JP4138494B2 - 最適化された多層光導波システム - Google Patents

最適化された多層光導波システム Download PDF

Info

Publication number
JP4138494B2
JP4138494B2 JP2002586040A JP2002586040A JP4138494B2 JP 4138494 B2 JP4138494 B2 JP 4138494B2 JP 2002586040 A JP2002586040 A JP 2002586040A JP 2002586040 A JP2002586040 A JP 2002586040A JP 4138494 B2 JP4138494 B2 JP 4138494B2
Authority
JP
Japan
Prior art keywords
layer
core
refractive index
buffer layer
light transmissive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2002586040A
Other languages
English (en)
Japanese (ja)
Other versions
JP2004534262A5 (enExample
JP2004534262A (ja
Inventor
ダブリュ．ベッソン カール
ブードゥジャン ジョージ
エルダダ ローイ
パント ディープティ
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
EIDP Inc
Original Assignee
EI Du Pont de Nemours and Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by EI Du Pont de Nemours and Co filed Critical EI Du Pont de Nemours and Co
Publication of JP2004534262A publication Critical patent/JP2004534262A/ja
Publication of JP2004534262A5 publication Critical patent/JP2004534262A5/ja
Application granted granted Critical
Publication of JP4138494B2 publication Critical patent/JP4138494B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Images

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/02—Optical fibres with cladding with or without a coating
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G02B6/1221—Basic optical elements, e.g. light-guiding paths made from organic materials
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12083—Constructional arrangements
    • G02B2006/12107—Grating
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12166—Manufacturing methods
    • G02B2006/12176—Etching

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Optical Integrated Circuits (AREA)
JP2002586040A 2001-05-01 2002-04-04 最適化された多層光導波システム Expired - Fee Related JP4138494B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/846,691 US6542684B2 (en) 2001-05-01 2001-05-01 Optimized multi-layer optical waveguiding system
PCT/US2002/010946 WO2002088795A1 (en) 2001-05-01 2002-04-04 Optimized multi-layer optical waveguiding system

Publications (3)

Publication Number Publication Date
JP2004534262A JP2004534262A (ja) 2004-11-11
JP2004534262A5 JP2004534262A5 (enExample) 2005-12-22
JP4138494B2 true JP4138494B2 (ja) 2008-08-27

Family

ID=25298660

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002586040A Expired - Fee Related JP4138494B2 (ja) 2001-05-01 2002-04-04 最適化された多層光導波システム

Country Status (6)

Country Link
US (1) US6542684B2 (enExample)
EP (1) EP1393101A4 (enExample)
JP (1) JP4138494B2 (enExample)
KR (1) KR100832678B1 (enExample)
CN (1) CN100406935C (enExample)
WO (1) WO2002088795A1 (enExample)

Families Citing this family (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7078445B2 (en) * 2001-02-01 2006-07-18 E. I. Du Pont De Nemours And Company Photosensitive acrylate composition and waveguide device
JP4066670B2 (ja) * 2002-02-19 2008-03-26 オムロン株式会社 光スイッチ
US6904219B1 (en) * 2002-07-26 2005-06-07 Boston Laser, Inc. Ultra high-power continuous wave planar waveguide amplifiers and lasers
KR20040021710A (ko) * 2002-08-29 2004-03-11 주식회사 코오롱 열적산화안정성이 우수한 플라스틱 광섬유 및 그의 제조방법
JP3890046B2 (ja) * 2002-10-07 2007-03-07 日本電信電話株式会社 平面回路型光学素子の製造方法
US7776236B2 (en) * 2003-07-25 2010-08-17 General Electric Company Index contrast enhanced optical waveguides and fabrication methods
JP2005157090A (ja) * 2003-11-27 2005-06-16 Mitsumi Electric Co Ltd 光導波路デバイス
TWI285664B (en) * 2003-12-25 2007-08-21 Kansai Paint Co Ltd Curable resin composition for optical waveguide, curable dry film for optical waveguide, waveguide, and, method for manufacturing optical waveguide
JP4318036B2 (ja) * 2004-02-16 2009-08-19 オムロン株式会社 光導波路
JP4894995B2 (ja) * 2004-10-21 2012-03-14 Ｊｓｒ株式会社 光導波路用感光性樹脂組成物、光導波路及びその製造方法
US7400809B2 (en) 2004-12-10 2008-07-15 General Electric Company Optical waveguide devices and method of making the same
EP1851591A4 (en) * 2005-02-15 2010-09-01 Rpo Pty Ltd PHOTOLITHOGRAPHIC PATTERNING OF POLYMERIC MATERIALS
AU2007223454A1 (en) * 2006-03-06 2007-09-13 Hitachi Chemical Company, Ltd. Flexible optical waveguide, method for manufacturing such flexible optical waveguide, and optical module
WO2007128039A1 (en) * 2006-05-01 2007-11-15 Rpo Pty Limited Waveguide materials for optical touch screens
JP2009015214A (ja) * 2007-07-09 2009-01-22 Tokai Univ 自己形成光導波路の製造方法
JP5580511B2 (ja) * 2007-10-22 2014-08-27 パナソニック株式会社 光電複合基板の製造方法
EP2103974A1 (en) * 2008-03-21 2009-09-23 Nitto Denko Corporation Optical waveguide having grating and method of forming the same
JP2011039489A (ja) * 2009-07-17 2011-02-24 Nitto Denko Corp 光導波路装置の製造方法
JP2012073358A (ja) * 2010-09-28 2012-04-12 Nitto Denko Corp コネクタ用光導波路の製法
US8649645B2 (en) 2011-06-10 2014-02-11 Xyratex Technology Limited Optical waveguide and a method of fabricating an optical waveguide
CN103560133B (zh) * 2013-10-18 2015-09-09 绵阳芯联芯通信科技有限公司 基于硅基的光无源集成器件设计平台的制作方法
US11460609B2 (en) 2018-04-02 2022-10-04 Magic Leap, Inc. Hybrid polymer waveguide and methods for making the same
US11067749B2 (en) * 2019-11-21 2021-07-20 Globalfoundries U.S. Inc. Waveguides with cladding layers of gradated refractive index
CN114563842A (zh) * 2020-11-27 2022-05-31 深南电路股份有限公司 一种折射率渐变聚合物波导及其制作方法
WO2022110065A1 (zh) * 2020-11-27 2022-06-02 深南电路股份有限公司 一种折射率渐变聚合物波导及其制作方法
CN114895413B (zh) * 2022-03-28 2023-12-19 深圳技术大学 一种孔隙包层结构的波导及其制备方法
WO2024084681A1 (ja) * 2022-10-21 2024-04-25 株式会社アドバンテスト 光導波路、および、光導波路の製造方法
WO2024218493A1 (en) * 2023-04-18 2024-10-24 ORCA Computing Limited Photonic waveguide
WO2025183093A1 (ja) * 2024-02-28 2025-09-04 京セラ株式会社 光回路基板および実装構造体

