JP4164947B2 - Optical / electrical wiring board, manufacturing method, and mounting board - Google Patents

Optical / electrical wiring board, manufacturing method, and mounting board Download PDF

Info

Publication number
JP4164947B2
JP4164947B2 JP17964599A JP17964599A JP4164947B2 JP 4164947 B2 JP4164947 B2 JP 4164947B2 JP 17964599 A JP17964599 A JP 17964599A JP 17964599 A JP17964599 A JP 17964599A JP 4164947 B2 JP4164947 B2 JP 4164947B2
Authority
JP
Japan
Prior art keywords
optical
support
electrical
electrical wiring
wiring board
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP17964599A
Other languages
Japanese (ja)
Other versions
JP2001004864A (en
Inventor
健人 塚本
孝夫 湊
雅之 大出
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toppan Inc
Original Assignee
Toppan Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toppan Inc filed Critical Toppan Inc
Priority to JP17964599A priority Critical patent/JP4164947B2/en
Publication of JP2001004864A publication Critical patent/JP2001004864A/en
Application granted granted Critical
Publication of JP4164947B2 publication Critical patent/JP4164947B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Images

Description

【0001】
【発明の属する技術分野】
本発明は、光配線と電気配線とが混在する光・電気配線基板及びその製造方法並びにその基板に光部品と電気部品とを実装した実装基板に関する。
【0002】
【従来の技術】
より速く演算処理が行えるコンピュータを作るために、CPUのクロック周波数は益々増大する傾向にあり、現在では1GHz程度のものが出現するに至っている。この結果、コンピュータの中のプリント基板上の銅による電気配線には高周波信号が流れる部分が存在することになるので、ノイズの発生により誤動作が生じたり、また、電磁波が発生して周囲に影響を与えることにもなる。
【0003】
このような問題を解決するために、プリント基板上の銅による電気配線の一部を光ファイバ又は光導波路による光配線に置き換え、電気信号の代わりに光信号を利用することが行われている。なぜなら、光信号の場合は、ノイズ及び電磁波の発生を抑えられるからである。
【0004】
高密度実装又は小型化の観点からは、電気配線と光配線とが同一の基板上で複数積み重なっている光・電気配線基板を作ることが望ましいが、光配線が複数となると光配線同士の光軸を一致させることは、非常に困難なものである。
【0005】
【発明が解決しようとする課題】
本発明は係る従来技術の欠点に鑑みてなされたもので、光配線を複数有しながら光配線同士の光軸を一致させることが容易な光・電気配線基板及び製造方法並びに実装基板を提供することを課題とする。
【0006】
【課題を解決するための手段】
本発明において前記の課題を達成するために、請求項1記載の発明は、電気信号を伝搬させる電気配線と、光信号を伝搬させる光配線を有する光・電気配線基板において、連続体の光配線が形成された可撓性の支持体を有すること、該支持体には、該支持体上にパターン状に形成された電気配線とこの面を覆う絶縁層が形成された領域が該支持体の両面に対向するよう設けてあり、且つ、該支持体が中間の部分で可撓性を保てるよう該領域は該支持体上に間隔をおいてその片側と他方の側に設けてあること、該支持体が、該間隔のところで折れない様に曲げられ、該片側と他方の側とが重ね合わされ固着されていること、そして、該片側と他方の側の間で該光配線が連続体を維持していること、を特徴とする光・電気配線基板である。
【0007】
また請求項2記載の発明は、請求項1記載の発明を前提とし、前記支持体の前記片側と他方の側の電気配線をビアホールで接続することを特徴とする請求項1記載の光・電気配線基板である。
【0008】
また請求項3記載の発明は、電気信号を伝搬させる電気配線と、光信号を伝搬させる光配線を有する光・電気配線基板の製造方法において、可撓性の支持体上に光配線を連続体で設ける工程、該支持体上に、パターン状の電気配線とこの面を覆う絶縁層のある領域を、該支持体の両面に対向するように、且つ、該支持体が中間の部分で可撓性を保てるように該領域を該支持体上に間隔をおいてその片側と他方の側に設ける工程、該支持体を、該間隔のところで折れない様に曲げ、該片側と他方の側の間で該光配線が連続体を維持したままで、該片側と他方の側とを重ね合わせ固着する工程、を少なくとも具備することを特徴とする光・電気配線基板の製造方法である。
【0009】
また請求項4記載の発明は、請求項3記載の発明を前提とし、更に、前記支持体の前記片側と他方の側の電気配線をビアホールで電気接続する工程、を具備することを特徴とする請求項3記載の光・電気配線基板の製造方法である。
【0010】
更に、請求項5記載の発明は、請求項1乃至2の何れか1項に記載の光・電気配線基板に、光部品又は/及び電気部品を実装したことを特徴とする実装基板である。
【0011】
【発明の実施の形態】
本発明に係る光・電気配線基板において、その製造工程の断面説明図を図1(1)〜(4)に、完成した光・電気配線基板の平面図を図1(5)に、光部品を実装した実装基板を図2に示す。
【0012】
本発明に係る光・電気配線板の製造にあたっては、まず、可撓性の支持体上に光配線を連続体で設ける。
【0013】
図1(1)を用いて説明すると、支持体としては、ポリエチレンナフタレート等の可撓性があり、好ましくはガラス転移温度Tgが高く、絶縁抵抗が高く、熱膨張率が小さいフィルム基材を用いる。なお、外部から光配線へのノイズ防止のため、後記するミラーの近傍以外は遮光性を有していることも好ましい。
【0014】
このような支持体の片面に、フッ素化ポリイミド等の可撓性があり光学特性の良い樹脂を溶液コーティング又はフィルムを接着により積層し、連続体の光配線2とする。連続体とするのは、複数の光配線同士を接続、光軸を一致させる工程を省略するためである。また、光配線は単一の樹脂からなっていてもよいが、光信号の損失減少のため、屈折率の違う樹脂を用い、光ファイバーのコア及びクラッドのような構造を有していてもよい。
【0015】
光配線の所定の部位には光・電気配線基板の面内方向から45度傾いた面を持つミラー3を形成する。光配線の一端のミラーは、光・電気配線板の表面に実装されるレーザ発光素子から発せられた光信号を90度反射し、光・電気配線板内を伝搬させる。他端のミラーは、光・電気配線板内を伝搬した光信号を90度反射し、光・電気配線板の表面に実装されるレーザ受光素子に入射させる。このミラーは、ダイシング、レーザ又はドライエッチング等の加工によりテーパを設ける方法、又は、ホログラフィー技術を用いた方法により形成することができる。なお、ミラー表面に反射膜を形成することが好ましい。
【0016】
