JP4103045B2 - Organic EL display panel and manufacturing method thereof - Google Patents

Organic EL display panel and manufacturing method thereof Download PDF

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JP4103045B2
JP4103045B2 JP2003312789A JP2003312789A JP4103045B2 JP 4103045 B2 JP4103045 B2 JP 4103045B2 JP 2003312789 A JP2003312789 A JP 2003312789A JP 2003312789 A JP2003312789 A JP 2003312789A JP 4103045 B2 JP4103045 B2 JP 4103045B2
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チャンナム キム
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エルジー エレクトロニクス インコーポレーテッド
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    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05BELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B33/00Electroluminescent light sources
    • H05B33/12Light sources with substantially two-dimensional radiating surfaces
    • H05B33/26Light sources with substantially two-dimensional radiating surfaces characterised by the composition or arrangement of the conductive material used as an electrode
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05BELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B33/00Electroluminescent light sources
    • H05B33/02Details
    • H05B33/06Electrode terminals
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05BELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B33/00Electroluminescent light sources
    • H05B33/10Apparatus or processes specially adapted to the manufacture of electroluminescent light sources
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05BELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B33/00Electroluminescent light sources
    • H05B33/12Light sources with substantially two-dimensional radiating surfaces
    • H05B33/14Light sources with substantially two-dimensional radiating surfaces characterised by the chemical or physical composition or the arrangement of the electroluminescent material, or by the simultaneous addition of the electroluminescent material in or onto the light source
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00Organic light-emitting devices
    • H10K50/80Constructional details
    • H10K50/805Electrodes
    • H10K50/81Anodes
    • HELECTRICITY
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    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00Organic light-emitting devices
    • H10K50/80Constructional details
    • H10K50/805Electrodes
    • H10K50/81Anodes
    • H10K50/814Anodes combined with auxiliary electrodes, e.g. ITO layer combined with metal lines
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    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00Organic light-emitting devices
    • H10K50/80Constructional details
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    • H10K50/82Cathodes
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10OLED displays
    • H10K59/17Passive-matrix OLED displays
    • H10K59/179Interconnections, e.g. wiring lines or terminals
    • H10K59/1795Interconnections, e.g. wiring lines or terminals comprising structures specially adapted for lowering the resistance
    • HELECTRICITY
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    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/80Constructional details
    • H10K59/805Electrodes
    • H10K59/8051Anodes
    • H10K59/80516Anodes combined with auxiliary electrodes, e.g. ITO layer combined with metal lines
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/80Constructional details
    • H10K59/805Electrodes
    • H10K59/8052Cathodes
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10OLED displays
    • H10K59/17Passive-matrix OLED displays
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/30Devices specially adapted for multicolour light emission
    • H10K59/35Devices specially adapted for multicolour light emission comprising red-green-blue [RGB] subpixels

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  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
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  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)

Description

本発明はディスプレイパネルに関し、特に有機ELディスプレイパネル及びその製造方法に関する。   The present invention relates to a display panel, and more particularly to an organic EL display panel and a manufacturing method thereof.

近年、表示装置の大型化に伴い、占有空間の小さい平板ディスプレイパネルへの要求が増大しているが、このような平板ディスプレイパネルの一つとして、有機ELディスプレイパネルが注目されている。有機ELディスプレイパネルは、非常に薄く、マトリックス形式でアドレッシングでき、15V以下の低電圧で駆動可能であるという長所を有する。   In recent years, with an increase in the size of a display device, demand for a flat display panel with a small occupied space has increased. As one of such flat display panels, an organic EL display panel has attracted attention. The organic EL display panel is very thin, can be addressed in a matrix form, and can be driven at a low voltage of 15 V or less.

このような有機ELディスプレイパネルの製造において、フルカラーを実現するには様々な方法があるが、その中で最も発光効率が優れているのはシャドーマスクを用いる方法である。   In manufacturing such an organic EL display panel, there are various methods for realizing a full color. Among them, the method using a shadow mask has the highest luminous efficiency.

図4は、一般的な有機ELディスプレイパネルの製造工程を示す断面図であり、図5は、図4に示す製造工程で使用されるシャドーマスクを示す平面図である。図4及び図5に示すように、透明基板1上に透明な第1電極2を形成し、その上に隔壁(図示せず)を形成した後、図5に示すシャドーマスク4を用いて赤色有機発光層3−1、緑色有機発光層3−2、青色有機発光層3−3を順次形成する。   FIG. 4 is a cross-sectional view showing a manufacturing process of a general organic EL display panel, and FIG. 5 is a plan view showing a shadow mask used in the manufacturing process shown in FIG. As shown in FIGS. 4 and 5, a transparent first electrode 2 is formed on a transparent substrate 1, a partition wall (not shown) is formed thereon, and then red using a shadow mask 4 shown in FIG. An organic light emitting layer 3-1, a green organic light emitting layer 3-2, and a blue organic light emitting layer 3-3 are sequentially formed.

