JP4095230B2 - 電子放出素子、電子源および画像形成装置の製造方法 - Google Patents

電子放出素子、電子源および画像形成装置の製造方法 Download PDF

Info

Publication number
JP4095230B2
JP4095230B2 JP2000107493A JP2000107493A JP4095230B2 JP 4095230 B2 JP4095230 B2 JP 4095230B2 JP 2000107493 A JP2000107493 A JP 2000107493A JP 2000107493 A JP2000107493 A JP 2000107493A JP 4095230 B2 JP4095230 B2 JP 4095230B2
Authority
JP
Japan
Prior art keywords
electron
manufacturing
ion beam
emitting device
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2000107493A
Other languages
English (en)
Japanese (ja)
Other versions
JP2001291467A5 (enExample
JP2001291467A (ja
Inventor
健夫 塚本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2000107493A priority Critical patent/JP4095230B2/ja
Publication of JP2001291467A publication Critical patent/JP2001291467A/ja
Publication of JP2001291467A5 publication Critical patent/JP2001291467A5/ja
Application granted granted Critical
Publication of JP4095230B2 publication Critical patent/JP4095230B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Images

Landscapes

  • Cold Cathode And The Manufacture (AREA)
JP2000107493A 2000-04-10 2000-04-10 電子放出素子、電子源および画像形成装置の製造方法 Expired - Fee Related JP4095230B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000107493A JP4095230B2 (ja) 2000-04-10 2000-04-10 電子放出素子、電子源および画像形成装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000107493A JP4095230B2 (ja) 2000-04-10 2000-04-10 電子放出素子、電子源および画像形成装置の製造方法

Publications (3)

Publication Number Publication Date
JP2001291467A JP2001291467A (ja) 2001-10-19
JP2001291467A5 JP2001291467A5 (enExample) 2008-03-27
JP4095230B2 true JP4095230B2 (ja) 2008-06-04

Family

ID=18620480

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000107493A Expired - Fee Related JP4095230B2 (ja) 2000-04-10 2000-04-10 電子放出素子、電子源および画像形成装置の製造方法

Country Status (1)

Country Link
JP (1) JP4095230B2 (enExample)

Also Published As

Publication number Publication date
JP2001291467A (ja) 2001-10-19

Similar Documents

Publication Publication Date Title
KR100702037B1 (ko) 전자방출소자 및 그 제조방법
JPH11297192A (ja) 電子放出素子、電子源、画像形成装置の製造方法
JP4667031B2 (ja) 電子放出素子の製造方法、および該製造方法を用いた、電子源並びに画像表示装置の製造方法
JP3826120B2 (ja) 電子放出素子、電子源及び画像表示装置の製造方法
JP2009104916A (ja) 電子放出素子、電子源、画像表示装置および電子放出素子の製造方法
US6617773B1 (en) Electron-emitting device, electron source, and image-forming apparatus
EP2120247B1 (en) Electron-emitting device and image display apparatus
US20090284120A1 (en) Electron emitter and image display apparatus
JP4095230B2 (ja) 電子放出素子、電子源および画像形成装置の製造方法
JP3387005B2 (ja) 電子放出素子及びその製造方法
US7445535B2 (en) Electron source producing apparatus and method
JP2949639B2 (ja) 電子放出素子、電子源、画像形成装置及び、それらの製造方法
JP2009146751A (ja) 電子放出素子、電子源、および、画像表示装置
JP2884496B2 (ja) 電子放出素子、電子源、画像形成装置及びそれらの製造方法
JP2961524B2 (ja) 電子放出素子、電子源及び画像形成装置
JP3710273B2 (ja) 電子源及び画像形成装置の製造方法
JP3673668B2 (ja) 電子源の製造方法及び電子源の製造装置
JP2000021291A (ja) 電子放出素子、それを用いた電子源及び画像形成装置
JPH1055745A (ja) 電子放出素子及びそれを備えた電子源並びに画像形成装置
JP2000251671A (ja) 電子放出素子の製造方法及び電子放出素子
JPH1050203A (ja) 電子放出素子、それを用いた電子源、画像形成装置、及びそれらの製造方法
JP2002075169A (ja) 電子放出素子、電子源、および画像形成装置、並びにそれらの製造方法
JP2001283718A (ja) 電子放出素子、電子源、画像形成装置、及び電子放出素子の製造方法
JPH1050208A (ja) 電子放出素子、電子源、画像形成装置及びそれらの製造方法
JPH1050202A (ja) 薄膜素子及びそれを用いた発光装置

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20061225

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20071214

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20080208

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20080226

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20080307

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20110314

Year of fee payment: 3

R150 Certificate of patent or registration of utility model

Free format text: JAPANESE INTERMEDIATE CODE: R150

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20120314

Year of fee payment: 4

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20130314

Year of fee payment: 5

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20140314

Year of fee payment: 6

LAPS Cancellation because of no payment of annual fees