JP4222830B2 - 温度プレートとばねとを備えた圧力トランスデュサー - Google Patents

温度プレートとばねとを備えた圧力トランスデュサー Download PDF

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Publication number
JP4222830B2
JP4222830B2 JP2002554687A JP2002554687A JP4222830B2 JP 4222830 B2 JP4222830 B2 JP 4222830B2 JP 2002554687 A JP2002554687 A JP 2002554687A JP 2002554687 A JP2002554687 A JP 2002554687A JP 4222830 B2 JP4222830 B2 JP 4222830B2
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JP
Japan
Prior art keywords
sensor
shell
heater
pressure transducer
plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2002554687A
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English (en)
Japanese (ja)
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JP2004521328A (ja
Inventor
ポーリン、ジェイムス・エム
マシュー、シャンティ・イー
マインドリン、レオニッド
クイッグレー、クラウディア・ジェイ
ブランケンシップ、スティーブン・ディー
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MKS Instruments Inc
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MKS Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by MKS Instruments Inc filed Critical MKS Instruments Inc
Publication of JP2004521328A publication Critical patent/JP2004521328A/ja
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Publication of JP4222830B2 publication Critical patent/JP4222830B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/04—Means for compensating for effects of changes of temperature, i.e. other than electric compensation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0075—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a ceramic diaphragm, e.g. alumina, fused quartz, glass

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Measuring Fluid Pressure (AREA)
JP2002554687A 2000-12-28 2001-12-21 温度プレートとばねとを備えた圧力トランスデュサー Expired - Fee Related JP4222830B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/750,428 US6612176B2 (en) 2000-12-28 2000-12-28 Pressure transducer assembly with thermal shield
PCT/US2001/050848 WO2002054034A1 (en) 2000-12-28 2001-12-21 Pressure transducer with thermal plate and spring

Publications (2)

Publication Number Publication Date
JP2004521328A JP2004521328A (ja) 2004-07-15
JP4222830B2 true JP4222830B2 (ja) 2009-02-12

Family

ID=25017833

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002554687A Expired - Fee Related JP4222830B2 (ja) 2000-12-28 2001-12-21 温度プレートとばねとを備えた圧力トランスデュサー

Country Status (7)

Country Link
US (1) US6612176B2 (zh)
EP (1) EP1348111B1 (zh)
JP (1) JP4222830B2 (zh)
KR (1) KR100791874B1 (zh)
DE (1) DE60113722T2 (zh)
TW (1) TW513562B (zh)
WO (1) WO2002054034A1 (zh)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6687635B2 (en) * 2002-06-13 2004-02-03 Mks Instruments, Inc. Apparatus and method for compensated sensor output
JP4159895B2 (ja) * 2003-02-17 2008-10-01 キヤノンアネルバ株式会社 静電容量型圧力センサ及びその製造方法
US7347099B2 (en) * 2004-07-16 2008-03-25 Rosemount Inc. Pressure transducer with external heater
US7124640B1 (en) * 2005-07-13 2006-10-24 Mks Instruments, Inc. Thermal mounting plate for heated pressure transducer
US7679033B2 (en) * 2005-09-29 2010-03-16 Rosemount Inc. Process field device temperature control
JP4563312B2 (ja) * 2005-12-05 2010-10-13 株式会社堀場エステック 静電容量式圧力センサ装置
DE112008001459A5 (de) * 2007-06-19 2010-05-12 Inficon Gmbh Vakuummesszellenanordnung mit Heizung
US8477499B2 (en) 2009-06-05 2013-07-02 Laird Technologies, Inc. Assemblies and methods for dissipating heat from handheld electronic devices
US8646540B2 (en) * 2010-07-20 2014-02-11 Firetrace Usa, Llc Methods and apparatus for passive non-electrical dual stage fire suppression
JP6130765B2 (ja) * 2013-09-30 2017-05-17 アズビル株式会社 静電容量型圧力センサ
WO2018122698A1 (en) * 2016-12-28 2018-07-05 Tubitak High accuracy pressure transducer with improved temperature stability
DE102017119358A1 (de) * 2017-08-24 2019-02-28 Endress+Hauser SE+Co. KG Modulares Feldgerät
JP7285621B2 (ja) * 2017-11-29 2023-06-02 株式会社堀場エステック 真空計
KR102539918B1 (ko) * 2019-02-26 2023-06-02 스미토모 크라이어제닉스 오브 아메리카 인코포레이티드 커패시턴스 다이어프램 게이지 내의 고온 센서와 전자 장치 간의 열 장벽
JP7418248B2 (ja) * 2020-03-05 2024-01-19 株式会社堀場エステック 真空計

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU2556577A (en) * 1976-06-07 1978-11-30 Bunker Ramo Pressure sensor
US4176557A (en) 1976-06-07 1979-12-04 Bunker Ramo Corporation Pressure sensor
US4850227A (en) 1987-12-22 1989-07-25 Delco Electronics Corporation Pressure sensor and method of fabrication thereof
SE461300B (sv) * 1988-05-17 1990-01-29 Hydrolab Ab Tryckmaetare
GB9508877D0 (en) * 1995-05-02 1995-06-21 Ici Plc Dye diffusion thermal transfer printing
US5625152A (en) * 1996-01-16 1997-04-29 Mks Instruments, Inc. Heated pressure transducer assembly
US5911162A (en) * 1997-06-20 1999-06-08 Mks Instruments, Inc. Capacitive pressure transducer with improved electrode support
US6029525A (en) 1998-02-04 2000-02-29 Mks Instruments, Inc. Capacitive based pressure sensor design

Also Published As

Publication number Publication date
US6612176B2 (en) 2003-09-02
DE60113722D1 (de) 2005-11-03
KR20030063481A (ko) 2003-07-28
EP1348111A1 (en) 2003-10-01
TW513562B (en) 2002-12-11
EP1348111B1 (en) 2005-09-28
KR100791874B1 (ko) 2008-01-07
JP2004521328A (ja) 2004-07-15
DE60113722T2 (de) 2006-09-14
WO2002054034A1 (en) 2002-07-11
US20020083774A1 (en) 2002-07-04

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