JP2003146399A - Method for purging connection part of material-tank in liquid-material delivery system - Google Patents
Method for purging connection part of material-tank in liquid-material delivery systemInfo
- Publication number
- JP2003146399A JP2003146399A JP2001344862A JP2001344862A JP2003146399A JP 2003146399 A JP2003146399 A JP 2003146399A JP 2001344862 A JP2001344862 A JP 2001344862A JP 2001344862 A JP2001344862 A JP 2001344862A JP 2003146399 A JP2003146399 A JP 2003146399A
- Authority
- JP
- Japan
- Prior art keywords
- liquid material
- valve
- inert gas
- liquid
- pipe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
Description
【発明の詳細な説明】
【０００１】
【発明の属する技術分野】この発明は、半導体製造など
において用いる液体材料を供給する装置の材料タンク接
続部分におけるパージ方法に関する。
【０００２】
【従来の技術】前記液体材料供給装置は、液体材料を収
容したタンク（以下、材料タンクという）に対して不活
性ガス導入管によって不活性ガスを導入し、この導入に
よって押し出される液体材料を液体材料導出管によって
導出するように構成されているが、前記材料タンクは、
前記不活性ガス導入管および液体材料導出管とは、通
常、接続・分離自在に構成され、使用によって材料タン
ク内の液体材料がある一定量以下になると、新しい材料
タンクに取り替えられる。そして、今まで使用していた
材料タンクを前記不活性ガス導入管および液体材料導出
管から分離する場合、従来においては、図２に示すよう
にして、ガス流路および液体流路内におけるパージを行
うようにして、前記流路内に不活性ガスＩＧおよび液体
材料が残留させないようにしていた。
【０００３】すなわち、図２において、１は液体材料Ｌ
Ｍを収容する材料タンクである。２，３は材料タンク１
に設けられる不活性ガスＩＧの導入部、液体材料ＬＭの
導出部で、不活性ガス導入部２は、材料タンク１内と連
通するように上蓋１ａに取り付けられており、液体材料
導出部３は上蓋１ａを貫通して、材料タンク１内の底板
１ｂ近くまで挿入されている。そして、これらの不活性
ガス導入部２および液体材料導出部３には、開閉弁４，
５が設けられるとともに、先端には後述する不活性ガス
導入管６、液体材料導出管７との分離自在の接続のため
の接続部２ａ，３ａが設けられている。
【０００４】６，７は不活性ガス導入部２および液体材
料導出部３にそれぞれ分離自在に接続される不活性ガス
導入管、液体材料導出管である。そして、不活性ガス導
入管６の上流側は不活性ガス供給源（図示していない）
に接続され、下流端には不活性ガス導入部２の接続部２
ａに対応する接続部６ａが形成されるとともに、開閉弁
８が設けられている。また、液体材料導出管の上流端に
は液体材料導出部３の接続部３ａに対応する接続部７ａ
が形成されるとともに、開閉弁９，１０が直列に設けら
れ，開閉弁１０の下流側は、半導体製造装置（図示して
いない）に接続されている。なお、前記接続部２ａと６
ａおよび３ａと７ａは、いずれも容易に接続・分離でき
るように構成されている。
【０００５】そして、以下、説明の便宜上、前記接続部
２ａと６ａおよび３ａと７ａによって、不活性ガス導入
部２と不活性ガス導入管６、液体材料導出部３と液体材
料導出管７とがそれぞれ接続されているときの開閉弁４
から開閉弁８までの流路部分および開閉弁５から開閉弁
９間での流路部分を、それぞれガス側接続流路１１、液
体側接続流路１２と言い、これら１１．１２を総称して
材料タンク接続部分１３と言う。
【０００６】１４は材料タンク接続部分１３を真空引き
するための真空引きラインで、例えば液体材料導出管７
の開閉弁９の上流側の点１５において接続され、開閉弁
１６および真空ポンプ１７が直列に設けられており、真
空ポンプ１７の下流側は大気開放されている。そして、
１８はガス側接続流路１１と液体側接続流路１２とを互
いに接続する接続流路で、両端がガス側接続流路１１お
よび液体側接続流路１２とそれぞれ点１９，２０におい
て接続されており、開閉弁２１を備えている。
【０００７】上記構成の液体材料供給装置においては、
材料タンク１の取替えに際して、材料タンク接続部分１
３をパージする必要があるがあるが、従来においては、
開閉弁４，５，８，９を閉じるとともに、開閉弁１６，
２１を開いて、真空ポンプ１７を動作させて材料タンク
接続部分１３をパージする真空引き動作と、開閉弁４，
５，９，１６を閉じるとともに、開閉弁８，２１を開い
て、不活性ガス導入管６を介して不活性ガスＩＧを材料
タンク接続部分１３に導入してこれをガス加圧する動作
とを所定の回数繰り返し、これらの真空引き動作とガス
加圧動作をそれぞれ所定の回数行うことにより、材料タ
ンク接続部分１３のパージが行われていると判断してい
た。
【０００８】
【発明が解決しようとする課題】しかしながら、液体材
料ＬＭの種類やその純度およびそのときの環境温度など
使用環境によっては、前記材料タンク接続部分１３に対
する真空引き動作とガス加圧動作の回数を変える必要が
あるが、前記各動作を特定の回数だけ行う従来の手法に
おいては、前記材料タンク接続部分１３のパージが必ず
しも確実に行われていないことがあった。
【０００９】この発明は、上述の事柄に留意してなされ
たもので、その目的は、材料タンク接続部分のパージを
短時間に行うことができるとともに、そのパージ効果を
