KR101010032B1

KR101010032B1 - Twin fluid slit nozzle and manufacture method thereof

Info

Publication number: KR101010032B1
Application number: KR1020097001901A
Authority: KR
Inventors: 히토시 히라키카와
Original assignee: 스프레이잉 시스템스 재팬 가부시키가이샤
Priority date: 2007-09-18
Filing date: 2008-04-30
Publication date: 2011-01-21
Also published as: CN101547744A; HK1136240A1; CN101547744B; JP2009066564A; KR20090051735A; WO2009037887A1; JP4156656B1

Abstract

It provides a two-fluid slit nozzle that mixes liquid and gas to inject a homogeneous and highly atomized membrane spray mist in the longitudinal direction. A mixing space for colliding the two-fluid at right angles is provided inside the nozzle, and then injected through a means for further homogenizing the mixed fluid. The mixing plate is sandwiched between the long plate-shaped liquid supply plate and the gas supply plate, and the liquid supply plate is passed through the air orifice from the air supply plate to the other side of the mixing plate, and through the liquid orifice penetrating the mixing plate at right angles. The liquid sent from is impingementally mixed in the mixing space. The gas-liquid mixture collides between the primary orifice penetrating the mixing plate at the downstream end of the mixing space, the impingement chamber on the liquid supply plate side, the secondary orifice penetrating the mixing plate at the upstream end of the spraying slit and the spraying slit. , Homogenized and atomized by expansion and compression, accelerated and sprayed from the spraying slit.

Mixing plate, liquid supply plate, air supply plate, spraying slit, air slit nozzle, orifice, collision chamber

Description

Two-fluid slit nozzle and its manufacturing method {TWIN FLUID SLIT NOZZLE AND MANUFACTURE METHOD THEREOF}

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a two-fluid slit nozzle and a method for manufacturing the same, and in particular, a two-fluid slit nozzle for forming a film-shaped spray mist of gas-liquid mixture used for precision cleaning of an electronic component or a two-fluid cleaning, A method for producing a slit nozzle.

Conventionally, in order to form a film-form spray mist, several airflow nozzles were installed side by side and used, but the distribution of the fine spray in the interference part between sprays sprayed from adjacent nozzles does not become uniform, A stain was occurring. In addition, the spray from each nozzle has a spray angle, and in order to obtain a desired cleaning effect corresponding to the spray angle, a great restriction is added to the setting of the position, height or distance of the nozzle row with respect to the surface of the object to be cleaned. In addition, the spray distribution from the nozzle to the near-field spray is inconsistent, and there are some places where spraying does not exist, so this nozzle row cannot be used at the closest position where the spray rate to the object to be cleaned is highest, and the distribution is continuous. However, it can only be used in a spaced position where the spray speed is reduced. For this reason, the spray impact and cleaning effect actually obtained are attenuated.

In order to form a suitable film | membrane spray mist, there exists a proposal of the two-fluid slit nozzle which overlaps a some long plate-like object and comprises a slit-shaped nozzle (patent document 1). Here, the intermediate spacer is sandwiched between the first plate on the gas supply side and the second plate on the liquid supply side, and slit-shaped injection holes are provided along one end surface in the longitudinal direction of both plates, and the gas flow path and the other surface provided on one surface of the intermediate spacer. The liquid flow path provided in the above is joined at an angle of 45 ° to 90 ° in the gas-liquid impingement mixing part through the slit-shaped injection hole. In other words, by combining the gas and the liquid inside the slit nozzle, since the air is reliably mixed, the nozzle can be placed close to the object to be cleaned, and a high spray impact can be obtained. However, since the gas-liquid collision mixing part at this nozzle is continuous to the slit-shaped injection hole at a slight distance, it is narrow as the mixing space of the two-fluid body, and in this example, formation of a highly homogeneous spray cannot be expected.

