JP2001173568A - Piezoelectric diaphragm pump and manufacturing method therefor - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a piezoelectric diaphragm pump capable of securing sealing ability for a passage. SOLUTION: This piezoelectric diaphragm pump is provided with a diaphragm formed out of a piezoelectric element, upper and lower enclosures 5a, 5b where a passage 2 constituted by a suction passage 2a and a discharge passage 2b is formed between them, a suction valve and a discharge valve formed by interposing a membrane valve 7 between the upper and lower enclosures 5a, 5b, and a pump chamber formed between the diaphragm and one enclosure 5a. In the pump, a fluid is passed from the suction passage 2a to be discharged to the discharge passage 2b through the pump chamber by bending movement of the diaphragm. An O-ring 12 is disposed along the passage 2 in one of the upper and lower enclosures 5a, 5b, and the upper and lower enclosures 5a, 5b are fastened with the O-ring 12 interposed between them.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a structure of a piezoelectric diaphragm pump used in, for example, a medical field or an analysis field which requires precise fluid control of a minute flow rate, and a method of manufacturing the same.

[0002]

2. Description of the Related Art Conventionally, as a piezoelectric diaphragm pump of this type, as shown in FIGS. 15 to 17, for example, a diaphragm 1 composed of a piezoelectric element, a flow path 2, a pedestal part 3, a counterbore part 4, and the like are formed. Upper and lower housings 5a and 5b
a and 6b and a membrane valve 7 made of a polyimide film or the like. The membrane valve 7 is interposed between the upper and lower housings 5a and 5b, and the upper and lower housings 5a and 5b are integrated with each other with fastening screws or the like. At the end of the suction-side flow path 2a of the flow path 2, an upper counterbore part 4, a lower pedestal part 3, and a through-hole 6a of a membrane valve 7 are formed with a suction valve 8 for preventing backflow. At the end of the discharge side flow path 2b of the flow path 2, a discharge valve 9 for preventing backflow is formed by a lower counterbore part 4, a through hole 6b of a membrane valve 7, and an upper pedestal part 3. The diaphragm 1 is mounted on the upper housing 5a, and a pump chamber 10 is provided between the diaphragm 1 and the upper housing 5a. The pump chamber 10 and the suction-side flow path 2a are connected to the communication hole 1 of the upper housing 5a.
1a is connected to the pump chamber 10 via the suction valve 8.
The discharge side flow path 2b is communicated with the communication hole 11b of the upper housing 5a via the discharge valve 9. This piezoelectric diaphragm pump functions as a pump by applying a voltage to the diaphragm 1 made of a piezoelectric element to cause the diaphragm 1 to bend and move.

FIGS. 18 and 19 show an example of the operation of the above-mentioned diaphragm pump. FIG. 18A shows the state of suction of the fluid, and FIG. 18B shows the state of discharge of the fluid. In the fluid suction state, the diaphragm 1 expands, so that the discharge valve 9 is closed as shown in FIG. 19A and the suction valve 8 is opened as shown in FIG. Fills the pump chamber 10 with the fluid sucked from the pump chamber 10. Thereafter, when the diaphragm 1 is contracted and the pump chamber 10 is compressed, as shown in FIG.
Is closed, and as shown in FIG.
Is opened, and the fluid is discharged from the discharge-side flow path 2b.

[0004]

The upper and lower housings 5a and 5b of the above-mentioned piezoelectric diaphragm pump are generally molded products of resin. However, when assembling the upper and lower housings 5a and 5b integrally, the upper and lower housings 5a and 5b are not connected to each other. It is merely integrated by inserting a fastening screw into the housings 5a and 5b.
However, due to the surface roughness and undulation of the surfaces of the housings 5a and 5b, there is a problem that the tightness of the flow path cannot be secured only by tightening the fastening screws.
When the pressure of the fluid is applied, a and 5b have a problem that they cannot be sealed because they are deformed.

The present invention has been made in view of the above description, and an object of the present invention is to provide a piezoelectric diaphragm capable of ensuring the tightness of a flow path and a method of manufacturing the same.

