JP2000214066A5 - - Google Patents

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Publication number
JP2000214066A5
JP2000214066A5 JP1999014003A JP1400399A JP2000214066A5 JP 2000214066 A5 JP2000214066 A5 JP 2000214066A5 JP 1999014003 A JP1999014003 A JP 1999014003A JP 1400399 A JP1400399 A JP 1400399A JP 2000214066 A5 JP2000214066 A5 JP 2000214066A5
Authority
JP
Japan
Prior art keywords
probe
protrusions
scanning
deterioration determination
deterioration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1999014003A
Other languages
English (en)
Japanese (ja)
Other versions
JP2000214066A (ja
JP4218107B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP01400399A priority Critical patent/JP4218107B2/ja
Priority claimed from JP01400399A external-priority patent/JP4218107B2/ja
Publication of JP2000214066A publication Critical patent/JP2000214066A/ja
Publication of JP2000214066A5 publication Critical patent/JP2000214066A5/ja
Application granted granted Critical
Publication of JP4218107B2 publication Critical patent/JP4218107B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP01400399A 1999-01-22 1999-01-22 走査型プローブ顕微鏡 Expired - Lifetime JP4218107B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP01400399A JP4218107B2 (ja) 1999-01-22 1999-01-22 走査型プローブ顕微鏡

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP01400399A JP4218107B2 (ja) 1999-01-22 1999-01-22 走査型プローブ顕微鏡

Publications (3)

Publication Number Publication Date
JP2000214066A JP2000214066A (ja) 2000-08-04
JP2000214066A5 true JP2000214066A5 (https=) 2005-09-15
JP4218107B2 JP4218107B2 (ja) 2009-02-04

Family

ID=11849051

Family Applications (1)

Application Number Title Priority Date Filing Date
JP01400399A Expired - Lifetime JP4218107B2 (ja) 1999-01-22 1999-01-22 走査型プローブ顕微鏡

Country Status (1)

Country Link
JP (1) JP4218107B2 (https=)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1326225C (zh) * 2004-11-05 2007-07-11 中国科学院上海微系统与信息技术研究所 微机械芯片测试探卡及制造方法
JP2006308313A (ja) * 2005-04-26 2006-11-09 Hitachi Kenki Fine Tech Co Ltd 走査型プローブ顕微鏡およびその探針評価方法
JP6515873B2 (ja) * 2016-06-09 2019-05-22 住友金属鉱山株式会社 原子間力顕微鏡用探針の評価方法
JP7340761B2 (ja) * 2019-10-28 2023-09-08 パナソニックＩｐマネジメント株式会社 測定用プローブ
CN114088979B (zh) * 2021-12-20 2025-01-10 百及纳米科技(上海)有限公司 探针校准方法、表面测量方法以及探针控制设备
CN114754713B (zh) * 2022-06-13 2022-09-20 广州粤芯半导体技术有限公司 用于原子力显微镜的探针损伤检测方法

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