JP4156656B1 - Two-fluid slit nozzle and manufacturing method thereof - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a mixing space for allowing two fluids to collide at right angles in a slit nozzle in order to obtain a uniform film-like jet mist in the length direction by mixing liquid and gas, and means for further homogenizing the mixed fluid A two-fluid slit nozzle for passing and jetting is provided.
A mixing plate is sandwiched between a long plate-like liquid supply plate and a gas supply plate, and a liquid sent from the liquid supply plate through a liquid orifice penetrating the mixing plate at a right angle from the air supply plate The air sent through the air orifice to the other surface of the mixing plate is collided and mixed in the mixing space on the other surface of the mixing plate, and the jet slit between the downstream end of the mixing space and the lower end surfaces of both the mixing and air supply plates The upstream end is jetted from the jet slit in a collision chamber that connects between the two groups of orifices penetrating the mixing plate and the two groups of orifices on the liquid supply plate side and performs homogenization and acceleration by expansion and compression.
[Selection] Figure 1

Description

  The present invention relates to a two-fluid slit nozzle and a manufacturing method thereof, and more particularly to a two-fluid slit nozzle that forms a gas-liquid mixed film-like jet mist used for precision cleaning and two-fluid cleaning of electronic components, and the two-fluid slit nozzle. And how to do.

  Conventionally, a plurality of two-fluid nozzles are used in parallel to form a film-like spray mist. However, the distribution of the fine spray at the interfering portion between sprays sprayed from adjacent nozzles is not uniform. Unevenness occurs in the cleaning effect. In addition, the spray from each nozzle has a spray angle, and in order to obtain a desired cleaning effect corresponding to the spray angle, the setting of the position, height or distance of the nozzle row with respect to the surface of the object to be cleaned is greatly limited. Will be added. In addition, the spray distribution in the short distance spray from the nozzle is not uniform, and there are some places where the spray does not exist, so this nozzle row cannot be used at the short distance position where the spray speed is highest for the object to be cleaned. However, since it is forced to be used at a separated position where the spray speed is reduced although the distribution is uniform, the actual spray impact and cleaning effect obtained are attenuated.

  In order to form a suitable film-like jet mist, there is a proposal of a two-fluid slit nozzle that forms a slit-like nozzle by superposing a plurality of long plate-like bodies (Patent Document 1). Here, an intermediate spacer is sandwiched between the first plate material on the gas supply side and the second plate material on the liquid supply side, and slit-shaped injection holes are provided along one end surface in the length direction of both plate materials that cross the intermediate spacer in the width direction. The gas flow path provided on one surface of the spacer and the liquid flow path provided on the other surface are merged at a crossing angle of 45 ° to 90 ° in the gas-liquid collision mixing portion leading to the slit-like injection hole. That is, since the two fluids are reliably mixed by performing the confluence of gas and liquid inside the slit nozzle, the nozzle is placed close to the object to be cleaned, and a high spray impact can be obtained. However, since the gas-liquid collision mixing part in this nozzle continues to the slit-like injection hole with a slight distance, the mixing space of the two fluids is narrow, and the formation of a highly homogeneous spray cannot be expected.

In addition to a two-fluid slit nozzle that can simplify the structure of a slit-like nozzle constructed by stacking long plate-like bodies, improve the uniformity of the spray distribution of the mixed mist in the longitudinal direction of the nozzle, and improve the cleaning power Has been proposed (Patent Document 2). A mixing space that spreads in a plate shape is provided between the opposed surfaces of the pair of stacked long plate members, and the gas and liquid supplied through the plate member are respectively passed through the chamber and the numerous injection holes of the supply plate. Then, they merge together in a 90 ° relationship, are sent to the mixing space, mixed, and then discharged from a slit-like discharge port provided on one end surface in the length direction of both plate-like bodies in communication with the mixing space. However, also in this two-fluid slit nozzle, since the two fluids are simply sent directly from the mixing space having the same width to the slit-like discharge port, it is not possible to expect a highly homogeneous spray as in the above case.
JP 2006-192360 A JP 2007-98310 A

