JP4084551B2 - Manufacturing method of optical disk - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to an optical disc manufacturing method, and more particularly to an optical disc manufacturing method including a step of applying a liquid substance by a spin coating method.
[0002]
[Prior art]
In recent years, optical discs typified by CDs and DVDs have been widely used as recording media for recording large volumes of digital data. In general, a read-only optical disc is laminated in the order of a light transmission layer, a reflection layer, and a protection layer from the recording surface side, and a writable optical disc is a light transmission layer, recording layer, reflection layer, and protection layer from the recording surface side. In any type of optical disc, when reading data, a laser is irradiated from the light transmission layer side to detect the reflected light.
[0003]
FIG. 13 is a cross-sectional view showing the layer structure of a CD-ROM, which is the most common read-only optical disc.
[0004]
As shown in FIG. 13, the CD-ROM is composed of a light transmission layer 1 having a thickness of about 1.2 mm, a reflective layer 2 having a thickness of about 50 nm, and a protective layer 3 having a thickness of about 5 μm. In general, the light transmission layer 1 is made of polycarbonate on which prepits are formed in advance, the reflection layer 2 is made of aluminum, and the protective layer 3 is made of an ultraviolet curable resin. In producing a CD-ROM having such a configuration, first, a light transmissive layer 1 having a pre-pit corresponding to digital data to be recorded using a stamper is injection-molded, and then, among the light transmissive layers 1, The reflective layer 2 is formed by depositing aluminum over the entire surface where the pits are formed by sputtering. Then, an ultraviolet curable resin is formed on the surface of the reflective layer 2 by a spin coating method to form the protective layer 3. Thus, a CD-ROM composed of the light transmission layer 1, the reflection layer 2, and the protective layer 3 is produced.
[0005]
Here, the spin coat method for forming the protective layer 3 is a method widely used not only in the manufacture of optical discs but also in the manufacture of semiconductor devices as a method of applying a liquid substance. However, the film thickness of the film formed by the spin coating method is almost uniform in the portion away from the portion where the UV curable resin is dropped (dropping point), but in the vicinity of the dropping point, In order to form the protective layer 3 as uniformly as possible in the area (recording area) where the pits are formed on the recording surface of the optical disk, the central portion of the optical disk is dropped. Ideally a point. However, since a hole for chucking to the drive is generally formed at the center of the optical disk, the center of the optical disk cannot be used as the dropping point as it is. For this reason, Japanese Patent Application Laid-Open No. 11-213459 proposes a method in which a hole at the center of the optical disk is closed with a cap and an ultraviolet curable resin is dropped onto the center of the cap.
[0006]
[Problems to be solved by the invention]
However, in the method described in the publication, since almost the entire upper surface of the cap is covered with the ultraviolet curable resin, various problems arise in handling the cap. For example, in the method described in the publication, since the ultraviolet curable resin inevitably adheres to the arm for handling the cap, the arm is not only contaminated by the ultraviolet curable resin, but also the manufacturing apparatus. There is a possibility that the ultraviolet curable resin may adhere to this part and other manufacturing apparatuses, and this may cause the reliability of the entire manufacturing process to deteriorate. The UV curable resin adhering to the arm may be removed by providing an arm cleaning process, but in this case, the entire manufacturing process becomes complicated.
[0007]
Accordingly, an object of the present invention is to provide an improved method of manufacturing an optical disc.
[0008]
Another object of the present invention is to provide an improved method of manufacturing an optical disc including a step of applying a liquid substance by a spin coating method.
[0009]
Still another object of the present invention is to provide a method of manufacturing an optical disc in which contamination of an arm for handling a cap is prevented.
[0010]
[Means for Solving the Problems]
The object of the present invention is to handle the handling projection of a cap having a circular umbrella portion having one convex surface and a handling projection provided so as to project from the center of the convex surface of the umbrella portion, A placing step of placing a cap on a substantially central portion of the film formation substrate; and the convex surface of the umbrella portion of the cap. Position away from the center of A method of manufacturing an optical disc, comprising: a dropping step of dropping a liquid substance on the substrate; and a spin coating step of applying the liquid substance to the surface of the film forming substrate by integrally rotating the film forming substrate and the cap. Achieved by:
[0011]
According to the present invention, the cap is provided with a protrusion for handling, and further, a liquid substance to be applied Is dropped at a position away from the center of the convex surface of the cap umbrella The liquid substance to be applied does not adhere to the arm for handling the cap. For this reason, the liquid substance to be applied to the manufacturing apparatus or the like is attached, and the possibility of contamination is greatly reduced. Therefore, it is possible to improve the reliability of the entire manufacturing process and to provide an arm cleaning process. Disappears.