その後、光配線の保護のため、可撓性のある樹脂を積層し、光配線が形成された支持体1を得る。このような樹脂は、外部から光配線へのノイズ防止のため遮光性を有していることが好ましい。
【0017】
なお、支持体にミラーを作成する他の方法としては、支持体上に光配線及び樹脂を積層後、所定部位をレーザ又はドライエッチング等で斜めに穿孔する方法によっても行うことができる。
【0018】
次に、支持体上に間隔をあけて電気配線を有する表面層と裏面層を設ける。
【0019】
図1(2)を用いて説明すると、光配線が形成された支持体1の両面に銅等の金属箔を積層し、公知のフォトリソグラフィー法によりパターニングし、電気配線4を形成する。その後、絶縁性の樹脂を塗布し絶縁層5とする。この際、絶縁層5にミラーを露出させるための開口部9を設けておくことが好ましい。
【0020】
なお、他の電気配線の形成方法としては、ビルトアップによるプリント配線板の製造において用いられる、サブトラクト法又はアディテブ法を用いることが出来る。
【0021】
ところで、前記電気配線4及び絶縁層5は、支持体1全面に設けるのではなく、所定の間隔6をおいて設ける。これは、後記する重ね合わせの際の曲げ部分とするためである。図1(2)においては、間隔6の左側の部分を表面層7、右側の部分を裏面層8という。また、間隔6を複数設けて、表面層、中間層、裏面層とすれば、更に、多層の光・電気配線基板を得ることができる。
【0022】
次に、表面層と裏面層を前記間隔を略中央にして重ね合わせ固着する。
【0023】
図1(3)を用いて説明すると、表面層と裏面層を支持体が折れない様に内側に間隔を略中央にして内側に重ね合わせる。その際、表面層と略同じ大きさのプレプリグ等の接着剤10も挟み込む。その後、熱プレス、熱ローラ等で加熱・加圧して、表面層、接着剤、裏面層を固着する。なお、単なるプリプレグに代えて、通常の電気配線基板をプリプレグに挟んだものを用いると、更に、多層の光・電気配線基板を得ることが出来る。
【0024】
更に、必要に応じて、表面層と裏面層の電気配線をビアホールで電気接続する。
【0025】
図1(4)を用いて説明すると(図1(5)のA−A’断面)、エキシマレーザ等の高出力レーザ又はドリルにより、光・電気配線板を厚さ方向に完全に穿孔するか、部分的に穿孔してビアホール11を形成する。その後、メッキ法等を用い導電性物質で穿孔を埋めることにより、各電気配線間の導通をとることができるので、電気信号を伝搬することができる。
【0026】
このようにして製造した光・電気配線板の平面図を図1(5)に示す。
図中、表面層7は、光配線2を埋設している。この光配線2は支持体1内に設けられており、裏面層の光配線と連続体である。また、表面層7には、開口部9が設けられており、開口部9からは光配線2に形成されているミラーが露出する。開口部9の周囲には4つの光部品搭載用パット12が存在し、光部品のリードフレーム又はパッドと、はんだ又ははんだボールで接続される。更に、図示しない電気部品実装用のパッドも存在する。
【0027】
前記光・電気配線基板の表面に、光部品及び電気部品の実装を行った。
【0028】
このような実装基板の断面を図2に示す。この実装基板にはCPU、メモリ(図示せず)、レーザ発光素子13及びレーザ受光素子14が搭載されている。実装基板上のCPUからの電気信号を変調し、レーザ発光素子13により光信号としてミラーにより光配線を伝搬した。そして、光配線を伝搬した光信号をミラーで反射してレーザ受光素子で電気信号に復調し、ノイズが発生することなくバスに伝搬することができた。
【0029】
【発明の効果】
本発明によれば、複数の光配線が連続体であるため、困難な複数の光配線を接続する工程が不要なうえ、光配線の光軸が当然に一致する光・電気配線基板並びに実装基板を提供することができる。
【0030】
【図面の簡単な説明】
【図1】本発明に係わる光・電気配線基板の説明図。
【図2】本発明に係わる光・電気配線基板に光部品を実装した実装基板の説明図。
【符号の説明】
1 光配線が形成された支持体
2 光配線
2 ミラー
4 電気配線
5 絶縁層
6 間隔
7 表面層
8 裏面層
9 開口部
10 接着剤
11 ビアホール
12 光部品搭載用パッド
13 レーザ発光素子
14 レーザ受光素子
[0001]
BACKGROUND OF THE INVENTION
The present invention relates to an optical / electrical wiring board in which optical wiring and electrical wiring are mixed, a method for manufacturing the same, and a mounting board in which optical components and electrical components are mounted on the substrate.
[0002]
[Prior art]
In order to make a computer that can perform arithmetic processing faster, the clock frequency of the CPU tends to increase more and more, and about 1 GHz now appears. As a result, there are parts where high-frequency signals flow in the electrical wiring of copper on the printed circuit board in the computer, so malfunctions may occur due to the generation of noise, and electromagnetic waves may be generated, affecting the surroundings. It will also give.
[0003]
In order to solve such a problem, a part of the copper electrical wiring on the printed circuit board is replaced with an optical fiber or optical waveguide optical wiring, and an optical signal is used instead of the electrical signal. This is because the generation of noise and electromagnetic waves can be suppressed in the case of optical signals.
[0004]
From the viewpoint of high-density mounting or miniaturization, it is desirable to create an optical / electrical wiring board in which multiple electrical wirings and optical wirings are stacked on the same substrate. Matching the axes is very difficult.
[0005]
[Problems to be solved by the invention]
The present invention has been made in view of the drawbacks of the related art, and provides an optical / electrical wiring board, a manufacturing method, and a mounting board that have a plurality of optical wirings and can easily align the optical axes of the optical wirings. This is the issue.