  As described in the conventional example with the one-row arrangement of a plurality of two-fluid nozzles described above, in order to obtain a high cleaning effect due to a strong spray impact, the spray speed is sufficiently high and the spray spray distribution is uniform at a position close to the nozzle. It is necessary to be. In that sense, as shown in Patent Document 1, the configuration of the slit nozzle is adopted, and mixing by causing the gas and the liquid ejected to collide with each other at an angle of 45 ° to 90 ° can be performed inside the slit nozzle. Although effective, there is insufficient space or measures for further homogenization of the two fluids after mixing.

  On the other hand, in Patent Document 2, two fluids are flowed in a relationship of 90 ° in the flow direction at positions separated from each other in the upstream region of the mixing space having a certain length in the flow direction of the fluid, or in the same position. It shows that mixing is performed while converging in the direction of 45 ° and being led to the downstream slit-like discharge port, and the mixing is carried out in such a way that the ejected liquid collides directly at right angles to the air flow immediately after ejection, and the length. It does not indicate any positive homogenization measures other than simply flowing down a flat mixing space.

  Therefore, the present invention has been proposed to solve such a problem. In order to obtain a suitable film-like jet mist by mixing two fluids, a slit nozzle is employed, and a mixing space sufficient for mixing the two fluids. A slit nozzle having a configuration in which the jet liquid flow collides with the jet air flow almost perpendicularly to the jet air flow in this mixing space, and the mixed fluid can be positively homogenized before being sent to the jet slit. The first purpose is to provide it.

  A second object of the present invention is to form a film-like jet mist by highly homogeneous two-fluid mixing even at a position close to the jet slit, so that the maximum spray impact and the best cleaning effect at the highest spray speed are achieved. An object of the present invention is to provide a two-fluid slit nozzle capable of achieving the above.

  Furthermore, a third object of the present invention is to provide a manufacturing method that makes it possible to manufacture the above-described two-fluid slit nozzle in the first and second objects easily and therefore at low cost.

