JP4088062B2 - Purge method in material tank connection part of liquid material supply device - Google Patents

Purge method in material tank connection part of liquid material supply device Download PDF

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JP4088062B2
JP4088062B2 JP2001344862A JP2001344862A JP4088062B2 JP 4088062 B2 JP4088062 B2 JP 4088062B2 JP 2001344862 A JP2001344862 A JP 2001344862A JP 2001344862 A JP2001344862 A JP 2001344862A JP 4088062 B2 JP4088062 B2 JP 4088062B2
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liquid material
inert gas
gas introduction
valve
open
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JP2003146399A (en
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孝之 家城
忠幸 長野
新吾 南
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Horiba Stec Co Ltd
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Horiba Stec Co Ltd
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Description

【０００１】
【発明の属する技術分野】
この発明は、半導体製造などにおいて用いる液体材料供給装置の材料タンク接続部分におけるパージ方法に関する。
【０００２】
【従来の技術】
前記液体材料供給装置は、液体材料を収容したタンク（以下、材料タンクという）に対して不活性ガス導入管によって不活性ガスを導入し、この導入によって押し出される液体材料を液体材料導出管によって導出するように構成されているが、前記材料タンクは、前記不活性ガス導入管および液体材料導出管とは、通常、接続・分離自在に構成され、使用によって材料タンク内の液体材料がある一定量以下になると、新しい材料タンクに取り替えられる。そして、今まで使用していた材料タンクを前記不活性ガス導入管および液体材料導出管から分離する場合、従来においては、図２に示すようにして、ガス流路および液体流路内におけるパージを行うようにして、前記流路内に不活性ガスＩＧおよび液体材料が残留させないようにしていた。
【０００３】
すなわち、図２において、１は液体材料ＬＭを収容する材料タンクである。２，３は材料タンク１に設けられる不活性ガスＩＧの導入部、液体材料ＬＭの導出部で、不活性ガス導入部２は、材料タンク１内と連通するように上蓋１ａに取り付けられており、液体材料導出部３は上蓋１ａを貫通して、材料タンク１内の底板１ｂ近くまで挿入されている。そして、これらの不活性ガス導入部２および液体材料導出部３には、開閉弁４，５が設けられるとともに、先端には後述する不活性ガス導入管６、液体材料導出管７との分離自在の接続のための接続部２ａ，３ａが設けられている。
【０００４】
６，７は不活性ガス導入部２および液体材料導出部３にそれぞれ分離自在に接続される不活性ガス導入管、液体材料導出管である。そして、不活性ガス導入管６の上流側は不活性ガス供給源（図示していない）に接続され、下流端には不活性ガス導入部２の接続部２ａに対応する接続部６ａが形成されるとともに、開閉弁８が設けられている。また、液体材料導出管７の上流端には液体材料導出部３の接続部３ａに対応する接続部７ａが形成されるとともに、開閉弁９，１０が直列に設けられ，開閉弁１０の下流側は、半導体製造装置（図示していない）に接続されている。なお、前記接続部２ａと６ａおよび３ａと７ａは、いずれも容易に接続・分離できるように構成されている。
【０００５】
そして、以下、説明の便宜上、前記接続部２ａと６ａおよび３ａと７ａによって、不活性ガス導入部２と不活性ガス導入管６、液体材料導出部３と液体材料導出管７とがそれぞれ接続されているときの開閉弁４から開閉弁８までの流路部分および開閉弁５から開閉弁９間での流路部分を、それぞれガス側接続流路１１、液体側接続流路１２と言い、これら１１．１２を総称して材料タンク接続部分１３と言う。
【０００６】
１４は材料タンク接続部分１３を真空引きするための真空引きラインで、例えば液体材料導出管７の開閉弁９の上流側の点１５において接続され、開閉弁１６および真空ポンプ１７が直列に設けられており、真空ポンプ１７の下流側は大気開放されている。そして、１８はガス側接続流路１１と液体側接続流路１２とを互いに接続する接続流路で、両端がガス側接続流路１１および液体側接続流路１２とそれぞれ点１９，２０において接続されており、開閉弁２１を備えている。
【０００７】