確実に確認することのできる液体材料供給装置の材料タ
ンク接続部分におけるパージ方法（以下、単にパージ方
法という）を提供することである。
【００１０】
【課題を解決するための手段】上記目的を達成するた
め、この発明では、液体材料を収容した材料タンクの開
閉弁をそれぞれ有する不活性ガス導入部および液体材料
導出部に、開閉弁をそれぞれ有する不活性ガス導入管お
よび液体材料導出管を分離自在に接続するとともに、前
記不活性ガス導入管と液体材料導出管との間を開閉弁を
介して接続し、さらに、不活性ガス導入管または液体材
料導出管に開閉弁および真空ポンプを備えた真空引きラ
インを接続し、前記不活性ガス導入部の開閉弁から不活
性ガス導入管の開閉弁に至るガス流路部分および前記液
体材料導出部の開閉弁から液体材料導出管の開閉弁に至
る液体流路部分を、前記真空ポンプによって真空引きし
てパージするようにした液体材料供給装置において、前
記不活性ガス導入管または液体材料導出管のいずれかに
開閉弁および圧力センサを備えた圧力確認ラインを接続
し、前記不活性ガス導入部および液体材料導出部の開閉
弁と前記不活性ガス導入管および液体材料導出管の開閉
弁をそれぞれ閉じた状態で前記真空ポンプによって前記
流路部分を真空引きした後、前記圧力確認ラインの開閉
弁を開き、前記圧力センサによって前記流路部分におけ
る圧力を確認するようにしている。
【００１１】
【発明の実施の形態】以下、この発明の詳細を、図を参
照しながら説明する。図１は、この発明のパージ方法を
実施するための構成を示すもので、この図において、図
２における符号と同一符号は同一物であるので、その説
明は省略する。
【００１２】図１において、２２は材料タンク接続部分
１３における圧力の状態を確認するための圧力確認ライ
ンで、この実施の形態においては、液体側接続流路１２
と接続流路１８との接続点２０に接続され、開閉弁２３
および圧力センサ２４が直列状態で設けられている。
【００１３】次に、上記構成を用いたパージ方法につい
て説明する。
（１）開閉弁４，５，８，９を閉じるとともに、開閉弁
１６，２１，２３を開いて、真空ポンプ１７を動作させ
て材料タンク接続部分１３を真空引きしてパージを行
い、圧力センサ２４の指示値が０Ｐａになるようにす
る。
【００１４】（２）開閉弁１６を閉じる。この状態で
は、開閉弁４，５，８，９，１６は閉じ、開閉弁２１，
２３は開いている。そして、この状態において、圧力セ
ンサ２４の指示値を確認し、０Ｐａを超えて圧力上昇が
生じていれば、材料タンク接続部分１３には、不活性ガ
スＩＧおよび液体材料ＬＭが残留していると判断して、
前記（１）のようにしてパージを行い、圧力センサ２４
の指示値を確認する。ここで、前記指示値が０Ｐａのま
まで圧力上昇がなければ、所定のパージが行われている
と判断できるので、材料タンク１を接続部２ａと６ａお
よび３ａと７ａにおいてガス側接続流路１１および液体
側接続流路１２から切り離す。
【００１５】上述のように、上記パージ方法において
は、数値としてパージ効果を確認することができるの
で、必要以上に真空引きなどの操作を繰り返して行う必
要がないとともに、材料タンク１の使用環境に関係な
く、パージ効果を定量的かつ確実に把握することができ
る。したがって、材料タンク接続部分１３におけるパー
ジを短時間かつ確実に行うことができる。
【００１６】なお、上述の実施の形態においては、真空
引きライン１４および圧力確認ライン２２を液体側接続
流路１２に接続しているが、これらをガス側接続流路１
１に接続してもよく、要するに、材料タンク接続部分１
３に接続されていればよい。そして、真空引きライン１
４および圧力確認ライン２２は、材料タンク接続部分１
３に分離自在に接続されるようにしてあってもよい。ま
た、ガス側接続流路１１と液体側接続流路１２とを接続
する接続流路１８は、これらと分離自在に構成してあっ
てもよい。
【００１７】
【発明の効果】以上説明したように、この発明によれ
ば、材料タンク接続部分のパージを短時間に行うことが
できるとともに、そのパージ効果を確実に確認すること
のでき、使用関係に関係なく定量的にパージ効果を確認
することができ、各種の液体材料に容易に対応すること
ができる。Description: BACKGROUND OF THE INVENTION [0001] 1. Field of the Invention [0002] The present invention relates to a method for purging a material tank connection portion of an apparatus for supplying a liquid material used in semiconductor manufacturing or the like. 2. Description of the Related Art The above-mentioned liquid material supply device introduces an inert gas into a tank containing a liquid material (hereinafter referred to as a material tank) through an inert gas introduction pipe, and the liquid pushed out by this introduction is introduced. The material is configured to be led out by a liquid material lead-out pipe, but the material tank is