Another configuration of a two-fluid slit nozzle in which a slit-shaped nozzle formed by superimposing an elongated plate body can simplify the structure, improve uniformity of spray distribution of the mixed mist in the longitudinal direction of the nozzle, and improve cleaning power. This is proposed (patent document 2). Between the opposing surfaces of a pair of overlapping long plate-shaped bodies, a mixing space extending in a plate shape is provided, and the gas and liquid supplied through the plate-shaped bodies are each other through a chamber and a plurality of injection holes in the supply plate. It joins in a 90 degree | times relationship, is sent to a mixing space, it mixes, and it communicates with a mixing space, and discharges from the slit-shaped discharge port provided in the longitudinal end surface of both plate-shaped objects. However, even in this airflow slit nozzle, the airflow is sent directly from the mixing space to the slit-shaped discharge port, and thus, as in the case described above, a highly homogeneous spray cannot be expected.

[Patent Document 1]: Japanese Patent Laid-Open No. 2006-192360

[Patent Document 2]: Japanese Patent Application Laid-Open No. 2007-98310

(Initiation of invention)

(Technical problem to be solved)

As described in the conventional example of the above arrangement of a plurality of two-fluid nozzles, in order to obtain a high cleaning effect due to a strong spray impact, the spray rate is sufficiently high, and the spray spray distribution at a position close to the nozzle is uniform. One thing is necessary. In that sense, as shown in Patent Literature 1, it is effective to employ a constitution of a slit nozzle, and to effect mixing inside the slit nozzle to cause a gas and a liquid to collide with each other at an angle of 45 ° to 90 °, respectively. However, in the example of this patent document 1, there is insufficient space for the further homogenization of the distillate after mixing.

On the other hand, Patent Literature 2 discloses that two air bodies are ejected and joined in a 90 ° relationship in the flow direction, respectively, at positions separated from each other in an upstream region of the elongated mixing space in the flow direction of the fluid, or 45 ° in the flow direction at the same position, respectively. A slit nozzle in which their mixing proceeds while ejecting and joining in the relationship and proceeding to the downstream slit-shaped discharge port is shown. Although this example shows that the jetting liquid collides at right angles to the air stream immediately after the jetting in a mixing space having a certain length, it merely causes the flat mixing space to flow down, and the gas-liquid mixture is not sufficiently homogenized and the injection hole is Sprayed from.

The present invention has been proposed to solve such a problem, and a first object of the present invention is to have a slit nozzle for mixing a two-fluid to obtain a suitable film spray mist, and to provide a mixing space sufficient for mixing the two-fluid inside of the slit nozzle. The present invention provides a slit nozzle having a configuration capable of impinging a jetting liquid stream at approximately right angles to the jetting air stream in this mixing space and positively homogenizing the mixed fluid before sending it to the injection slit.

In addition, the second object of the present invention is to form a film-like spray mist by mixing highly homogeneous airflow even at a position close to the spray slit, which can achieve the maximum spray impact and the best cleaning effect at the highest spray rate. It is to provide an airflow slit nozzle.

Moreover, the 3rd object of this invention is to provide the manufacturing method which makes it easy and inexpensive to manufacture the airflow slit nozzle in the above-mentioned 1st and 2nd object.

(Means to solve the task)

In order to solve the above problems, the two-fluid air slit nozzle according to the present invention has a mixing plate which is long and tightly fastened with each other, a liquid supply plate in contact with one surface of the mixing plate, and an air supply plate in contact with the other surface of the mixing plate. The liquid supply plate includes a liquid pipe connection opening on the outer surface and a primary liquid chamber open on the surface in contact with the mixing plate and in communication with the liquid pipe connection, and the air supply plate is in contact with the air pipe connection opening on the outer surface and the mixing plate. An injection air slit opening in the surface and communicating with the air pipe connection, and an injection slit bored at one end along the longitudinal direction of the plate is provided between the mixing plate and the air supply plate, and the injection slit and the primary liquid chamber and With a mixing chamber located between the primary air chambers In the two-fluid slit nozzle, the mixing chamber is composed of a plurality of longitudinal grooves formed at right angles to the longitudinal direction of each plate, and at the upstream end through the air orifices each formed in a groove shape perpendicular to the longitudinal direction of the plate Communicate with the primary liquid chamber in the vicinity of the upstream end through a thin orifice liquid orifice in communication with the primary air chamber and through the mixing plate at right angles to the direction of each air orifice, The downstream end is terminated apart from the upstream end of the injection slit, and between the downstream end of the mixing chamber and the upstream end of the injection slit, a plurality of primary orifices penetrating the mixing plate at the downstream end of each groove of the mixing chamber; A plurality of secondary orifices penetrating the mixing plate at an upstream end of the injection slit, and a liquid supply plate The mixing chamber collision portion formed with at least one recess formed so as to communicate through the first orifice and the second orifice on the surface in contact with the plate being in communication.

