JP4170120B2 - 半導体装置の作製方法 - Google Patents

半導体装置の作製方法 Download PDF

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Publication number
JP4170120B2
JP4170120B2 JP2003076646A JP2003076646A JP4170120B2 JP 4170120 B2 JP4170120 B2 JP 4170120B2 JP 2003076646 A JP2003076646 A JP 2003076646A JP 2003076646 A JP2003076646 A JP 2003076646A JP 4170120 B2 JP4170120 B2 JP 4170120B2
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JP
Japan
Prior art keywords
film
gas
substrate
silicon nitride
chamber
Prior art date
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Expired - Fee Related
Application number
JP2003076646A
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English (en)
Japanese (ja)
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JP2004288753A (ja
JP2004288753A5 (enExample
Inventor
充弘 一條
勇臣 浅見
邦彦 福地
聡志 鳥海
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Semiconductor Energy Laboratory Co Ltd
Original Assignee
Semiconductor Energy Laboratory Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Semiconductor Energy Laboratory Co Ltd filed Critical Semiconductor Energy Laboratory Co Ltd
Priority to JP2003076646A priority Critical patent/JP4170120B2/ja
Priority to US10/804,053 priority patent/US7465966B2/en
Publication of JP2004288753A publication Critical patent/JP2004288753A/ja
Publication of JP2004288753A5 publication Critical patent/JP2004288753A5/ja
Application granted granted Critical
Publication of JP4170120B2 publication Critical patent/JP4170120B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
    • C23C14/3414—Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D86/00—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
    • H10D86/40—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D86/00—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
    • H10D86/40—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs
    • H10D86/60—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs wherein the TFTs are in active matrices

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Plasma & Fusion (AREA)
  • General Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Thin Film Transistor (AREA)
  • Formation Of Insulating Films (AREA)
  • Electroluminescent Light Sources (AREA)
  • Physical Vapour Deposition (AREA)
JP2003076646A 2003-03-19 2003-03-19 半導体装置の作製方法 Expired - Fee Related JP4170120B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2003076646A JP4170120B2 (ja) 2003-03-19 2003-03-19 半導体装置の作製方法
US10/804,053 US7465966B2 (en) 2003-03-19 2004-03-19 Film formation method and manufacturing method of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003076646A JP4170120B2 (ja) 2003-03-19 2003-03-19 半導体装置の作製方法

Publications (3)

Publication Number Publication Date
JP2004288753A JP2004288753A (ja) 2004-10-14
JP2004288753A5 JP2004288753A5 (enExample) 2006-04-06
JP4170120B2 true JP4170120B2 (ja) 2008-10-22

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003076646A Expired - Fee Related JP4170120B2 (ja) 2003-03-19 2003-03-19 半導体装置の作製方法

Country Status (2)

Country Link
US (1) US7465966B2 (enExample)
JP (1) JP4170120B2 (enExample)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7824520B2 (en) * 2003-03-26 2010-11-02 Semiconductor Energy Laboratory Co., Ltd. Plasma treatment apparatus
WO2006049130A1 (ja) * 2004-11-05 2006-05-11 Hitachi Kokusai Electric Inc. 半導体装置の製造方法
EP1994577A1 (en) * 2006-03-03 2008-11-26 Philips Intellectual Property & Standards GmbH Electroluminescent arrangement
US7727773B2 (en) 2006-10-31 2010-06-01 Semiconductor Energy Laboratory Co., Ltd Method of manufacturing an analytical sample and method of analyzing an analytical sample
US7897482B2 (en) * 2007-05-31 2011-03-01 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and manufacturing method thereof
KR20130057460A (ko) * 2010-08-31 2013-05-31 시마쯔 코포레이션 비정질 질화 규소막 및 그 제조 방법
KR101832361B1 (ko) * 2011-01-19 2018-04-16 삼성디스플레이 주식회사 박막 트랜지스터 표시판 및 그 제조 방법
US9722212B2 (en) * 2011-02-14 2017-08-01 Semiconductor Energy Laboratory Co., Ltd. Lighting device, light-emitting device, and manufacturing method and manufacturing apparatus thereof
CN107799656B (zh) * 2016-09-07 2019-12-06 元太科技工业股份有限公司 有机发光元件
US20220209166A1 (en) * 2019-04-11 2022-06-30 Sharp Kabushiki Kaisha Light-emitting element and display device

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US52950A (en) * 1866-03-06 Iproveivient in tailorsj measures
JPS5892218A (ja) 1981-11-28 1983-06-01 Semiconductor Energy Lab Co Ltd 半導体装置作製方法
JPS5968921A (ja) 1982-10-12 1984-04-19 Matsushita Electric Ind Co Ltd 薄膜の形成方法
JPH0640546B2 (ja) 1985-07-09 1994-05-25 松下電器産業株式会社 窒化シリコン薄膜の製造方法
JP2642849B2 (ja) * 1993-08-24 1997-08-20 株式会社フロンテック 薄膜の製造方法および製造装置
JP3464287B2 (ja) 1994-09-05 2003-11-05 株式会社半導体エネルギー研究所 半導体装置の作製方法
US6699530B2 (en) * 1995-07-06 2004-03-02 Applied Materials, Inc. Method for constructing a film on a semiconductor wafer
JP3045945B2 (ja) 1995-03-30 2000-05-29 川崎製鉄株式会社 窒化珪素薄膜の形成方法
US6631022B1 (en) * 1999-05-28 2003-10-07 Sony Corporation Optical device, a fabrication method thereof, a driving method thereof and a camera system
JP2000340562A (ja) 1999-05-31 2000-12-08 Hitachi Ltd 半導体装置及びその製造方法
TW513753B (en) 2000-03-27 2002-12-11 Semiconductor Energy Lab Semiconductor display device and manufacturing method thereof
SG126714A1 (en) * 2002-01-24 2006-11-29 Semiconductor Energy Lab Light emitting device and method of manufacturing the same

Also Published As

Publication number Publication date
US20040185673A1 (en) 2004-09-23
JP2004288753A (ja) 2004-10-14
US7465966B2 (en) 2008-12-16

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