[0006]
[Means for Solving the Problems]
In order to achieve the above object in the present invention, the invention according to claim 1 is an optical / electrical wiring board having an electrical wiring for propagating an electric signal and an optical wiring for propagating the optical signal. The support has a flexible support formed on the support, and the support has a region in which electric wiring formed in a pattern on the support and an insulating layer covering the surface are formed. The region is provided on one side and the other side at intervals on the support so that the support can be flexible at an intermediate portion, The support is bent so that it does not break at the interval, the one side and the other side are overlapped and fixed, and the optical wiring maintains a continuous body between the one side and the other side. It is an optical / electrical wiring board characterized by the above.
[0007]
The invention according to claim 2 is based on the invention according to claim 1, and the electrical wiring on the one side and the other side of the support is connected by a via hole. It is a wiring board.
[0008]
According to a third aspect of the present invention, there is provided a method of manufacturing an optical / electrical wiring board having an electric wiring for propagating an electric signal and an optical wiring for propagating an optical signal, wherein the optical wiring is a continuous body on a flexible support. A step of providing a pattern-like electric wiring and a region having an insulating layer covering the surface on the support so as to oppose both surfaces of the support, and the support is flexible at an intermediate portion. A step of providing the region on one side and the other side of the support so as to maintain the property, bending the support so that it does not break at the interval, and between the one side and the other side. And at least a step of superposing and fixing the one side and the other side while maintaining the continuum of the optical wiring.
[0009]
The invention described in claim 4 is based on the invention described in claim 3, and further comprises a step of electrically connecting the electrical wiring on the one side and the other side of the support by via holes. It is a manufacturing method of the optical / electrical wiring board according to claim 3.
[0010]
Furthermore, the invention described in claim 5 is a mounting board in which an optical component and / or an electrical component is mounted on the optical / electrical wiring board described in any one of claims 1 to 2.
[0011]
DETAILED DESCRIPTION OF THE INVENTION
In the optical / electrical wiring board according to the present invention, cross-sectional explanatory views of the manufacturing process are shown in FIGS. 1 (1) to (4), and a plan view of the completed optical / electrical wiring board is shown in FIG. 1 (5). A mounting board on which is mounted is shown in FIG.
[0012]
In the production of the optical / electrical wiring board according to the present invention, first, an optical wiring is provided as a continuous body on a flexible support.
[0013]
Referring to FIG. 1 (1), the support is made of a film substrate having flexibility such as polyethylene naphthalate, preferably having a high glass transition temperature Tg, a high insulation resistance, and a low coefficient of thermal expansion. Use. In addition, in order to prevent noise from the outside to the optical wiring, it is also preferable to have a light shielding property except in the vicinity of a mirror described later.