The two-fluid slit nozzle according to claim 2 is composed of a mixing plate each long and tightly fastened to each other by a fixing bolt, a liquid supply plate in contact with one side of the mixing plate, and an air supply plate in contact with the other side of the mixing plate. A liquid pipe connection opening on the outer surface and a primary liquid chamber opening along the plate in the longitudinal direction and communicating with the liquid pipe connection on the surface contacting the mixing plate, and the air supply plate includes an air pipe connection opening on the outside surface and a mixing plate; A first air chamber opening along the longitudinal direction of the plate and in communication with the air duct connection on the side facing each other, wherein the mixing plate includes the first liquid chamber of the liquid supply plate and the primary air chamber of the air supply plate and the length direction of each plate. Between injection slits drilled on one side In an airflow slit nozzle having a mixing chamber located, the mixing chamber of the mixing plate is composed of a plurality of longitudinal grooves formed on the other surface of the mixing plate at right angles to the longitudinal direction of the plate, each perpendicular to the longitudinal direction of the plate. Through an air orifice formed on the other side of the mixing plate in the shape of a groove toward the primary air chamber at an upstream end, and through a thin orifice liquid orifice respectively penetrating the mixing plate at right angles to the direction of the air orifice. In communication with the primary liquid chamber near the upstream end, the downstream end of each groove of the mixing chamber is terminated apart from the upstream end of the injection slit, and between the downstream end of the mixing chamber and the upstream end of the injection slit, each groove of the mixing chamber. A plurality of primary orifices penetrating the mixing plate at the downstream end of the jetting slit And a plurality of secondary orifices penetrating the mixing plate at the stage and concave portions formed by communicating between each of the primary orifices and each secondary orifice on a surface in contact with the mixing plate of the liquid supply plate. .

In addition, in the airflow slit nozzle according to claim 3, in the airflow slit nozzle according to claim 1 or 2, the downstream ends of the longitudinal grooves constituting the mixing chamber are connected in a U-shape in a horizontal groove for each adjacent pair. Each lateral groove communicates with the collision chamber by a plurality of primary orifices, and the upstream end of the injection slit communicates with the entire secondary orifice through a final chamber formed in a lateral groove shape extending in the longitudinal direction of each plate. It is characterized by communicating with the orifice.

The airflow slit nozzle according to claim 4, wherein in the airflow slit nozzle according to claim 3, the collision chamber has a short core at a position facing the outlet of the primary orifice, and is downstream of the short core of the collision chamber. The secondary orifices facing the top are provided with a smaller diameter and a smaller interval than the primary orifices, and the injection slits are formed at one end of the plate with the injection slits drilled from the position facing the final chamber on the surface in contact with the mixing plate of the air supply plate. It is characterized by consisting of a concave surface portion provided up to the surface.

