JP4190555B2 - Multi-piece wiring board and manufacturing method thereof - Google Patents

Multi-piece wiring board and manufacturing method thereof Download PDF

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JP4190555B2
JP4190555B2 JP2006231478A JP2006231478A JP4190555B2 JP 4190555 B2 JP4190555 B2 JP 4190555B2 JP 2006231478 A JP2006231478 A JP 2006231478A JP 2006231478 A JP2006231478 A JP 2006231478A JP 4190555 B2 JP4190555 B2 JP 4190555B2
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wiring board
acute angle
corner
radius
green sheet
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JP2008060096A (en
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栄治 各務
節男 矢田
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NGK Spark Plug Co Ltd
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Description

本発明は、セラミックからなる配線基板を多数個併有する多数個取り配線基板およびその製造方法に関する。   The present invention relates to a multi-cavity wiring board having a large number of wiring boards made of ceramic and a method for manufacturing the same.

平面視が四角形を呈するセラミック製の配線基板は、各コーナ付近が欠けたり、割れるおそれがあるため、各コーナごとに面取りを施されている。このため、各コーナごとに面取りされた配線基板を多数個取りするための多数個取り配線基板では、縦横に隣接する多数の配線基板のコーナ付近ごとに貫通孔が形成される。
かかる貫通孔の形成に際し、焼成前のグリーンシートに、スリットおよびスルーホール(貫通孔)を設け、スリットとスルーホールとの間に所定長さの非スリット部分を設けると共に、複数の配線基板部分が隣接するスリットの交差部ごとに形成される平面視がほぼ正方形、ほぼ二等辺三角形、ほぼ直角三角形のスルーホールの鋭角部分に半径が0.1〜2.0mmのアールを付けた多数個取り用のセラミック基板の製造方法が提案されている(例えば、特許文献1参照)。
A ceramic wiring board having a square shape in plan view may be chamfered at each corner because the vicinity of each corner may be chipped or cracked. For this reason, in the multi-cavity wiring board for taking a large number of wiring boards chamfered for each corner, through holes are formed in the vicinity of the corners of a large number of wiring boards adjacent vertically and horizontally.
In forming such through holes, slits and through holes (through holes) are provided in the green sheet before firing, a non-slit portion having a predetermined length is provided between the slits and the through holes, and a plurality of wiring board portions are provided. For multi-cavity picking, with a radius of 0.1 to 2.0 mm in the acute angle part of through-holes that are formed in each crossing point of adjacent slits in a square shape, a substantially isosceles triangle, and a right-angled triangle. A method for manufacturing a ceramic substrate has been proposed (see, for example, Patent Document 1).

特開平6−91628号公報 (第1〜5頁、図1〜図3)JP-A-6-91628 (Pages 1-5, FIGS. 1-3)

しかしながら、前記特許文献1のセラミック基板のように、配線基板部分がグリーンシートの縦横に隣接して配置されている形態では、前記スリットに沿って切断した場合、前記スルーホールの鋭角部分のアールが、個別の配線基板におけるコーナごとに、平面視で尖った鋭角の突出部分が厚み方向に沿って残ってしまう。このため、上記鋭角の突出部分において欠けや割れを生じるおそれがあった。
また、グリーンシートに設ける貫通孔(スルーホール)の鋭角部に付けるアールが、従来のように半径0.13mmと小さい場合、かかるグリーンシートの乾燥工程で、鋭角部に収縮応力が集中するため、以降の搬送工程で、クラックが生じるおそれがあった。
However, in the form in which the wiring board portion is disposed adjacent to the vertical and horizontal sides of the green sheet as in the ceramic substrate of Patent Document 1, when the cutting is performed along the slit, the radius of the acute angle portion of the through hole is reduced. For each corner of the individual wiring board, a sharp protruding portion that is sharp in plan view remains along the thickness direction. For this reason, there existed a possibility of producing a chip | tip and a crack in the said acute angle protrusion part.
In addition, when the radius that is attached to the acute angle portion of the through hole (through hole) provided in the green sheet is as small as 0.13 mm as in the past, shrinkage stress concentrates on the acute angle portion in the drying process of the green sheet. There was a risk of cracks occurring in the subsequent transport process.

本発明は、背景技術において説明した問題点を解決し、個別の配線基板に分離して得られる配線基板のコーナごとに尖った鋭角部分がなく、欠けや割れに強い配線基板を確実に提供できる多数個取り配線基板およびその製造方法を提供する、ことを課題とする。   The present invention solves the problems described in the background art, and can reliably provide a wiring board that is resistant to chipping and cracking without having a sharp corner portion for each corner of the wiring board obtained by separating into individual wiring boards. It is an object of the present invention to provide a multi-piece wiring board and a manufacturing method thereof.

課題を解決するための手段および発明の効果Means for Solving the Problems and Effects of the Invention

本発明は、前記課題を解決するため、多数の配線基板を互いに離間して配置し、配線基板ごとのコーナに面取りを設けるための貫通孔の鋭角部分に所定範囲の半径のアールを付けると共に、かかる鋭角部分を配線基板の外側の耳部に配置する、ことに着想して成されたものである。
即ち、本発明の多数個取り配線基板(請求項1)は、平面視が矩形を呈し、セラミックからなる複数の配線基板と、かかる複数の配線基板の周囲に位置し、セラミックからなる耳部と、上記配線基板ごとの各コーナを面取りする直線の斜辺を含み、鋭角部分に半径0.2〜0.5mmのアールを付された平面視がほぼ三角形の貫通孔と、を備え、上記鋭角部分は、上記耳部に形成されている、ことを特徴とする。
In order to solve the above-mentioned problem, the present invention arranges a large number of wiring boards apart from each other, attaches a radius of a predetermined range to the acute angle portion of the through hole for chamfering the corner of each wiring board, It is conceived that such an acute angle portion is arranged on the outer ear portion of the wiring board.
That is, multiple patterning wiring board of the present invention (claim 1), it caused a plan view a rectangular, and a plurality of wiring boards from ceramic ing, positioned around such a plurality of wiring boards, that Do ceramic A through-hole having a substantially triangular shape in a plan view including an ear portion and a straight hypotenuse chamfering each corner of each wiring board and having an acute-angled portion with a radius of 0.2 to 0.5 mm; The acute angle portion is formed in the ear portion.