次いで、全面に第2電極材料を蒸着して発光領域に第2電極を形成することにより、フルカラー有機ELディスプレイパネルを製造する。ここで、第1電極は陽極であり、第2電極は陰極である。   Next, a second electrode material is deposited on the entire surface to form a second electrode in the light emitting region, thereby manufacturing a full color organic EL display panel. Here, the first electrode is an anode and the second electrode is a cathode.

しかし、このような方法で製作された有機ELディスプレイパネルは、第2電極(陰極)ラインの抵抗により電力が浪費されて効率が低下する。   However, in the organic EL display panel manufactured by such a method, power is wasted due to the resistance of the second electrode (cathode) line, and the efficiency is lowered.

このような効率の低下を克服するためには、第2電極ラインを一定の厚さ以上に形成しなければならないが、上記の方法では一定の厚さ以上の第2電極ラインを形成し難い。   In order to overcome such a decrease in efficiency, the second electrode line must be formed with a certain thickness or more, but it is difficult to form the second electrode line with a certain thickness or more by the above method.

本発明の目的は、電極ラインの抵抗を低減して効率を向上させた有機ELディスプレイパネル及びその製造方法を提供することにある。   An object of the present invention is to provide an organic EL display panel in which the resistance of an electrode line is reduced and the efficiency is improved, and a manufacturing method thereof.

上記目的を達成するため、本発明に係る有機ELディスプレイパネルは、複数の第1電極と複数の第2電極とが交差する各位置に発光領域を有する有機ELディスプレイパネルであって、複数の発光領域を有する基板と、前記基板の前記発光領域以外の領域に形成された絶縁層と、前記基板の前記発光領域上の第1電極と、前記第1電極上の有機発光層と、前記有機発光層上の第2電極と、隣接する前記第2電極の間に形成されて前記第2電極同士を電気的に絶縁する電気絶縁隔壁と、前記電気絶縁隔壁の間であって、かつ、前記発光領域の周辺に形成されて前記第2電極の1つに電気的に接続された補助電極とを含み、前記電気絶縁隔壁は、前記補助電極の間の前記絶縁層上に形成されることを特徴とする。 In order to achieve the above object, an organic EL display panel according to the present invention is an organic EL display panel having a light emitting region at each position where a plurality of first electrodes and a plurality of second electrodes intersect, A substrate having a region; an insulating layer formed in a region other than the light emitting region of the substrate; a first electrode on the light emitting region of the substrate; an organic light emitting layer on the first electrode; A second electrode on the layer; an electrically insulating partition formed between the adjacent second electrodes to electrically insulate the second electrodes; and between the electrically insulating partition and the light emission look including an auxiliary electrode that is electrically connected to one of said second electrode is formed in the peripheral region, the electrically insulating barrier wall is to be formed on the insulating layer between the auxiliary electrode Features.

また、上記有機ELディスプレイパネルにおいて、第2電極と補助電極とは、発光領域の縁の周辺で電気的に接続されることを特徴とする。   In the organic EL display panel, the second electrode and the auxiliary electrode are electrically connected around the edge of the light emitting region.

また、上記有機ELディスプレイパネルにおいて、補助電極は、Cr、Al、Au、W、Cu、Ni、Agから選択された材料により、絶縁層の上に形成されることを特徴とする。   In the organic EL display panel, the auxiliary electrode is formed on the insulating layer with a material selected from Cr, Al, Au, W, Cu, Ni, and Ag.

本発明の別の態様では、本発明に係る有機ディスプレイパネルは、複数の第1電極と複数の第2電極とが交差する各位置に発光領域を有する有機ELディスプレイパネルであって、複数の発光領域を有する基板と、前記基板の前記発光領域以外の領域に形成された絶縁層と、前記基板の発光領域上の第1電極と、前記第1電極の一側面に電気的に接続された第1補助電極と、前記第1電極上の有機発光層と、前記有機発光層上の第2電極と、隣接する前記第2電極の間に形成されて前記第2電極同士を電気的に絶縁する電気絶縁隔壁と、前記電気絶縁隔壁の間であって、かつ、前記発光領域の周辺に形成されて前記第2電極の1つに電気的に接続された第2補助電極と、を含み、前記電気絶縁隔壁は、前記第2補助電極の間の前記絶縁層上に形成されることを特徴とする。 In another aspect of the present invention, an organic display panel according to the present invention is an organic EL display panel having a light emitting region at each position where a plurality of first electrodes and a plurality of second electrodes intersect, A substrate having a region; an insulating layer formed in a region other than the light emitting region of the substrate; a first electrode on the light emitting region of the substrate; and a first electrode electrically connected to one side surface of the first electrode. 1 auxiliary electrode, an organic light emitting layer on the first electrode, a second electrode on the organic light emitting layer, and the second electrode adjacent to each other to electrically insulate the second electrodes from each other. an electrically insulating partition wall, be between the electrically insulating partition wall, and, seen including a second auxiliary electrode that is electrically connected to one of said second electrode is formed on the periphery of the light emitting region, The electrically insulating partition is formed on the insulating layer between the second auxiliary electrodes. Characterized in that it is made.