Moreover, the manufacturing method of the airflow slit nozzle which concerns on this invention provides the long plate-shaped mixing plate, the liquid supply plate which contact | connects one surface of the mixing plate, and the air supply plate which contact | connects the other surface of the mixing plate, respectively, and the outer surface to the liquid supply plate At the joining surface with the liquid pipe connection opening and the mixing plate which is opened at the opening and at the joining surface with the mixing plate, and at the joining surface with the air pipe connection opening at the outer surface of the air supply plate and at the joining surface with the mixing plate. An air orifice which opens and communicates with the air pipe connection port, which communicates with the opening of the primary air chamber of the air supply plate on the other side of the mixing plate, and an upstream end connected to the downstream end of the air orifice. A chamber and one end opening along the longitudinal direction of the mixing plate In the manufacturing method of the airflow orifice slit nozzle which forms the injection slit, joins and superimposes a liquid supply plate on one side of a mixing plate, and an air supply plate on the other side, and tightly fastens with a fixing bolt, The process of forming the mixing chamber includes a plurality of thin grooves perpendicular to the longitudinal direction of the plate as air orifices on the other surface of the mixing plate, and an upstream end is continuous to each thin groove as the mixing chamber, and the downstream end is a spray slit. A plurality of longitudinal grooves spaced apart from the upstream end of the plurality of grooves are formed by etching and diffusion fusion, and communicate with the openings of the liquid supply plate through the mixing plate at right angles in the direction of the grooves at the upstream end of each longitudinal groove. Liquid orifices and a plurality of primary orifices penetrating the mixing plate at the downstream end of each longitudinal groove And a plurality of secondary orifices of smaller diameter and smaller spacing than the primary orifices penetrating the mixing plate at the upstream end of the spraying slit and the final chamber communicating the entire secondary orifices in the longitudinal direction of the plate at the other side of the mixing plate. And forming the liquid pipe connection port and the primary liquid chamber in the liquid supply plate. The concave becomes a collision chamber which communicates the primary orifice and the secondary orifice of the mixing plate to the joining surface of the mixing plate. It is characterized by including a step of forming a part.

In the manufacturing method of the airflow slit nozzle according to claim 6, in the manufacturing method of the airflow slit nozzle according to claim 5, the step of forming an air orifice and a mixing chamber on the mixing plate further includes a vertical groove forming a mixing chamber. And a step of forming a horizontal groove connecting the downstream ends of the pairs in a U-shape for each adjacent pair, and a primary orifice communicating each of the horizontal grooves with the collision chamber at a plurality of locations on the other surface of the mixing plate. .

(Effects of the Invention)

According to the two-fluid slit nozzle according to the present invention, a slit nozzle is first adopted in order to mix the two-fluid to obtain a suitable film spray mist, and the ejection opening of the liquid orifice is provided at the upstream end of the mixing chamber provided inside the slit nozzle. It is arranged at right angles to the ejection opening of, and the mixture of the air bodies is performed there. Thereby, the liquid stream is most effectively sheared by the air stream, and the liquid is atomized, whereby a gas-liquid mixture that is surely mixed is obtained. Mixing of the air is further progressed while the mixture descends the mixing chamber. In addition, the mixture is redirected by a small diameter primary orifice at the downstream end of the mixing chamber and sent to the impingement chamber, where the homogenization proceeds under stirring action including expansion and compression. The homogenized and compressed spray is smaller in diameter, speeds up in more secondary orifices and proceeds to the final chamber where it is more homogenized and ejected from the spraying slit at high speed. In the final chamber, the spray is ejected at high speed from the smallest diameter and the largest number of secondary orifices, so that a homogeneous and high speed film spray mist in the longitudinal direction of the slit nozzle is surely obtained.

Moreover, according to the manufacturing method of the airflow slit nozzle which concerns on this invention, many air orifices of the mixing plate, U-shaped mixing chamber, and final chamber which require the most precise processing among the components which comprise this slit nozzle are supplied with air. Since it is comprised by the groove | channel opened on the other surface of the mixing plate joined with a plate, these parts can be formed easily by etching or diffusion fusing from this other surface side, and therefore a two-fluid slit nozzle can be manufactured at low cost. .

1 is a cross-sectional view along line I-I of FIG. 2 of an embodiment configuration of an airflow slit nozzle according to the present invention;

FIG. 2 is a plan view showing a part of the air supply plate joining surface of the long mixing plate in the exemplary embodiment of FIG. 1. FIG.

One… . Liquid supply plate 11... Liquid pipe connection

12... Primary liquid chamber 13. Crash chamber

2… Mixing plate 21... Air orifice

22 ... Mixing chamber 23... Liquid orifice

24... Horizontal groove 25... Primary orifice

26... Secondary orifice 27... Final chamber

3 ... Air supply plate 31... Air line

32... Primary air chamber 33.. Spraying slit

34, 35... Fixing bolt

(The best mode for carrying out the invention)

EMBODIMENT OF THE INVENTION Below, the Example of this invention is described based on an accompanying drawing.