これによれば、耳部に囲まれ且つ互いに離間した複数の配線基板ごとの各コーナに、当該コーナと斜めに交差する直線の斜辺を含む平面視がほぼ三角形の貫通孔が形成されていると共に、かかる貫通孔の鋭角部分は、半径0.2〜0.5mmのアールが付され、且つ耳部に形成されている。このため、グリーンシートの段階において、乾燥時に生じる収縮応力が鋭角部分に集中せず、かかる収縮応力に起因するクラックを生じていないと共に、個別の配線基板に分離した際に、コーナ付近に尖った鋭角の突出部が残らないため、欠けや割れを生じにくい配線基板とすることが可能となる。
尚、前記鋭角部分に付けるアールの半径が0.2mm未満になると、グリーンシート段階における乾燥時の収縮応力に起因するクラックを生じるおそれがあり、上記アールの半径が5.0mmを越えると、耳部に占める貫通孔の面積が過大となり、多数個取りする際の効率が低下するため、前記範囲としたものである。望ましい上記アールの半径は、0.2〜0.35mmの範囲である。
According to this, each corner of each of the plurality of wiring boards surrounded by the ears and spaced apart from each other is formed with a through-hole having a substantially triangular shape in a plan view including the oblique side of the straight line that obliquely intersects the corner. The acute angle portion of the through hole is rounded with a radius of 0.2 to 0.5 mm and is formed at the ear. For this reason, in the stage of the green sheet, the shrinkage stress generated during drying does not concentrate on the acute angle portion, cracks due to the shrinkage stress are not generated, and when separated into individual wiring boards, they are pointed near the corner. Since no sharp-angled protrusions remain, it is possible to provide a wiring board that is less prone to chipping or cracking.
In addition, if the radius of the radius applied to the acute angle portion is less than 0.2 mm, there is a risk of causing cracks due to shrinkage stress during drying in the green sheet stage. If the radius of the radius exceeds 5.0 mm, the ear Since the area of the through-hole occupying the part becomes excessive and the efficiency at the time of taking a large number decreases, it is within the above range. A desirable radius of the radius is in the range of 0.2 to 0.35 mm.

付言すれば、前記配線基板および耳部は、複数のセラミック層の積層体からなり、各配線基板における上記セラミック層間には、配線層が形成されている、多数個取り配線基板も本発明に含まれ得る。これによる場合、セラミック層ごとに配線層を形成するための導電性ペーストを印刷しても、これに伴う前記乾燥時の収縮応力に起因するクラックが貫通孔の鋭角部に生じる事態を、抑制することが可能となる。
尚、前記多数個取り配線基板は、例えば、アルミナなどの高温焼成セラミック、あるいはガラス−セラミックなどの低温焼成セラミックからなる。
また、前記貫通孔は、配線基板の各コーナに斜めに交差する斜辺とその両側に対称に位置する一対の鋭角部分とを有する平面視がほぼ二等辺直角三角形のほか、不等辺直角三角形、直角部よりも大きな鈍角とを一対の鋭角部分とを有する平面視がほぼ三角形を呈する形態も含む。
更に、前記配線基板は、各コーナに位置する四つの貫通孔とこれらの間を通過する仮想の切断予定面や、表層側および裏面側の少なくとも一方を通過するスリットとによって、その周囲の耳部と区画されている。
加えて、前記配線基板は、その表面に搭載すべき電子部品と接続するパッド、その裏面にマザーボードとの導通を取るための外部電極、ならびに、これらの間を接続する内部の配線層およびビア導体を有している。
In other words, the wiring board and the ear portion are composed of a laminate of a plurality of ceramic layers, and a wiring layer is formed between the ceramic layers of each wiring board. Can be. In this case, even when a conductive paste for forming a wiring layer is printed for each ceramic layer, a situation in which cracks resulting from the shrinkage stress at the time of drying accompanying the printing occur in the acute angle portion of the through hole is suppressed. It becomes possible.
The multi-piece wiring board is made of, for example, a high-temperature fired ceramic such as alumina, or a low-temperature fired ceramic such as glass-ceramic.
The through-hole has an isosceles right-angled triangle, an isosceles right-angled triangle, a right angle in addition to a substantially isosceles right-angled triangle in plan view having a hypotenuse obliquely intersecting each corner of the wiring board and a pair of acutely angled portions symmetrically located on both sides thereof. A plan view having an obtuse angle larger than the portion and a pair of acute angle portions substantially forms a triangle is also included.
Further, the wiring board includes four through holes located in each corner, a virtual cutting planned surface passing between them, and a slit passing through at least one of the surface layer side and the back surface side. It is partitioned.
In addition, the wiring board includes a pad connected to an electronic component to be mounted on the front surface, an external electrode for establishing electrical connection with the motherboard on the back surface, and an internal wiring layer and via conductor connecting between them. have.

