JP4257431B2 - 多孔質半導体膜の形成方法 - Google Patents
多孔質半導体膜の形成方法 Download PDFInfo
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- 239000004065 semiconductor Substances 0.000 title claims description 118
- 238000000034 method Methods 0.000 title claims description 63
- 239000000758 substrate Substances 0.000 claims description 125
- 239000007864 aqueous solution Substances 0.000 claims description 68
- 229910052710 silicon Inorganic materials 0.000 claims description 60
- 239000010703 silicon Substances 0.000 claims description 60
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 58
- -1 alkali metal salt Chemical class 0.000 claims description 8
- 230000001678 irradiating effect Effects 0.000 claims description 8
- 150000003839 salts Chemical class 0.000 claims description 8
- KRHYYFGTRYWZRS-UHFFFAOYSA-M Fluoride anion Chemical compound [F-] KRHYYFGTRYWZRS-UHFFFAOYSA-M 0.000 claims description 7
- 229910017855 NH 4 F Inorganic materials 0.000 claims description 4
- 229910052783 alkali metal Inorganic materials 0.000 claims description 4
- OAKJQQAXSVQMHS-UHFFFAOYSA-N Hydrazine Chemical class NN OAKJQQAXSVQMHS-UHFFFAOYSA-N 0.000 claims description 3
- 150000003863 ammonium salts Chemical group 0.000 claims description 3
- 239000010408 film Substances 0.000 description 164
- 229910021426 porous silicon Inorganic materials 0.000 description 38
- 239000013078 crystal Substances 0.000 description 37
- 230000005284 excitation Effects 0.000 description 32
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 23
- 229910000040 hydrogen fluoride Inorganic materials 0.000 description 21
- 150000004673 fluoride salts Chemical class 0.000 description 17
- 230000000052 comparative effect Effects 0.000 description 16
- 238000000295 emission spectrum Methods 0.000 description 15
- 230000015572 biosynthetic process Effects 0.000 description 14
- 239000011698 potassium fluoride Substances 0.000 description 14
- 239000000126 substance Substances 0.000 description 14
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 11
- FAPWRFPIFSIZLT-UHFFFAOYSA-M Sodium chloride Chemical compound [Na+].[Cl-] FAPWRFPIFSIZLT-UHFFFAOYSA-M 0.000 description 11
- 238000007743 anodising Methods 0.000 description 11
- PUZPDOWCWNUUKD-UHFFFAOYSA-M sodium fluoride Chemical compound [F-].[Na+] PUZPDOWCWNUUKD-UHFFFAOYSA-M 0.000 description 10
- 239000000463 material Substances 0.000 description 9
- 230000003647 oxidation Effects 0.000 description 9
- 238000007254 oxidation reaction Methods 0.000 description 9
- 230000002378 acidificating effect Effects 0.000 description 7
- 238000002048 anodisation reaction Methods 0.000 description 7
- 238000006243 chemical reaction Methods 0.000 description 7
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 6
- 230000009102 absorption Effects 0.000 description 6
- 238000010521 absorption reaction Methods 0.000 description 6
- 238000000862 absorption spectrum Methods 0.000 description 6
- XJHCXCQVJFPJIK-UHFFFAOYSA-M caesium fluoride Chemical compound [F-].[Cs+] XJHCXCQVJFPJIK-UHFFFAOYSA-M 0.000 description 6