(Example 1)

1 shows a configuration in one embodiment of an airflow slit nozzle in accordance with the present invention in a cross sectional view along line I-I in FIG. 2.

In FIG. 1, the two-fluid slit nozzle is formed by overlapping a long, plate-shaped liquid supply plate 1, a mixing plate 2, and an air supply plate 3, respectively. The thick liquid supply plate 1 is joined to one surface 2A of the mixing plate 2 at its side 1A. The liquid supply plate 1 has a liquid pipe connection port 11 which is open at the upper end surface and can connect the liquid supply pipe, and communicates with the liquid pipe connection port 11 inside, and the primary liquid chamber opened at the side surface 1A. (12) and the collision chamber 13 which consists of a recessed part opened in side surface 1A at the position near a lower end surface. Since the primary liquid chamber 12 has an end facing the liquid pipe connection 11 and a recess deeper from this end along the one surface 2A of the mixing plate 2, the inflow liquid includes expansion and compression. Under stirring action.

The thick air supply plate 3 joined to the other surface 2B of the mixing plate 2 at the side surface 3A communicates with the air pipe connection port 31 opened on the side of the opposite side and communicates with the air pipe connection port 31. The primary air chamber 32 opened in 3A) is provided. In addition, in this embodiment, the injection slit 33 into which the film-shaped mist is injected is formed in this embodiment in a concave surface formed continuously in the longitudinal direction from the lower surface along the longitudinal direction of the air supply plate 3 to a certain height position. It consists of a part of the other surface 2B following the lower surface 2C of the mixing plate 2 opposing a concave surface.

The mixing plate 2 sandwiched between the liquid supply plate 1 and the air supply plate 3 is configured to substantially separate the primary liquid chamber 12 and the primary air chamber 32 from each other. The mixing plate 2 is provided with means for homogeneous and high speed spraying by mixing with high efficiency while transporting the liquid and air in both chambers 12 and 32 upstream of the injection slit 33.

First, the bottom surface of the lower end surface side of the air supply plate 3 of the primary air chamber 32 is set to a position higher than the bottom surface of the concave portion of the primary liquid chamber 12, whereby the right-angle gas-liquid mixture injection is performed. Make it possible. As shown in FIG. 1, the mixing plate 2 is above the bottom surface of the recessed portion of the primary liquid chamber 12 from a position in communication with the bottom surface portion of the primary air chamber 32 of the other surface 2B. A plurality of thin groove-shaped air orifices 21 formed in the pattern shown in the plan view of the other surface 2B side of the mixing plate 2 of FIG. 2 are provided. In addition, the other surface 2B of the mixing plate 2 is provided with a plurality of rather thick longitudinal groove-shaped mixing chambers 22, which are respectively continuous at the downstream end of the air orifice 21, and the downstream ends of each mixing chamber 22. Is provided so as to terminate at a position slightly separated from the upstream end of the injection slit 33. At the upstream end of each mixing chamber 22, a liquid orifice penetrating the mixing plate 2 at right angles to the direction of the air orifice 21 and communicating near the bottom surface of the recess of the primary liquid chamber 12 ( 23) is installed. Therefore, the liquid injected from the liquid orifice 23 collides at right angles with the air ejected from the air orifice 21 in the upstream end of each mixing chamber 22, and is effectively sheared by the blowing air flow to finely granulate. And down into the mixing chamber 22 while mixing with the air stream.

At the downstream end of the mixing chamber 22, a small diameter primary orifice 25 is installed through the mixing plate 2 substantially vertically, and the downstream end of the mixing chamber 22 and the liquid supply plate 1. The upstream end of the above-mentioned collision chamber 13 provided in the joining surface 1A of this is connected by this primary orifice 25. As shown in FIG. The upstream end of the impingement chamber 13 is provided with a deep recess 14 deepened in the flow direction of the mixed spray from the primary orifice 25, where the mixed spray is once expanded here and then the shallow recess on the downstream side. Is compressed again. The downstream end of the impingement chamber 13 is disposed at a position opposite to the upstream end of the injection slit 33, and these opposing ends penetrate the mixing plate 2 and have a smaller diameter than the primary orifice 25. It is communicated by the secondary orifice 26. Therefore, the mixed spray, which is once homogeneously expanded and recompressed in the impingement chamber 13, is accelerated by the secondary orifice 26 of the smallest diameter in this system and sent to the injection slit 33.