In order to solve the above-mentioned problems, the two-fluid slit nozzle according to the present invention includes a mixing plate that is long and fastened with a fixing bolt, a liquid supply plate that contacts one surface of the mixing plate, and an air supply that contacts the other surface of the mixing plate The liquid supply plate comprises a liquid pipe connection port that opens to the outer surface, and a primary liquid chamber that opens along the length of the plate and communicates with the liquid pipe connection port on the surface in contact with the mixing plate. Has a primary air chamber that opens along the length of the plate and communicates with the air pipe connection port on the surface in contact with the mixing plate, and the mixing plate is the primary liquid of the liquid supply plate. The primary air chamber of the chamber and air supply plate and the length direction of each plate In the two-fluid slit nozzle having a mixing chamber that communicates with an injection slit that opens at one end surface along the mixing plate, the mixing chamber of the mixing plate is formed in a narrow groove shape on the other surface of the mixing plate, perpendicular to the plate length direction. The primary liquid chamber communicates with the primary air chamber at the upstream end through the formed air orifice, and in the vicinity of the upstream end through the fine liquid orifice that passes through the mixing plate at right angles to the air orifice. The mixing chamber is formed with a plurality of vertical grooves formed on the other surface of the mixing plate so as to be orthogonal to the plate length direction. The downstream end of each groove of the mixing chamber terminates at a distance from the upstream end of the injection slit. Between the downstream end of the mixing slit and the upstream end of the injection slit is a plurality of through the mixing plate at the downstream end of each groove of the mixing chamber. A primary orifice, a plurality of secondary orifices penetrating the mixing plate at the upstream end of the injection slit, and a surface of the liquid supply plate contacting the mixing plate are formed to communicate with each primary orifice and each secondary orifice. It communicates with the collision chamber which consists of a recessed part.
Furthermore, in the two-fluid slit nozzle according to claim 2, the downstream end of the longitudinal groove forming the mixing chamber of the mixing plate is connected in a U shape with a lateral groove formed on the other surface of the mixing plate for each adjacent pair. A number of primary orifices communicate with the impingement chamber, and the upstream end of the injection slit is connected to the other surface of the mixing plate through a secondary chamber formed in a transverse groove shape extending in the longitudinal direction of each plate. And communicating with the secondary orifice.
The two-fluid slit nozzle according to claim 3 has a stepped deep portion at a position where the collision chamber faces the outlet of the primary orifice, and the secondary orifice facing the shallow portion downstream from the stepped deep portion of the collision chamber is 1 The injection slit is a concave surface provided from the position facing the final chamber to one end surface of the plate where the injection slit opens, on the surface of the air supply plate that contacts the mixing plate. It is characterized by.
In addition, the manufacturing method of the two-fluid slit nozzle according to the present invention includes a long plate-shaped mixing plate, a liquid supply plate in contact with one surface of the mixing plate, and an air supply plate in contact with the other surface of the mixing plate. A liquid pipe connection port that opens on the outer surface of the plate and a primary liquid chamber that opens at the joint surface with the mixing plate and communicates with the liquid pipe connection port, and an air pipe connection port that opens on the outer surface of the air supply plate A primary air chamber that opens at the joint surface with the mixing plate and communicates with the air pipe connection port, and an air orifice that communicates with the opening of the primary air chamber of the air supply plate on the other surface of the mixing plate; Mixing chamber with the upstream end connected to the downstream end of the orifice and the length of the mixing plate Of the two-fluid slit nozzle formed by joining the liquid supply plate on one surface of the mixing plate and the air supply plate on the other surface, and then tightening them with fixing bolts. In the manufacturing method, the step of forming the air orifice and the mixing chamber in the mixing plate includes a plurality of narrow grooves perpendicular to the plate length direction as air orifices on the other surface of the mixing plate, and each of the narrow grooves as a mixing chamber. Are formed by etching or diffusion fusion, and are further orthogonal to the narrow grooves at the upstream end of each vertical groove. A plurality of liquid orifices penetrating the mixing plate and communicating with the opening of the liquid supply plate, and each longitudinal groove A plurality of primary orifices penetrating the mixing plate at the downstream end, a plurality of secondary orifices penetrating the mixing plate at the upstream end of the injection slit and having a smaller diameter and a smaller interval than the primary orifice, and all two on the other surface side of the mixing plate Forming a final chamber that communicates the secondary orifice in the longitudinal direction of the plate, and forming the liquid pipe connection port and the primary liquid chamber in the liquid supply plate includes a step of forming the mixing plate at a joint surface with the mixing plate. The method includes a step of forming a collision chamber including a concave portion that communicates the primary orifice and the secondary orifice.
Furthermore, in the method of manufacturing the two-fluid slit nozzle according to claim 5, the step of forming the air orifice and the mixing chamber on the mixing plate further includes forming the downstream end of the longitudinal groove forming the mixing chamber in a U shape for each adjacent pair. The method includes a step of forming, on the other surface of the mixing plate, a lateral groove to be connected, and a primary orifice that communicates with each of the transverse grooves at a plurality of locations with a collision chamber.

  According to the two-fluid slit nozzle according to the present invention, in order to mix the two fluids to obtain a suitable film-like jet mist, the slit nozzle is first adopted, and the upstream end of the mixing chamber in which the two-fluid mixing is provided inside the slit nozzle. In this case, the liquid orifice outlet is disposed at right angles to the air orifice outlet. Thereby, the liquid flow is most effectively sheared by the air flow, and the liquid is atomized to obtain a reliable gas-liquid mixture. The mixture not only proceeds further while going down the mixing chamber, but is also redirected by the small diameter primary orifice at the downstream end of the mixing chamber to the impingement chamber where it undergoes agitation, including expansion and compression. Homogenization. The homogenized and compressed spray is smaller in diameter and accelerated with a larger number of secondary orifices and proceeds to the final chamber, where the spray is further homogenized and injected from the injection slit at a higher speed. In the final chamber, the spray is ejected at a high speed from the largest number of secondary orifices with the smallest diameter, so that a uniform and high-speed film-like mist can be reliably obtained in the length direction of the slit nozzle.

