JP4079151B2 - 研磨方法 - Google Patents
研磨方法 Download PDFInfo
- Publication number
- JP4079151B2 JP4079151B2 JP2005015113A JP2005015113A JP4079151B2 JP 4079151 B2 JP4079151 B2 JP 4079151B2 JP 2005015113 A JP2005015113 A JP 2005015113A JP 2005015113 A JP2005015113 A JP 2005015113A JP 4079151 B2 JP4079151 B2 JP 4079151B2
- Authority
- JP
- Japan
- Prior art keywords
- polishing
- wafer
- dressing
- tool
- holding
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- Grinding-Machine Dressing And Accessory Apparatuses (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005015113A JP4079151B2 (ja) | 2005-01-24 | 2005-01-24 | 研磨方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005015113A JP4079151B2 (ja) | 2005-01-24 | 2005-01-24 | 研磨方法 |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9054096A Division JP3697775B2 (ja) | 1996-03-19 | 1996-03-19 | 研磨装置 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007318981A Division JP4803167B2 (ja) | 2007-12-10 | 2007-12-10 | 研磨装置 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2005153141A JP2005153141A (ja) | 2005-06-16 |
JP2005153141A5 JP2005153141A5 (pt) | 2005-09-08 |
JP4079151B2 true JP4079151B2 (ja) | 2008-04-23 |
Family
ID=34737565
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2005015113A Expired - Fee Related JP4079151B2 (ja) | 2005-01-24 | 2005-01-24 | 研磨方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP4079151B2 (pt) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009248282A (ja) * | 2008-04-10 | 2009-10-29 | Showa Denko Kk | 研磨装置及び研磨補助装置、ならびに、研磨方法 |
US9238293B2 (en) * | 2008-10-16 | 2016-01-19 | Applied Materials, Inc. | Polishing pad edge extension |
CN106737129A (zh) * | 2016-12-16 | 2017-05-31 | 中国科学院长春光学精密机械与物理研究所 | 可调转速比的平面研磨装置 |
CN110549242B (zh) * | 2018-05-31 | 2020-10-23 | 许栋梁 | 全向整合式调节装置 |
JP2024085517A (ja) * | 2022-12-15 | 2024-06-27 | 株式会社荏原製作所 | 研磨装置 |
-
2005
- 2005-01-24 JP JP2005015113A patent/JP4079151B2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JP2005153141A (ja) | 2005-06-16 |
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