Preferably, as shown in FIG. 2, the downstream end of the vertical groove-shaped mixing chamber 22 is connected in U-shape by the horizontal groove 24 for each adjacent pair. Since the pair of air orifices 21 and the mixing chamber 22 which are connected to each other are provided at a predetermined interval in the length direction of each plate, the horizontal groove 24 has a certain length, and the horizontal groove 24 has a plurality of A small diameter primary orifice 25 is installed. In addition, the mixing chamber (2) has a final chamber (27) formed by a transverse groove extending in the longitudinal direction of the plate, which communicates all of the smallest secondary orifices (26) with a smaller number than the primary orifice. It is provided on the other surface 2B of), and this final chamber 27 is connected to the upstream end of the injection slit 33. As shown in FIG. Into the transverse groove 24, the plurality of small diameter primary orifices 25, the impingement chamber 13, the secondary orifices 26 of the largest and smallest diameters, and the final chamber 27 which communicates the entire secondary orifices. Diffusion and compression of the mixture are repeatedly performed in the path made. Thereby, it becomes possible to form a film-form spray mist actively positively and completely homogenized, and to spray at high speed over the whole length of the spray slit 33. As shown in FIG.

More preferably, the primary orifice 25 and the secondary orifice 26 are offset and arranged without being disposed in the vertical up and down positions. Thereby, the homogenization of the spray is further promoted.

In addition, although the injection slit 33 was described as a concave surface provided in the joining surface 3A with the mixing plate of the air supply plate 3 here, it is not limited to this, On the other surface 2B of the mixing plate 2 The substantially same effect is obtained also as a concave surface provided from the final chamber 27 to the lower end surface 2C of the mixing plate 2.

Next, the manufacturing method of the airflow slit nozzle which concerns on this invention is described. First, the long plate-shaped mixing plate 2, the liquid supply plate 1 in contact with the one surface 2A of the mixing plate 2, and the air supply plate 3 in contact with the other surface 2B of the mixing plate 2, respectively. To raise the material.

As for the liquid supply plate 1, a plurality of liquid pipe connection ports 11 which are opened at any one outer surface, here the upper end surface on the opposite side from the cross section which the injection slit 33 opened, and are moderately spaced in the longitudinal direction of the plate. ) And a primary liquid chamber 12 which opens at the bonding surface 1A of the mixing plate 2 and communicates with the liquid pipe connecting port 11 therein. The primary liquid chamber 12 can be divided into one suitable length for each liquid pipe connection 11, or one that is continuous to approximately the entire length of the liquid supply plate 1, or both.

In addition, when the liquid pipe connecting port 11 and the primary liquid chamber 12 are formed in the liquid supply plate 1, the primary orifice 25 and the secondary of the mixing plate are formed on the joining surface 1A of the mixing plate. A collision chamber 13 having a stepped recess is formed to communicate between the orifices 26.

With respect to the air supply plate 3, a plurality of air pipe connection ports 31 are opened on one of the outer surfaces, here the surface opposite to the joining surface 3A to the mixing plate 2, and spaced appropriately in the longitudinal direction of the plate. ) And a primary air chamber 32 that is opened at the bonding surface 3A of the mixing plate and communicates with the air pipe connecting portion 31 therein. The primary air chambers 32 may be formed separately for each air pipe connection port 31 or may be formed as one common to all air pipe connection ports.