一方、本発明の多数個取り配線基板の製造方法(請求項2)は、グリーンシートにおいて、縦横に互いに離隔して位置する平面視が矩形の複数の配線基板領域ごとの各コーナを面取りする斜辺を含んで、かかるグリーンシートに平面視がほぼ三角形の貫通孔を打ち抜く工程と、複数のかかる貫通孔が形成されたグリーンシートにおける各配線基板領域の表面および裏面の少なくとも一方に導電性ペーストを印刷する工程と、かかる導電性ペーストが印刷されたグリーンシートを乾燥する工程と、を含み、上記打ち抜き工程で形成される貫通孔は、配線基板領域ごとの各コーナを面取りする斜辺と、その両側に位置する一対の鋭角部分とを備え、かかる一対の鋭角部分ごとに半径0.2〜0.5mmのアールが付されており、かかる一対の鋭角部分は、上記配線基板領域に隣接する耳部に形成されている、ことを特徴とする。 On the other hand, the manufacturing method for a multi-cavity wiring board according to the present invention (Claim 2) is a hypotenuse for chamfering each corner of each of a plurality of wiring board regions having a rectangular plan view , which are separated from each other vertically and horizontally in a green sheet . And printing a conductive paste on at least one of the front and back surfaces of each wiring board region in the green sheet in which a plurality of such through-holes are formed And a step of drying the green sheet on which the conductive paste is printed, and the through hole formed in the punching step includes a hypotenuse that chamfers each corner of each wiring board region, and both sides thereof. and a pair of acute angle portions located, and Earl radius 0.2~0.5mm is attached to each such pair of sharp edges, such a pair of acute angles Min is formed in the ear portion adjacent to the wiring substrate region, and wherein the.

これによれば、複数のグリーンシートの配線基板領域ごとの各コーナ付近に、当該コーナに交差する直線の斜辺を含む平面視がほぼ三角形の貫通孔が形成され、かかる貫通孔の鋭角部分は、半径0.2〜0.5mmのアールが付され、且つ当該アールは耳部に形成されている。このため、配線層を形成するための導電性ペーストを印刷したグリーンシートを乾燥する工程で、貫通孔の鋭角部分ごとに、かかる乾燥時の収縮応力に起因するクラックを生じる事態を確実に抑制できる。しかも、かかるグリーンシートを積層してから焼成した多数個取り配線基板を個別の配線基板に分離した際に、各コーナ付近に尖った鋭角の突出部がないため、欠けや割れに強い配線基板を効率良く提供することが可能となる。   According to this, in the vicinity of each corner for each wiring board region of the plurality of green sheets, a through-hole having a substantially triangular shape in a plan view including a hypotenuse of a straight line intersecting the corner is formed, and the acute angle portion of the through-hole is A radius of 0.2 to 0.5 mm is attached, and the radius is formed at the ear. For this reason, in the process of drying the green sheet on which the conductive paste for forming the wiring layer is printed, it is possible to reliably suppress the occurrence of cracks due to the shrinkage stress during drying for each acute angle portion of the through hole. . In addition, when the multi-piece wiring board fired after laminating such green sheets is separated into individual wiring boards, there are no sharp protrusions near each corner. It becomes possible to provide efficiently.

付言すれば、前記乾燥工程の後に、前記打ち抜き、印刷、および乾燥の各工程を経た複数のグリーンシートを圧着して積層する工程と、得られたグリーンシート積層体を焼成する工程と、を有する、多数個取り配線基板の製造方法も本発明に含まれ得る。これによる場合、前記欠けや割れを生じにくい配線基板を確実に且つ効率良く提供することが可能となる。   In other words, after the drying step, there are a step of pressing and laminating a plurality of green sheets that have undergone the punching, printing, and drying steps, and a step of firing the obtained green sheet laminate. A method for manufacturing a multi-piece wiring board can also be included in the present invention. In this case, it is possible to reliably and efficiently provide a wiring board that is less likely to cause chipping or cracking.

以下において、本発明を実施するための最良の形態について説明する。
図1は、本発明の多数個取り配線基板K1を示す平面図、図2は、図1中の一点鎖線部分Yの部分拡大図、図3は、図1中のX−X線の矢視に沿った垂直断面図である。
多数個取り配線基板K1は、図1に示すように、平面視で全体が長方形を呈しており、平面視が長方形(矩形)を呈し且つ縦横に互いに離隔して位置する四個(複数)の配線基板1と、これらの周囲に位置する枠形状の耳部16と、配線基板1ごとの各コーナ付近に形成した複数の貫通孔14と、を備えている。各配線基板1は、コーナごとに位置する四つの貫通孔14とこれらの間を通過する表面側のみを通過するスリットsとによって、その周囲の耳部16と区画されている。
In the following, the best mode for carrying out the present invention will be described.
1 is a plan view showing a multi-piece wiring board K1 of the present invention, FIG. 2 is a partially enlarged view of a one-dot chain line portion Y in FIG. 1, and FIG. 3 is an arrow view of line XX in FIG. FIG.
As shown in FIG. 1, the multi-piece wiring board K <b> 1 has a rectangular shape as a whole in plan view, and the four (several) pieces that are rectangular (rectangular) in plan view and are spaced apart from each other vertically and horizontally. The wiring board 1 includes a frame-shaped ear 16 positioned around the wiring board 1, and a plurality of through holes 14 formed in the vicinity of each corner of the wiring board 1. Each wiring board 1 is partitioned from the surrounding ears 16 by four through-holes 14 located for each corner and slits s that pass only through the surface passing between them.