- 238000003486 chemical etching Methods 0.000 description 6
- 239000011521 glass Substances 0.000 description 6
- 230000003287 optical effect Effects 0.000 description 6
- NROKBHXJSPEDAR-UHFFFAOYSA-M potassium fluoride Chemical compound [F-].[K+] NROKBHXJSPEDAR-UHFFFAOYSA-M 0.000 description 6
- 239000011780 sodium chloride Substances 0.000 description 6
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 5
- 238000000089 atomic force micrograph Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 5
- 239000008151 electrolyte solution Substances 0.000 description 5
- PQXKHYXIUOZZFA-UHFFFAOYSA-M lithium fluoride Chemical compound [Li+].[F-] PQXKHYXIUOZZFA-UHFFFAOYSA-M 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 5
- 238000005259 measurement Methods 0.000 description 5
- 239000000243 solution Substances 0.000 description 5
- 239000010409 thin film Substances 0.000 description 5
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 4
- 238000007654 immersion Methods 0.000 description 4
- 239000012528 membrane Substances 0.000 description 4
- 230000007935 neutral effect Effects 0.000 description 4
- 230000035515 penetration Effects 0.000 description 4
- 239000011775 sodium fluoride Substances 0.000 description 4
- 235000013024 sodium fluoride Nutrition 0.000 description 4
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 3
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- 239000002253 acid Substances 0.000 description 3
- 150000001875 compounds Chemical class 0.000 description 3
- 238000007796 conventional method Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- 229910003437 indium oxide Inorganic materials 0.000 description 3
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 description 3
- AHLATJUETSFVIM-UHFFFAOYSA-M rubidium fluoride Chemical compound [F-].[Rb+] AHLATJUETSFVIM-UHFFFAOYSA-M 0.000 description 3
- 238000005033 Fourier transform infrared spectroscopy Methods 0.000 description 2
- 229910002808 Si–O–Si Inorganic materials 0.000 description 2
- XSTXAVWGXDQKEL-UHFFFAOYSA-N Trichloroethylene Chemical group ClC=C(Cl)Cl XSTXAVWGXDQKEL-UHFFFAOYSA-N 0.000 description 2
- 239000003513 alkali Substances 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 230000001427 coherent effect Effects 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 150000004820 halides Chemical class 0.000 description 2
- 230000007062 hydrolysis Effects 0.000 description 2
- 238000006460 hydrolysis reaction Methods 0.000 description 2
- GRPQBOKWXNIQMF-UHFFFAOYSA-N indium(3+) oxygen(2-) tin(4+) Chemical compound [Sn+4].[O-2].[In+3] GRPQBOKWXNIQMF-UHFFFAOYSA-N 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 230000010355 oscillation Effects 0.000 description 2
- 230000001590 oxidative effect Effects 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 229920006395 saturated elastomer Polymers 0.000 description 2
- 238000004904 shortening Methods 0.000 description 2
- 150000003376 silicon Chemical class 0.000 description 2
- 239000002904 solvent Substances 0.000 description 2