[0012]
In a preferred embodiment of the present invention, the cap further includes a positioning portion provided on a surface opposite to the convex surface of the umbrella portion, and placing the cap in the above-described placing step, This is performed by positioning using the positioning unit.
[0013]
According to the preferred embodiment of the present invention, since the positioning portion is provided on the cap, the placing step can be easily performed.
[0014]
In a further preferred aspect of the present invention, the umbrella portion of the cap has a shape that becomes thinner toward the outer peripheral portion, and the positioning portion of the cap is on the opposite side of the umbrella portion. It consists of a positioning projection that protrudes from the center of the surface.
[0015]
In a further preferred embodiment of the present invention, after the placing step, suction is performed to press the outermost peripheral portion of the umbrella portion of the cap against the surface of the film forming substrate by sucking the positioning protrusion of the cap. The method further includes a step.
[0016]
According to a further preferred embodiment of the present invention, since the flatness between the surface of the umbrella part and the surface of the film formation substrate can be improved, the film thickness of the liquid material applied in the spin coating process can be made more uniform. Can do.
[0017]
In a further preferred embodiment of the present invention, the liquid substance is an ultraviolet curable resin.
[0018]
In a further preferred embodiment of the present invention, the ultraviolet curable resin formed on the surface of the film-forming substrate is irradiated with ultraviolet light while covering the central portion of the film-forming substrate with a first ultraviolet mask. A first ultraviolet irradiation step for curing is further provided, and the diameter of the first ultraviolet mask is larger than the diameter of the umbrella portion of the cap.
[0019]
In a further preferred embodiment of the present invention, a removal step of handling the handling protrusion of the cap to remove the cap from the surface of the film formation substrate, and a surface of the film formation substrate after the removal step The method further includes a second ultraviolet irradiation step of irradiating the ultraviolet curable resin formed on the substrate with ultraviolet rays and curing the resin.
[0020]
In a further preferred embodiment of the present invention, the cap is made of plastic.
[0021]
In a further preferred embodiment of the present invention, the cap is made of polyolefin.
[0022]
According to a further preferred embodiment of the present invention, since the affinity between the cap and the ultraviolet curable resin is relatively low, it is possible to relatively easily separate the polyolefin that is the material of the cap from the ultraviolet curable resin. it can.
[0023]
The type of the optical disk that can be manufactured by the method according to the present invention is not particularly limited, and a protective film such as CD-ROM, CD-R, CD-RW, DVD-ROM, DVD-R, DVD-RW. It is possible to manufacture not only an optical disc of a type that is formed by spin coating, but also an optical disc of a type in which a light transmission layer is formed by spin coating.
[0024]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.
[0025]
FIG. 1 is a cross-sectional view schematically showing an optical disc 10 manufactured by the method according to this embodiment.
[0026]
As shown in FIG. 1, an optical disc 10 includes a substrate 11 having a thickness of about 1.1 mm, a reflective layer 12 having a thickness of about 70 to 130 nm, a recording layer 13 having a thickness of about 100 to 250 nm, The light transmission layer 14 having a thickness of about 50 to 150 μm is formed. A hole 15 is provided in the central portion of the optical disc 10. The substrate 11 is made of polycarbonate, and the reflective layer 12 is made of an alloy containing silver as a main component. The recording layer 13 has a multilayer structure in which the upper and lower sides of the phase change film on which data is actually recorded are sandwiched between dielectric films. Further, the light transmission layer 14 is made of an ultraviolet curable resin. When data is read from the optical disk 10 having such a structure, a read laser is irradiated from the light transmission layer 14 side, and the difference in the amount of reflected light is detected. Further, when writing data to the optical disc 10, a writing laser is irradiated from the light transmitting layer 14 side, thereby changing the state of the recording layer 13 (crystal structure of the phase change film).