上記構成の液体材料供給装置においては、材料タンク１の取替えに際して、材料タンク接続部分１３をパージする必要があるが、従来においては、開閉弁４，５，８，９を閉じるとともに、開閉弁１６，２１を開いて、真空ポンプ１７を動作させて材料タンク接続部分１３をパージする真空引き動作と、開閉弁４，５，９，１６を閉じるとともに、開閉弁８，２１を開いて、不活性ガス導入管６を介して不活性ガスＩＧを材料タンク接続部分１３に導入してこれをガス加圧する動作とを所定の回数繰り返し、これらの真空引き動作とガス加圧動作をそれぞれ所定の回数行うことにより、材料タンク接続部分１３のパージが行われていると判断していた。
【０００８】
【発明が解決しようとする課題】
しかしながら、液体材料ＬＭの種類やその純度およびそのときの環境温度など使用環境によっては、前記材料タンク接続部分１３に対する真空引き動作とガス加圧動作の回数を変える必要があるが、前記各動作を特定の回数だけ行う従来の手法においては、前記材料タンク接続部分１３のパージが必ずしも確実に行われていないことがあった。
【０００９】
この発明は、上述の事柄に留意してなされたもので、その目的は、材料タンク接続部分のパージを短時間に行うことができるとともに、そのパージ効果を確実に確認することのできる液体材料供給装置の材料タンク接続部分におけるパージ方法（以下、単にパージ方法という）を提供することである。
【００１０】
【課題を解決するための手段】
上記目的を達成するため、この発明では、液体材料を収容した材料タンクの開閉弁をそれぞれ有する不活性ガス導入部および液体材料導出部に、開閉弁をそれぞれ有する不活性ガス導入管および液体材料導出管を分離自在に接続するとともに、前記不活性ガス導入管と液体材料導出管との間を開閉弁を介して接続し、さらに、不活性ガス導入管または液体材料導出管に開閉弁および真空ポンプを備えた真空引きラインを接続した液体材料供給装置におけるパージ方法であって、
前記不活性ガス導入部の開閉弁から不活性ガス導入管の開閉弁に至るガス流路部分および前記液体材料導出部の開閉弁から液体材料導出管の開閉弁に至る液体流路部分を、前記真空ポンプによって真空引きしてパージし、
前記不活性ガス導入部および液体材料導出部の開閉弁と前記不活性ガス導入管および液体材料導出管の開閉弁をそれぞれ閉じた状態で前記真空ポンプによって、前記流路部分の圧力を確認するための圧力確認ラインの圧力センサの指示値が所定の圧力値以下になるまで前記流路部分を真空引きした後、前記真空引きラインの開閉弁を閉じ、このときの前記圧力センサの指示値が、前記所定の圧力値を越えて圧力上昇が生じているのか、あるいは、前記所定の圧力値以下のままで圧力上昇がないのかを確認するようにし、
さらに、前記圧力センサの指示値が、前記所定の圧力値を越えて圧力上昇が生じていれば所定のパージが行われていないと判断して再度前記流路部分を真空引きしてパージする一方、前記圧力センサの指示値が、前記所定の圧力値以下のままで圧力上昇がなければ、前記流路部分において所定のパージが行われていると判断するようにしている。
【００１１】
【発明の実施の形態】
以下、この発明の詳細を、図を参照しながら説明する。図１は、この発明のパージ方法を実施するための構成を示すもので、この図において、図２における符号と同一符号は同一物であるので、その説明は省略する。
【００１２】
図１において、２２は材料タンク接続部分１３における圧力の状態を確認するための圧力確認ラインで、この実施の形態においては、液体側接続流路１２と接続流路１８との接続点２０に接続され、開閉弁２３および圧力センサ２４が直列状態で設けられている。
【００１３】
次に、上記構成を用いたパージ方法について説明する。
（１）開閉弁４，５，８，９を閉じるとともに、開閉弁１６，２１，２３を開いて、真空ポンプ１７を動作させて材料タンク接続部分１３を真空引きしてパージを行い、圧力センサ２４の指示値が０Ｐａになるようにする。
【００１４】
（２）開閉弁１６を閉じる。この状態では、開閉弁４，５，８，９，１６は閉じ、開閉弁２１，２３は開いている。そして、この状態において、圧力センサ２４の指示値を確認し、０Ｐａを超えて圧力上昇が生じていれば、材料タンク接続部分１３には、不活性ガスＩＧおよび液体材料ＬＭが残留していると判断して、前記（１）のようにしてパージを行い、圧力センサ２４の指示値を確認する。ここで、前記指示値が０Ｐａのままで圧力上昇がなければ、所定のパージが行われていると判断できるので、材料タンク１を接続部２ａと６ａおよび３ａと７ａ においてガス側接続流路１１および液体側接続流路１２から切り離す。
【００１５】
上述のように、上記パージ方法においては、数値としてパージ効果を確認することができるので、必要以上に真空引きなどの操作を繰り返して行う必要がないとともに、材料タンク１の使用環境に関係なく、パージ効果を定量的かつ確実に把握することができる。したがって、材料タンク接続部分１３におけるパージを短時間かつ確実に行うことができる。
【００１６】
なお、上述の実施の形態においては、真空引きライン１４および圧力確認ライン２２を液体側接続流路１２に接続しているが、これらをガス側接続流路１１に接続してもよく、要するに、材料タンク接続部分１３に接続されていればよい。そして、真空引きライン１４および圧力確認ライン２２は、材料タンク接続部分１３に分離自在に接続されるようにしてあってもよい。また、ガス側接続流路１１と液体側接続流路１２とを接続する接続流路１８は、これらと分離自在に構成してあってもよい。