About the mixing plate 2, as the air orifice on the other surface 2B, a plurality of thin grooves perpendicular to the longitudinal direction of the mixing plate are inserted into the openings of the primary air chamber 32 of the air supply plate 3. In the communicating position, it forms by etching or diffusion fusion. In addition, as the mixing chamber 22, an upstream end is connected to a downstream end of each thin groove, and a plurality of rather thick longitudinal grooves, which are separated from an upstream end of the injection slit 33, by etching or diffusion fusion. Form. Moreover, the injection slit opened at the one end surface along the longitudinal direction of the mixing plate is formed. In addition, a plurality of liquid orifices 23 are formed to penetrate the mixing plate 2 at right angles to the direction of the grooves at the upstream end of each longitudinal groove and communicate with the opening of the liquid supply plate 1. Also, a plurality of small diameter primary orifices 25 penetrating the mixing plate 2 at the downstream end of each longitudinal groove, and primary orifices penetrating the mixing plate 2 at the upstream end of the injection slit 33. Smaller diameters also form a plurality of secondary orifices 26 of smaller spacing. Moreover, the last chamber 27 of the horizontal groove shape which communicates the whole secondary orifice 26 in the longitudinal direction of the mixing plate in the other surface 2B side of the mixing plate 2 is formed.

In addition, the injection slit opened to the end surface along the longitudinal direction of the plate may be formed in the air supply plate 3.

The liquid supply plate 1 is bonded to one surface 2A of the mixing plate 2 thus completed, and the air supply plate 3 is bonded to the other surface 2B, respectively, and the mixing plate 2 is sandwiched. For example, the fastening bolts 34 and 35 are tightly fastened with respect to the liquid supply plate 1 from the side of the air supply plate 3, and the airflow slit nozzle is manufactured.

The two-fluid slit nozzle of the present invention can be used, for example, for two-fluid washing or precision cleaning, such as electronic parts. Moreover, the manufacturing method of this invention can be used for manufacture of the airflow slit nozzle of such a use.

Claims

Each of the mixing plate is long and tightly fastened to each other, the liquid supply plate in contact with one side of the mixing plate and the air supply plate in contact with the other side of the mixing plate, the liquid supply plate is in contact with the liquid pipe connection opening on the outer surface and the mixing plate An air supply plate having an opening in the surface and communicating with the liquid pipe connection, the air supply plate having an air pipe connection opening in the outer surface and a primary air chamber opening in the surface in contact with the mixing plate and in communication with the air pipe connection, A jet slit drilled at one end along the longitudinal direction of the plate is installed between the mixing plate and the air supply plate, and has a spray slit nozzle having a mixing chamber located between the jet slit and the primary liquid chamber and the primary air chamber. in,

The mixing chamber consists of a plurality of longitudinal grooves installed at right angles to the longitudinal direction of each plate, and communicates with the primary air chamber at an upstream end through air orifices each formed in a groove shape perpendicular to the longitudinal direction of each plate. And communicate with the primary liquid chamber near the upstream end through a thin orifice liquid orifice penetrating the mixing plate at right angles to the direction of each air orifice, and the downstream end of each groove of the mixing chamber A plurality of primary orifices penetrating the mixing plate at the downstream end of the mixing chamber and the upstream end of the spraying slit and separated from the upstream end and downstream of each groove of the mixing chamber, and the mixing plate at the upstream end of the spraying slit. A plurality of secondary orifices penetrating the through and in contact with the mixing plate of the liquid supply plate The first orifice and the second second-rate material slit nozzle characterized in that the communication from the collision chamber comprising at least one recessed portion formed so as to communicate between the orifices.

It consists of a mixing plate which is long and tightly fastened to each other, a liquid supply plate in contact with one side of the mixing plate, and an air supply plate in contact with the other side of the mixing plate, and the liquid supply plate is connected to the liquid pipe connection opening on the outer surface and the mixing plate. It is provided with the primary liquid chamber which opens along the longitudinal direction of a plate and communicates with a liquid pipe connection part in the contact surface, The air supply plate opens along the longitudinal direction of the plate in the air pipe connection hole opened to the outer surface, and the surface which contact | connects a mixing plate. A primary air chamber in communication with the air pipe connection, wherein the mixing plate is located between the primary liquid chamber of the liquid supply plate and the primary air chamber of the air supply plate and the injection slit drilled in one end along the longitudinal direction of each plate Teeth having a mixing chamber In the slit nozzle body,