The inert gas inlet pipe and the liquid material outlet pipe are usually configured to be freely connectable and separable, and when the liquid material in the material tank falls below a certain amount by use, the pipe is replaced with a new material tank. In the case where the material tank used so far is separated from the inert gas introduction pipe and the liquid material discharge pipe, conventionally, as shown in FIG. 2, purging in the gas flow path and the liquid flow path is performed. In this way, the inert gas IG and the liquid material are prevented from remaining in the flow path. That is, in FIG. 2, 1 is a liquid material L
M is a material tank containing M. 2 and 3 are material tanks 1
The inert gas introduction section 2 is attached to the upper lid 1a so as to communicate with the inside of the material tank 1, and the liquid material introduction section 3 It penetrates through the upper lid 1a and is inserted to the vicinity of the bottom plate 1b in the material tank 1. The on-off valve 4 and the on-off valve 4,
5 are provided, and connection portions 2a and 3a for detachable connection with an inert gas introduction pipe 6 and a liquid material discharge pipe 7 described later are provided at the tip. Reference numerals 6 and 7 denote an inert gas inlet pipe and a liquid material outlet pipe, respectively, which are detachably connected to the inert gas inlet 2 and the liquid material outlet 3, respectively. The upstream side of the inert gas introduction pipe 6 is an inert gas supply source (not shown).
At the downstream end of the connection portion 2 of the inert gas introduction portion 2.
A connection portion 6a corresponding to a is formed, and an on-off valve 8 is provided. At the upstream end of the liquid material outlet pipe, a connection portion 7a corresponding to the connection portion 3a of the liquid material outlet portion 3 is provided.
Are formed, and on-off valves 9 and 10 are provided in series, and the downstream side of the on-off valve 10 is connected to a semiconductor manufacturing apparatus (not shown). The connection portions 2a and 6
Each of a and 3a and 7a is configured to be easily connected / disconnected. [0005] For convenience of explanation, the connection portions 2a and 6a and the connection portions 3a and 7a allow the inert gas introduction portion 2 and the inert gas introduction tube 6, and the liquid material lead-out portion 3 and the liquid material lead-out tube 7 to be formed. On-off valve 4 when each is connected
The flow path from the valve to the on-off valve 8 and the flow path from the on-off valve 5 to the on-off valve 9 are referred to as a gas-side connection flow path 11 and a liquid-side connection flow path 12, respectively. It is referred to as a material tank connection portion 13. Reference numeral 14 denotes an evacuation line for evacuation of the material tank connecting portion 13.