  Further, according to the method of manufacturing the two-fluid slit nozzle according to the present invention, in the mixing plate that requires the most precise machining among the components constituting the slit nozzle, a large number of gas orifices and the subsequent U-shaped mixing chamber are used. In addition, since the final chamber is constituted by a groove opened on the other surface of the mixing plate joined to the air supply plate, these members can be easily formed by etching or diffusion fusion from the other surface side. The nozzle can be manufactured at low cost.

  Embodiments of the present invention will be described below with reference to the accompanying drawings.

FIG. 1 is a cross-sectional view taken along the line II of FIG. 2 showing the configuration of an embodiment of a two-fluid slit nozzle according to the present invention.
In FIG. 1, the two-fluid slit nozzle is generally configured by laminating a long and plate-like liquid supply plate 1, a mixing plate 2, and an air supply plate 3. The thick liquid supply plate 1 joined to the one surface 2A of the mixing plate 2 on the side surface 1A is connected to the liquid pipe connection port 11 which is open to the upper end surface and can be connected to the liquid supply pipe, and the liquid pipe connection port 11 therein. And a primary liquid chamber 12 that opens at the side surface 1A and a collision chamber 13 that is a recess that opens at the side surface 1A at a position close to the lower end surface. The primary liquid chamber 12 includes a step portion facing the liquid pipe connection port 11 and a concave portion further deepening along the one surface 2A of the mixing plate 2 from the step portion, so that the inflowing liquid has a stirring action including expansion and compression. Receive.

  The thick air supply plate 3 joined to the other surface 2B of the mixing plate 2 at the side surface 3A is connected to the air tube connection port 31 that opens to the opposite side surface and opens to the side surface 3A. A primary air chamber 32 is provided.

  The mixing plate 2 sandwiched between the liquid supply plate 1 and the air supply plate 3 is configured to substantially separate the primary liquid chamber 12 and the primary air chamber 32 from each other. In this embodiment, the liquid and air in the layers 12 and 32 are continuously formed in the longitudinal direction from the lower end surface along the longitudinal direction of the air supply plate 3 to a certain height position, and the mixing is opposed to the concave surface. Means are provided for mixing with high efficiency and producing a homogeneous and high-speed spray while transporting to the upstream end of the injection slit 33 constituted by the lower surface 2C of the plate 2 and a part of the other surface 2B following the lower surface 2C.

  First, the bottom surface of the primary air chamber 32 on the lower end surface side of the air supply plate 3 is positioned higher than the bottom surface of the recess of the primary liquid chamber 12, thereby enabling a right-angle gas-liquid mixed injection. As shown in FIG. 1, the mixing plate 2 extends from the position where the other surface 2 </ b> B communicates with the bottom surface portion of the primary air chamber 32 to the position above the bottom surface of the concave portion of the primary liquid chamber 12. 2 includes a plurality of fine groove-shaped air orifices 21 in a pattern seen in the plan view of the other surface 2B side. Furthermore, the other surface 2B of the mixing plate 2 is provided with a number of slightly thick longitudinal groove-shaped mixing chambers 22 continuous with the downstream ends of the air orifices 21, and the downstream ends of the mixing chambers 22 are upstream ends of the injection slits 33. It is provided so as to terminate at a position slightly separated from. At the upstream end portion of each mixing chamber 22, a liquid orifice 23 is provided that passes through the mixing plate 2 in a direction perpendicular to the air orifice 21 and communicates near the bottom of the concave portion of the primary liquid chamber 12. Therefore, in the upstream end of each mixing chamber 22, the liquid ejected from the liquid orifice 23 collides with the air ejected from the air orifice 21 at a right angle, and is effectively sheared and atomized by the ejected air flow. , Down the mixing chamber 22 while being mixed with the air stream.