本発明のさらに別の態様では、複数の第1電極と複数の第2電極とが交差する各位置に発光領域を有する有機ELディスプレイパネルの本発明に係る製造方法は、透明基板上に所定の間隔を有する複数の第1電極を形成する工程と、発光領域以外の領域に絶縁層を形成する工程と、絶縁層上に第2補助電極を形成する工程と、前記絶縁層上の隣接する発光領域の間に第1電極に直交する方向に電気絶縁隔壁を形成する工程と、シャドーマスクを用いて各発光領域に有機発光層を形成する工程と、有機発光層を含む全面に電極材料を蒸着して第2補助電極に電気的に接続された複数の第2電極を形成する工程と、第2電極を含む全面に保護膜を形成する工程とを含むことを特徴とする。
In still another aspect of the present invention, a manufacturing method according to the present invention of an organic EL display panel having a light emitting region at each position where a plurality of first electrodes and a plurality of second electrodes intersect each other is provided on a transparent substrate. Forming a plurality of spaced apart first electrodes, forming an insulating layer in a region other than the light emitting region, forming a second auxiliary electrode on the insulating layer, and adjacent light emission on the insulating layer Forming an electrically insulating partition between the regions in a direction perpendicular to the first electrode, forming an organic light emitting layer in each light emitting region using a shadow mask, and depositing an electrode material on the entire surface including the organic light emitting layer And a step of forming a plurality of second electrodes electrically connected to the second auxiliary electrode, and a step of forming a protective film on the entire surface including the second electrode.

また、上記有機ELディスプレイパネルの製造方法において、第1電極を形成する工程は、さらに、第1電極の側面に電気的に接続された第1補助電極を形成するステップを含むことを特徴とする。   In the method for manufacturing an organic EL display panel, the step of forming the first electrode further includes a step of forming a first auxiliary electrode electrically connected to a side surface of the first electrode. .

また、上記有機ELディスプレイパネルの製造方法において、第2補助電極は、発光領域の縁の周辺に突出部を有して形成され、それによって第2電極に電気的に接続されることを特徴とする。   In the method for manufacturing an organic EL display panel, the second auxiliary electrode is formed with a protrusion around the edge of the light emitting region, and is thereby electrically connected to the second electrode. To do.

本発明の他の目的、特徴及び利点は、添付の図面を参照した実施形態の詳細な説明を通じて明白になるであろう。   Other objects, features and advantages of the present invention will become apparent through the detailed description of the embodiments with reference to the accompanying drawings.

このように、本発明によれば、第2補助電極を形成して第2電極(陰極)の抵抗を低減することができるため、有機ELディスプレイパネルの効率が向上する。また、有機ELディスプレイパネルの駆動電力を低減することができるため、電力の浪費が低減する。   Thus, according to the present invention, since the second auxiliary electrode can be formed to reduce the resistance of the second electrode (cathode), the efficiency of the organic EL display panel is improved. Moreover, since the drive power of the organic EL display panel can be reduced, the waste of power is reduced.

以下、本発明の好ましい一実施形態における構成及び作用を添付の図面を参照しながら説明する。図1A〜図1Gは、本実施形態における有機ELディスプレイパネルの製造工程を示す斜視図であり、図2A〜図2Gは、本実施形態における有機ELディスプレイパネルの製造工程を示す平面図である。   Hereinafter, the configuration and operation of a preferred embodiment of the present invention will be described with reference to the accompanying drawings. 1A to 1G are perspective views showing the manufacturing process of the organic EL display panel in the present embodiment, and FIGS. 2A to 2G are plan views showing the manufacturing process of the organic EL display panel in the present embodiment.

まず、図1A及び図2Aに示すように、透明基板10上に透明材料からなる第1電極11及び第2電極のパッド11−2を形成する。   First, as shown in FIGS. 1A and 2A, a first electrode 11 and a second electrode pad 11-2 made of a transparent material are formed on a transparent substrate 10.

次いで、図1B及び図2Bに示すように、第1電極11の抵抗を低減するために、第1電極11の縁に一部が重なるように第1補助電極11−1を形成する。ここで、第1補助電極11−1の材料としては、第1電極11の材料であるITOよりも抵抗の小さい金属を使用すれば良く、例えば、Cr、Al、Cu、W、Au、Ni、Agなどがある。   Next, as shown in FIGS. 1B and 2B, the first auxiliary electrode 11-1 is formed so as to partially overlap the edge of the first electrode 11 in order to reduce the resistance of the first electrode 11. Here, as the material of the first auxiliary electrode 11-1, a metal having a resistance smaller than that of ITO, which is the material of the first electrode 11, may be used. For example, Cr, Al, Cu, W, Au, Ni, There are Ag and the like.

そして、図1C及び図2Cに示すように、発光領域以外の領域に絶縁層12を形成する。ここで、絶縁層12の材料は、無機物、有機物を問わず、絶縁体であれば良い。   Then, as shown in FIGS. 1C and 2C, the insulating layer 12 is formed in a region other than the light emitting region. Here, the material of the insulating layer 12 may be an insulator regardless of whether it is inorganic or organic.