貫通孔14は、図2に示すように、配線基板1の各コーナを45度に面取りする平面視が直線の斜辺11と、その両側に対称に位置する一対の鋭角部分12と、直角部分13と、を有する平面視がほぼ二等辺直角三角形(ほぼ三角形)を呈し、各鋭角部分12には、半径r0.2〜0.5mmのアールが付されている。かかる鋭角部分12は、配線基板1に隣接する耳部16に形成されている。このため、図2に示すように、各配線基板1と耳部16との間を区画するスリットsは、鋭角部分12が耳部16に位置するように、貫通孔14と交差している。
図3に示すように、多数個取り配線基板K1は、セラミック層s1〜s6を一体に積層したものであり、貫通孔14は、各配線基板1の各コーナ付近ごとのセラミック層s1〜s6を、かかる配線基板K1の表面2と裏面3との間を厚み方向に沿って貫通している。尚、スリットsは、最上層のセラミックs1にのみ形成されている。また、上記表面2および裏面3は、多数個取り配線基板K1、個別の配線基板1、および耳部16について、共通して用いるものとする。
As shown in FIG. 2, the through-hole 14 includes a hypotenuse 11 having a straight line when chamfering each corner of the wiring board 1 at 45 degrees, a pair of acute angle portions 12 symmetrically positioned on both sides thereof, and a right angle portion 13. And a plan view having substantially isosceles right triangles (substantially triangles), and each acute angle portion 12 is provided with a radius r of 0.2 to 0.5 mm. The acute angle portion 12 is formed in the ear portion 16 adjacent to the wiring board 1. For this reason, as shown in FIG. 2, the slit s that partitions between each wiring board 1 and the ear portion 16 intersects the through hole 14 so that the acute angle portion 12 is located in the ear portion 16.
As shown in FIG. 3, the multi-cavity wiring board K <b> 1 is obtained by integrally laminating ceramic layers s <b> 1 to s <b> 6. The wiring board K1 penetrates between the front surface 2 and the rear surface 3 along the thickness direction. The slit s is formed only in the uppermost ceramic s1. Further, the front surface 2 and the back surface 3 are commonly used for the multi-cavity wiring board K1, the individual wiring board 1, and the ear portion 16.

図1,図3に示すように、個々の配線基板1は、表面2および裏面3を有するセラミック層s1〜s6と、これらの間に形成された所定パターンの配線層4〜8と、表面2に形成された複数のパッド9と、裏面3に形成された複数の外部電極10と、を備えている。かかる配線層4〜8、パッド9、および外部電極10は、セラミック層s1〜s6がアルミナなどの高温焼成セラミックの場合には、WまたはMoからなり、ガラス−アルミナなどで構成される低温焼成セラミックの場合には、Cuからなる。尚、パッド9は、表面2に搭載すべきICチップなどの電子部品と接続するために、外部電極10は、配線基板1を実装する図示しないザーボードとの導通を取るために、それぞれ追って活用される。   As shown in FIGS. 1 and 3, each wiring board 1 includes ceramic layers s <b> 1 to s <b> 6 having a front surface 2 and a back surface 3, wiring layers 4 to 8 having a predetermined pattern formed therebetween, and a front surface 2. And a plurality of external electrodes 10 formed on the back surface 3. When the ceramic layers s1 to s6 are high-temperature fired ceramics such as alumina, the wiring layers 4 to 8, the pads 9, and the external electrodes 10 are made of W or Mo and are made of glass-alumina or the like. In this case, it is made of Cu. The pad 9 is connected to an electronic component such as an IC chip to be mounted on the surface 2, and the external electrode 10 is used later to establish conduction with a not-shown server board on which the wiring board 1 is mounted. The

図4は、前記各スリットsに沿って、多数個取り配線基板K1を図示しないカッタなどを用いて切断・分離して得られた配線基板1を示す斜視図である。図4に示すように、分離された個別の配線基板1は、四つの側面の間の各コーナに前記貫通孔14の斜辺11がそのまま残った面取り面11が形成されている。かかる面取り面11と隣接する各側面とは、平面視でそれぞれ鈍角を形成していると共に、各コーナ付近には、尖った鋭角の突出部が形成されていない。このため、セラミック層s1〜s6からなる配線基板1は、欠けや割れが発生しにくくなる。更に、後述するように、貫通孔14は、セラミック層s1〜s6となるグリーンシート段階において、各鋭角部分12に半径r0.2〜0.5mmのアールが付されていたため、グリーンシートへの印刷工程後の乾燥時にクラックを生じずに、積層および焼成工程を経ている。
従って、前記多数個取り配線基板K1によれば、各コーナ付近に尖った突出部がなく、欠けや割れに強い配線基板1を、複数個同時に効率良く確実に提供することが可能である。
FIG. 4 is a perspective view showing the wiring board 1 obtained by cutting and separating the multi-piece wiring board K1 using a cutter (not shown) along the slits s. As shown in FIG. 4, the separated individual wiring boards 1 are formed with chamfered surfaces 11 in which the oblique sides 11 of the through holes 14 remain as they are at the corners between the four side surfaces. The chamfered surface 11 and each side surface adjacent to each other form an obtuse angle in a plan view, and no sharp acute angle protrusion is formed in the vicinity of each corner. For this reason, the wiring board 1 composed of the ceramic layers s1 to s6 is less likely to be chipped or cracked. Further, as will be described later, the through holes 14 are printed on the green sheets because the sharp corners 12 are rounded with a radius r0.2 to 0.5 mm at the green sheet stage where the ceramic layers s1 to s6 are formed. The layers are laminated and fired without causing cracks during drying after the process.
Therefore, according to the multi-cavity wiring board K1, it is possible to efficiently and surely provide a plurality of wiring boards 1 that have no sharp protrusions in the vicinity of each corner and are resistant to chipping and cracking simultaneously.