[0014]
On one side of such a support, a flexible and good optical property resin such as fluorinated polyimide is laminated by solution coating or film to form a continuous optical wiring 2. The reason why the continuum is used is to omit the step of connecting a plurality of optical wirings and matching the optical axes. The optical wiring may be made of a single resin. However, in order to reduce the loss of the optical signal, a resin having a different refractive index may be used to have a structure such as an optical fiber core and cladding.
[0015]
A mirror 3 having a surface inclined by 45 degrees from the in-plane direction of the optical / electrical wiring board is formed at a predetermined portion of the optical wiring. The mirror at one end of the optical wiring reflects the optical signal emitted from the laser light emitting element mounted on the surface of the optical / electrical wiring board by 90 degrees and propagates the light / electrical wiring board. The mirror at the other end reflects the optical signal propagated through the optical / electrical wiring board by 90 degrees and makes it incident on a laser light receiving element mounted on the surface of the optical / electrical wiring board. This mirror can be formed by a method of providing a taper by processing such as dicing, laser or dry etching, or a method using a holographic technique. It is preferable to form a reflective film on the mirror surface.
[0016]
Thereafter, in order to protect the optical wiring, a flexible resin is laminated to obtain the support 1 on which the optical wiring is formed. Such a resin preferably has a light shielding property to prevent noise from the outside to the optical wiring.
[0017]
In addition, as another method for forming a mirror on the support, it is also possible to perform a method in which an optical wiring and a resin are laminated on the support and then a predetermined portion is perforated obliquely by laser or dry etching.
[0018]
Next, a front surface layer and a back surface layer having electrical wiring are provided on the support at intervals.
[0019]
Referring to FIG. 1B, a metal foil such as copper is laminated on both surfaces of the support 1 on which the optical wiring is formed, and patterned by a known photolithography method to form the electrical wiring 4. Thereafter, an insulating resin is applied to form the insulating layer 5. At this time, it is preferable to provide an opening 9 for exposing the mirror in the insulating layer 5.
[0020]
As another method for forming the electrical wiring, a subtracting method or an additive method used in manufacturing a printed wiring board by built-up can be used.
[0021]
By the way, the electric wiring 4 and the insulating layer 5 are not provided on the entire surface of the support 1 but are provided at a predetermined interval 6. This is because it is a bent portion at the time of superposition described later. In FIG. 1 (2), the left portion of the interval 6 is referred to as a surface layer 7, and the right portion is referred to as a back layer 8. Further, if a plurality of intervals 6 are provided to form a front surface layer, an intermediate layer, and a back surface layer, a multilayer optical / electrical wiring board can be obtained.
[0022]
Next, the front surface layer and the back surface layer are overlapped and fixed with the interval approximately in the center.
[0023]