次に、図1D及び図2Dに示すように、絶縁層12上に第2補助電極13を形成する。ここで、第2補助電極13は発光領域の縁の周辺に突出部13−1を有し、それによって第2電極に電気的に接続される。第2電極に接続される第2補助電極13の材料としては、例えば、Cr、Al、Cu、W、Au、Ni、Agのような、第2電極よりも抵抗の小さい金属を使用すれば良い。   Next, as shown in FIGS. 1D and 2D, the second auxiliary electrode 13 is formed on the insulating layer 12. Here, the second auxiliary electrode 13 has a protrusion 13-1 around the edge of the light emitting region, and is thereby electrically connected to the second electrode. As a material of the second auxiliary electrode 13 connected to the second electrode, for example, a metal having a resistance smaller than that of the second electrode, such as Cr, Al, Cu, W, Au, Ni, or Ag may be used. .

次いで、図1E及び図2Eに示すように、隣接する発光領域の間に第1電極11に直交する方向にバッファ層(図示せず)を形成し、各バッファ層の上に電気絶縁隔壁14を形成する。   Next, as shown in FIGS. 1E and 2E, a buffer layer (not shown) is formed between adjacent light emitting regions in a direction perpendicular to the first electrode 11, and an electrically insulating partition 14 is formed on each buffer layer. Form.

そして、図1F及び図2Fに示すように、複数のビアホール15−1を有するシャドーマスク15を用いて各発光領域に有機発光層16を形成する。ここで、シャドーマスク15のビアホール15−1の形状は、発光領域の形状に一致するものである。   Then, as shown in FIGS. 1F and 2F, an organic light emitting layer 16 is formed in each light emitting region using a shadow mask 15 having a plurality of via holes 15-1. Here, the shape of the via hole 15-1 of the shadow mask 15 matches the shape of the light emitting region.

以後、図1G及び図2Gに示すように、有機発光層16を含む全面に電極材料を蒸着して、第2補助電極13に電気的に接続された複数の第2電極17を形成する。   Thereafter, as shown in FIGS. 1G and 2G, an electrode material is deposited on the entire surface including the organic light emitting layer 16 to form a plurality of second electrodes 17 electrically connected to the second auxiliary electrode 13.

そして、図示は省略するが、第2電極17を含む全面に保護膜を形成し、封入を実施して有機ELディスプレイパネルを完成する。ここで、第1電極は陽極であり、第2電極は陰極である。   And although illustration is abbreviate | omitted, a protective film is formed in the whole surface containing the 2nd electrode 17, implementation is implemented, and an organic electroluminescent display panel is completed. Here, the first electrode is an anode and the second electrode is a cathode.

図3(a)は、図2GのI−I' 線による断面図であり、図3(b)は、図2GのII−II' 線による断面図である。図3(a)及び図3(b)に示すように、本発明に係る有機ELディスプレイパネルは、複数の第1電極11と複数の第2電極17とが交差する各位置に発光領域を有する。そして、電気絶縁隔壁14は、隣接する発光領域の間に形成されたバッファ層18の上に形成され、第2電極17同士を電気的に絶縁する。また、第2補助電極13が各発光領域の周辺に形成され、第2電極17に電気的に接続される。第2電極17は、第2補助電極13の突出部13−1に電気的に接続される。   3A is a cross-sectional view taken along the line II ′ of FIG. 2G, and FIG. 3B is a cross-sectional view taken along the line II-II ′ of FIG. 2G. As shown in FIGS. 3A and 3B, the organic EL display panel according to the present invention has a light emitting region at each position where the plurality of first electrodes 11 and the plurality of second electrodes 17 intersect. . The electrically insulating partition 14 is formed on the buffer layer 18 formed between adjacent light emitting regions, and electrically insulates the second electrodes 17 from each other. The second auxiliary electrode 13 is formed around each light emitting region and is electrically connected to the second electrode 17. The second electrode 17 is electrically connected to the protruding portion 13-1 of the second auxiliary electrode 13.

以上説明した内容を通じて、当業者であれば本発明の技術的思想の範囲内で多様な変更及び修訂が可能である。従って、本発明の技術的範囲は、実施形態に記載された内容に限定されず、特許請求の範囲により決められるべきである。   Through the above description, those skilled in the art can make various changes and modifications within the scope of the technical idea of the present invention. Therefore, the technical scope of the present invention is not limited to the contents described in the embodiments, and should be determined by the claims.