前記多数個取り配線基板Kは、以下のようにして製造した。
予め、アルミナ粉末、バンイダ樹脂、溶剤、および可塑剤を配合し、ドクターブレード法により、厚みが約200μmのグリーンシートg1〜g6を用意した。
図5に示すように、グリーンシートg1において、仮想の一点鎖線で囲まれた縦・横四つの配線基板領域1aのコーナ付近ごとに、図示しないパンチとかかるパンチの断面に倣った受け入れ孔を有するダイとによって、各コーナを45度に面取りする平面視が直線の斜辺11と、その両側に対称に位置する一対の鋭角部分12とを含む平面視がほぼ直角二等辺三角形の貫通孔14aを打ち抜いた(打ち抜き工程)。貫通孔14aは、配線基板領域1aごとの各コーナを45度に面取りする平面視が直線の斜辺11と、その両側に対称に位置する一対の鋭角部分12と、直角部分13と、を備えており、各鋭角部分12には、半径r0.2〜0.5mmのアールが付されている。かかる打ち抜き工程は、他のグリーンシートg2〜g6についても同様に行った。
尚、各配線基板領域1aは、平面視で約40×約50mmのサイズであり、その周囲は、四角枠形状の耳部16aが囲んでいる。
The multi-piece wiring board K was manufactured as follows.
Alumina powder, vanida resin, solvent, and plasticizer were blended in advance, and green sheets g1 to g6 having a thickness of about 200 μm were prepared by a doctor blade method.
As shown in FIG. 5, the green sheet g1 has a punch (not shown) and a receiving hole that follows the cross section of the punch in each of the vicinity of the corners of the four vertical and horizontal wiring board regions 1a surrounded by a virtual one-dot chain line. by the die, the hypotenuse 11 plan view of straight line chamfer each corner to 45 degrees, a pair of sharp edges 12 and substantially perpendicular two like-edge triangle of the through hole 14a is a plan view including a positioned symmetrically on both sides (Punching process). The through-hole 14a includes a hypotenuse 11 having a straight line when chamfering each corner of each wiring board region 1a at 45 degrees, a pair of acute angle portions 12 symmetrically positioned on both sides thereof, and a right angle portion 13. Each acute angle portion 12 is provided with a radius r of 0.2 to 0.5 mm. This punching process was similarly performed for the other green sheets g2 to g6.
Each wiring board region 1a has a size of about 40 × about 50 mm in plan view, and a square frame-shaped ear portion 16a surrounds the periphery.

次に、配線基板領域1aのコーナ付近ごとに、貫通孔14aを打ち抜かれたグリーンシートg1〜g6における各配線基板領域1aにおける所定の位置に、図示しない複数のビアホールを打ち抜いた。
次いで、図6に示すように、グリーンシートg1〜g6の各配線基板領域1aにおける複数のビアホールに、W粉末を含む導電性ペーストを充填して、ビア導体vを形成した。
更に、図6に示すように、グリーンシートg1〜g6における表面(2)および裏面(3)の少なくとも一方に、上記同様の導電性ペースト4〜10を所定パターンに倣って印刷することで、配線層4〜8、パッド9、および外部電極10を印刷により形成した(印刷工程)。かかる配線層4〜8、パッド9、および外部電極10は、配線基板領域1aごとにおける表面2、裏面3、あるいはグリーンシートg2〜g6間の内部に形成した。
Next, a plurality of via holes (not shown) were punched at predetermined positions in the respective wiring board regions 1a in the green sheets g1 to g6 from which the through holes 14a were punched for each corner vicinity of the wiring board region 1a.
Next, as shown in FIG. 6, a via conductor v was formed by filling a plurality of via holes in each wiring board region 1 a of the green sheets g1 to g6 with a conductive paste containing W powder.
Further, as shown in FIG. 6, the conductive paste 4 to 10 similar to the above is printed in a predetermined pattern on at least one of the front surface (2) and the back surface (3) of the green sheets g1 to g6. Layers 4-8, pad 9, and external electrode 10 were formed by printing (printing process). The wiring layers 4 to 8, the pad 9, and the external electrode 10 were formed inside the front surface 2, the back surface 3, or the green sheets g2 to g6 for each wiring board region 1a.

引き続いて、ビア導体v、配線層4〜8、パッド9、あるいは外部電極10が形成されたグリーンシートg1〜g6を、約100℃×約30秒によって乾燥した(乾燥工程)。かかる乾燥に伴って、収縮応力がグリーンシートg1〜g6に発生する。しかし、各貫通孔14aの鋭角部分12には、半径r0.2〜0.5mmのアールが付されており、上記収縮応力が各鋭角部分12付近に集中しにくいため、グリーンシートg1〜g6にクラックが発生しなかった。
次に、前記グリーンシートg1〜g6を、各貫通孔14aが連通し且つ各配線基板領域1aが積み上がるように、厚み方向に積層および圧着した(積層工程)。その結果、図7に示すように、一体に積層されたグリーンシートg1〜g6からなり、縦横に四つの配線基板1、それらの各コーナ付近を貫通する複数の貫通孔14、および周囲の耳部16を備えたグリーンシート積層体gsが得られた。
Subsequently, the green sheets g1 to g6 on which the via conductors v, the wiring layers 4 to 8, the pads 9, or the external electrodes 10 were formed were dried at about 100 ° C. for about 30 seconds (drying process). With such drying, shrinkage stress is generated in the green sheets g1 to g6. However, the acute angle portion 12 of each through-hole 14a is rounded with a radius r of 0.2 to 0.5 mm, and the shrinkage stress is less likely to concentrate in the vicinity of each acute angle portion 12, so that the green sheets g1 to g6 Cracks did not occur.
Next, the green sheets g1 to g6 were laminated and pressure-bonded in the thickness direction so that the through holes 14a communicated with each other and the wiring board regions 1a were stacked (lamination process). As a result, as shown in FIG. 7, the green sheets g1 to g6 are integrally laminated, and the four wiring boards 1 vertically and horizontally, a plurality of through holes 14 penetrating the vicinity of each corner, and surrounding ears The green sheet laminated body gs provided with 16 was obtained.

次いで、図7に示すように、グリーンシート積層体gsにおける最上層のグリーンシートg1に対して、各配線基板領域1aと耳部16とを区画するスリットsを、各貫通孔14の鋭角部分12が耳部16に位置するように、図示しないカッタを挿入して形成した。
そして、スリットsが形成されたグリーンシート積層体gsを、所定の温度帯に加熱して焼成した(焼成工程)。
その結果、前記図1〜図3に示した多数個取り配線基板K1が得られた。更に、かかる多数個取り配線基板K1を前記スリットsに沿って切断し、且つ耳部16を分離することで、前記図4に示した四つの配線基板1を得ることができた。
Next, as shown in FIG. 7, slits s that partition each wiring board region 1 a and ear portion 16 are formed in the acute angle portion 12 of each through-hole 14 with respect to the uppermost green sheet g1 in the green sheet laminate gs. Is formed by inserting a cutter (not shown) so that the is located at the ear 16.
And the green sheet laminated body gs in which the slit s was formed was heated and baked to the predetermined temperature range (baking process).
As a result, the multi-cavity wiring board K1 shown in FIGS. 1 to 3 was obtained. Further, by cutting the multi-piece wiring board K1 along the slit s and separating the ears 16, the four wiring boards 1 shown in FIG. 4 could be obtained.