[0027]
The optical disk 10 manufactured by the method according to this embodiment is a type of optical disk in which the light transmission layer 14 is formed by spin coating. However, as described above, the type of the optical disk that can be manufactured by the method according to the present invention is not limited to this, and includes an optical disk (for example, CD-ROM) of a type in which a protective film is formed by a spin coating method. It is.
[0028]
FIG. 2A is a perspective view schematically showing a main part of the manufacturing apparatus 20 for realizing the method according to the present embodiment, and FIG. 2B is a schematic sectional view thereof.
[0029]
As shown in FIGS. 2A and 2B, the manufacturing apparatus 20 includes a stage 21 having a diameter substantially equal to the diameter of the optical disc 10, a first protrusion 22 provided at the center of the stage 21, And a second protrusion 23 provided at the center of the first protrusion 22. The stage 21, the first projecting portion 22, and the second projecting portion 23 are substantially integrated, and when a rotating mechanism (not shown) is operated, these rotate together.
[0030]
The first protrusion 22 is placed with a chucking region in the vicinity of the center of the precursor of the optical disk 10 to be manufactured (in this specification, this may be referred to as “film-forming substrate 10 ′”). A plurality of first air inlets 24 are provided on the surface thereof. As a result, when a first intake mechanism (not shown) is activated, the film formation substrate 10 ′ placed on the first protrusion 22 is in an adsorbing state and is substantially fixed to the manufacturing apparatus 20.
[0031]
The diameter of the second protrusion 23 corresponds to the diameter of the hole 15 of the optical disc 10, and when the film formation substrate 10 ′ is placed on the first protrusion 22, the hole 15 of the film formation substrate 10 ′. In this state, the second protrusion 23 is inserted. A second air inlet 25 is provided at the center of the second protrusion 23. The second intake port 25 is sucked by a second intake mechanism (not shown).
[0032]
Next, a method for manufacturing an optical disc according to this embodiment will be described.
[0033]
First, the substrate 11 on which pregrooves are formed using a stamper is manufactured by an injection molding method. Next, the reflective layer 12 is formed by sputtering on the entire surface of the substrate 11 where the pregroove is formed, and then the recording layer 13 is formed by sputtering on the entire surface of the reflective layer 12.
[0034]
Next, as shown in FIG. 3, a film formation substrate 10 ′ in which a reflective layer 12 and a recording layer 13 are formed on a substrate 11 is used with a first arm 31 made of a suction pad having a flexible tip. The film formation substrate 10 ′ is placed on the first protrusion 22. Here, the first arm 31 is a part of the manufacturing apparatus 20. FIG. 4 shows a state in which the film formation substrate 10 ′ is placed on the first protrusion 22 in this way. Here, the film formation substrate 10 ′ is placed so that the side on which the recording layer 13 is formed is the upper surface. The first arm 31 is an area where data is not recorded on the surface of the recording layer 13 (typically, an area within about 21 mm from the center of the film formation substrate 10 ′) when transporting the film formation substrate 10 ′. ), That is, adsorb the vicinity of the hole 15. Note that an annular groove 16 may be formed on the substrate 11 inside a region where the data is not recorded due to the “stamper” in the mold used for molding. Is formed, it is preferable to transport the deposition substrate 10 ′ by adsorbing the inner region. 3 and 4 show a state in which the film formation substrate 10 ′ is conveyed by the first arm 31 adsorbing the inner region of the annular groove 16. The groove 16 is omitted in FIG.
[0035]
When the film formation substrate 10 ′ is placed on the first protrusion 22 in this way, the first air intake mechanism (not shown) is activated, and thereby the film formation substrate placed on the first protrusion 22. 10 ′ is substantially fixed in a state in which the second protrusion 23 is fitted in the hole 15 by adsorption by the first air inlet 24.
[0036]
Next, the cap 40 is transported using the second arm 32, and the cap 40 is placed at the center of the fixed film formation substrate 10 '. The second arm 32 is a part of the manufacturing apparatus 20. FIG. 5 shows a state in which the cap 40 is placed on the central portion of the film formation substrate 10 ′ in this way.
[0037]
FIG. 6 is a schematic perspective view showing the shape of the cap 40.
[0038]
As shown in FIG. 6, the cap 40 is provided with a circular umbrella portion 41 having a convex surface and a concave surface, the thickness of the cap portion 40 becoming thinner toward the outer peripheral portion, and one protruding from the center of the concave surface of the umbrella portion 41. A first protrusion 42 and a second protrusion 43 provided so as to protrude from the center of the convex surface of the umbrella portion 41 to the other are provided. Although not particularly limited, polyolefin is used as the material of the cap 40.