本発明の好ましい一実施形態における、有機ELディスプレイパネルの製造方法の一工程を示す斜視図である。It is a perspective view which shows 1 process of the manufacturing method of the organic electroluminescent display panel in preferable one Embodiment of this invention. 本発明の好ましい一実施形態における、有機ELディスプレイパネルの製造方法の一工程を示す斜視図である。It is a perspective view which shows 1 process of the manufacturing method of the organic electroluminescent display panel in preferable one Embodiment of this invention. 本発明の好ましい一実施形態における、有機ELディスプレイパネルの製造方法の一工程を示す斜視図である。It is a perspective view which shows 1 process of the manufacturing method of the organic electroluminescent display panel in preferable one Embodiment of this invention. 本発明の好ましい一実施形態における、有機ELディスプレイパネルの製造方法の一工程を示す斜視図である。It is a perspective view which shows 1 process of the manufacturing method of the organic electroluminescent display panel in preferable one Embodiment of this invention. 本発明の好ましい一実施形態における、有機ELディスプレイパネルの製造方法の一工程を示す斜視図である。It is a perspective view which shows 1 process of the manufacturing method of the organic electroluminescent display panel in preferable one Embodiment of this invention. 本発明の好ましい一実施形態における、有機ELディスプレイパネルの製造方法の一工程を示す斜視図である。It is a perspective view which shows 1 process of the manufacturing method of the organic electroluminescent display panel in preferable one Embodiment of this invention. 本発明の好ましい一実施形態における、有機ELディスプレイパネルの製造方法の一工程を示す斜視図である。It is a perspective view which shows 1 process of the manufacturing method of the organic electroluminescent display panel in preferable one Embodiment of this invention. 本発明の好ましい一実施形態における、有機ELディスプレイパネルの製造方法の一工程を示す平面図である。It is a top view which shows 1 process of the manufacturing method of the organic electroluminescent display panel in preferable one Embodiment of this invention. 本発明の好ましい一実施形態における、有機ELディスプレイパネルの製造方法の一工程を示す平面図である。It is a top view which shows 1 process of the manufacturing method of the organic electroluminescent display panel in preferable one Embodiment of this invention. 本発明の好ましい一実施形態における、有機ELディスプレイパネルの製造方法の一工程を示す平面図である。It is a top view which shows 1 process of the manufacturing method of the organic electroluminescent display panel in preferable one Embodiment of this invention. 本発明の好ましい一実施形態における、有機ELディスプレイパネルの製造方法の一工程を示す平面図である。It is a top view which shows 1 process of the manufacturing method of the organic electroluminescent display panel in preferable one Embodiment of this invention. 本発明の好ましい一実施形態における、有機ELディスプレイパネルの製造方法の一工程を示す平面図である。It is a top view which shows 1 process of the manufacturing method of the organic electroluminescent display panel in preferable one Embodiment of this invention. 本発明の好ましい一実施形態における、有機ELディスプレイパネルの製造方法の一工程を示す平面図である。It is a top view which shows 1 process of the manufacturing method of the organic electroluminescent display panel in preferable one Embodiment of this invention. 本発明の好ましい一実施形態における、有機ELディスプレイパネルの製造方法の一工程を示す平面図である。It is a top view which shows 1 process of the manufacturing method of the organic electroluminescent display panel in preferable one Embodiment of this invention. (a)は図2GのI−I' 線による断面図であり、(b)は図2GのII−II' 線による断面図である。(A) is sectional drawing by the II 'line of FIG. 2G, (b) is sectional drawing by the II-II' line of FIG. 2G. 一般的な有機ELディスプレイパネルの製造工程を示す断面図である。It is sectional drawing which shows the manufacturing process of a general organic electroluminescent display panel. 図4に示す製造工程で使用されるシャドーマスクを示す平面図である。FIG. 5 is a plan view showing a shadow mask used in the manufacturing process shown in FIG. 4.

符号の説明Explanation of symbols

10 透明基板
11 第1電極
11−1 第1補助電極
11−2 第2電極のパッド
12 絶縁層
13 第2補助電極
13−1 突出部
14 電気絶縁隔壁
15 シャドーマスク
15−1 ビアホール
16 有機発光層
17 第2電極
18 バッファ層

DESCRIPTION OF SYMBOLS 10 Transparent substrate 11 1st electrode 11-1 1st auxiliary electrode 11-2 Pad of 2nd electrode 12 Insulating layer 13 2nd auxiliary electrode 13-1 Protrusion part 14 Electrical insulation partition 15 Shadow mask 15-1 Via hole 16 Organic light emitting layer 17 Second electrode 18 Buffer layer

Claims (15)