  The downstream end portion of the mixing chamber 22 is provided with a small-diameter primary orifice 25 penetrating the mixing plate 2 substantially vertically, and provided at the downstream end portion of the mixing chamber 22 and the joining surface 1A of the liquid supply plate 1 described above. The upstream end of the collision chamber 13 is communicated with the primary orifice 25. A deep recess 14 deepened in the flow direction of the mixed spray from the primary orifice 25 is provided at the upstream end of the collision chamber 13, and the mixed spray is once expanded and then compressed again in the shallow recess on the downstream side. Is done. The downstream end of the collision chamber 13 is positioned opposite to the upstream end of the injection slit 33, and the opposing end passes through the mixing plate 2 and communicates with a secondary orifice 26 provided with a smaller diameter than the primary orifice 25. Is done. Accordingly, the mixed spray which has been once expanded in the collision chamber 13 and reliably homogenized by being recompressed is accelerated by the secondary orifice 26 having the smallest diameter in this system and sent to the injection slit 33.

  Preferably, as shown in FIG. 2, the downstream end of the longitudinal groove-like mixing chamber 22 is communicated in a U shape by a lateral groove 24 for each adjacent pair, and the paired air orifices 21 and the mixing chamber 22 are connected. Is provided with a plurality of small-diameter primary orifices 25 in a lateral groove 24 having a certain length by providing a certain interval in the length direction of each plate. Further, on the other surface 2B side of the mixing plate 2, the plate A final chamber 27 formed by a longitudinal transverse groove that communicates all of the secondary orifices 26 having the smallest diameter, which is the largest number at a smaller interval than the primary orifice, is provided in the length direction. Connect to the upstream end. In this way, diffusion and compression are repeatedly performed in a path including the transverse groove 24, a large number of small-diameter primary orifices 25, the collision chamber 13, the largest-numbered smallest-diameter secondary orifice 26, and the final chamber 27 communicating with all the secondary orifices. Thus, it becomes possible to form the film-like jet mist positively and substantially homogenized at high speed over the entire length of the jet slit 33.

  Here, the ejection slit 33 is described as a concave surface provided on the joint surface 3A of the air supply plate 3 with the mixing plate. However, the present invention is not limited to this. A substantially similar effect can be obtained even with a concave surface provided up to the lower end surface 2C of the second.

  Next, a method for manufacturing the two-fluid slit nozzle according to the present invention will be described. First, materials for a long plate-shaped mixing plate 2, a liquid supply plate 1 in contact with one surface 2A of the mixing plate 2, and an air supply plate 3 in contact with the other surface 2B of the mixing plate 2 are prepared.

  The liquid supply plate 1 has an opening on one of its outer surfaces, here the upper end surface on the thickness side, and a plurality of liquid pipe connection ports 11 that are appropriately spaced in the plate length direction, a mixing plate 2, A primary liquid chamber 12 is formed which opens at the joint surface 1A and communicates with the liquid pipe connection port 11 therein. The primary liquid chamber 12 may be divided into appropriate lengths one by one for each liquid pipe connection port 11, or may be one continuous with almost the entire length of the liquid supply plate 1. .

  The air supply plate 3 is opened on one of its outer surfaces, here on the width side opposite to the joint surface 3A with the mixing plate 2, and a plurality of airs spaced at appropriate intervals in the plate length direction. The primary air chamber 32 that opens at the joint surface 3A of the pipe connection port 31 and the mixing plate and communicates with the air pipe connection port 31 inside is divided for each air pipe connection port 31 or all air pipe connections It is formed as one common to the mouth.