[0006]

According to a first aspect of the present invention, there is provided a piezoelectric diaphragm pump comprising: a diaphragm comprising a piezoelectric element; and a flow path comprising a suction side flow path and a discharge side flow path. Upper and lower housings 5 with 2 formed between them
a, 5b, a suction valve 8 and a discharge valve 9 formed by interposing a membrane valve 7 between upper and lower housings 5a, 5b, and a pump formed between the diaphragm 1 and one housing 5a. A piezoelectric diaphragm pump comprising a chamber 10 and a fluid that is discharged from the suction-side flow path 2a to the discharge-side flow path 2b through the pump chamber 10 by the bending movement of the diaphragm 1. An O-ring 12 is arranged along one of the flow paths 2 on one of 5a and 5b, and the upper and lower casings 5a and 5b are fastened with the O-ring 12 interposed therebetween. O arranged along the flow path 2
By sealing the upper and lower housings 5a and 5b via the ring 12, the hermeticity between the upper and lower housings 5a and 5b can be secured,
Fluid leakage due to surface roughness and surface undulation of the housings 5a and 5b can be prevented.

According to a second aspect of the present invention, there is provided a piezoelectric diaphragm pump comprising a diaphragm formed of a piezoelectric element and a flow path formed of a suction side flow path and a discharge side flow path. 5a, 5b, a suction valve 8 and a discharge valve 9 formed by interposing a membrane valve 7 between upper and lower housings 5a, 5b, and a pump formed between the diaphragm 1 and one housing 1a. A piezoelectric diaphragm pump having a chamber 10 and configured so that fluid is discharged from the suction-side flow path 2a to the discharge-side flow path 2b through the pump chamber 10 by bending motion of the diaphragm 1. A thin resin film 13 is layered on a thin resin film 13 and a thin resin film 1 is placed between upper and lower casings 5a and 5b.
3 and the upper and lower casings 5a, 3 are fastened with the thick resin film 14 interposed therebetween. The upper and lower housings 5a and 5b are pressed against each other by interposing a thick resin film 14 in addition to the thin resin film 13 serving as the membrane valve 7 between the upper and lower housings 5a and 5b. , 5b can be secured, and fluid leakage due to surface roughness and surface undulation of the housings 5a, 5b can be prevented.

According to a third aspect of the present invention, there is provided a piezoelectric diaphragm pump according to the second aspect, wherein the thin resin film 13 and the thick resin film 14 are vertically moved between the suction side flow path 2a and the discharge side flow path 2b. Is characterized in that the order of stacking is reversed. In this way, the thick resin film 14
The holes provided in the holes can be easily machined.

According to a fourth aspect of the present invention, there is provided a piezoelectric diaphragm pump in which a diaphragm formed of a piezoelectric element and a flow path formed of a suction side flow path and a discharge side flow path are formed therebetween. A pump formed between the diaphragm 1 and one housing 5a; a suction valve 8 and a discharge valve 9 formed by interposing a membrane valve 7 between upper and lower housings 5a and 5b; A fluid from the suction side flow path 2a by the bending movement of the diaphragm 1.
A piezoelectric diaphragm pump configured to be discharged to the discharge side flow path 2b through the upper and lower casings 5a, 5b.
A resin ridge 15 along one of the flow paths 2
And the upper and lower housings 5a and 5b are fastened with the resin ridge film 15 interposed therebetween.
By sealing the upper and lower housings 5a and 5b by interposing a resin ridged film 15 between the upper and lower housings 5a and 5b, the hermeticity between the upper and lower housings 5a and 5b can be secured. Fluid leakage due to the surface roughness or undulation of the bodies 5a, 5b can be prevented. In addition, the resin ridge film 15 can be provided closer to the flow path 2 than the O-ring 12, so that response operation characteristics can be improved.