以上の多数個取り配線基板K1の製造方法によれば、各貫通孔14aの鋭角部分12に、半径r0.2〜0.5mmのアールが付されているため、配線層4〜8などの導電性ペースト4〜10を印刷したグリーンシートg1〜g6を乾燥する工程において、かかる乾燥時の収縮応力に起因するクラックの発生を確実に防止できる。しかも、グリーンシートg1〜g6を積層・焼成して得られた多数個取り配線基板K1を個別の配線基板1に切断・分離した際に、各コーナ付近に尖った鋭角の突出部がないため、欠けや割れに強い配線基板1を効率良く提供することができる。   According to the manufacturing method of the multi-cavity wiring board K1 described above, since the radius R of 0.2 to 0.5 mm is given to the acute angle portion 12 of each through hole 14a, the conductive layers 4 to 8 and the like are electrically conductive. In the step of drying the green sheets g1 to g6 on which the conductive pastes 4 to 10 are printed, it is possible to reliably prevent the occurrence of cracks due to the shrinkage stress during the drying. Moreover, when the multi-piece wiring board K1 obtained by laminating and firing the green sheets g1 to g6 is cut and separated into individual wiring boards 1, there are no sharp protrusions in the vicinity of each corner. The wiring board 1 that is resistant to chipping and cracking can be provided efficiently.

ここで、本発明の具体的な実施例について説明する。
所定量のアルミナ粉末、バンイダ樹脂、溶剤、および可塑剤を配合し、ドクターブレード法により、100mm×100mm×180μmのグリーンシートを複数枚製作した。各グリーンシートの中央部に予め設定された40mm×50mmの配線基板領域1aの各コーナ付近に対し、当該コーナに45度で交差する長さが7mmの斜辺11と、その両端に連続し表1に示す半径rのアールが付された一対の鋭角部12と、を備えた平面視がほぼ二等辺直角三角形を呈する貫通孔14aを打ち抜いて形成した。
次に、各グリーンシートの表面および裏面に対し、同じベタパターンで厚みが20μmのW粉末を含む導電性ペーストを印刷した。
Now, specific examples of the present invention will be described.
A predetermined amount of alumina powder, vanida resin, solvent, and plasticizer were blended, and a plurality of 100 mm × 100 mm × 180 μm green sheets were produced by the doctor blade method. For each corner of the wiring board region 1a of 40 mm × 50 mm set in advance in the center of each green sheet, a hypotenuse 11 having a length of 7 mm intersecting the corner at 45 degrees is continuous to both ends thereof. A through hole 14a having a pair of acute angle portions 12 with a radius r shown in FIG.
Next, a conductive paste containing W powder having the same solid pattern and a thickness of 20 μm was printed on the front and back surfaces of each green sheet.

次いで、上記導電性ペーストが印刷された各グリーンシートを、図示しない連続乾燥炉に挿入し、100℃×30秒の乾燥を施した。
以上の打ち抜き、印刷、および乾燥工程を、貫通孔14aにおける鋭角部分12の半径rごとに10枚(1組)ずつのグリーンシートに対して行った。鋭角部分12の半径rごとの組別に、上記乾燥後において、クラックの有無を観察した。
そして、10枚のうち、1枚でも貫通孔14aの鋭角部12の付近にクラックがある組には、「あり」とし、10枚の全てでクラックがなかった組には、「なし」として、表1中に示した。
Next, each green sheet on which the conductive paste was printed was inserted into a continuous drying furnace (not shown) and dried at 100 ° C. for 30 seconds.
The punching, printing, and drying steps described above were performed on 10 (one set) green sheets for each radius r of the acute angle portion 12 in the through hole 14a. After the drying, the presence or absence of cracks was observed for each set of radii r of the acute angle portion 12.
Of the 10 sheets, “Yes” is given to a group having a crack near the acute angle portion 12 of the through-hole 14a, and “No” is given to a group having no cracks in all 10 sheets. It is shown in Table 1.

Figure 0004190555
Figure 0004190555

表1によれば、鋭角部分12の半径rが0.08〜0.17mmであった比較例のグリーンシートでは、各半径rの組ごとに少なくとも1枚にクラックが生じていた。一方、鋭角部分12の半径rが0.20〜0.35mmであった実施例のグリーンシートでは、各半径rの組の全てにおいてクラックが発生しなかった。
かかる結果は、比較例の各グリーンシートでは、貫通孔14aの鋭角部分12の半径rが0.20mm未満と小さかったため、乾燥時に生じる収縮応力が鋭角部分12に集中したことにより、その付近にクラックが発生した、ものと推定される。一方、実施例の各グリーンシートでは、貫通孔14aの鋭角部分12の半径rが0.20〜0.35mmと比較的大きかったため、乾燥時に生じる収縮応力が鋭角部分12に集中しにくくなったことにより、その付近にクラックが発生しなかった、ものと推定される。
以上の実施例によって、グリーンシートに打ち抜く貫通孔14aの鋭角部分12の半径rを、0.2mm以上とする本発明の効果が裏付けられた。
According to Table 1, in the green sheet of the comparative example in which the radius r of the acute angle portion 12 was 0.08 to 0.17 mm, at least one crack was generated for each set of the radius r. On the other hand, in the green sheet of the example in which the radius r of the acute angle portion 12 was 0.20 to 0.35 mm, cracks did not occur in all the groups having the radius r.
As a result, in each green sheet of the comparative example, since the radius r of the acute angle portion 12 of the through hole 14a was small, less than 0.20 mm, the shrinkage stress generated during the drying was concentrated on the acute angle portion 12 and cracks were generated in the vicinity thereof. Is estimated to have occurred. On the other hand, in each green sheet of the example, the radius r of the acute angle portion 12 of the through-hole 14a was relatively large as 0.20 to 0.35 mm, so that the shrinkage stress generated during drying was less likely to concentrate on the acute angle portion 12. Therefore, it is presumed that no crack was generated in the vicinity thereof.
The effect of the present invention in which the radius r of the acute angle portion 12 of the through-hole 14a punched into the green sheet is 0.2 mm or more is supported by the above example.

