JP4096916B2 - 試料解析方法および装置 - Google Patents

試料解析方法および装置 Download PDF

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Publication number
JP4096916B2
JP4096916B2 JP2004167933A JP2004167933A JP4096916B2 JP 4096916 B2 JP4096916 B2 JP 4096916B2 JP 2004167933 A JP2004167933 A JP 2004167933A JP 2004167933 A JP2004167933 A JP 2004167933A JP 4096916 B2 JP4096916 B2 JP 4096916B2
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Japan
Prior art keywords
sample
holder
ion beam
piece
probe
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Expired - Lifetime
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Japanese (ja)
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JP2004279430A5 (enExample
JP2004279430A (ja
Inventor
馨 梅村
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Hitachi Ltd
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Hitachi Ltd
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Priority to JP2004167933A priority Critical patent/JP4096916B2/ja
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  • Sampling And Sample Adjustment (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
JP2004167933A 2004-06-07 2004-06-07 試料解析方法および装置 Expired - Lifetime JP4096916B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2004167933A JP4096916B2 (ja) 2004-06-07 2004-06-07 試料解析方法および装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004167933A JP4096916B2 (ja) 2004-06-07 2004-06-07 試料解析方法および装置

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP26836397A Division JP3677968B2 (ja) 1997-10-01 1997-10-01 試料解析方法および装置

Related Child Applications (2)

Application Number Title Priority Date Filing Date
JP2006159234A Division JP4353962B2 (ja) 2006-06-08 2006-06-08 試料解析方法及び試料作製方法
JP2006159235A Division JP4177860B2 (ja) 2006-06-08 2006-06-08 試料作製方法

Publications (3)

Publication Number Publication Date
JP2004279430A JP2004279430A (ja) 2004-10-07
JP2004279430A5 JP2004279430A5 (enExample) 2005-05-26
JP4096916B2 true JP4096916B2 (ja) 2008-06-04

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ID=33297121

Family Applications (1)

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JP2004167933A Expired - Lifetime JP4096916B2 (ja) 2004-06-07 2004-06-07 試料解析方法および装置

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JP (1) JP4096916B2 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5032076B2 (ja) * 2006-09-12 2012-09-26 株式会社テクノフロント 質量分析装置
SG11201402475YA (en) * 2011-11-29 2014-06-27 Kla Tencor Corp Systems and methods for preparation of samples for sub-surface defect review

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Publication number Publication date
JP2004279430A (ja) 2004-10-07

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