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4609252A (en) 1979-04-02 1986-09-02 Hughes Aircraft Company Organic optical waveguide device and method of making
JPH01138509A (ja) 1987-11-26 1989-05-31 Asahi Chem Ind Co Ltd 高密度光導波路及びその製法
GB2222465A (en) * 1988-09-03 1990-03-07 Marconi Gec Ltd Optical waveguide having low light loss
FR2658307A1 (fr) * 1990-02-13 1991-08-16 Thomson Csf Guide d'onde optique integre et procede de realisation.
US5143577A (en) * 1991-02-08 1992-09-01 Hoechst Celanese Corporation Smooth-wall polymeric channel and rib waveguides exhibiting low optical loss
FR2684239B1 (fr) * 1991-11-27 1994-03-04 France Telecom Procede de fabrication d'un guide d'onde optique planaire entierement a base de polymeres, et son utilisation dans un isolateur optique integre.
TW262537B (enExample) 1993-07-01 1995-11-11 Allied Signal Inc
TW293090B (enExample) * 1995-02-17 1996-12-11 Allied Signal Inc
ATE196015T1 (de) 1995-06-28 2000-09-15 Jds Fitel Photonics C V Mindestens fünflagige optische vorrichtung
JP3738469B2 (ja) * 1995-07-27 2006-01-25 日立化成工業株式会社 ポリイミド及びこれを用いた光部品
US5896484A (en) * 1996-02-15 1999-04-20 Corning Incorporated Method of making a symmetrical optical waveguide
US5932397A (en) * 1996-05-28 1999-08-03 Rvm Scientific, Inc. Multicolor lithography for control of three dimensional refractive index gradient processing
JPH1039151A (ja) 1996-07-25 1998-02-13 Hitachi Cable Ltd 光導波路及びその製造方法
AU729612B2 (en) * 1996-11-19 2001-02-08 Alcatel Optical waveguide with Bragg grating
WO1998037445A1 (fr) * 1997-02-19 1998-08-27 Hitachi, Ltd. Guide d'ondes optique en polymere, circuit integre optique, module optique et appareil de communication optique
KR100219714B1 (ko) * 1997-02-26 1999-09-01 윤종용 저손실 광능동소자의 제작방법
US6335149B1 (en) 1997-04-08 2002-01-01 Corning Incorporated High performance acrylate materials for optical interconnects
US6157765A (en) * 1998-11-03 2000-12-05 Lucent Technologies Planar waveguide optical amplifier
US6306563B1 (en) * 1999-06-21 2001-10-23 Corning Inc. Optical devices made from radiation curable fluorinated compositions
JP2001066445A (ja) * 1999-08-26 2001-03-16 Oki Electric Ind Co Ltd 光導波路およびその形成方法
US6690871B2 (en) * 2000-07-10 2004-02-10 Massachusetts Institute Of Technology Graded index waveguide

Also Published As

Publication number Publication date
JP2004534262A (ja) 2004-11-11
KR20040015227A (ko) 2004-02-18
US6542684B2 (en) 2003-04-01
KR100832678B1 (ko) 2008-05-27
CN100406935C (zh) 2008-07-30
WO2002088795A1 (en) 2002-11-07
EP1393101A1 (en) 2004-03-03
EP1393101A4 (en) 2006-06-21
US20030026569A1 (en) 2003-02-06
CN1549937A (zh) 2004-11-24

Similar Documents

Publication Publication Date Title
JP4138494B2 (ja) 最適化された多層光導波システム
US6306563B1 (en) Optical devices made from radiation curable fluorinated compositions
US6800424B2 (en) Optical devices made from radiation curable fluorinated compositions
US7011932B2 (en) Polymer waveguide fabrication process
EP1393103B1 (en) Design of low insertion loss, single-mode polymeric waveguides
US6842544B2 (en) Method for apodizing a planar waveguide grating
US6824934B2 (en) One step laser fabrication of polymer wave-guided structures having varying width and height, and their application to pigtailing of optical fibers
HK1076825B (en) Optical devices made from radiation curable fluorinated compositions

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20050324

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20050324

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20080118

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20080417

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20080509

A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20080605

R150 Certificate of patent or registration of utility model

Free format text: JAPANESE INTERMEDIATE CODE: R150

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20110613

Year of fee payment: 3

LAPS Cancellation because of no payment of annual fees