- DDFHBQSCUXNBSA-UHFFFAOYSA-N 5-(5-carboxythiophen-2-yl)thiophene-2-carboxylic acid Chemical compound S1C(C(=O)O)=CC=C1C1=CC=C(C(O)=O)S1 DDFHBQSCUXNBSA-UHFFFAOYSA-N 0.000 description 1
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical group [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 1
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 1
- 229910006404 SnO 2 Inorganic materials 0.000 description 1
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 1
- 150000007513 acids Chemical class 0.000 description 1
- 239000012670 alkaline solution Substances 0.000 description 1
- 150000001768 cations Chemical class 0.000 description 1
- 239000003153 chemical reaction reagent Substances 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000005238 degreasing Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000005868 electrolysis reaction Methods 0.000 description 1
- 238000000866 electrolytic etching Methods 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- CUPFNGOKRMWUOO-UHFFFAOYSA-N hydron;difluoride Chemical compound F.F CUPFNGOKRMWUOO-UHFFFAOYSA-N 0.000 description 1
- 229910052745 lead Inorganic materials 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 238000004020 luminiscence type Methods 0.000 description 1
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 1
- 229910052753 mercury Inorganic materials 0.000 description 1
- 229910021645 metal ion Inorganic materials 0.000 description 1
- 239000011259 mixed solution Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910017604 nitric acid Inorganic materials 0.000 description 1
- 230000001443 photoexcitation Effects 0.000 description 1
- 238000005424 photoluminescence Methods 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 238000004886 process control Methods 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 238000002407 reforming Methods 0.000 description 1
- 239000012266 salt solution Substances 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 230000005476 size effect Effects 0.000 description 1
- 239000011734 sodium Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 1
- 229910001887 tin oxide Inorganic materials 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 238000009827 uniform distribution Methods 0.000 description 1
- 239000003021 water soluble solvent Substances 0.000 description 1
- 229910052724 xenon Inorganic materials 0.000 description 1
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
- 239000011701 zinc Substances 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/30604—Chemical etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/26—Materials of the light emitting region
- H01L33/34—Materials of the light emitting region containing only elements of group IV of the periodic system
- H01L33/346—Materials of the light emitting region containing only elements of group IV of the periodic system containing porous silicon
Description
(1)陽極化成法で作製した多孔質半導体膜の酸化
多孔質シリコン膜を酸化することで、発光波長が短波長側にシフトする。酸化方法としては、(a)熱酸化(非特許文献3)、(b)空気中放置による自然酸化(非特許文献4)、(c)陽極化成時に、フッ化水素とアルコールとを混合した電解液に金属亜鉛を溶解させることで、多孔質シリコン膜を効率的に酸化させる(非特許文献5)、等の方法がある。
