CN100406935C - 优化的多层光波导系统 - Google Patents

优化的多层光波导系统 Download PDF

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Publication number
CN100406935C
CN100406935C CN028091973A CN02809197A CN100406935C CN 100406935 C CN100406935 C CN 100406935C CN 028091973 A CN028091973 A CN 028091973A CN 02809197 A CN02809197 A CN 02809197A CN 100406935 C CN100406935 C CN 100406935C
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CN
China
Prior art keywords
core
sandwich layer
refractive index
cushion
printing opacity
Prior art date
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Expired - Fee Related
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CN028091973A
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English (en)
Chinese (zh)
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CN1549937A (zh
Inventor
K·W·贝森
G·布多希安
L·埃尔达达
D·潘特
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EIDP Inc
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EI Du Pont de Nemours and Co
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Publication of CN1549937A publication Critical patent/CN1549937A/zh
Application granted granted Critical
Publication of CN100406935C publication Critical patent/CN100406935C/zh
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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/02Optical fibres with cladding with or without a coating
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122Basic optical elements, e.g. light-guiding paths
    • G02B6/1221Basic optical elements, e.g. light-guiding paths made from organic materials
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13Integrated optical circuits characterised by the manufacturing method
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12083Constructional arrangements
    • G02B2006/12107Grating
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12166Manufacturing methods
    • G02B2006/12176Etching

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Optical Integrated Circuits (AREA)
CN028091973A 2001-05-01 2002-04-04 优化的多层光波导系统 Expired - Fee Related CN100406935C (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/846,691 US6542684B2 (en) 2001-05-01 2001-05-01 Optimized multi-layer optical waveguiding system
US09/846,691 2001-05-01

Publications (2)

Publication Number Publication Date
CN1549937A CN1549937A (zh) 2004-11-24
CN100406935C true CN100406935C (zh) 2008-07-30

Family

ID=25298660

Family Applications (1)

Application Number Title Priority Date Filing Date
CN028091973A Expired - Fee Related CN100406935C (zh) 2001-05-01 2002-04-04 优化的多层光波导系统

Country Status (6)

Country Link
US (1) US6542684B2 (enExample)
EP (1) EP1393101A4 (enExample)
JP (1) JP4138494B2 (enExample)
KR (1) KR100832678B1 (enExample)
CN (1) CN100406935C (enExample)
WO (1) WO2002088795A1 (enExample)

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US7078445B2 (en) * 2001-02-01 2006-07-18 E. I. Du Pont De Nemours And Company Photosensitive acrylate composition and waveguide device
JP4066670B2 (ja) * 2002-02-19 2008-03-26 オムロン株式会社 光スイッチ
US6904219B1 (en) * 2002-07-26 2005-06-07 Boston Laser, Inc. Ultra high-power continuous wave planar waveguide amplifiers and lasers
KR20040021710A (ko) * 2002-08-29 2004-03-11 주식회사 코오롱 열적산화안정성이 우수한 플라스틱 광섬유 및 그의 제조방법
JP3890046B2 (ja) * 2002-10-07 2007-03-07 日本電信電話株式会社 平面回路型光学素子の製造方法
US7776236B2 (en) * 2003-07-25 2010-08-17 General Electric Company Index contrast enhanced optical waveguides and fabrication methods
JP2005157090A (ja) * 2003-11-27 2005-06-16 Mitsumi Electric Co Ltd 光導波路デバイス
TWI285664B (en) * 2003-12-25 2007-08-21 Kansai Paint Co Ltd Curable resin composition for optical waveguide, curable dry film for optical waveguide, waveguide, and, method for manufacturing optical waveguide
JP4318036B2 (ja) * 2004-02-16 2009-08-19 オムロン株式会社 光導波路
JP4894995B2 (ja) * 2004-10-21 2012-03-14 Jsr株式会社 光導波路用感光性樹脂組成物、光導波路及びその製造方法
US7400809B2 (en) 2004-12-10 2008-07-15 General Electric Company Optical waveguide devices and method of making the same
EP1851591A4 (en) * 2005-02-15 2010-09-01 Rpo Pty Ltd PHOTOLITHOGRAPHIC PATTERNING OF POLYMERIC MATERIALS
AU2007223454A1 (en) * 2006-03-06 2007-09-13 Hitachi Chemical Company, Ltd. Flexible optical waveguide, method for manufacturing such flexible optical waveguide, and optical module
WO2007128039A1 (en) * 2006-05-01 2007-11-15 Rpo Pty Limited Waveguide materials for optical touch screens
JP2009015214A (ja) * 2007-07-09 2009-01-22 Tokai Univ 自己形成光導波路の製造方法
JP5580511B2 (ja) * 2007-10-22 2014-08-27 パナソニック株式会社 光電複合基板の製造方法
EP2103974A1 (en) * 2008-03-21 2009-09-23 Nitto Denko Corporation Optical waveguide having grating and method of forming the same
JP2011039489A (ja) * 2009-07-17 2011-02-24 Nitto Denko Corp 光導波路装置の製造方法
JP2012073358A (ja) * 2010-09-28 2012-04-12 Nitto Denko Corp コネクタ用光導波路の製法
US8649645B2 (en) 2011-06-10 2014-02-11 Xyratex Technology Limited Optical waveguide and a method of fabricating an optical waveguide
CN103560133B (zh) * 2013-10-18 2015-09-09 绵阳芯联芯通信科技有限公司 基于硅基的光无源集成器件设计平台的制作方法
US11460609B2 (en) 2018-04-02 2022-10-04 Magic Leap, Inc. Hybrid polymer waveguide and methods for making the same
US11067749B2 (en) * 2019-11-21 2021-07-20 Globalfoundries U.S. Inc. Waveguides with cladding layers of gradated refractive index
CN114563842A (zh) * 2020-11-27 2022-05-31 深南电路股份有限公司 一种折射率渐变聚合物波导及其制作方法
WO2022110065A1 (zh) * 2020-11-27 2022-06-02 深南电路股份有限公司 一种折射率渐变聚合物波导及其制作方法
CN114895413B (zh) * 2022-03-28 2023-12-19 深圳技术大学 一种孔隙包层结构的波导及其制备方法
WO2024084681A1 (ja) * 2022-10-21 2024-04-25 株式会社アドバンテスト 光導波路、および、光導波路の製造方法
WO2024218493A1 (en) * 2023-04-18 2024-10-24 ORCA Computing Limited Photonic waveguide
WO2025183093A1 (ja) * 2024-02-28 2025-09-04 京セラ株式会社 光回路基板および実装構造体