図8は、異なる形態の多数個取り配線基板K2を示す平面図、図9は、図8中の一点鎖線部分Zの部分拡大図である。
多数個取り配線基板K2は、前記多数個取り配線基板K1と同様に、平面視が長方形(矩形)を呈し、縦横に互いに離隔して位置する四個(複数)の配線基板1と、これらの周囲に位置する枠形状の耳部16と、配線基板1ごとの各コーナ付近に形成した複数の貫通孔14と、を備えている。各配線基板1は、コーナごとに位置する四つの貫通孔14とこれらの間を通過する表層側のみを通過する仮想の切断予定面cとによって、その周囲の耳部16と区画されている。
上記貫通孔14は、図9に示すように、配線基板1の各コーナを45度に面取りする平面視が直線の斜辺11と、その両側に対称に位置する一対の鋭角部分12と、直角部分13と、からなる平面視がほぼ二等辺直角三角形(ほぼ三角形)を呈し、各鋭角部分12には、半径r0.2〜0.5mmのアールが付されている。かかる鋭角部分12は、配線基板1に隣接する耳部16に形成されている。このため、図8に示すように、各配線基板1と耳部16との間を区画する切断予定面cは、鋭角部分12が耳部16に位置するように、貫通孔14と交差している。
FIG. 8 is a plan view showing a multi-piece wiring board K2 of a different form, and FIG. 9 is a partially enlarged view of a one-dot chain line portion Z in FIG.
The multi-piece wiring board K2, like the multi-piece wiring board K1, is rectangular (rectangular) in plan view, and four (plural) wiring boards 1 that are spaced apart from each other vertically and horizontally, and these A frame-shaped ear portion 16 positioned around the periphery and a plurality of through holes 14 formed in the vicinity of each corner of each wiring board 1 are provided. Each wiring board 1 is partitioned from the surrounding ears 16 by four through-holes 14 positioned for each corner and a virtual cutting plane c that passes only between the surface layers passing between them.
As shown in FIG. 9, the through-hole 14 includes a hypotenuse 11 having a straight line when chamfering each corner of the wiring board 1 at 45 degrees, a pair of acute angle portions 12 symmetrically positioned on both sides thereof, and a right angle portion. 13 has a substantially isosceles right triangle (substantially triangular), and each acute angle portion 12 has a radius r of 0.2 to 0.5 mm. The acute angle portion 12 is formed in the ear portion 16 adjacent to the wiring board 1. Therefore, as shown in FIG. 8, the planned cutting surface c that divides between each wiring board 1 and the ear portion 16 intersects the through hole 14 so that the acute angle portion 12 is located at the ear portion 16. Yes.

切断予定面cは、多数個取り配線基板K2を形成する前記同様の複数のセラミック(g1〜g6)層に対し、平面方向で同じ位置にそれらの厚み方向に沿って設定されている。
尚、前記多数個取り配線基板K2は、前記多数個取り配線基板K1の製造方法のうち、前記スリットsの形成を除いた各工程を経ることで製造可能である。
以上のような多数個取り配線基板K2によっても、各コーナ付近に尖った鋭角の突出部がなく、欠けや割れに強い配線基板1を、複数個同時に効率良く確実に提供することが可能である。
The planned cutting plane c is set along the thickness direction at the same position in the plane direction with respect to a plurality of the same ceramic (g1 to g6) layers forming the multi-piece wiring board K2.
The multi-cavity wiring board K2 can be manufactured through the steps of the manufacturing method of the multi-cavity wiring board K1 except for the formation of the slit s.
Even with the multi-piece wiring board K2 as described above, it is possible to efficiently and surely provide a plurality of wiring boards 1 that are resistant to chipping and cracking at the same time without sharp sharp protrusions in the vicinity of each corner. .

本発明は、前記実施の各形態および実施例に限定されるものではない。
多数個取り配線基板を形成するグリーンシートは、前記アルミナに限らず、ムライトや、窒化アルミニウムなどのセラミックからなるもの、あるいは、低温焼成セラミックの一種であるガラス−セラミックからなるものとしても良い。
また、多数個取り配線基板およびこれに配設された複数の配線基板は、平面視が正方形(矩形)を呈する形態としても良い。
更に、多数個取り配線基板に配設される複数の配線基板の各コーナ付近ごとに形成する貫通孔は、かかるコーナ部と斜めに交差する斜辺と、その両側に位置し半径0.2〜0.5mmのアールが付された鋭角部分と、を含んだ平面視がほぼ三角形を呈するものであれば、ほぼ不等辺直角三角形や、一対の鋭角部の他に鈍角部を有するほぼ三角形を呈する形態であっても良い。
また、前記複数の配線基板と耳部とを区画するスリットは、多数個取り配線基板の裏面側に形成したり、表面側および裏面側の双方に形成しても良い。
更に、前記複数の配線基板と耳部とを区画する切断予定面は、前記スリットが形成されないセラミック層に設定しても良い。
加えて、前記複数の配線基板は、最上層やこれに隣接する表面側のセラミック層が当該表面に開口するキャビティを有する形態とし、かかるキャビティの底面に前記パッドを形成した形態としても良い。
The present invention is not limited to the embodiments and examples described above.
The green sheet forming the multi-piece wiring board is not limited to alumina, but may be made of a ceramic such as mullite or aluminum nitride, or a glass-ceramic which is a kind of low-temperature fired ceramic.
In addition, the multi-piece wiring board and the plurality of wiring boards arranged on the wiring board may have a form of a square (rectangle) in plan view.
Furthermore, the through holes formed in the vicinity of each corner of the plurality of wiring boards disposed on the multi-piece wiring board are located on both sides of the corners obliquely intersecting with the corners and have a radius of 0.2 to 0. If the planar view including an acute angle portion with a radius of 5 mm exhibits a substantially triangular shape, a substantially non-equal-sided right triangle or a substantially triangular shape having an obtuse angle portion in addition to a pair of acute angle portions It may be.
Further, the slits that divide the plurality of wiring boards and the ears may be formed on the back side of the multi-piece wiring board, or may be formed on both the front side and the back side.
Further, the planned cutting surface that divides the plurality of wiring boards and the ears may be set to a ceramic layer in which the slit is not formed.
In addition, the plurality of wiring boards may have a form in which the uppermost layer or a ceramic layer on the surface side adjacent thereto has a cavity opened on the surface, and the pad is formed on the bottom surface of the cavity.