【００１７】
【発明の効果】
以上説明したように、この発明によれば、材料タンク接続部分のパージを短時間に行うことができるとともに、そのパージ効果を確実に確認することができ、使用環境に関係なく定量的にパージ効果を確認することができ、各種の液体材料に容易に対応することができる。
【図面の簡単な説明】
【図１】 この発明の液体材料供給装置の材料タンク接続部分におけるパージ方法を実施するための構成の一例を概略的に示す図である。
【図２】 従来の液体材料供給装置の材料タンク接続部分におけるパージ方法を実施するための構成を概略的に示す図である。
【符号の説明】
１…材料タンク、２…不活性ガス導入部、３…液体材料導出部、４，５，８，９，１０，１６，２１，２３…開閉弁、６…不活性ガス導入管、７…液体材料導出管、１１…ガス流路部分、１２…液体流路部分、１４…真空引きライン、１７…真空ポンプ、２２…圧力確認ライン、２４…圧力センサ、ＬＭ…液体材料、ＩＧ…不活性ガス。[0001]
BACKGROUND OF THE INVENTION
This invention relates to purging method in wood charge tank connected portion of the liquid material supply equipment used in semiconductor manufacturing.
[0002]
[Prior art]
The liquid material supply device introduces an inert gas into the tank containing the liquid material (hereinafter referred to as a material tank) through an inert gas introduction pipe, and derives the liquid material pushed out by the introduction through the liquid material outlet pipe. However, the material tank is usually configured to be connectable and separable from the inert gas introduction pipe and the liquid material outlet pipe, and a certain amount of liquid material in the material tank is used depending on use. When it becomes below, it is replaced with a new material tank. Then, when separating the material tank used so far from the inert gas introduction pipe and the liquid material outlet pipe, conventionally, purging in the gas flow path and the liquid flow path is performed as shown in FIG. In this manner, the inert gas IG and the liquid material are not left in the flow path.
[0003]
That is, in FIG. 2, 1 is a material tank that stores the liquid material LM. Reference numerals 2 and 3 denote an inert gas IG introduction portion and a liquid material LM lead-out portion provided in the material tank 1, and the inert gas introduction portion 2 is attached to the upper lid 1a so as to communicate with the inside of the material tank 1. The liquid material lead-out portion 3 passes through the upper lid 1a and is inserted to the vicinity of the bottom plate 1b in the material tank 1. The inert gas introduction part 2 and the liquid material lead-out part 3 are provided with on-off valves 4 and 5 and can be separated from an inert gas introduction pipe 6 and a liquid material lead-out pipe 7 described later at the tip. Connection portions 2a and 3a are provided for connection.