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5291574A (en) * 1991-11-27 1994-03-01 France Telecom Method for manufacturing strip optical waveguides
US5837804A (en) * 1995-07-27 1998-11-17 Hitachi Chemical Company, Ltd. Polyimides and optical parts obtained by using the same
US5896484A (en) * 1996-02-15 1999-04-20 Corning Incorporated Method of making a symmetrical optical waveguide
US5940568A (en) * 1996-11-19 1999-08-17 Alcatel Alsthom Compagnie Generale D'electricite Planar optical waveguide, planar optical waveguide with Bragg grating, and method of fabricating such a planar optical waveguide
EP0961139A1 (en) * 1997-02-19 1999-12-01 Hitachi, Ltd. Polymer optical waveguide, optical integrated circuit, optical module and optical communication apparatus
US6210867B1 (en) * 1997-02-26 2001-04-03 Samsung Electronics Co., Ltd. Method for fabricating low-loss optically active device

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US4609252A (en) 1979-04-02 1986-09-02 Hughes Aircraft Company Organic optical waveguide device and method of making
JPH01138509A (ja) 1987-11-26 1989-05-31 Asahi Chem Ind Co Ltd 高密度光導波路及びその製法
GB2222465A (en) * 1988-09-03 1990-03-07 Marconi Gec Ltd Optical waveguide having low light loss
FR2658307A1 (fr) * 1990-02-13 1991-08-16 Thomson Csf Guide d'onde optique integre et procede de realisation.
US5143577A (en) * 1991-02-08 1992-09-01 Hoechst Celanese Corporation Smooth-wall polymeric channel and rib waveguides exhibiting low optical loss
TW262537B (enExample) 1993-07-01 1995-11-11 Allied Signal Inc
TW293090B (enExample) * 1995-02-17 1996-12-11 Allied Signal Inc
ATE196015T1 (de) 1995-06-28 2000-09-15 Jds Fitel Photonics C V Mindestens fünflagige optische vorrichtung
US5932397A (en) * 1996-05-28 1999-08-03 Rvm Scientific, Inc. Multicolor lithography for control of three dimensional refractive index gradient processing
JPH1039151A (ja) 1996-07-25 1998-02-13 Hitachi Cable Ltd 光導波路及びその製造方法
US6335149B1 (en) 1997-04-08 2002-01-01 Corning Incorporated High performance acrylate materials for optical interconnects
US6157765A (en) * 1998-11-03 2000-12-05 Lucent Technologies Planar waveguide optical amplifier
US6306563B1 (en) * 1999-06-21 2001-10-23 Corning Inc. Optical devices made from radiation curable fluorinated compositions
JP2001066445A (ja) * 1999-08-26 2001-03-16 Oki Electric Ind Co Ltd 光導波路およびその形成方法
US6690871B2 (en) * 2000-07-10 2004-02-10 Massachusetts Institute Of Technology Graded index waveguide

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5291574A (en) * 1991-11-27 1994-03-01 France Telecom Method for manufacturing strip optical waveguides
US5837804A (en) * 1995-07-27 1998-11-17 Hitachi Chemical Company, Ltd. Polyimides and optical parts obtained by using the same
US5896484A (en) * 1996-02-15 1999-04-20 Corning Incorporated Method of making a symmetrical optical waveguide
US5940568A (en) * 1996-11-19 1999-08-17 Alcatel Alsthom Compagnie Generale D'electricite Planar optical waveguide, planar optical waveguide with Bragg grating, and method of fabricating such a planar optical waveguide
EP0961139A1 (en) * 1997-02-19 1999-12-01 Hitachi, Ltd. Polymer optical waveguide, optical integrated circuit, optical module and optical communication apparatus
US6210867B1 (en) * 1997-02-26 2001-04-03 Samsung Electronics Co., Ltd. Method for fabricating low-loss optically active device

Also Published As

Publication number Publication date
JP2004534262A (ja) 2004-11-11
JP4138494B2 (ja) 2008-08-27
KR20040015227A (ko) 2004-02-18
US6542684B2 (en) 2003-04-01
KR100832678B1 (ko) 2008-05-27
WO2002088795A1 (en) 2002-11-07
EP1393101A1 (en) 2004-03-03
EP1393101A4 (en) 2006-06-21
US20030026569A1 (en) 2003-02-06
CN1549937A (zh) 2004-11-24

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Granted publication date: 20080730

Termination date: 20110404