  For the mixing plate 2, in general, an air orifice 21 communicating with the opening of the primary air chamber 32 of the air supply plate 3 on the other surface 2B, a mixing chamber 22 having an upstream end connected to the downstream end of the air orifice, An ejection slit that opens at one end surface along the length direction of the mixing plate is formed. The liquid supply plate 1 is joined to one surface 2A of the mixing plate 2 thus formed, and the air supply plate 3 is joined to the other surface 2B and overlapped, and the mixing plate 2 is sandwiched, for example, fixing bolts from the air supply plate 3 side. The two-fluid slit nozzle is manufactured by tightening 34 and 35 against the liquid supply plate 1.

  In particular, according to the method of manufacturing the two-fluid slit nozzle according to the present invention, in order to form the air orifice 21 and the mixing chamber 22 in the mixing plate 2, the mixing plate 2 has an air orifice 21 on the other surface 2 </ b> B. Etching a plurality of narrow grooves perpendicular to the length direction as a mixing chamber 22 and a plurality of slightly thick vertical grooves each having a continuous upstream end and a downstream end separated from the upstream end of the injection slit 33. Alternatively, it is formed by diffusion fusion. Further, a plurality of liquid orifices 23 that pass through the mixing plate 2 at right angles to the narrow grooves at the upstream end of each vertical groove and communicate with the opening of the liquid supply plate 1, and pass through the mixing plate 2 at the downstream end of each vertical groove. A plurality of primary orifices 25 having a small diameter, a plurality of secondary orifices 26 penetrating the mixing plate 2 at the upstream end of the injection slit 33 and having a smaller diameter and a smaller interval than the primary orifice, and the other surface 2B side of the mixing plate 2 A transverse groove-shaped final chamber 27 that communicates all the secondary orifices 26 in the length direction of the mixing plate is formed.

  When the liquid pipe connection port 11 and the primary liquid chamber 12 are formed in the liquid supply plate 1, the space between the primary orifice 25 and the secondary orifice 26 of the mixing plate is formed on the joint surface 1A with the mixing plate. Forming a collision chamber 13 formed of a stepped recess communicating with the step.

Sectional drawing which follows the II line | wire of FIG. 2 of one Example structure of the two-fluid slit nozzle which concerns on this invention FIG. 1 is a plan view of an air supply plate joining surface side of a part of a long mixing plate in the embodiment of FIG.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Liquid supply plate 11 Liquid pipe connection port 12 Primary liquid chamber 13 Collision chamber 2 Mixing plate 21 Air orifice 22 Mixing chamber 23 Liquid orifice 24 Horizontal groove 25 Primary orifice 26 Secondary orifice 27 Final chamber 3 Air supply plate 31 Air pipe connection Port 32 Primary air chamber 33 Injection slit 34, 35 Fixing bolt

Claims (5)