According to a fifth aspect of the present invention, there is provided a piezoelectric diaphragm pump in which a diaphragm 1 comprising a piezoelectric element and a flow path 2 comprising a suction side flow path 2a and a discharge side flow path 2b are formed therebetween. A pump formed between the diaphragm 1 and one housing 5a; a suction valve 8 and a discharge valve 9 formed by interposing a membrane valve 7 between upper and lower housings 5a and 5b; A fluid from the suction side flow path 2a by the bending movement of the diaphragm 1.
A piezoelectric diaphragm pump configured to be discharged to the discharge side flow path 2b through the upper and lower casings 5a, 5b.
Is formed of resin, and a protrusion 16 is formed along the flow path 2 on a case 5b formed of resin.
Is characterized by being concluded. Upper and lower housings 5a, 5
By interposing the resin protrusion 16 integral with the housing 5b between the upper and lower housings 5a and 5b, the hermeticity between the upper and lower housings 5a and 5b can be secured, and the surface roughness and surface of the housings 5a and 5b can be secured. Fluid leakage due to undulation can be prevented. In addition, since the protrusion 16 is integrally provided from the resin housing 5b, the O-ring 12
It can be provided closer to the flow path 2 and the response operation characteristics can be improved.

According to a sixth aspect of the present invention, there is provided a method of manufacturing a piezoelectric diaphragm pump, comprising the steps of:
Upper and lower housings 5a and 5b in which a flow path 2 including a suction-side flow path 2a and a discharge-side flow path 2b are formed;
a and 5b, a suction valve 8 and a discharge valve 9 formed with a membrane valve 7 interposed therebetween, and a pump chamber 10 formed between the diaphragm 1 and one housing 5a. In a piezoelectric diaphragm pump configured so that fluid is discharged from the suction side flow path 2a through the pump chamber 10 to the discharge side flow path 2b by bending motion, the hermetically sealed upper and lower casings 5a and 5b are maintained. Ridged film for resin 1
5 is formed along the flow path 2, the upper and lower casings 5a, 5b
Mask 1 for removing resin film 17 on any one of
8 is covered so as to cover portions other than the periphery of the flow path 2, and then the resin film 17 is coated from above the mask 18 so as to adhere to at least the periphery of the flow path 2 of the housing 5 b. It is characterized in that the ridge film 15 as the resin film 17 is formed only on the periphery of the flow path 2 by peeling off. Case 5b
The resin ridge film 15 along the peripheral edge of the flow path 2 can be easily formed, and the diaphragm pump having the structure of claim 4 can be easily manufactured.

[0012]

DESCRIPTION OF THE PREFERRED EMBODIMENTS The overall structure of a piezoelectric diaphragm pump is basically the same as that described in the conventional example, and therefore, in the description of the embodiment of the present invention, only points different from the conventional example will be mainly described.

First, an example of the first embodiment will be described.
As shown in FIG. 1, the upper and lower housings 5a and 5b are provided with a flow path 2 including a suction side flow path 2a and a discharge side flow path 2b, a pedestal portion 3, a counterbore portion 4, and communication holes 11a and 11b. A membrane valve 7 having through holes 6a, 6b and made of a polyimide film or the like is interposed between the upper and lower housings 5a, 5b, and the upper and lower housings 5a, 5b are integrated by fastening with fastening screws or the like. Have been. At the end of the suction-side flow path 2a of the flow path 2, an upper counterbore part 4, a lower pedestal part 3, and a through-hole 6a of a membrane valve 7 are formed with a suction valve 8 for preventing backflow. At the end of the discharge side flow path 2b of the flow path 2, a lower counterbore part 4, a through hole 6b of the membrane valve 7, and an upper pedestal part 3
A discharge valve 9 for preventing back flow is formed. The housings 5a and 5b are, for example, resin molded products.

In the case of the present invention, the upper and lower casings 5a, 5
An O-ring 12 formed of an elastic body such as rubber is attached along the peripheral edge of at least one of the flow paths 2 out of b. In the case of this example, the O-ring 12 is mounted along the peripheral edge of the suction-side flow path 2a and the discharge-side flow path 2b of the lower housing 5b. O
When the ring 12 is mounted, the groove 2 is formed along the periphery of the flow path 2.
2, and the O-ring 12 is fitted into the groove 22. When the O-ring 12 is attached to the lower housing 5b as described above, when the upper and lower housings 5a and 5b are integrated by fastening a tightening screw via the membrane valve 7, the O-ring 12 is closed.
The sealing performance is maintained by the ring 12, and even if the surfaces of the housings 5a and 5b are rough or undulating, and even if the housings 5a and 5b are made of resin, fluid leakage can be prevented. it can. In the case of this example, the O-ring 12 is attached to the lower housing 5b.
, But may be mounted on the upper housing 5a.