[0039]
The diameter of the umbrella portion 41 is set to be larger than the diameter of the hole 15 of the optical disc 10 to be manufactured and smaller than the innermost diameter of the data recording area of the optical disc 10 to be manufactured. When the annular groove 16 is present, the diameter is set larger than the diameter of the annular groove 16. For example, when the diameter of the hole 15 of the optical disk 10 to be manufactured is 15 mm, the diameter of the annular groove 16 is 36 mm, and the diameter of the innermost circumference of the data recording area of the optical disk 10 to be manufactured is 42 mm. The diameter of the umbrella portion 41 is preferably set to about 36.5 mm to 40 mm. Further, as the tapered shape of the umbrella portion 41, when the cap 40 is placed at the center of the film formation substrate 10 ′, the outermost peripheral portion (tip) of the umbrella portion 41 is in contact with the surface of the film formation substrate 10 ′, And it is set as the shape where an inner peripheral part does not contact | connect the 2nd protrusion part 23 of the manufacturing apparatus 20. FIG.
[0040]
Further, the diameter of the first protrusion 42 corresponds to the diameter of the second air inlet 25 of the manufacturing apparatus 20, and as shown in FIG. 5, the cap 40 is placed at the center of the film formation substrate 10 ′. When placed, the first inlet 42 is inserted into the second air inlet 25. That is, the first protrusion 42 serves as a positioning member when the cap 40 is placed. The length of the first protrusion 42 is not particularly limited.
[0041]
Further, the diameter and length of the second protrusion 43 are not particularly limited as long as the second protrusion 32 can be handled.
[0042]
When the cap 40 having such a shape is placed on the center portion of the fixed film formation substrate 10 ′, the second intake mechanism (not shown) is operated. As a result, the cap 40 is substantially fixed in a state where the first protrusion 42 is fitted to the second air inlet 25 due to the suction by the second air inlet 25. At this time, the umbrella portion 41 of the cap 40 is slightly deformed by adsorption by the second air inlet 25, the outermost peripheral portion (tip) of the umbrella portion 41 is in contact with the surface of the film forming substrate 10 ′, and the umbrella portion The concave surface portion 41 is pressed against the surface of the film formation substrate 10 ′ so as to contact the second protrusion 23 of the manufacturing apparatus 20.
[0043]
In this state, a rotation mechanism (not shown) is operated to rotate the stage 21, the first projecting portion 22, and the second projecting portion 23 integrally at a low speed, and as shown in FIG. The ultraviolet curable resin 50 is dropped on the convex surface of the portion 41. In this case, the film formation substrate 10 ′ is fixed to the first protrusion 22 by suction by the first air inlet 24, and the cap 40 is fixed to the second protrusion 23 by suction by the second air inlet 25. Therefore, the film formation substrate 10 ′ and the cap 40 also rotate together with the stage 21, the first protrusion 22, and the second protrusion 23. The dropping point of the ultraviolet curable resin 50 is preferably set as close to the center of the convex surface of the umbrella 41 as possible. As a result, the ultraviolet curable resin 50 stays on the convex surface of the umbrella portion 41 of the cap 40.
[0044]
Next, the stage 21, the first projecting portion 22, and the second projecting portion 23 are integrally rotated at a high speed by a rotation mechanism (not shown), and the convex surface of the umbrella portion 41 of the cap 40 as shown in FIG. The staying ultraviolet curable resin 50 is spin-coated on the surface of the film forming substrate 10 ′ (the surface of the recording layer 13) by centrifugal force. Thus, a thin film of the ultraviolet curable resin 50 having a thickness of about 100 μm is formed on the surface of the film forming substrate 10 ′ (the surface of the recording layer 13). In this case, the flatness of the thin film of the ultraviolet curable resin 50 becomes better as the dropping point in the dropping step of the ultraviolet curable resin 50 is closer to the center of the convex surface of the umbrella portion 41.