Describing with reference to FIG. 1 (3), the front surface layer and the back surface layer are overlapped with each other on the inner side so that the support is not bent and the interval is substantially in the center. At that time, an adhesive 10 such as a prepreg having the same size as the surface layer is also sandwiched. Then, it heats and pressurizes with a hot press, a heat roller, etc., and a surface layer, an adhesive agent, and a back layer are fixed. It should be noted that a multilayer optical / electrical wiring board can be obtained by using an ordinary electric wiring board sandwiched between prepregs instead of a simple prepreg.
[0024]
Furthermore, if necessary, the electrical wiring of the front surface layer and the back surface layer is electrically connected by a via hole.
[0025]
Explaining with reference to FIG. 1 (4) (AA 'cross section in FIG. 1 (5)), is it possible to completely drill the optical / electrical wiring board in the thickness direction by a high-power laser such as an excimer laser or a drill? The via hole 11 is formed by partially drilling. After that, by filling the perforations with a conductive material using a plating method or the like, electrical connection can be established between the electrical wirings, so that an electrical signal can be propagated.
[0026]
A plan view of the optical / electrical wiring board manufactured in this way is shown in FIG.
In the figure, the surface layer 7 has the optical wiring 2 embedded therein. The optical wiring 2 is provided in the support 1 and is a continuous body with the optical wiring on the back surface layer. The surface layer 7 is provided with an opening 9 from which the mirror formed on the optical wiring 2 is exposed. Four optical component mounting pads 12 exist around the opening 9 and are connected to the lead frame or pad of the optical component by solder or solder balls. Furthermore, there are pads for mounting electrical components (not shown).
[0027]
Optical components and electrical components were mounted on the surface of the optical / electrical wiring board.
[0028]
A cross section of such a mounting substrate is shown in FIG. A CPU, a memory (not shown), a laser light emitting element 13 and a laser light receiving element 14 are mounted on the mounting board. The electric signal from the CPU on the mounting substrate was modulated, and the laser light emitting element 13 propagated the optical wiring through the mirror as an optical signal. Then, the optical signal propagated through the optical wiring was reflected by the mirror and demodulated into an electric signal by the laser light receiving element, and could be propagated to the bus without generating noise.
[0029]
【The invention's effect】
According to the present invention, since a plurality of optical wirings are continuous bodies, an optical / electrical wiring board and a mounting board in which the optical axes of the optical wirings naturally coincide with each other without a step of connecting difficult optical wirings. Can be provided.
[0030]
[Brief description of the drawings]
FIG. 1 is an explanatory diagram of an optical / electrical wiring board according to the present invention.
FIG. 2 is an explanatory diagram of a mounting board in which optical components are mounted on the optical / electrical wiring board according to the present invention.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 Support body in which optical wiring was formed 2 Optical wiring 2 Mirror 4 Electrical wiring 5 Insulating layer 6 Space | interval 7 Surface layer 8 Back surface layer 9 Opening part 10 Adhesive 11 Via hole 12 Optical component mounting pad 13 Laser light emitting element 14 Laser light receiving element