[0004]
Reference numerals 6 and 7 denote an inert gas introduction pipe and a liquid material lead pipe that are detachably connected to the inert gas introduction section 2 and the liquid material lead-out section 3, respectively. The upstream side of the inert gas introduction pipe 6 is connected to an inert gas supply source (not shown), and a connection portion 6a corresponding to the connection portion 2a of the inert gas introduction portion 2 is formed at the downstream end. In addition, an on-off valve 8 is provided. In addition, a connecting portion 7 a corresponding to the connecting portion 3 a of the liquid material outlet portion 3 is formed at the upstream end of the liquid material outlet tube 7, and on-off valves 9 and 10 are provided in series. Are connected to a semiconductor manufacturing apparatus (not shown). The connecting portions 2a and 6a and 3a and 7a are both configured to be easily connected and disconnected.
[0005]
For convenience of explanation, the inert gas introduction part 2 and the inert gas introduction pipe 6, and the liquid material outlet part 3 and the liquid material outlet pipe 7 are connected by the connecting parts 2a and 6a and 3a and 7a, respectively. The channel portion from the on-off valve 4 to the on-off valve 8 and the channel portion between the on-off valve 5 and the on-off valve 9 are referred to as a gas side connection channel 11 and a liquid side connection channel 12, respectively. 11.12 is collectively referred to as a material tank connecting portion 13.
[0006]
14 is a evacuation line for evacuating the material tank connection portion 13, which is connected, for example, at a point 15 upstream of the on-off valve 9 of the liquid material outlet pipe 7, and the on-off valve 16 and the vacuum pump 17 are provided in series. The downstream side of the vacuum pump 17 is open to the atmosphere. Reference numeral 18 denotes a connection flow path for connecting the gas side connection flow path 11 and the liquid side connection flow path 12 to each other, and both ends are connected to the gas side connection flow path 11 and the liquid side connection flow path 12 at points 19 and 20, respectively. The on-off valve 21 is provided.
[0007]
In the liquid material supply apparatus having the above configuration, when the material tank 1 is replaced, the material tank connection portion 13 needs to be purged . Conventionally, the on-off valves 4, 5, 8, 9 are closed and the on-off valve 16 is closed. , 21 is opened, the vacuum pump 17 is operated to purge the material tank connection portion 13, and the on-off valves 4, 5, 9, 16 are closed and the on-off valves 8, 21 are opened to be inactive The operation of introducing the inert gas IG into the material tank connecting portion 13 via the gas introduction pipe 6 and pressurizing the gas is repeated a predetermined number of times, and the vacuuming operation and the gas pressurizing operation are performed a predetermined number of times. Thus, it was determined that the material tank connection portion 13 was purged.
[0008]
[Problems to be solved by the invention]
However, depending on the use environment such as the type of liquid material LM, its purity, and the ambient temperature at that time, it is necessary to change the number of vacuuming operations and gas pressurizing operations for the material tank connection portion 13. In the conventional method of performing a specific number of times, the material tank connection portion 13 may not always be purged reliably.
[0009]
The present invention has been made in consideration of the above-mentioned matters, and the object thereof is to supply a liquid material that can purge the material tank connection portion in a short time and can reliably confirm the purge effect. purging method in wood charge tank connected portion of the equipment (hereinafter, simply referred to as purging method) is to provide.