複数の第1電極と複数の第2電極とが交差する各位置に発光領域を有する有機ELディスプレイパネルであって、
複数の発光領域を有する基板と、
前記基板の前記発光領域以外の領域に形成された絶縁層と、
前記基板の前記発光領域上の第1電極と、
前記第1電極上の有機発光層と、
前記有機発光層上の第2電極と、
隣接する前記第2電極の間に形成されて前記第2電極同士を電気的に絶縁する電気絶縁隔壁と、
前記電気絶縁隔壁の間であって、かつ、前記発光領域の周辺に形成されて前記第2電極の1つに電気的に接続された補助電極と、を含み、
前記電気絶縁隔壁は、前記補助電極の間の前記絶縁層上に形成されることを特徴とする有機ELディスプレイパネル。
An organic EL display panel having a light emitting region at each position where a plurality of first electrodes and a plurality of second electrodes intersect,
A substrate having a plurality of light emitting regions;
An insulating layer formed in a region other than the light emitting region of the substrate;
A first electrode on the light emitting region of the substrate;
An organic light emitting layer on the first electrode;
A second electrode on the organic light emitting layer;
An electrically insulating partition formed between adjacent second electrodes to electrically insulate the second electrodes ;
Be between the electrically insulating partition wall, and, seen including a and electrically connected to the auxiliary electrodes to one of said second electrode is formed on the periphery of the light emitting region,
The organic EL display panel according to claim 1, wherein the electrically insulating partition is formed on the insulating layer between the auxiliary electrodes .
前記第2電極と前記補助電極とは、前記発光領域の縁の周辺で電気的に接続されることを特徴とする請求項1記載の有機ELディスプレイパネル。   The organic EL display panel according to claim 1, wherein the second electrode and the auxiliary electrode are electrically connected around an edge of the light emitting region. 前記補助電極は、前記第2電極の抵抗を低減することを特徴とする請求項1記載の有機ELディスプレイパネル。   The organic EL display panel according to claim 1, wherein the auxiliary electrode reduces a resistance of the second electrode. 前記補助電極は、Cr、Al、Au、W、Cu、Ni、Agから選択された材料により形成されることを特徴とする請求項1記載の有機ELディスプレイパネル。   2. The organic EL display panel according to claim 1, wherein the auxiliary electrode is made of a material selected from Cr, Al, Au, W, Cu, Ni, and Ag. 前記補助電極は、前記絶縁層の上に形成されることを特徴とする請求項1記載の有機ELディスプレイパネル。 The auxiliary electrode, an organic EL display panel according to claim 1, characterized in that it is formed on the insulating layer. 複数の第1電極と複数の第2電極とが交差する各位置に発光領域を有する有機ELディスプレイパネルであって、
複数の発光領域を有する基板と、
前記基板の前記発光領域以外の領域に形成された絶縁層と、
前記基板の発光領域上の第1電極と、
前記第1電極の一側面に電気的に接続された第1補助電極と、
前記第1電極上の有機発光層と、
前記有機発光層上の第2電極と、
隣接する前記第2電極の間に形成されて前記第2電極同士を電気的に絶縁する電気絶縁隔壁と、
前記電気絶縁隔壁の間であって、かつ、前記発光領域の周辺に形成されて前記第2電極の1つに電気的に接続された第2補助電極と、を含み、
前記電気絶縁隔壁は、前記第2補助電極の間の前記絶縁層上に形成されることを特徴とする有機ELディスプレイパネル。
An organic EL display panel having a light emitting region at each position where a plurality of first electrodes and a plurality of second electrodes intersect,
A substrate having a plurality of light emitting regions;
An insulating layer formed in a region other than the light emitting region of the substrate;
A first electrode on the light emitting region of the substrate;
A first auxiliary electrode electrically connected to one side of the first electrode;
An organic light emitting layer on the first electrode;
A second electrode on the organic light emitting layer;
An electrically insulating partition formed between adjacent second electrodes to electrically insulate the second electrodes ;
Be between the electrically insulating partition wall, and, seen including a second auxiliary electrode electrically connected near to being formed in one of the second electrode of the light emitting region,
The organic EL display panel according to claim 1, wherein the electrically insulating partition is formed on the insulating layer between the second auxiliary electrodes .
前記第2電極と前記第2補助電極とは、前記発光領域の縁の周辺で電気的に接続されることを特徴とする請求項6記載の有機ELディスプレイパネル。   The organic EL display panel according to claim 6, wherein the second electrode and the second auxiliary electrode are electrically connected around an edge of the light emitting region. 前記第1、第2補助電極は、前記第1、第2電極の抵抗を低減することを特徴とする請求項6記載の有機ELディスプレイパネル。   The organic EL display panel according to claim 6, wherein the first and second auxiliary electrodes reduce the resistance of the first and second electrodes. 前記第1、第2補助電極は、Cr、Al、Au、W、Cu、Ni、Agから選択された材料により形成されることを特徴とする請求項6記載の有機ELディスプレイパネル。   The organic EL display panel according to claim 6, wherein the first and second auxiliary electrodes are made of a material selected from Cr, Al, Au, W, Cu, Ni, and Ag. 前記第2補助電極は、前記絶縁層の上に形成されることを特徴とする請求項6記載の有機ELディスプレイパネル。 The second auxiliary electrode, an organic EL display panel according to claim 6, characterized in that it is formed on the insulating layer. 複数の第1電極と複数の第2電極とが交差する各位置に発光領域を有する有機ELディスプレイパネルの製造方法であって、
透明基板上に所定の間隔を有する複数の第1電極を形成する工程と、
前記発光領域以外の領域に絶縁層を形成する工程と、
前記絶縁層上に第2補助電極を形成する工程と、
前記絶縁層上の隣接する前記発光領域の間に前記第1電極に直交する方向に電気絶縁隔壁を形成する工程と、
シャドーマスクを用いて、それぞれの前記発光領域に有機発光層を形成する工程と、
前記有機発光層を含む全面に電極材料を蒸着して、前記第2補助電極に電気的に接続された複数の第2電極を形成する工程と、
前記第2電極を含む全面に保護膜を形成する工程と、
を含むことを特徴とする有機ELディスプレイパネルの製造方法。
A method of manufacturing an organic EL display panel having a light emitting region at each position where a plurality of first electrodes and a plurality of second electrodes intersect,
Forming a plurality of first electrodes having a predetermined interval on a transparent substrate;
Forming an insulating layer in a region other than the light emitting region;