Claims (5)

電気信号を伝搬させる電気配線と、光信号を伝搬させる光配線を有する光・電気配線基板において、
連続体の光配線が形成された可撓性の支持体を有すること、
該支持体には、該支持体上にパターン状に形成された電気配線とこの面を覆う絶縁層が形成された領域が該支持体の両面に対向するよう設けてあり、且つ、該支持体が中間の部分で可撓性を保てるよう該領域は該支持体上に間隔をおいてその片側と他方の側に設けてあること、
該支持体が、該間隔のところで折れない様に曲げられ、該片側と他方の側とが重ね合わされ固着されていること、
そして、該片側と他方の側の間で該光配線が連続体を維持していること、
を特徴とする光・電気配線基板。
In an optical / electrical wiring board having electrical wiring for propagating electrical signals and optical wiring for propagating optical signals,
Having a flexible support on which a continuous optical wiring is formed;
The support is provided with an electric wiring formed in a pattern on the support and a region where an insulating layer covering the surface is formed so as to face both surfaces of the support, and the support The region is provided on one side and the other side of the support so as to maintain flexibility at an intermediate portion.
The support is bent so that it does not break at the interval, and the one side and the other side are overlapped and fixed;
And that the optical wiring maintains a continuous body between the one side and the other side,
Optical and electrical wiring board characterized by
前記支持体の前記片側と他方の側の電気配線をビアホールで接続することを特徴とする請求項1記載の光・電気配線基板。 2. The optical / electrical wiring board according to claim 1 , wherein electrical wirings on the one side and the other side of the support are connected by via holes. 電気信号を伝搬させる電気配線と、光信号を伝搬させる光配線を有する光・電気配線基板の製造方法において、
可撓性の支持体上に光配線を連続体で設ける工程、
該支持体上に、パターン状の電気配線とこの面を覆う絶縁層のある領域を、該支持体の両面に対向するように、且つ、該支持体が中間の部分で可撓性を保てるように該領域を該支持体上に間隔をおいてその片側と他方の側に設ける工程、
該支持体を、該間隔のところで折れない様に曲げ、該片側と他方の側の間で該光配線が連続体を維持したままで、該片側と他方の側とを重ね合わせ固着する工程、
を少なくとも具備することを特徴とする光・電気配線基板の製造方法。
In a method of manufacturing an optical / electrical wiring board having an electrical wiring for propagating an electrical signal and an optical wiring for propagating an optical signal,
A step of providing an optical wiring as a continuous body on a flexible support;
A region having a pattern-like electric wiring and an insulating layer covering this surface on the support is opposed to both surfaces of the support, and the support can maintain flexibility at an intermediate portion. A step of providing the region on one side and the other side of the support with a space therebetween,
Bending the support so that it does not break at the interval, and maintaining the optical wiring in a continuous state between the one side and the other side, and stacking and fixing the one side and the other side ;
A method for manufacturing an optical / electrical wiring board, comprising:
更に、前記支持体の前記片側と他方の側の電気配線をビアホールで電気接続する工程、を具備することを特徴とする請求項3記載の光・電気配線基板の製造方法。 4. The method of manufacturing an optical / electrical wiring board according to claim 3, further comprising a step of electrically connecting the electric wirings on the one side and the other side of the support by via holes. 請求項1乃至2の何れか1項に記載の光・電気配線基板に、光部品又は/及び電気部品を実装したことを特徴とする実装基板。A mounting substrate in optical and electrical wiring board according to any one of claims 1 to 2, characterized in that mounting the optical parts and / or electrical components.
JP17964599A 1999-06-25 1999-06-25 Optical / electrical wiring board, manufacturing method, and mounting board Expired - Fee Related JP4164947B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17964599A JP4164947B2 (en) 1999-06-25 1999-06-25 Optical / electrical wiring board, manufacturing method, and mounting board