The on-off valve 16 and the vacuum pump 17 are connected in series at a point 15 on the upstream side of the on-off valve 9, and the downstream side of the vacuum pump 17 is open to the atmosphere. And
Reference numeral 18 denotes a connection flow path that connects the gas-side connection flow path 11 and the liquid-side connection flow path 12 to each other. Both ends are connected to the gas-side connection flow path 11 and the liquid-side connection flow path 12 at points 19 and 20, respectively. And an on-off valve 21. In the liquid material supply device having the above structure,
When replacing the material tank 1, the material tank connection part 1
3 needs to be purged, but conventionally,
While closing the on-off valves 4, 5, 8, and 9, the on-off valves 16,
21, the vacuum pump 17 is operated to operate the vacuum pump 17 to purge the material tank connection portion 13,
The operation of closing the valves 5, 9, 16 and opening the on-off valves 8, 21 to introduce the inert gas IG into the material tank connecting portion 13 through the inert gas introduction pipe 6 and pressurizing the gas is pressurized. By repeatedly performing the evacuation operation and the gas pressurization operation a predetermined number of times, it has been determined that the material tank connection portion 13 has been purged. However, depending on the type of the liquid material LM, its purity, and the use environment such as the environmental temperature at that time, the vacuuming operation and the gas pressurizing operation for the material tank connecting portion 13 are not performed. Although it is necessary to change the number of times, in the conventional method of performing each of the above operations only a specific number of times, the material tank connecting portion 13 may not always be reliably purged. The present invention has been made in consideration of the above-mentioned matters, and an object of the present invention is to make it possible to purge a connection portion of a material tank in a short time and to surely confirm the purging effect. An object of the present invention is to provide a purging method (hereinafter, simply referred to as a purging method) at a material tank connection portion of a liquid material supply device. In order to achieve the above object, according to the present invention, an on-off valve and an on-off valve for a material tank containing a liquid material are provided at the inert gas inlet and the liquid material outlet respectively. And an inert gas inlet pipe and a liquid material outlet pipe each having a slidable valve. The inert gas inlet pipe and the liquid material outlet pipe are connected via an on-off valve. Connecting a vacuum line provided with an on-off valve and a vacuum pump to a pipe or a liquid material outlet pipe, a gas flow path portion from the on-off valve of the inert gas introduction section to the on-off valve of the inert gas introduction pipe, and the liquid material In the liquid material supply device, the liquid flow path portion from the opening / closing valve of the outlet section to the opening / closing valve of the liquid material outlet pipe is evacuated and purged by the vacuum pump. A pressure check line equipped with an on-off valve and a pressure sensor is connected to either the inert gas introduction pipe or the liquid material outlet pipe, and the inert gas inlet and the on-off valve of the liquid material outlet and the inert gas inlet pipe and After the flow path is evacuated by the vacuum pump with the on-off valves of the liquid material outlet pipes closed, the on-off valve of the pressure check line is opened, and the pressure in the flow path is checked by the pressure sensor. Like that. Hereinafter, the present invention will be described in detail with reference to the drawings. FIG. 1 shows a configuration for carrying out the purging method of the present invention. In FIG. 1, the same reference numerals as those in FIG. 2 denote the same parts, and a description thereof will be omitted. In FIG. 1, reference numeral 22 denotes a pressure confirmation line for confirming the state of the pressure in the material tank connection portion 13;
Is connected to a connection point 20 between
And the pressure sensor 24 are provided in series. Next, a purging method using the above configuration will be described. (1) The on-off valves 4, 5, 8, and 9 are closed, and the on-off valves 16, 21, and 23 are opened. The vacuum pump 17 is operated to evacuate and purge the material tank connection portion 13, thereby performing a pressure sensor. 24 is set to 0 Pa. (2) The on-off valve 16 is closed. In this state, the on-off valves 4, 5, 8, 9, 16 are closed and the on-off valves 21,
23 is open. Then, in this state, the indication value of the pressure sensor 24 is checked, and if the pressure rise exceeds 0 Pa, it is determined that the inert gas IG and the liquid material LM remain in the material tank connection portion 13. Judge,
Purging is performed as in (1) above, and the pressure sensor 24
Check the indicated value of. Here, if the indicated value remains 0 Pa and there is no pressure increase, it can be determined that a predetermined purge is being performed, so that the material tank 1 is connected to the gas-side connection flow path 11 at the connection portions 2a and 6a and 3a and 7a. And the liquid side connection flow path 12. As described above, in the above-mentioned purging method, the purge effect can be confirmed as a numerical value, so that it is not necessary to repeatedly perform operations such as vacuuming more than necessary, Irrespective of this, the purge effect can be grasped quantitatively and reliably. Therefore, the purge in the material tank connection portion 13 can be performed in a short time and reliably. In the above-described embodiment, the evacuation line 14 and the pressure confirmation line 22 are connected to the liquid-side connection channel 12, but these are connected to the gas-side connection channel 1.