[0045]
When a thin film of the ultraviolet curable resin 50 is formed on the surface of the film formation substrate 10 ′ (the upper surface of the recording layer 13) in this manner, the stage 21 and the first protrusion 22 are then moved by a rotation mechanism (not shown). And the 2nd protrusion part 23 is integrally rotated at medium speed. In this state, as shown in FIG. 9, an ultraviolet curable resin 50 thin film formed on the surface of the film formation substrate 10 ′ is covered with the first ultraviolet mask 60 while covering the central portion of the film formation substrate 10 ′. Irradiate with ultraviolet rays to cure it. The first ultraviolet mask 60 is a part of the manufacturing apparatus 20.
[0046]
Here, the diameter of the first ultraviolet mask 60 is set to be larger than the diameter of the umbrella portion 41 of the cap 40 and smaller than the innermost diameter of the data recording area of the optical disc 10 to be manufactured. For this reason, in the ultraviolet irradiation step, the cap 40 of the ultraviolet curable resin 50 present on the surface of the umbrella portion 41 of the cap 40 and the ultraviolet curable resin 50 formed on the surface of the film forming substrate 10 ′ The portion formed in the vicinity is in an uncured state, and the ultraviolet curable resin 50 formed in the other portion is in a cured state.
[0047]
Next, after the operation of the rotation mechanism (not shown) is stopped to stop the rotation, the operation of the second intake mechanism (not shown) is stopped. At this time, the operating state of the first intake mechanism (not shown) is maintained. In this state, as shown in FIG. 10, the cap 40 is removed using the second arm 32. In this case, since the ultraviolet curable resin 50 formed at the interface between the outermost peripheral portion (tip) of the umbrella portion 41 of the cap 40 and the surface of the film forming substrate 10 ′ is in an uncured state, the cap can be used without difficulty. 40 can be removed. The removed cap 40 is collected in a used cap case (not shown), and then separated into polyolefin and ultraviolet curable resin, which are the materials of the cap 40, and recycled.
[0048]
After removing the cap 40 in this manner, as shown in FIG. 11, the film forming substrate is covered with the second ultraviolet mask 62 having the circular holes 63 except for the central portion of the film forming substrate 10 ′. The thin film of the uncured ultraviolet curable resin 50 formed on the surface of 10 ′ is irradiated with ultraviolet rays to be cured. The second ultraviolet mask 62 is a part of the manufacturing apparatus 20.
[0049]
Here, the diameter of the hole 63 of the second ultraviolet mask 62 corresponds to the diameter of the first ultraviolet mask 60. Therefore, in the ultraviolet irradiation process, the uncured ultraviolet curable resin 50 formed on the surface of the film forming substrate 10 ′ is irradiated with ultraviolet rays to be cured, and the already cured ultraviolet curable resin 50. Is not substantially irradiated. Thereby, alteration and discoloration of the ultraviolet curable resin 50 by excessive ultraviolet irradiation are prevented.
[0050]
Thus, the curing of the ultraviolet curable resin 50 formed on the surface of the film formation substrate 10 ′ is completed, and the film formation of the light transmission layer 14 is completed. Then, the operation of the first intake mechanism (not shown) is stopped, and as shown in FIG. 12, the optical disc 10 on which the light transmission layer 14 has been formed is unloaded.
[0051]
As described above, in the method of manufacturing an optical disc according to the present embodiment, the umbrella portion 41 into which the ultraviolet curable resin 50 is dropped, the first protrusion 42 that fits into the second air inlet 25, and the second projection. The cap 40 having the second protrusion 43 for handling by the arm 32 is used to spin coat the ultraviolet curable resin 50, thereby forming the light transmission layer 14, so that the cap 40 is handled. The ultraviolet curable resin 50 does not adhere to the second arm 32. For this reason, since the ultraviolet curable resin 50 adheres to other parts of the manufacturing apparatus 20 and other manufacturing apparatuses and the possibility of contamination is greatly reduced, the reliability of the entire manufacturing process can be improved. It is not necessary to provide a cleaning process for the second arm 32.
[0052]
Further, the umbrella portion 41 of the cap 40 used in the method of manufacturing the optical disc according to the present embodiment is slightly deformed by being sucked by the second air inlet 25 and is pressed against the surface of the film formation substrate 10 ′. Therefore, the flatness between the surface of the umbrella portion 41 and the surface of the film formation substrate 10 ′ is high, and therefore, it is possible to ensure good uniformity of the thin film of the ultraviolet curable resin 50 at the time of spin coating. It becomes possible.