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17964599A JP4164947B2 (en) 1999-06-25 1999-06-25 Optical / electrical wiring board, manufacturing method, and mounting board

Publications (2)

Publication Number Publication Date
JP2001004864A JP2001004864A (en) 2001-01-12
JP4164947B2 true JP4164947B2 (en) 2008-10-15

Family

ID=16069401

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17964599A Expired - Fee Related JP4164947B2 (en) 1999-06-25 1999-06-25 Optical / electrical wiring board, manufacturing method, and mounting board

Country Status (1)

Country Link
JP (1) JP4164947B2 (en)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006025523A1 (en) 2004-09-02 2006-03-09 Nec Corporation Photoelectric composite module
JP4696589B2 (en) * 2005-02-22 2011-06-08 住友ベークライト株式会社 Optical waveguide forming substrate
JP4696647B2 (en) * 2005-03-31 2011-06-08 住友ベークライト株式会社 Optical waveguide forming substrate
JP4711895B2 (en) * 2006-02-03 2011-06-29 ホシデン株式会社 Photoelectric flexible wiring board connection structure, connector and photoelectric flexible wiring board
JP4876830B2 (en) * 2006-09-29 2012-02-15 パナソニック電工株式会社 Photoelectric conversion device
JP2009192818A (en) * 2008-02-14 2009-08-27 Nitto Denko Corp Manufacturing method of optoelectric hybrid board and optoelectric hybrid board obtained thereby
JP5225211B2 (en) * 2009-06-12 2013-07-03 新光電気工業株式会社 Optical waveguide, method for manufacturing the same, and substrate for mounting optical waveguide
WO2011055511A1 (en) * 2009-11-04 2011-05-12 日本電気株式会社 Semiconductor device and method for manufacturing the same

Also Published As

Publication number Publication date
JP2001004864A (en) 2001-01-12

Similar Documents

Publication Publication Date Title
JP5247880B2 (en) Photoelectric wiring board and optical module
JP4164947B2 (en) Optical / electrical wiring board, manufacturing method, and mounting board
JP6084027B2 (en) Optical waveguide device and manufacturing method thereof
US7025849B2 (en) Method of attaching optical waveguide component to printed circuit board
JP4366751B2 (en) Optical / electrical wiring board, manufacturing method, and mounting board
JP2001196643A (en) Chip carrier for mounting light/electric element and mounting method thereof, light/electric wiring board and manufacturing method thereof, and mounting board
JP4677651B2 (en) Optical wiring layer manufacturing method, optical / electrical wiring substrate, manufacturing method thereof, and mounting substrate
JP4306011B2 (en) Optical wiring layer and manufacturing method thereof, optical / electrical wiring substrate, manufacturing method thereof, and mounting substrate
JP4374648B2 (en) Optical / electrical wiring board, manufacturing method, and mounting board
JP2001183556A (en) Multi-chip module board and multi-chip module
CN110780393B (en) Optical waveguide and optical circuit board
US10295769B2 (en) Opto-electric hybrid board and method of manufacturing same
JP7032942B2 (en) Optical waveguide and optical circuit board
JP4304764B2 (en) Optical / electrical wiring board, manufacturing method, and mounting board
JP4441980B2 (en) Optical / electrical wiring substrate, manufacturing method thereof, manufacturing method of optical wiring film, and mounting substrate
JP2001196494A (en) Chip carrier for mounting opto-electric element, manufacturing and mounting method therefor, opto- electric wiring board, manufacturing method therefor and mounted substrate
JP2005322946A (en) Manufacturing method of printed wiring board and printed wiring board
JP4507359B2 (en) Optical / electrical wiring board, its connection structure and its connection method
JP2006091500A (en) Optical waveguide board into which optical waveguide is engaged and optical and electric hybrid circuit board
JP2001255428A (en) Optical wiring layer having optical fiber connecting hole, its manufacturing method, and optical/electric wiring substrate and optical/electric mounting substrate using it
JPH1154859A (en) Printed wiring board and manufacture thereof
JP4253933B2 (en) Optical / electrical wiring board and mounting board
JP4240659B2 (en) Optical / electrical wiring board, manufacturing method, and mounting board
JPH0745959A (en) Manufacture of rigid flex wiring board
JP2003179318A (en) Printed wiring board and manufacturing method therefor

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20060320

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20080417

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20080422

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20080619

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20080708

A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20080721

R150 Certificate of patent or registration of utility model

Free format text: JAPANESE INTERMEDIATE CODE: R150

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20110808

Year of fee payment: 3

LAPS Cancellation because of no payment of annual fees