[0010]
[Means for Solving the Problems]
In order to achieve the above object, in the present invention, an inert gas introduction pipe and a liquid material lead-out each having an on-off valve in an inert gas introduction part and a liquid material lead-out part respectively having an on-off valve of a material tank containing a liquid material The pipe is connected in a separable manner, and the inert gas introduction pipe and the liquid material outlet pipe are connected via an on-off valve, and the on-off valve and the vacuum pump are connected to the inert gas introduction pipe or the liquid material outlet pipe. A purging method in a liquid material supply apparatus connected to a vacuum drawing line comprising:
A gas flow path portion extending from the open / close valve of the inert gas introduction section to the open / close valve of the inert gas introduction pipe, and a liquid flow path section extending from the open / close valve of the liquid material discharge section to the open / close valve of the liquid material discharge pipe, Purge by vacuuming with a vacuum pump,
In order to confirm the pressure of the flow path portion by the vacuum pump in a state in which the open / close valves of the inert gas introduction part and the liquid material outlet part and the open / close valves of the inert gas introduction pipe and the liquid material outlet pipe are closed, respectively. After the vacuum passage is evacuated until the indicated value of the pressure sensor of the pressure confirmation line becomes a predetermined pressure value or less, the open / close valve of the evacuation line is closed, and the indicated value of the pressure sensor at this time is Check whether there is a pressure increase exceeding the predetermined pressure value, or whether there is no pressure increase below the predetermined pressure value,
Further, if the indicated value of the pressure sensor exceeds the predetermined pressure value and a pressure rise has occurred, it is determined that the predetermined purge is not performed, and the flow passage portion is again evacuated and purged. When the indicated value of the pressure sensor remains below the predetermined pressure value and there is no pressure increase, it is determined that a predetermined purge is being performed in the flow path portion.
[0011]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, the details of the present invention will be described with reference to the drawings. FIG. 1 shows a configuration for carrying out the purging method of the present invention. In this figure, the same reference numerals as those in FIG.
[0012]
In FIG. 1, reference numeral 22 denotes a pressure confirmation line for confirming the pressure state in the material tank connection portion 13. In this embodiment, the pressure confirmation line 22 is connected to a connection point 20 between the liquid side connection flow path 12 and the connection flow path 18. The on-off valve 23 and the pressure sensor 24 are provided in series.
[0013]
Next, a purge method using the above configuration will be described.
(1) The on-off valves 4, 5, 8, 9 are closed, the on-off valves 16, 21, 23 are opened, the vacuum pump 17 is operated, the material tank connection portion 13 is evacuated and purged, and the pressure sensor The indication value of 24 is set to 0 Pa.
[0014]
(2) Close the on-off valve 16. In this state, the on-off valves 4, 5, 8, 9, 16 are closed, and the on-off valves 21, 23 are open. In this state, the indicated value of the pressure sensor 24 is confirmed, and if the pressure rise exceeds 0 Pa, the inert gas IG and the liquid material LM remain in the material tank connection portion 13. After the determination, purging is performed as in (1) above, and the indicated value of the pressure sensor 24 is confirmed. Here, if the indicated value remains at 0 Pa and there is no pressure increase, it can be determined that a predetermined purge is being performed, so the material tank 1 is connected to the gas side connection flow path 11 at the connection portions 2a and 6a and 3a and 7a. And separated from the liquid-side connection channel 12.
[0015]
As described above, in the purge method, since the purge effect can be confirmed as a numerical value, it is not necessary to repeatedly perform an operation such as evacuation more than necessary, and regardless of the use environment of the material tank 1, The purge effect can be grasped quantitatively and reliably. Therefore, the purge in the material tank connection part 13 can be performed in a short time and reliably.
[0016]
In the above-described embodiment, the evacuation line 14 and the pressure confirmation line 22 are connected to the liquid side connection flow path 12, but these may be connected to the gas side connection flow path 11. What is necessary is just to be connected to the material tank connection part 13. FIG. The evacuation line 14 and the pressure confirmation line 22 may be separably connected to the material tank connection portion 13. Moreover, the connection flow path 18 that connects the gas side connection flow path 11 and the liquid side connection flow path 12 may be configured to be separable from these.
[0017]
【The invention's effect】
As described above, according to the present invention, the material tank connection portion can be purged in a short time, and the purge effect can be confirmed reliably, and the purge effect can be quantitatively determined regardless of the use environment. It can be confirmed and various liquid materials can be handled easily.
[Brief description of the drawings]
FIG. 1 is a diagram schematically showing an example of a configuration for carrying out a purging method in a material tank connection portion of a liquid material supply apparatus according to the present invention.