Forming a second auxiliary electrode on the insulating layer;
Forming an electrically insulating partition between the adjacent light emitting regions on the insulating layer in a direction perpendicular to the first electrode;
Forming an organic light emitting layer in each of the light emitting regions using a shadow mask;
Depositing an electrode material on the entire surface including the organic light emitting layer to form a plurality of second electrodes electrically connected to the second auxiliary electrode;
Forming a protective film on the entire surface including the second electrode;
A method for producing an organic EL display panel, comprising:
前記複数の第1電極を形成する工程は、さらに、前記第1電極の側面に電気的に接続された第1補助電極を形成するステップを含むことを特徴とする請求項11記載の有機ELディスプレイパネルの製造方法。   12. The organic EL display according to claim 11, wherein the step of forming the plurality of first electrodes further includes a step of forming a first auxiliary electrode electrically connected to a side surface of the first electrode. Panel manufacturing method. 前記第2補助電極は、前記発光領域の縁の周辺に突出部を有して形成され、それによって前記第2電極に電気的に接続されることを特徴とする請求項11記載の有機ELディスプレイパネルの製造方法。   12. The organic EL display according to claim 11, wherein the second auxiliary electrode is formed with a protrusion around the edge of the light emitting region, and is thereby electrically connected to the second electrode. Panel manufacturing method. 前記第1、第2補助電極は、Cr、Al、Au、W、Cu、Ni、Agから選択された材料により形成されることを特徴とする請求項11記載の有機ELディスプレイパネルの製造方法。   12. The method of manufacturing an organic EL display panel according to claim 11, wherein the first and second auxiliary electrodes are formed of a material selected from Cr, Al, Au, W, Cu, Ni, and Ag. 前記電気絶縁隔壁を形成する工程は、
隣接する前記発光領域の間に前記第1電極に直交する方向にバッファ層を形成するステップと、
前記バッファ層上に電気絶縁隔壁を形成するステップと、
を含むことを特徴とする請求項11記載の有機ELディスプレイパネルの製造方法。
The step of forming the electrically insulating partition includes:
Forming a buffer layer in a direction perpendicular to the first electrode between adjacent light emitting regions;
Forming an electrically insulating partition on the buffer layer;
The method for producing an organic EL display panel according to claim 11, comprising:
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Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050259709A1 (en) 2002-05-07 2005-11-24 Cymer, Inc. Systems and methods for implementing an interaction between a laser shaped as a line beam and a film deposited on a substrate
JP2005019211A (en) 2003-06-26 2005-01-20 Casio Comput Co Ltd El display panel and its manufacturing method
TWI232707B (en) * 2004-03-31 2005-05-11 Fujitsu Ltd Display
US7999458B2 (en) * 2004-08-26 2011-08-16 Lg Display Co., Ltd. Organic electro luminescence device and fabrication method thereof
KR101032950B1 (en) 2004-11-25 2011-05-09 삼성전자주식회사 Method for manufacturing organic electroluminescence device
MX2007007939A (en) * 2004-12-27 2007-11-07 Quantum Paper Inc Addressable and printable emissive display.
JP4984433B2 (en) * 2005-05-16 2012-07-25 大日本印刷株式会社 Method for forming light emitting layer and method for producing organic light emitting device using the same
KR101245217B1 (en) * 2006-06-12 2013-03-19 엘지디스플레이 주식회사 Light emitting device and fabrication method of the same
JP2008084541A (en) 2006-09-25 2008-04-10 Fujifilm Corp Organic el display device and manufacturing method therefor
US8179036B2 (en) * 2007-01-22 2012-05-15 Koninklijke Philips Electronics N.V. Light emitting device with a shunt
RU2457584C2 (en) * 2007-04-27 2012-07-27 Конинклейке Филипс Электроникс Н.В. Organic light-emitting device having anodised metal coating
US7834543B2 (en) * 2007-07-03 2010-11-16 Canon Kabushiki Kaisha Organic EL display apparatus and method of manufacturing the same
US20090098680A1 (en) * 2007-10-15 2009-04-16 E.I. Du Pont De Nemours And Company Backplane structures for solution processed electronic devices
EP2225776A4 (en) 2007-12-14 2013-01-16 Du Pont Backplane structures for electronic devices
EP2352360B1 (en) * 2008-10-06 2021-09-15 AGC Inc. Substrate for electronic device, electronic device using same and method for producing same
WO2012014759A1 (en) * 2010-07-26 2012-02-02 Semiconductor Energy Laboratory Co., Ltd. Light-emitting device, lighting device, and manufacturing method of light-emitting device
US8963137B2 (en) * 2011-09-02 2015-02-24 Lg Display Co., Ltd. Organic light-emitting display device and method of fabricating the same
US20130056784A1 (en) * 2011-09-02 2013-03-07 Lg Display Co., Ltd. Organic Light-Emitting Display Device and Method of Fabricating the Same
JP2013008704A (en) * 2012-10-11 2013-01-10 Sony Corp Display device, method for manufacturing display device, and electronic apparatus
CN103702467B (en) * 2013-12-13 2018-07-24 固安翌光科技有限公司 A kind of OLED illumination source
US9478591B2 (en) * 2013-12-23 2016-10-25 Lg Display Co., Ltd. Organic light emitting display device and repair method thereof
CN103700690B (en) * 2013-12-24 2018-11-13 北京维信诺科技有限公司 A kind of oled panel and preparation method thereof
KR102290785B1 (en) * 2014-11-18 2021-08-19 삼성디스플레이 주식회사 Organic light emitting display device
CN111739422B (en) * 2020-06-29 2022-04-29 上海天马微电子有限公司 Display panel, manufacturing method thereof and display device