Each mixing plate is long and fastened with fixing bolts, a liquid supply plate in contact with one surface of the mixing plate, and an air supply plate in contact with the other surface of the mixing plate. A primary liquid chamber that opens along the length of the plate and communicates with the liquid pipe connection port is provided on the surface in contact with the mixing plate, and the air supply plate has a plate on the surface in contact with the air pipe connection port that opens on the outer surface and the mixing plate. A primary air chamber that opens along the length direction of the air pipe and communicates with the air pipe connection port. The mixing plate includes a primary liquid chamber of the liquid supply plate, a primary air chamber of the air supply plate, and a length direction of each plate. A mixing chamber that communicates with the injection slit that opens at one end along In two-fluid slit nozzle to obtain,
The mixing chamber of the mixing plate communicates with the primary air chamber at the upstream end via an air orifice formed on the other surface of the mixing plate in a narrow groove shape perpendicular to the plate length direction, and each air orifice Are connected to the primary liquid chamber in the vicinity of the upstream end through a fine liquid orifice penetrating the mixing plate perpendicularly to the mixing plate, and formed on the other surface of the mixing plate at right angles to the plate length direction. The downstream end of each groove of the mixing chamber is spaced apart from the upstream end of the injection slit, and the downstream end of the mixing chamber and the upstream end of the injection slit are at the downstream end of each groove of the mixing chamber. A plurality of primary orifices penetrating the mixing plate and a plurality of secondary orifices penetrating the mixing plate at the upstream end of the injection slit , Two-fluid slit nozzle, characterized in that communicates with the collision chamber formed of recesses between formed communicating the with the primary orifice and the secondary orifice surface in contact with the mixing plate of the liquid distributor plate.   The downstream end of the longitudinal groove forming the mixing chamber of the mixing plate is connected in a U-shape with a lateral groove formed on the other surface of the mixing plate for each adjacent pair, and each lateral groove communicates with the collision chamber by a number of primary orifices, The upstream end of the injection slit communicates with the secondary orifice through a final chamber formed in a lateral groove shape extending in the longitudinal direction of each plate by communicating with all the secondary orifices on the other surface of the mixing plate. Item 2. A two-fluid slit nozzle according to item 1.   The collision chamber has a stepped deep portion at a position facing the outlet of the primary orifice, and a larger number of secondary orifices facing the shallow portion downstream from the stepped deep portion of the collision chamber are provided with a smaller diameter and smaller intervals than the primary orifice. The injection slit is a concave surface portion provided on a surface of the air supply plate that contacts the mixing plate from a position facing the final chamber to one end surface of the plate where the injection slit opens. Fluid slit nozzle. A long plate-shaped mixing plate, a liquid supply plate in contact with one surface of the mixing plate, and an air supply plate in contact with the other surface of the mixing plate are prepared. Forming a primary liquid chamber which opens at the joint surface and communicates with the liquid pipe connection port, and opens at the air supply plate connection port which opens on the outer surface of the air supply plate and the mixing plate and the air pipe connection port. A mixing chamber having a primary air chamber in communication with the mixing plate, an air orifice communicating with the opening of the primary air chamber of the air supply plate on the other surface of the mixing plate, and a mixing chamber having an upstream end connected to the downstream end of the air orifice; Forming an injection slit that opens on one end surface along the length direction of the plate. A liquid supply plate on one surface of the ring plate, superimposed to each joining the air distribution plate on the other side, in the manufacturing method of the two-fluid slit nozzle formed by tightening the fixing bolt,
The step of forming the air orifice and the mixing chamber in the mixing plate includes a plurality of narrow grooves orthogonal to the plate length direction as air orifices on the other surface of the mixing plate, and an upstream end in each of the narrow grooves as the mixing chamber. A plurality of vertical grooves that are continuous and have downstream ends separated from the upstream end of the injection slit are formed by etching or diffusion fusion, and at the upstream end of each vertical groove, a mixing plate is formed perpendicular to the narrow grooves. A plurality of liquid orifices penetrating and communicating with the opening of the liquid supply plate, a plurality of primary orifices penetrating the mixing plate at the downstream end of each longitudinal groove, and a primary orifice penetrating the mixing plate at the upstream end of the ejection slit Multiple secondary orifices with smaller diameters and smaller intervals and the other side of the mixing plate Forming a final chamber for communicating all the secondary orifices in the longitudinal direction of the plate, and forming the liquid pipe connection port and the primary liquid chamber in the liquid supply plate at the joint surface with the mixing plate. A method of manufacturing a two-fluid slit nozzle, comprising a step of forming a collision chamber formed of a recess that communicates a primary orifice and a secondary orifice of a mixing plate.   The step of forming the air orifice and the mixing chamber in the mixing plate further includes a horizontal groove that connects the downstream ends of the vertical grooves forming the mixing chamber in a U-shape for each adjacent pair, and each horizontal groove communicates with the collision chamber at a number of locations. The method for manufacturing a two-fluid slit nozzle according to claim 4, further comprising a step of forming a primary orifice on the other surface of the mixing plate.

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