JP4218107B2 - 走査型プローブ顕微鏡 - Google Patents

走査型プローブ顕微鏡 Download PDF

Info

Publication number
JP4218107B2
JP4218107B2 JP01400399A JP1400399A JP4218107B2 JP 4218107 B2 JP4218107 B2 JP 4218107B2 JP 01400399 A JP01400399 A JP 01400399A JP 1400399 A JP1400399 A JP 1400399A JP 4218107 B2 JP4218107 B2 JP 4218107B2
Authority
JP
Japan
Prior art keywords
probe
deterioration
sample
deterioration determination
scanning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP01400399A
Other languages
English (en)
Japanese (ja)
Other versions
JP2000214066A (ja
JP2000214066A5 (https=
Inventor
秀郎 中島
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP01400399A priority Critical patent/JP4218107B2/ja
Publication of JP2000214066A publication Critical patent/JP2000214066A/ja
Publication of JP2000214066A5 publication Critical patent/JP2000214066A5/ja
Application granted granted Critical
Publication of JP4218107B2 publication Critical patent/JP4218107B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Images

Landscapes

  • Length Measuring Devices With Unspecified Measuring Means (AREA)
JP01400399A 1999-01-22 1999-01-22 走査型プローブ顕微鏡 Expired - Lifetime JP4218107B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP01400399A JP4218107B2 (ja) 1999-01-22 1999-01-22 走査型プローブ顕微鏡

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP01400399A JP4218107B2 (ja) 1999-01-22 1999-01-22 走査型プローブ顕微鏡

Publications (3)

Publication Number Publication Date
JP2000214066A JP2000214066A (ja) 2000-08-04
JP2000214066A5 JP2000214066A5 (https=) 2005-09-15
JP4218107B2 true JP4218107B2 (ja) 2009-02-04

Family

ID=11849051

Family Applications (1)

Application Number Title Priority Date Filing Date
JP01400399A Expired - Lifetime JP4218107B2 (ja) 1999-01-22 1999-01-22 走査型プローブ顕微鏡

Country Status (1)

Country Link
JP (1) JP4218107B2 (https=)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1326225C (zh) * 2004-11-05 2007-07-11 中国科学院上海微系统与信息技术研究所 微机械芯片测试探卡及制造方法
JP2006308313A (ja) * 2005-04-26 2006-11-09 Hitachi Kenki Fine Tech Co Ltd 走査型プローブ顕微鏡およびその探針評価方法
JP6515873B2 (ja) * 2016-06-09 2019-05-22 住友金属鉱山株式会社 原子間力顕微鏡用探針の評価方法
JP7340761B2 (ja) * 2019-10-28 2023-09-08 パナソニックＩｐマネジメント株式会社 測定用プローブ
CN114088979B (zh) * 2021-12-20 2025-01-10 百及纳米科技(上海)有限公司 探针校准方法、表面测量方法以及探针控制设备
CN114754713B (zh) * 2022-06-13 2022-09-20 广州粤芯半导体技术有限公司 用于原子力显微镜的探针损伤检测方法

Also Published As

Publication number Publication date
JP2000214066A (ja) 2000-08-04

Similar Documents

Publication Publication Date Title
US5852232A (en) Acoustic sensor as proximity detector
Li et al. Characterization of semiconductor surface conductivity by using microscopic four-point probe technique
US8342008B2 (en) Scanning probe microscope
US7375324B2 (en) Stylus system for modifying small structures
WO1998029707A9 (en) Acoustic sensor as proximity detector
JP2007309919A (ja) 走査プローブ顕微鏡
CN107796957A (zh) 探针着陆检测
JP4218107B2 (ja) 走査型プローブ顕微鏡
JP2005201904A (ja) プローブ顕微鏡
CN114754713B (zh) 用于原子力显微镜的探针损伤检测方法
JP2009525466A (ja) 可変密度走査関連出願の相互参照本出願は、２００６年１月３１日に出願された米国仮特許出願６０／７６３，６５９の優先権を主張し、２００６年１１月２８日に出願された、米国特許出願１１／５６３，８２２（発明の名称「可変密度走査」）に関連しその優先権を主張するものであり、引用によりその全体を本明細書に包含する。
Wang et al. Large-area scanning probe nanolithography facilitated by automated alignment of probe arrays
JP4752080B2 (ja) 電子顕微鏡微細作業用マニピュレーション装置
JP2009058480A (ja) 走査型プローブ顕微鏡およびカンチレバー管理方法
JP7826788B2 (ja) 原子間力顕微鏡用探針の評価方法、および測定試料の表面形状の測定方法
JPH09251026A (ja) 走査プローブ顕微鏡
US20260063697A1 (en) Apparatus for measuring static electricity
JP4497665B2 (ja) プローブの走査制御装置、該走査制御装置による走査型プローブ顕微鏡、及びプローブの走査制御方法、該走査制御方法による測定方法
Petersen et al. Reproducibility of nano-and micro-scale multi-point probe sheet resistance measurements
KR102257552B1 (ko) 다중 팁 기반 패턴 인쇄 장치의 제조방법
TW202507282A (zh) 用於缺陷檢測及複查之多頭原子力顯微鏡(afm)
JP4130169B2 (ja) 走査型プローブ顕微鏡
CN121252727A (zh) 一种基于微力传感的一维微纳结构直径原位测量装置及方法
JP2005043108A (ja) 走査型プローブ顕微鏡の特定パターン検出方法
US20050005425A1 (en) Method and apparatus for HDD suspension gimbal-dimple separation (contact) force measurement

Legal Events

Date Code Title Description
A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20050405

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20050405

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20061220

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20080312

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20080509

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20080603

A02 Decision of refusal

Free format text: JAPANESE INTERMEDIATE CODE: A02

Effective date: 20080725

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20080922

A911 Transfer to examiner for re-examination before appeal (zenchi)

Free format text: JAPANESE INTERMEDIATE CODE: A911

Effective date: 20081001

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20081021

A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20081103

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20111121

Year of fee payment: 3

R150 Certificate of patent or registration of utility model

Free format text: JAPANESE INTERMEDIATE CODE: R150

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20080509

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20121121

Year of fee payment: 4

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20121121

Year of fee payment: 4

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20131121

Year of fee payment: 5

EXPY Cancellation because of completion of term