1 may be connected to the material tank connection part 1
3 only needs to be connected. And the evacuation line 1
4 and the pressure confirmation line 22
3 may be detachably connected. The connection flow path 18 connecting the gas-side connection flow path 11 and the liquid-side connection flow path 12 may be configured to be separable therefrom. As described above, according to the present invention, the material tank connection can be purged in a short time, and the purge effect can be surely confirmed. The purge effect can be quantitatively confirmed irrespective of the above, and it is possible to easily cope with various liquid materials.
【図面の簡単な説明】
【図１】この発明の液体材料供給装置の材料タンク接続
部分におけるパージ方法を実施するための構成の一例を
概略的に示す図である。
【図２】従来の液体材料供給装置の材料タンク接続部分
におけるパージ方法を実施するための構成を概略的に示
す図である。
【符号の説明】
１…材料タンク、２…不活性ガス導入部、３…液体材料
導出部、４，５，８，９，１０，１６，２１，２３…開
閉弁、６…不活性ガス導入管、７…液体材料導出管、１
１…ガス流路部分、１２…液体流路部分、１４…真空引
きライン、１７…真空ポンプ、２２…圧力確認ライン、
２４…圧力センサ、ＬＭ…液体材料、ＩＧ…不活性ガ
ス。BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a diagram schematically showing an example of a configuration for performing a purging method at a material tank connection portion of a liquid material supply device of the present invention. FIG. 2 is a diagram schematically showing a configuration for performing a purging method at a material tank connection portion of a conventional liquid material supply device. [Description of Signs] 1 ... Material tank, 2 ... Inert gas inlet, 3 ... Liquid material outlet, 4,5,8,9,10,16,21,23 ... Open / close valve, 6 ... Inert gas inlet Pipe, 7 ... Liquid material outlet pipe, 1
DESCRIPTION OF SYMBOLS 1 ... gas flow path part, 12 ... liquid flow path part, 14 ... evacuation line, 17 ... vacuum pump, 22 ... pressure confirmation line
24: pressure sensor, LM: liquid material, IG: inert gas.