Next, an example of the second embodiment will be described. In the case of this example, as shown in FIG.
The upper and lower housings 5a, 5b are fastened with the thin resin film 13 and the thick resin film 14 interposed between the upper and lower housings 5a, 5b while the thin resin film 13 is laminated on the thin resin film 13 to be formed. . Thick resin film 14
As shown in FIG. 4, a pedestal portion 3 'corresponding to the pedestal portion 3 of the lower housing 5b is provided, and a through hole 4' is provided corresponding to the counterbore portion 4. The pedestal portion 3 ′ of the thick resin film 14 is supported by a radial connecting portion 19, and when the pedestal portion 3 ′ is formed on the thick resin film 14, as shown in FIG. First mask 2
The laser beam is radiated to pierce the hole to form a pedestal portion 3 ′ and a connecting portion 19, and then the second mask 21 is superimposed, and the laser is irradiated to radiate the connecting portion 19. Sharpen the top of The through hole 4 'is only a hole.
As shown in FIG. 3B, the upper counterbore portion 4, the lower pedestal portion 3, and the thick resin film 14 are provided at the end of the suction-side flow path 2a.
A suction valve 8 for preventing backflow is formed by a pedestal portion 3 'and a through hole 6a of a thin resin film 13 as a membrane valve 7, and an end of the discharge side flow path 2b as shown in FIG. The lower counterbore part 4 and the through hole 4 ′ of the thick resin film 14
The discharge valve 9 for preventing backflow is formed by the through hole 6b of the thin resin film 13 as the membrane valve 7 and the upper pedestal portion 3.

As described above, in addition to the thin resin film 13 serving as the membrane valve 7 and the thick resin film 14 interposed between the upper and lower housings 5a and 5b, the upper and lower housings 5a and 5b are interposed.
b, the airtightness between the upper and lower housings 5a and 5b can be ensured. Even if the surfaces of the housings 5a and 5b are rough or undulating, the housings 5a and 5b Even if is made of resin, fluid leakage can be prevented.

Next, an example of the third embodiment will be described. This example is the same as the example of the second embodiment, but
The order in which the thin resin film 13 and the thick resin film 14 are vertically stacked on the suction side flow path 2a and the discharge side flow path 2b is reversed. Thin resin film 13
Is the first resin film 1 so as to be on the suction side and the discharge side.
3a and the second resin film 13b, and the first resin film 14 is also thickened so as to be on the suction side and the discharge side.
Is divided into a resin film 14a and a second resin film 14b. On the first resin film 14a side of the thick resin film 14, a through hole 3 "corresponding to the pedestal portion 3 is provided. On the suction side, the first resin film 13a is provided.
A first resin film 14a is stacked on the second resin film 14b, and a second resin film 13b is stacked on the second resin film 14b on the discharge side. 6 (a), the upper counterbore part 4, the lower pedestal part 3, the through hole 3 ″ of the thick resin film 14, and the membrane valve 7 are provided at the end of the suction side flow path 2a.
A suction valve 8 for preventing backflow is formed by a through hole 6a of the thin resin film 13 as a thin film, and a lower counterbore portion 4 is formed thick at the end of the discharge side flow path 2b as shown in FIG. A discharge valve 9 for preventing backflow is formed by the through hole 4 ′ of the resin film 14, the through hole 6 b of the thin resin film 13 as the membrane valve 7, and the upper pedestal 3. In this way, the thick resin film 14 can be easily processed because the through holes 3 ″ need only be formed in the thick resin film 14 instead of opening the pedestal portion 3 ′ as in the above example.