[0053]
Furthermore, the cap 40 used in the method of manufacturing an optical disc according to the present embodiment is made of polyolefin, and has a relatively low affinity for the ultraviolet curable resin and a high resistance to a solvent. Separation from the functional resin can be performed relatively easily.
[0054]
The present invention is not limited to the above-described embodiments, and various modifications are possible within the scope of the invention described in the claims, and these are also included in the scope of the present invention. Needless to say.
[0055]
For example, in the above embodiment, the optical disc 10 is completed when the light transmissive layer 14 is formed by the ultraviolet irradiation process shown in FIG. 11, and then the hard coat is further applied to the surface of the light transmissive layer 14. A step of forming a layer may be added. The method of forming the hard coat layer is not particularly limited, but after spin-coating the hard coat solution, the solvent contained in the hard coat solution is evaporated using a panel heater and then cured by irradiating with ultraviolet rays. It is preferable. Thus, in the case of adding a hard coat layer, an ultraviolet irradiation step for curing the hard coat liquid is added, so the amount of ultraviolet irradiation in the steps shown in FIGS. It is preferable to reduce it. That is, in the steps shown in FIGS. 9 and 11, it is preferable to completely cure the ultraviolet curable resin 50 by making the ultraviolet curable resin 50 in a semi-cured state and irradiating with ultraviolet rays for curing the hard coat liquid. .
[0056]
Moreover, in the said embodiment, the ultraviolet curable resin 50 of the part which is not covered with the 1st ultraviolet mask 60 is hardened by the ultraviolet irradiation process shown in FIG. 9, and the ultraviolet irradiation process shown in FIG. The portion of the ultraviolet curable resin 50 that is not covered by the second ultraviolet mask 62 is cured, but the portion that is not covered by the first ultraviolet mask 60 is cured by the ultraviolet irradiation process shown in FIG. In the ultraviolet irradiation process shown in FIG. 11, the ultraviolet curable resin 50 is cured by irradiating the entire surface with ultraviolet rays without using the second ultraviolet mask 62. It doesn't matter. According to this, since it is not necessary to use two types of UV masks, the manufacturing cost can be reduced.
[0057]
Furthermore, in the said embodiment, although the cap 40 which consists of polyolefin is used, it is not limited to this as a material of the cap 40, For example, other plastics, such as a polycarbonate, a metal, etc. are used. be able to. When plastics are used, an appropriate elasticity is given to the cap 40 itself, so that there is an advantage of excellent adhesion to the film formation substrate 10 ′.
[0058]
Moreover, although the umbrella part 41 of the cap 40 used in this embodiment has the shape where the thickness becomes thin, so that it goes to an outer peripheral part, the shape where thickness becomes thin, so that the umbrella part 41 goes to an outer peripheral part. It is not essential, and at least a portion may have a region where the thickness is constant or increased.
[0059]
Furthermore, although the umbrella part 41 of the cap 40 used in this embodiment has a convex surface and a concave surface, it is not essential that the back surface of the convex surface is a concave surface, and this may be a flat surface.
[0060]
Further, the cap 40 used in the present embodiment is provided with a first protrusion 42, and the first protrusion 42 is positioned by fitting into the second air inlet 25. It is not essential to provide such a first protrusion 42 as long as positioning is possible. Therefore, instead of the first protrusion 42, a concave portion may be provided in the center of the umbrella portion 41, thereby positioning the cap 40.
[0061]
Further, the layer structure of the optical disk manufactured by the method according to the present invention and the material of each layer are not particularly limited, and any optical disk can be used as long as it is a method including a step of applying a liquid substance by spin coating. It can also be applied to the manufacture of
[0062]
【The invention's effect】
As described above, according to the present invention, since the ultraviolet curable resin does not adhere to the arm for handling the cap, the ultraviolet curable resin adheres to other parts of the manufacturing apparatus or other manufacturing apparatus. And the risk of contamination is greatly reduced. As a result, the reliability of the entire manufacturing process can be improved, and since it is not necessary to provide an arm cleaning process, it is possible to avoid complication of the process.
[Brief description of the drawings]
FIG. 1 is a cross-sectional view schematically showing an optical disc 10 manufactured by a method according to a preferred embodiment of the present invention.
