Claims (4)

(57) [Claims] When an opening of a container body is closed by a lid member, a first seal member provided on the lid member is pressed against a projecting portion formed on a periphery of the opening of the container body. An electronic board container for keeping an internal space in a confidential state, wherein a film having a high gas barrier property and a small outgas amount is formed on at least the inner wall surface to the projecting portion on the container body, and the second seal member is An electronic board container, which is fixed so as to cover a film of a protruding portion. 2. The electronic substrate container according to claim 1, wherein said second seal member is formed of a material having a smaller coefficient of friction than said first seal member. 3. The first seal member and the second seal member are formed of the same material so that the second seal member has a higher hardness than the first seal member. The container for an electronic substrate according to claim 1. 4. When the opening of the container body is closed by the lid member, the first seal member provided on the lid member is pressed against the projecting portion formed on the periphery of the opening of the container body. An electronic board container for keeping an internal space confidential, wherein an inner seal having a high gas barrier property and a small amount of outgas is formed on an inner wall surface of the container body, and an end of the inner seal has a projection. An electronic board container, characterized in that a third seal member formed in advance in the shape of the provided portion is fixed so as to cover the projecting portion.