Next, an example of the fourth embodiment will be described. In this case, a resin ridged film 15 is formed along one of the upper and lower casings 5a and 5b along the flow path 2, and the upper and lower casings 5a and 5b are interposed with the resin ridged film 15 interposed therebetween. 5
b. In the case of this example, as shown in FIG. 8, a resin ridge film 14 is formed along the flow path 2 of the lower housing 5a. When the ridge film 14 is formed on the lower housing 5a, a resin film is formed on the entire upper surface of the lower housing 5a by a method such as vapor deposition polymerization (this resin is a material capable of forming a thin film such as polyimide. And a mask 17 is arranged thereon as shown in FIG.
Etching is performed by oxygen plasma or the like, and the ridge film 14 is formed while leaving only the resin film on the periphery of the flow path 2.

As described above, the upper and lower housings 5a and 5b are pressed against each other by interposing the resin ridges 15 between the upper and lower housings 5a and 5b. The hermeticity can be ensured, and fluid leakage can be prevented even if the surfaces of the casings 5a and 5b are rough or undulating, and even if the casings 5a and 5b are made of resin. Further, the resin ridge film 15 formed as described above can be provided closer to the flow path 2 than the O-ring 12, so that response operation characteristics can be improved. That is, in the case of the O-ring 12, since the groove 22 must be provided and mounted as shown in FIG.
There is a possibility that the O-ring 12 is fixed at a position away from the peripheral edge of the resin film and adversely affects the response operation characteristic. In the case of the resin ridge film 15, as shown in FIG. And the response operation characteristics are not easily affected. In the present example, the ridged film 15 is provided on the lower housing 5b, but may be provided on the upper housing 5a.

Next, an example of the fifth embodiment will be described. In this case, at least one of the upper and lower housings 5a and 5b is formed of resin, and a protrusion 16 is formed along the flow path 2 on the housing 5b formed of resin, and the protrusion 16 is interposed. In this state, the upper and lower housings 5a and 5b are fastened.
In the case of this example, the protrusion 16 is formed integrally with the lower housing 5 b made of resin along the flow path 2.

As described above, the housing 5b is interposed between the upper and lower housings 5a, 5b, and the resin protrusion 16 is interposed therebetween, and the housing is pressed down, so that the airtightness between the upper and lower housings 5a, 5b is improved. Thus, even if the surfaces of the casings 5a and 5b are rough or undulating, and even if the casings 5a and 5b are made of resin, fluid leakage can be prevented. In addition, since the projection 16 is integrally provided from the resin housing 5b, the projection 16 can be provided closer to the flow path 2 than the O-ring 12, so that response operation characteristics can be improved. That is, in the case of the O-ring 12, since the groove 22 must be provided and mounted as shown in FIG. 2, the O-ring 12 is fixed at a position away from the peripheral edge of the flow path 2 and adversely affects response operation characteristics. Although there is a possibility, in the case of the protrusion 16, as shown in FIG. 12, the protrusion 16 can be close to the periphery of the flow path 2 and the response operation characteristic is hardly affected. In addition,
In the case of this example, the projection 16 is provided on the lower housing 5b, but may be provided on the upper housing 5a.

Next, an example of the sixth embodiment will be described. This example shows another example of a method of forming the ridged film 15 on one of the housings 5a and 5b of the fourth embodiment. When forming the ridged film 15 on the housing 5b, first, as shown in FIGS. 13 and 14 (a), a mask 18 is coated so as to cover a portion other than the peripheral edge of the flow path 2, and then FIG.
As shown in FIG. 2B, a resin film 17 is coated so as to adhere to the entire surface from above the mask 18 (resin is a material such as polyimide which can form a thin film), and then the mask 18 is peeled off to remove the mask 18 shown in FIG.
As shown in FIG. 4C, the ridge film 15 as the resin film 17 is formed only on the peripheral edge of the flow path 2. In this case, the housing 5
It is possible to easily form the ridged film 15 of resin along the periphery of the flow path 2 of b, and it is possible to easily manufacture the diaphragm pump having the structure of the fourth embodiment.

[0023]

According to the first aspect of the present invention, as described above, the O-ring is disposed along one of the upper and lower casings along the flow path, and the upper and lower casings are interposed with the O-ring interposed therebetween. Since the body is fastened, airtightness between the upper and lower housings can be ensured by the O-ring, and fluid leakage can be prevented.