───────────────────────────────────────────────────── フロントページの続き (72)発明者 南 新吾 京都府京都市南区上鳥羽鉾立町11番５ 株 式会社エステック内 Ｆターム(参考） 3E083 AA20 AE15 3J071 AA02 BB05 BB14 CC01 CC07 DD27 EE24 FF11 ────────────────────────────────────────────────── ─── Continuation of front page (72) Inventor Shingo Minami 11-5 Kamitobako Tatemachi, Minami-ku, Kyoto, Kyoto In the formula company ESTEC F term (reference) 3E083 AA20 AE15 3J071 AA02 BB05 BB14 CC01 CC07 DD27 EE24 FF11
Claims (1)
をそれぞれ有する不活性ガス導入部および液体材料導出
部に、開閉弁をそれぞれ有する不活性ガス導入管および
液体材料導出管を分離自在に接続するとともに、前記不
活性ガス導入管と液体材料導出管との間を開閉弁を介し
て接続し、さらに、不活性ガス導入管または液体材料導
出管に開閉弁および真空ポンプを備えた真空引きライン
を接続し、前記不活性ガス導入部の開閉弁から不活性ガ
ス導入管の開閉弁に至るガス流路部分および前記液体材
料導出部の開閉弁から液体材料導出管の開閉弁に至る液
体流路部分を、前記真空ポンプによって真空引きしてパ
ージするようにした液体材料供給装置において、前記不
活性ガス導入管または液体材料導出管のいずれかに開閉
弁および圧力センサを備えた圧力確認ラインを接続し、
前記不活性ガス導入部および液体材料導出部の開閉弁と
前記不活性ガス導入管および液体材料導出管の開閉弁を
それぞれ閉じた状態で前記真空ポンプによって前記流路
部分を真空引きした後、前記圧力確認ラインの開閉弁を
開き、前記圧力センサによって前記流路部分における圧
力を確認するようにしたことを特徴とする液体材料供給
装置の材料タンク接続部分におけるパージ方法。Claims: 1. An inert gas introduction pipe and a liquid material deriving unit each having an on-off valve at an inert gas introduction unit and a liquid material deriving unit respectively having an on-off valve of a material tank containing a liquid material. The pipes are detachably connected, the inert gas introduction pipe and the liquid material outlet pipe are connected via an on-off valve, and the inert gas introduction pipe or the liquid material outlet pipe is further connected to an on-off valve and a vacuum pump. Connecting a vacuum line provided with a gas passage section from the opening / closing valve of the inert gas introduction section to the opening / closing valve of the inert gas introduction pipe and opening / closing of the liquid material introduction pipe from the opening / closing valve of the liquid material introduction section. In a liquid material supply device in which a liquid flow path portion leading to a valve is evacuated and purged by the vacuum pump, the liquid material supply device is opened to either the inert gas introduction pipe or the liquid material discharge pipe. Connect the pressure check line with a valve and pressure sensor,
After evacuating the flow path portion by the vacuum pump in a state in which the on-off valves of the inert gas inlet and the liquid material outlet and the on-off valves of the inert gas inlet and the liquid material outlet are closed, A method for purging a material tank connection part of a liquid material supply device, wherein an on-off valve of a pressure confirmation line is opened, and the pressure in the flow path part is confirmed by the pressure sensor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001344862A JP4088062B2 (en) | 2001-11-09 | 2001-11-09 | Purge method in material tank connection part of liquid material supply device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001344862A JP4088062B2 (en) | 2001-11-09 | 2001-11-09 | Purge method in material tank connection part of liquid material supply device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2003146399A true JP2003146399A (en) | 2003-05-21 |
| JP4088062B2 JP4088062B2 (en) | 2008-05-21 |
Family
ID=19158316
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001344862A Expired - Lifetime JP4088062B2 (en) | 2001-11-09 | 2001-11-09 | Purge method in material tank connection part of liquid material supply device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4088062B2 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6991365B1 (en) * | 2002-05-17 | 2006-01-31 | Baker Engineering And Risk Consultants, Inc. | Flammability test apparatus |
| CN102182917A (en) * | 2011-03-16 | 2011-09-14 | 中国科学院上海技术物理研究所 | Working medium filling device and method of loop circuit heat pipe at medium and low temperature |
| US8119196B2 (en) | 2004-10-27 | 2012-02-21 | Kabushiki Kaisha Toshiba | Semiconductor manufacturing apparatus, liquid container, and semiconductor device manufacturing method |
-
2001
- 2001-11-09 JP JP2001344862A patent/JP4088062B2/en not_active Expired - Lifetime
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6991365B1 (en) * | 2002-05-17 | 2006-01-31 | Baker Engineering And Risk Consultants, Inc. | Flammability test apparatus |
| US8119196B2 (en) | 2004-10-27 | 2012-02-21 | Kabushiki Kaisha Toshiba | Semiconductor manufacturing apparatus, liquid container, and semiconductor device manufacturing method |
| CN102182917A (en) * | 2011-03-16 | 2011-09-14 | 中国科学院上海技术物理研究所 | Working medium filling device and method of loop circuit heat pipe at medium and low temperature |
Also Published As
| Publication number | Publication date |
|---|---|
| JP4088062B2 (en) | 2008-05-21 |
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