(2)陽極化成法で作製した多孔質半導体膜の微細化
化学薬品によるエッチングや電解エッチングにより、陽極化成法で作製した多孔質部分を腐食溶解させて微細化することにより、量子サイズ効果に起因した発光の短波長側へのシフトを起こさせる(非特許文献6,7)。
(3)陽極化成法で作製した多孔質半導体膜の異種物質での被覆
多孔質シリコン膜の表面を、PbとZr、Tiの酸化物であるPb(ZrxTi1-x)O3でコーティングすることにより、発光特性が赤色発光から青色発光に変化する(非特許文献8)。同様に、多孔質シリコン膜をMnO2で被覆することにより、赤色発光が赤色および紫外の2色発光に変化する(非特許文献9)。但し、紫外発光の起源は不明であり、多孔質シリコン膜からの発光ではなくて、MnO2からの本質的ではない発光の可能性も考えられる。
(多孔質半導体膜の形成方法)
図1は、本発明の多孔質半導体膜の形成方法を説明するための概略断面図である。また、図2は、本発明の形成方法により多孔質半導体膜が形成された半導体基板の層構成を示す部分断面図である。
フッ化カリウム(KF)を例にして、フッ化塩の水溶液中で多孔質膜が形成される機構を考察する。
図3は、多孔質半導体膜が形成された半導体基板を備えた発光素子の層構成を示す部分断面図である。図3に示すように、半導体基板14の基板面14aには、上述した方法で多孔質半導体膜20が形成され、多孔質半導体膜20の表面には透明電極22が形成されている。
本発明の形成方法で形成された多孔質半導体膜は、可視から紫外で発光する発光素子等の光源デバイスへ応用することができる。可視から紫外で発光する発光素子は、近年注目されているGaN系発光ダイオードと市場が重なっており、その市場規模は大きい。
(実施例1)
半導体基板としてn型シリコン結晶基板を用意した。このシリコン結晶基板を、トリクロロエチレン(トリクレン)、アセトン、及びアルコールで順に脱脂洗浄した後、基板面が上を向くように、1Mのフッ化カリウム(KF)の水溶液に浸漬した。水溶液は定性的には弱アルカリ性であるが、そのpHは約7(ほぼ中性)である。
n型シリコン結晶基板を浸漬する水溶液を、25%のフッ化水素(HF)の水溶液とした以外は実施例1と同様にして、シリコン結晶基板に多孔質シリコン膜を形成し、この多孔質シリコン膜上に透明電極を形成して、比較例1の発光素子を得た。
実施例1及び比較例1で得られた発光素子の各々について、透明電極とシリコン結晶基板との間に所定の電圧を印加し、多孔質半導体膜からの発光スペクトルを測定した。
実施例1及び比較例1で形成された多孔質シリコン膜の各々について、原子間力顕微鏡(AFM)を用いて膜表面を観測した。膜表面のAFM観測は、多孔質シリコン膜上に透明電極を形成する前に行った。図5(A)が実施例1で形成された多孔質シリコン膜のAFM像であり、図5(B)が比較例1で形成された多孔質シリコン膜のAFM像である。
実施例1及び比較例1で形成された多孔質シリコン膜の各々について、フーリエ変換赤外分光法(FT−IR)により、膜表面の赤外吸収スペクトルを測定した。測定結果を図6に示す。なお、図6においては、実施例1の測定結果を太い実線で示し、比較例1の測定結果を点線で示す。また、参考のために、脱脂洗浄のみを行ったシリコン結晶基板についての赤外吸収スペクトルの測定結果を細い実線で示す。これらの赤外吸収スペクトルを比較することで、膜表面の化学的な構造の相違が分る。
n型シリコン結晶基板を浸漬する水溶液を、5Mのフッ化カリウム(KF)の水溶液とした以外は実施例1と同様にして、シリコン結晶基板に多孔質シリコン膜を形成し、この多孔質シリコン膜上に透明電極を形成して、実施例2の発光素子を得た。なお、水溶液のpHは7.6である。
n型シリコン結晶基板を浸漬する水溶液を、1Mのフッ化ナトリウム(NaF)の水溶液とした以外は実施例1と同様にして、シリコン結晶基板に多孔質シリコン膜を形成し、この多孔質シリコン膜上に透明電極を形成して、実施例3の発光素子を得た。
実施例4では、実施例1と同様に多孔質シリコン膜が形成されたシリコン結晶基板を、酸性のHF水溶液によって浸漬処理して発光波長の制御を行った。
12 容器
14a 基板面
14 半導体基板
16 光源
18 励起光
20 多孔質半導体膜
22 透明電極
Claims (5)
- アルカリ性を示すフッ化塩の水溶液にシリコン基板を浸漬し、
浸漬されたシリコン基板に電流を印加せずに該シリコン基板の基板面に光を照射し、
該基板面に可視から紫外で発光可能な多孔質半導体膜を形成する、
多孔質半導体膜の形成方法。 - 前記塩が、アルカリ金属塩である請求項1記載の多孔質半導体膜の形成方法。
- 前記塩が、アンモニウム塩又はヒドラジニウム塩である請求項1記載の多孔質半導体膜の形成方法。
- 前記光が、シリコン基板に吸収される光の波長以下の波長の光である請求項1〜3のいずれか1項に記載の多孔質半導体膜の形成方法。
- 前記塩が、LiF、NaF、KF、RbF,CsF、NH4F、及びN2H5Fからなる群から選択された1種または複数種の塩である請求項1記載の多孔質半導体膜の形成方法。
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JP2004331166A JP4257431B2 (ja) | 2004-11-15 | 2004-11-15 | 多孔質半導体膜の形成方法 |
PCT/JP2005/015752 WO2006051641A1 (ja) | 2004-11-15 | 2005-08-30 | 多孔質半導体膜の形成方法、発光素子、及び光学センサ |
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JP4257431B2 true JP4257431B2 (ja) | 2009-04-22 |
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JP5703780B2 (ja) * | 2011-01-26 | 2015-04-22 | 株式会社Sumco | 太陽電池用ウェーハの製造方法、太陽電池セルの製造方法、および太陽電池モジュールの製造方法 |
KR101528864B1 (ko) * | 2011-01-26 | 2015-06-15 | 가부시키가이샤 사무코 | 태양전지용 웨이퍼 및 그 제조 방법 |
JP2013012705A (ja) * | 2011-06-01 | 2013-01-17 | Sumco Corp | 太陽電池用ウェーハ、太陽電池セルおよび太陽電池モジュール |
JP5591763B2 (ja) * | 2011-06-23 | 2014-09-17 | 株式会社トクヤマ | 多孔質シリコンの製造方法 |
JP6625260B1 (ja) | 2018-10-18 | 2019-12-25 | 株式会社サイオクス | 構造体の製造方法および構造体の製造装置 |
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