According to a second aspect of the present invention, a thin resin film serving as a membrane valve is laminated with a thick resin film as described above, and the thin resin film and the thick resin film are interposed between the upper and lower housings. Since the upper and lower housings are fastened, a thick resin film is interposed in addition to the thin resin film that becomes the membrane valve, so that airtightness can be secured between the upper and lower housings, preventing fluid leakage. You can do it.

According to a third aspect of the present invention, as described above, in the second aspect, the thin resin film and the thick resin film are overlapped on the suction side flow path portion and the discharge side flow path portion. Since the order is reversed, the hole processing to be provided in the thick resin film is facilitated.

According to a fourth aspect of the present invention, as described above, a resin ridge film is formed along one of the upper and lower housings along the flow path, and the resin ridge film is interposed. Since the upper and lower casings are fastened in this state, the sealing between the upper and lower casings can be ensured by the resin ridged film, and fluid leakage can be prevented. Therefore, it can be provided closer to the flow path than the O-ring, and the response operation characteristics can be improved.

According to a fifth aspect of the present invention, at least one of the upper and lower housings is formed of a resin as described above, and a projection is formed on the housing formed of the resin along the flow path. However, since the upper and lower housings are fastened with the protrusions interposed, the hermeticity between the upper and lower housings can be ensured by the protrusions formed integrally with the housing, thereby preventing fluid leakage. Since it is a projection integrally formed from the resin housing, it can be provided closer to the flow path than the O-ring, and the response operation characteristics can be improved.

According to the invention of claim 6 of the present invention, when forming a resin ridge film along the flow path for maintaining the tightness between the upper and lower casings that are fastened, one of the upper and lower casings is used. A mask for removing the resin film is coated so as to cover a portion other than the peripheral edge of the flow path, and then coated so that the resin film adheres to at least the peripheral edge of the flow path of the housing from above the mask, Since the mask is peeled off to form a ridged film as a resin film only on the periphery of the flow path, a ridged film of resin along the periphery of the flow path of the housing can be easily formed. A diaphragm pump having a structure can be easily manufactured.

[Brief description of the drawings]

FIG. 1 is an exploded perspective view of an example of a first embodiment of the present invention.

FIG. 2 is a sectional view of a main part in an assembled state of the same.

3A is a front view of an example of the second embodiment, FIG. 3B is a cross-sectional view of a suction valve portion, and FIG. 3C is a cross-sectional view of a discharge valve portion.

FIG. 4 is a perspective view showing the thick resin film of the above.

FIGS. 5 (a) and 5 (b) are perspective views for explaining a state of processing into a thick resin film of the above.

6A and 6B show an example of the third embodiment, in which FIG. 6A is a sectional view of a suction valve portion, and FIG. 6B is a sectional view of a discharge valve portion.

FIG. 7 is an exploded perspective view of the same.

FIG. 8 is a perspective view showing a main part of the fourth embodiment.

FIG. 9 is a perspective view for explaining the processing described above.

FIG. 10 is a sectional view of a main part in an assembled state of the above.

FIG. 11 shows an example of the fifth embodiment of the present invention, and (a)
2 is a perspective view of a main part, and FIG. 2B is a cross-sectional view of the main part.

FIG. 12 is a sectional view of a main part in an assembled state of the above.

FIG. 13 is an exploded perspective view for explaining processing in the example of the sixth embodiment.

FIGS. 14 (a), (b) and (c) are explanatory views for explaining processing steps.

FIG. 15 is an exploded perspective view of a conventional piezoelectric diaphragm pump.

FIG. 16 is an exploded perspective view of a conventional housing and a membrane valve.

17A is a sectional view of a conventional suction valve portion, and FIG.
Is a sectional view of a conventional discharge valve portion.

FIGS. 18 (a) and (b) are explanatory diagrams illustrating a bending motion of a diaphragm.

FIGS. 19 (a), (b), (c) and (d) are explanatory diagrams of the operation of the suction valve and the discharge valve.