2A is a perspective view schematically showing a main part of a manufacturing apparatus 20 for realizing a method according to a preferred embodiment of the present invention, and FIG. 2B is a schematic cross-sectional view thereof. .
FIG. 3 is a diagram showing a step (carrying-in step) of a method for manufacturing an optical disc according to a preferred embodiment of the present invention.
FIG. 4 is a diagram showing one step of the optical disc manufacturing method according to a preferred embodiment of the present invention (placement step of the film forming substrate 10 ′).
FIG. 5 is a diagram showing one step of the optical disc manufacturing method (cap 40 mounting step) according to a preferred embodiment of the present invention.
6 is a schematic perspective view showing the shape of a cap 40. FIG.
FIG. 7 is a diagram showing one step of the optical disc manufacturing method (dropping step of the ultraviolet curable resin 50) according to a preferred embodiment of the present invention.
FIG. 8 is a diagram showing one step (spin coating step) of a method of manufacturing an optical disc according to a preferred embodiment of the present invention.
FIG. 9 is a diagram showing one step (first ultraviolet irradiation step) of the method of manufacturing an optical disc according to a preferred embodiment of the present invention.
FIG. 10 is a diagram showing one step of the optical disc manufacturing method (cap 40 removing step) according to a preferred embodiment of the present invention.
FIG. 11 is a diagram showing one step (second ultraviolet irradiation step) of the method of manufacturing an optical disc according to a preferred embodiment of the present invention.
FIG. 12 is a diagram showing one step (unloading step) of the method of manufacturing an optical disc according to a preferred embodiment of the present invention.
FIG. 13 is a cross-sectional view showing a layer structure of a CD-ROM.
[Explanation of symbols]
1 Light transmission layer
2 Recording layer
3 Protective layer
10 Optical disc
10 'Deposition substrate
11 Substrate
12 Reflective layer
13 Recording layer
14 Light transmission layer
15 holes
16 Annular groove
20 Production equipment
21 stages
22 First protrusion
23 Second protrusion
24 First inlet
25 Second inlet
31 First arm
32 Second arm
40 cap
41 Umbrella
42 1st protrusion
43 Second protrusion
50 UV curable resin
60 first UV mask
62 Second UV Mask
63 holes

Claims (9)

The handling projection of a cap having a circular umbrella portion having one convex surface and a handling projection provided so as to protrude from the center of the convex portion of the umbrella portion is handled, and the cap is abbreviated to the film forming substrate. A placement step of placing the substrate on a central portion; a dropping step of dropping a liquid substance at a position away from the center of the convex surface of the umbrella portion of the cap; and the film-forming substrate and the cap rotating together. And a spin coating step of applying the liquid substance to the surface of the film formation substrate.   The cap further includes a positioning portion provided on the surface of the umbrella portion opposite to the convex surface, and the cap is placed in the placing step by positioning using the positioning portion. The method of manufacturing an optical disk according to claim 1.   The cap portion of the cap has a shape that becomes thinner toward the outer peripheral portion, and the positioning portion of the cap is provided protruding from the center of the opposite surface of the cap portion. 3. The method of manufacturing an optical disk according to claim 2, comprising a positioning protrusion.   A suction step of pressing the outermost peripheral portion of the umbrella portion of the cap against the surface of the film forming substrate by sucking the positioning protrusion of the cap after the placing step. Item 4. A method for manufacturing an optical disk according to Item 3.   The optical disk manufacturing method according to claim 1, wherein the liquid substance is an ultraviolet curable resin.   A first ultraviolet irradiation step of irradiating the ultraviolet curable resin formed on the surface of the film-forming substrate with ultraviolet rays while covering the central portion of the film-forming substrate with a first ultraviolet mask and curing it; The method of manufacturing an optical disc according to claim 5, wherein the diameter of the first ultraviolet mask is larger than the diameter of the umbrella portion of the cap.   Removing the cap from the surface of the film formation substrate by handling the handling protrusion of the cap; and after the removal step, the ultraviolet curable resin formed on the surface of the film formation substrate. The optical disk manufacturing method according to claim 6, further comprising a second ultraviolet irradiation step of irradiating the ultraviolet ray and curing the ultraviolet ray.   8. The method of manufacturing an optical disc according to claim 1, wherein the cap is made of plastic.   9. The method of manufacturing an optical disk according to claim 8, wherein the cap is made of polyolefin.

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