本発明の多数個取り配線基板の一形態を示す平面図。The top view which shows one form of the multi-piece wiring board of this invention. 図1中の一点鎖線部分Yの部分拡大図。The elements on larger scale of the dashed-dotted line part Y in FIG. 図1中のX−X線の矢視に沿った垂直断面図。FIG. 2 is a vertical sectional view taken along line XX in FIG. 1. 上記多数個取り配線基板を切断・分割して得られた配線基板の斜視図。The perspective view of the wiring board obtained by cutting and dividing | segmenting the said multi-piece wiring board. 上記多数個取り配線基板の一製造工程を示す概略図。Schematic which shows one manufacturing process of the said multi-cavity wiring board. 図5に続く製造工程を示す概略図。Schematic which shows the manufacturing process following FIG. 図6に続く製造工程を示す概略図。Schematic which shows the manufacturing process following FIG. 異なる形態の多数個取り配線基板を示す平面図。The top view which shows the multi-cavity wiring board of a different form. 図8中の一点鎖線部分Zの部分拡大図。The elements on larger scale of the dashed-dotted line part Z in FIG.

符号の説明Explanation of symbols

1………………配線基板
1a……………配線基板領域
2………………表面
3………………裏面
4〜10………配線層/導電性ペースト
11……………斜辺
12……………鋭角部分
14,14a…貫通孔
r………………半径
K1,K2……多数個取り配線基板
g1〜g6……グリーンシート
1 ……………… Wiring board 1a ……………… Wiring board area 2 ……………… Front side 3 ……………… Back side 4-10 ………… Wiring layer / conductive paste 11 ………… …… Slant side 12 …………… Acute angle part 14, 14a… Through hole r ……………… Radius K1, K2 …… Multiple wiring board g1 to g6 …… Green sheet

Claims (2)

平面視が矩形を呈し、セラミックからなる複数の配線基板と、
上記複数の配線基板の周囲に位置し、セラミックからなる耳部と、
上記配線基板ごとの各コーナを面取りする直線の斜辺を含み、鋭角部分に半径0.2〜0.5mmのアールを付された平面視がほぼ三角形の貫通孔と、を備え、
上記鋭角部分は、上記耳部に形成されている、
ことを特徴とする多数個取り配線基板。
Plan view caused a rectangular, and a plurality of wiring boards ing ceramic,
Positioned around the plurality of wiring boards, and the ears ing ceramic,
A plane view including a straight hypotenuse chamfering each corner of each wiring board, with a radius of 0.2 to 0.5 mm in an acute angle portion, and a substantially triangular through hole,
The acute angle part is formed in the ear part,
A multi-piece wiring board characterized by that.
グリーンシートにおいて、縦横に互いに離隔して位置する平面視が矩形の複数の配線基板領域ごとの各コーナを面取りする斜辺を含んで、かかるグリーンシートに平面視がほぼ三角形の貫通孔を打ち抜く工程と、
上記複数の貫通孔が形成されたグリーンシートにおける各配線基板領域の表面および裏面の少なくとも一方に導電性ペーストを印刷する工程と、
上記導電性ペーストが印刷されたグリーンシートを乾燥する工程と、を含み、
上記打ち抜き工程で形成される貫通孔は、配線基板領域ごとの各コーナを面取りする斜辺と、その両側に位置する一対の鋭角部分とを備え、かかる一対の鋭角部分ごとに半径0.2〜0.5mmのアールが付されており、かかる一対の鋭角部分は、上記配線基板領域に隣接する耳部に形成されている、
ことを特徴とする多数個取り配線基板の製造方法。
The green sheet includes a hypotenuse that chamfers each corner of each of a plurality of rectangular wiring board regions that are spaced apart from each other in the vertical and horizontal directions, and the green sheet has a step of punching through holes that are substantially triangular in plan view. ,
A step of printing a conductive paste on at least one of the front and back surfaces of each wiring board region in the green sheet in which the plurality of through holes are formed;
Drying the green sheet on which the conductive paste is printed, and
The through hole formed in the punching step includes a hypotenuse that chamfers each corner for each wiring board region, and a pair of acute angle portions located on both sides thereof , and a radius of 0.2 to 0 for each pair of such acute angle portions. .5 mm radius is attached, and the pair of acute angle portions are formed in the ears adjacent to the wiring board region.
A method of manufacturing a multi-cavity wiring board characterized by the above.
JP2006231478A 2006-08-29 2006-08-29 Multi-piece wiring board and manufacturing method thereof Expired - Fee Related JP4190555B2 (en)

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JP2012227306A (en) 2011-04-19 2012-11-15 Ngk Insulators Ltd Manufacturing method of ceramic substrate
WO2016194746A1 (en) * 2015-06-02 2016-12-08 日東電工株式会社 Method for producing phosphor plate
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