[Explanation of symbols]

 Reference Signs List 1 diaphragm 2 flow path 2a suction-side flow path 2b discharge-side flow path 5a housing 5b housing 7 membrane valve 8 suction valve 9 discharge valve 10 pump chamber 12 O-ring 13 thin resin film 14 thick resin film 15 ridged film 16 protrusion Part 17 resin film 18 mask

 ──────────────────────────────────────────────────続 き Continued on the front page (72) Inventor Michihiko Tani 1048 Kazuma Kadoma, Kazuma-shi, Osaka Matsushita Electric Works Co., Ltd. F-term (reference) 3H077 AA01 AA11 CC02 DD06 EE26 FF07 FF08 FF36

Claims (6)

[Claims] An upper and lower housing in which a diaphragm made of a piezoelectric element, a flow passage composed of a suction-side flow passage and a discharge-side flow passage are formed, and a membrane valve interposed between the upper and lower housings. A pump chamber formed between the diaphragm and one of the housings, and a fluid is moved from the suction side flow path to the discharge side flow path through the pump chamber by the bending motion of the diaphragm. A piezoelectric diaphragm pump configured to be discharged, wherein an O-ring is arranged along one of the upper and lower housings along the flow path, and the upper and lower housings are fastened with the O-ring interposed therebetween. A piezoelectric diaphragm pump characterized by comprising: 2. An upper and lower housing in which a diaphragm made of a piezoelectric element, a flow passage composed of a suction-side flow passage and a discharge-side flow passage are formed, and a membrane valve interposed between the upper and lower housings. A pump chamber formed between the diaphragm and one of the housings, and a fluid is moved from the suction side flow path to the discharge side flow path through the pump chamber by the bending motion of the diaphragm. A piezoelectric diaphragm pump configured to be discharged, wherein a thick resin film is overlaid on a thin resin film serving as a membrane valve, and a thin resin film and a thick resin film are interposed between upper and lower housings. A piezoelectric diaphragm pump comprising a housing fastened. 3. The piezoelectric diaphragm pump according to claim 2, wherein the order in which the thin resin film and the thick resin film are vertically stacked in the suction side flow path portion and the discharge side flow path portion is reversed. . 4. A diaphragm formed of a piezoelectric element, upper and lower housings having a suction side flow path and a discharge side flow path formed therebetween, and a membrane valve interposed between the upper and lower housings. A pump chamber formed between the diaphragm and one of the housings, and a fluid is moved from the suction side flow path to the discharge side flow path through the pump chamber by the bending motion of the diaphragm. A piezoelectric diaphragm pump configured to be discharged, wherein a resin ridge film is formed along one of the upper and lower housings along the flow path, and the resin ridge film is interposed therebetween. A piezoelectric diaphragm pump comprising upper and lower housings fastened together. 5. A diaphragm comprising a piezoelectric element, upper and lower housings having a suction side flow path and a discharge side flow path formed therebetween, and a membrane valve interposed between the upper and lower housings. A pump chamber formed between the diaphragm and one of the housings, and a fluid is moved from the suction side flow path to the discharge side flow path through the pump chamber by the bending motion of the diaphragm. A piezoelectric diaphragm pump configured to be discharged, wherein at least one of the upper and lower housings is formed of a resin, and a protrusion is formed on the housing formed of the resin along the flow path. A piezoelectric diaphragm pump comprising upper and lower housings fastened together with a part interposed therebetween. 6. An upper and lower housing having a diaphragm formed of a piezoelectric element, a flow passage formed of a suction side flow passage and a discharge side flow passage formed therebetween, and a membrane valve interposed between the upper and lower housings. A pump chamber formed between the diaphragm and one of the housings, and a fluid is moved from the suction side flow path to the discharge side flow path through the pump chamber by the bending motion of the diaphragm. In a piezoelectric diaphragm pump that is configured to be discharged, when forming a resin ridge film along the flow path to maintain a tight seal between the upper and lower casings that are fastened, one of the upper and lower casings is used. A mask for removing the resin film is coated so as to cover a portion other than the peripheral edge of the flow path, and then coated so that the resin film adheres to at least the peripheral edge of the flow path of the housing from above the mask, Peel off the mask and resin film only on the periphery of the flow path A method for manufacturing a piezoelectric diaphragm pump, characterized by forming a ridged film as a step.