FIG. 2 is a diagram schematically showing a configuration for carrying out a purging method in a material tank connection portion of a conventional liquid material supply apparatus.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 ... Material tank, 2 ... Inert gas introduction part, 3 ... Liquid material derivation part, 4, 5, 8, 9, 10, 16, 21, 23 ... Open / close valve, 6 ... Inert gas introduction pipe, 7 ... Liquid Material outlet pipe, 11 ... gas flow path part, 12 ... liquid flow path part, 14 ... vacuum drawing line, 17 ... vacuum pump, 22 ... pressure confirmation line, 24 ... pressure sensor, LM ... liquid material, IG ... inert gas .

Claims (1)

液体材料を収容した材料タンクの開閉弁をそれぞれ有する不活性ガス導入部および液体材料導出部に、開閉弁をそれぞれ有する不活性ガス導入管および液体材料導出管を分離自在に接続するとともに、前記不活性ガス導入管と液体材料導出管との間を開閉弁を介して接続し、さらに、不活性ガス導入管または液体材料導出管に開閉弁および真空ポンプを備えた真空引きラインを接続した液体材料供給装置におけるパージ方法であって、
前記不活性ガス導入部の開閉弁から不活性ガス導入管の開閉弁に至るガス流路部分および前記液体材料導出部の開閉弁から液体材料導出管の開閉弁に至る液体流路部分を、前記真空ポンプによって真空引きしてパージし、
前記不活性ガス導入部および液体材料導出部の開閉弁と前記不活性ガス導入管および液体材料導出管の開閉弁をそれぞれ閉じた状態で前記真空ポンプによって、前記流路部分の圧力を確認するための圧力確認ラインの圧力センサの指示値が所定の圧力値以下になるまで前記流路部分を真空引きした後、前記真空引きラインの開閉弁を閉じ、このときの前記圧力センサの指示値が、前記所定の圧力値を越えて圧力上昇が生じているのか、あるいは、前記所定の圧力値以下のままで圧力上昇がないのかを確認するようにし、
さらに、前記圧力センサの指示値が、前記所定の圧力値を越えて圧力上昇が生じていれば所定のパージが行われていないと判断して再度前記流路部分を真空引きしてパージする一方、前記圧力センサの指示値が、前記所定の圧力値以下のままで圧力上昇がなければ、前記流路部分において所定のパージが行われていると判断するようにしたことを特徴とする液体材料供給装置の材料タンク接続部分におけるパージ方法。An inert gas introduction pipe and a liquid material lead-out pipe each having an on-off valve are detachably connected to an inert gas introduction section and a liquid material lead-out section each having an on-off valve of a material tank containing a liquid material. A liquid material in which an active gas introduction pipe and a liquid material lead-out pipe are connected via an on-off valve, and an inert gas introduction pipe or a liquid material lead-out pipe is connected to a vacuum drawing line having an on-off valve and a vacuum pump. A purge method in a supply device, comprising:
A gas flow path portion extending from the open / close valve of the inert gas introduction section to the open / close valve of the inert gas introduction pipe, and a liquid flow path section extending from the open / close valve of the liquid material discharge section to the open / close valve of the liquid material discharge pipe, Purge by vacuuming with a vacuum pump,
In order to confirm the pressure of the flow path portion by the vacuum pump in a state in which the open / close valves of the inert gas introduction part and the liquid material outlet part and the open / close valves of the inert gas introduction pipe and the liquid material outlet pipe are closed, respectively. After the vacuum passage is evacuated until the indicated value of the pressure sensor of the pressure confirmation line becomes a predetermined pressure value or less, the open / close valve of the evacuation line is closed, and the indicated value of the pressure sensor at this time is Check whether there is a pressure increase exceeding the predetermined pressure value, or whether there is no pressure increase below the predetermined pressure value,
Further, if the indicated value of the pressure sensor exceeds the predetermined pressure value and a pressure rise has occurred, it is determined that the predetermined purge is not performed, and the flow passage portion is again evacuated and purged. The liquid material is characterized in that if the indicated value of the pressure sensor remains below the predetermined pressure value and there is no pressure increase, it is determined that a predetermined purge is being performed in the flow path portion. A purge method in a material tank connection portion of a supply device.
JP2001344862A 2001-11-09 2001-11-09 Purge method in material tank connection part of liquid material supply device Expired - Lifetime JP4088062B2 (en)

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