JP4197776B2 - 光スキャナ - Google Patents

光スキャナ Download PDF

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Publication number
JP4197776B2
JP4197776B2 JP26127098A JP26127098A JP4197776B2 JP 4197776 B2 JP4197776 B2 JP 4197776B2 JP 26127098 A JP26127098 A JP 26127098A JP 26127098 A JP26127098 A JP 26127098A JP 4197776 B2 JP4197776 B2 JP 4197776B2
Authority
JP
Japan
Prior art keywords
elastic member
movable plate
optical scanner
wiring
coil
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP26127098A
Other languages
English (en)
Japanese (ja)
Other versions
JPH11242180A (ja
JPH11242180A5 (enExample
Inventor
博志 宮島
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Olympus Corp
Original Assignee
Olympus Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olympus Corp filed Critical Olympus Corp
Priority to JP26127098A priority Critical patent/JP4197776B2/ja
Priority to US09/213,062 priority patent/US6188504B1/en
Publication of JPH11242180A publication Critical patent/JPH11242180A/ja
Priority to US09/704,284 priority patent/US6392776B1/en
Publication of JPH11242180A5 publication Critical patent/JPH11242180A5/ja
Application granted granted Critical
Publication of JP4197776B2 publication Critical patent/JP4197776B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Mechanical Optical Scanning Systems (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
JP26127098A 1996-06-28 1998-09-16 光スキャナ Expired - Fee Related JP4197776B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP26127098A JP4197776B2 (ja) 1997-12-26 1998-09-16 光スキャナ
US09/213,062 US6188504B1 (en) 1996-06-28 1998-12-16 Optical scanner
US09/704,284 US6392776B1 (en) 1996-06-28 2000-11-01 Optical scanner

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP9-358901 1997-12-26
JP35890197 1997-12-26
JP26127098A JP4197776B2 (ja) 1997-12-26 1998-09-16 光スキャナ

Publications (3)

Publication Number Publication Date
JPH11242180A JPH11242180A (ja) 1999-09-07
JPH11242180A5 JPH11242180A5 (enExample) 2005-10-27
JP4197776B2 true JP4197776B2 (ja) 2008-12-17

Family

ID=26544993

Family Applications (1)

Application Number Title Priority Date Filing Date
JP26127098A Expired - Fee Related JP4197776B2 (ja) 1996-06-28 1998-09-16 光スキャナ

Country Status (1)

Country Link
JP (1) JP4197776B2 (enExample)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001228434A (ja) * 1999-12-08 2001-08-24 Nippon Signal Co Ltd:The 電磁駆動型光走査装置
US7064879B1 (en) 2000-04-07 2006-06-20 Microsoft Corporation Magnetically actuated microelectrochemical systems actuator
WO2002008818A1 (en) * 2000-07-24 2002-01-31 Nhk Spring Co., Ltd. Probe light scanning actuator
JP2002078368A (ja) * 2000-08-28 2002-03-15 Olympus Optical Co Ltd アクチュエータ駆動装置
JP2005099063A (ja) * 2000-12-11 2005-04-14 Miwa Engineering:Kk 偏向アクチュエータ、光走査素子、及び受光走査素子
JP2002307396A (ja) * 2001-04-13 2002-10-23 Olympus Optical Co Ltd アクチュエータ
US6775039B2 (en) 2001-07-13 2004-08-10 Olympus Corporation Driving circuit for an optical scanner
JP4890689B2 (ja) 2001-07-24 2012-03-07 オリンパス株式会社 三次元構造体の製造方法及び揺動体の製造方法
US6865064B2 (en) 2001-08-29 2005-03-08 Olympus Corporation Drive apparatus and drive method for electromagnetic drive actuator
JP4915092B2 (ja) * 2005-12-22 2012-04-11 株式会社ニコン 可変フィルタ装置及び投射型表示装置
KR100773535B1 (ko) * 2006-06-14 2007-11-05 삼성전기주식회사 맴스 디바이스
JP4251206B2 (ja) 2006-09-20 2009-04-08 セイコーエプソン株式会社 アクチュエータ、光スキャナおよび画像形成装置
JP2008089502A (ja) * 2006-10-04 2008-04-17 Kagawa Univ 自励発振駆動機構、センサおよびプローブ顕微鏡
JP2010169948A (ja) * 2009-01-23 2010-08-05 Sumitomo Precision Prod Co Ltd 光走査装置用揺動ミラー、揺動状態検出装置、及び、光走査装置
JP6180074B2 (ja) * 2011-08-30 2017-08-16 日本信号株式会社 プレーナ型電磁アクチュエータ

Also Published As

Publication number Publication date
JPH11242180A (ja) 1999-09-07

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