The mixing chamber of the mixing plate consists of a plurality of longitudinal grooves formed on the other side of the mixing plate at right angles to the longitudinal direction of the plate, and air formed on the other side of the mixing plate in the shape of grooves perpendicular to the longitudinal direction of the plate. Communicate with the primary air chamber at the upstream end through the orifice, and through the thin orifice liquid orifice through the mixing plate at right angles to the direction of the air orifice, respectively, and communicate with the primary liquid chamber near the upstream end. The downstream end of each groove of the chamber is terminated apart from the upstream end of the injection slit,

Between the downstream end of the mixing chamber and the upstream end of the spraying slit, a plurality of primary orifices penetrating the mixing plate at the downstream end of each groove of the mixing chamber, and a plurality of secondary orifices penetrating the mixing plate at the upstream end of the spraying slit. And a collision chamber comprising a concave portion formed by communicating between each primary orifice and each secondary orifice on a surface in contact with the mixing plate of the liquid supply plate.

The method of claim 1 or claim 2, wherein the downstream ends of the longitudinal grooves constituting the mixing chamber are connected in a U-shape in the lateral groove for each adjacent pair, each lateral groove is in communication with the collision chamber by a plurality of primary orifices The upstream end of the injection slit communicates with the secondary orifice through a final chamber formed in a transverse groove shape extending in the longitudinal direction of each plate in communication with the entire secondary orifice.

4. The impact chamber of claim 3, wherein the impact chamber has a short core at a position facing the outlet of the primary orifice, and the secondary orifice facing a shallow downstream of the short core of the impact chamber is also smaller in diameter than the primary orifice. A plurality of air jet slits are provided at intervals, and the air slit nozzle comprises a concave surface part provided from the position facing the final chamber on the surface in contact with the mixing plate of the air supply plate to one end face of the plate through which the jet slits are drilled. .

A primary liquid which is provided with a long plate-shaped mixing plate, a liquid supply plate, and an air supply plate, respectively, and which opens at the outer surface of the liquid supply plate, and opens at the joint surface with the mixing plate and communicates with the liquid pipe connection. Forming a chamber, and forming an air supply port open at the outer surface of the air supply plate and a primary air chamber open at the joining surface with the mixing plate and communicating with the air pipe connection, and on one side of the mixing plate An air orifice in communication with the opening of the primary air chamber, a mixing chamber connected upstream to the downstream end of the air orifice, and an injection slit opened at one end along the longitudinal direction of the mixing plate, and formed on one side of the mixing plate. Join the liquid supply plate and the air supply plate to the other side In the adhesive preparation and method of manufacturing a tight fastening member slit nozzle for second-rate by a fixing bolt,

In the step of forming the air orifice and the mixing chamber in the mixing plate, a plurality of fine grooves perpendicular to the longitudinal direction of the plate as air orifices are formed on the other side of the mixing plate, and the upstream end is continuous to each fine groove as the mixing chamber. Further, a plurality of longitudinal grooves, the downstream end of which is separated from the upstream end of the injection slit, is formed by one of etching and diffusion fusion, and penetrates the mixing plate at right angles in the direction of the grooves going from the upstream end of each longitudinal groove. A plurality of liquid orifices communicating with the opening of the liquid supply plate, a plurality of primary orifices penetrating the mixing plate at the downstream end of each longitudinal groove, and a primary orifice penetrating the mixing plate at the upstream end of the injection slit. The diameter also allows the play of multiple secondary orifices of small spacing and the entire secondary orifice on the other side of the mixing plate. Forming a final chamber in communication with the longitudinal direction of the substrate; and forming a liquid pipe connection port and a primary liquid chamber in the liquid supply plate include: a primary orifice and a second orifice of the mixing plate at a joining surface of the mixing plate; A method for producing a two-fluid slit nozzle, comprising the step of forming a recess to be a collision chamber in communication with a car orifice.

6. The process of claim 5, wherein the step of forming an air orifice and a mixing chamber in the mixing plate further comprises a horizontal groove connecting the downstream end of the vertical grooves constituting the mixing chamber in a U-shape for each adjacent pair, and a plurality of horizontal grooves. A method for producing a two-fluid slit nozzle comprising the step of forming a primary orifice in communication with a collision chamber at a mixing plate.