Family Cites Families (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4266223A (en) * 1978-12-08 1981-05-05 W. H. Brady Co. Thin panel display
US4720432A (en) * 1987-02-11 1988-01-19 Eastman Kodak Company Electroluminescent device with organic luminescent medium
JPH046795A (en) 1990-04-24 1992-01-10 Sharp Corp Organic el element
US5276380A (en) 1991-12-30 1994-01-04 Eastman Kodak Company Organic electroluminescent image display device
WO1994014298A1 (en) * 1992-12-14 1994-06-23 Westinghouse Electric Corporation Sunlight viewable thin film electroluminescent display having darkened metal electrodes
JP4142117B2 (en) * 1995-10-06 2008-08-27 パイオニア株式会社 Organic electroluminescence display panel and manufacturing method thereof
US6069443A (en) * 1997-06-23 2000-05-30 Fed Corporation Passive matrix OLED display
JP2000082588A (en) * 1997-09-22 2000-03-21 Fuji Electric Co Ltd Organic light emitting element and manufacture therefor
JP4006795B2 (en) 1997-11-11 2007-11-14 松下電器産業株式会社 Information processing apparatus having heat dissipation structure
JPH11273873A (en) * 1998-03-20 1999-10-08 Nec Kansai Ltd Electroluminescent lamp
JP3900675B2 (en) * 1998-04-23 2007-04-04 カシオ計算機株式会社 Electroluminescent device and manufacturing method thereof
JPH11339970A (en) 1998-05-26 1999-12-10 Tdk Corp Organic electroluminescent display device
KR100282393B1 (en) * 1998-06-17 2001-02-15 구자홍 method for fabricating Organic Electroluminescent display Device
US6624571B1 (en) * 1998-06-30 2003-09-23 Nippon Seiki Co., Ltd. Electroluminescent display
JP2000036391A (en) 1998-07-16 2000-02-02 Toray Ind Inc Organic electroluminescent element and manufacture thereof
KR100694959B1 (en) 1999-04-02 2007-03-14 이데미쓰 고산 가부시키가이샤 Organic electroluminescent display device and manufacturing method thereof
JP2000331783A (en) * 1999-05-21 2000-11-30 Tohoku Pioneer Corp Organic el display panel and manufacture thereof
JP2001185363A (en) 1999-12-28 2001-07-06 Sharp Corp Manufacturing method of organic electroluminescent element and display panel using that element
TWI249363B (en) 2000-02-25 2006-02-11 Seiko Epson Corp Organic electroluminescence device and manufacturing method therefor
US6838819B2 (en) * 2000-06-19 2005-01-04 Lg Electronics Inc. Full color organic EL display panel, manufacturing method thereof and driving circuit thereof
JP4423767B2 (en) 2000-08-22 2010-03-03 ソニー株式会社 Organic electroluminescent device and manufacturing method thereof
US6683410B2 (en) * 2000-09-20 2004-01-27 Samsung Sdi Co., Ltd. Organic EL device with light absorbing piece and method for manufacturing the same
US6626721B1 (en) 2000-09-22 2003-09-30 Eastman Kodak Company Organic electroluminescent device with supplemental cathode bus conductor
KR100370030B1 (en) * 2000-10-06 2003-01-30 엘지전자 주식회사 flat display device and method for the same
JP4620298B2 (en) * 2001-07-23 2011-01-26 パイオニア株式会社 Silver or silver alloy wiring, method for forming the same, and display panel substrate
JP3983037B2 (en) * 2001-11-22 2007-09-26 株式会社半導体エネルギー研究所 Light emitting device and manufacturing method thereof
KR100447499B1 (en) * 2002-05-07 2004-09-07 주식회사 엘리아테크 Organic electro luminescence display and method for manufacturing the same

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KR20040021909A (en) 2004-03-11
US9723687B2 (en) 2017-08-01
CN100352079C (en) 2007-11-28
JP2004103582A (en) 2004-04-02
KR100504472B1 (en) 2005-08-04
EP1399003B1 (en) 2005-12-28
US9237629B2 (en) 2016-01-12
US20070138944A1 (en) 2007-06-21
HK1063559A1 (en) 2004-12-31
US20160120006A1 (en) 2016-04-28
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DE60302958T2 (en) 2006-07-06
US20040160176A1 (en) 2004-08-19
US7211947B2 (en) 2007-05-01
US20090142863A1 (en) 2009-06-04
US8439718B2 (en) 2013-05-14
EP1399003A1 (en) 2004-03-17

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