JP4073540B2 - Water repellent member and manufacturing method thereof - Google Patents

Water repellent member and manufacturing method thereof Download PDF

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Publication number
JP4073540B2
JP4073540B2 JP10254098A JP10254098A JP4073540B2 JP 4073540 B2 JP4073540 B2 JP 4073540B2 JP 10254098 A JP10254098 A JP 10254098A JP 10254098 A JP10254098 A JP 10254098A JP 4073540 B2 JP4073540 B2 JP 4073540B2
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Japan
Prior art keywords
water
repellent
film
plasma
processed
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JP10254098A
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Japanese (ja)
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JPH11290767A (en
Inventor
雅明 柿本
善和 高橋
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Ulvac Inc
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Ulvac Inc
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  • Application Of Or Painting With Fluid Materials (AREA)
  • Polymerisation Methods In General (AREA)
  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
  • Chemical Vapour Deposition (AREA)

Description

【0001】
【発明の属する技術分野】
本発明は、結露や水による黴発生、絶縁破壊等の不都合を生ずる部材、例えば住宅用建材、電気絶縁用絶縁碍子等の部材の撥水性を改良した撥水性部材及びその製造方法に関する。
【0002】
【従来の技術】
従来、この種の部材には、親水性のセラミックスもしくは合成樹脂が使用され、部材がそのまま露出している状態で用いられている。
【0003】
【発明が解決しようとする課題】
例えば、電気絶縁用碍子等の部材は、降雨、霧などの気象状況では、部材の外面に水滴が付着し、電気絶縁性が悪くなる欠点があり、また、住宅建材であるアルミサッシ等では、冬季、結露によって大量の水滴が発生し、この水滴が原因で黴が発生したりする。
【0004】
本発明は、簡単に水滴の付着を防止できる撥水性の部材を提供すること及びこの部材を製造するのに適した方法を提供することを目的とするものである。
【0005】
【課題を解決するための手段】
本発明では、真空中で直流高電圧を印加して発生させたグロー放電を利用してモノマーをプラズマ重合せしめ、正の電極側で得られる撥水性のプラズマ重合膜を表面に有する部材により上記の目的を達成する。該プラズマ重合膜は、フッ化ビニリデンモノマーを原料とするプラズマ重合膜であることが好ましい。
【0006】
上記目的はまた、真空下、真空処理室内に原料ガスとしてフッ化ビニリデンのモノマーガスを導入し、該真空処理室内に用意した被処理部材の表面直上に設けた網状電極に正の直流高電圧を印加し、モノマーガスの圧力及び印加電圧を制御してグロー放電を発生させることによりプラズマ重合させ、該被処理部材の表面に撥水性のプラズマ重合膜を成膜することにより達成される。該被処理部材には、例えば金属、ガラス、セラミックス又は合成樹脂等からなるものが望ましい。
【0007】
また、真空下、真空処理室内に金属、ガラス、セラミックス又は合成樹脂からなる被処理部材を用意し、この被処理部材自体に直接又は該被処理部材を保持する電極に正の直流高電圧を印加し、モノマーガスの圧力及び印加電圧を制御してグロー放電を発生させることによりプラズマ重合させ、該被処理部材の表面に撥水性のプラズマ重合膜を成膜することによっても上記の目的が達成される。
【0008】
前記被処理部材としては、例えばサッシのような住宅用建材又は絶縁碍子等が望ましい。
【0009】
【発明の実施の形態】
本発明の撥水性部材を得るための被処理部材としては、上記したように、一般的に使用されているガラス、セラミックス、合成樹脂又は金属からなる被処理部材が用いられる。本発明の実施の形態の一例によれば、該撥水性部材は、図1に示すように、被処理部材1の少なくとも片面に直接に撥水性のプラズマ重合膜2を形成したものである。該プラズマ重合膜2としては、フッ化ビニリデンモノマーのガスを直流高電圧を印加して発生させたプラズマ中で分解励起し、該被処理部材1の表面上で重合して成膜したフッ化ビニリデンポリマーからなる膜が十分な撥水性を持つので適当である。該プラズマ重合膜2は通常100〜300nmの厚さに成膜される。
【0010】
本発明者等の実験によれば、プラズマ重合膜はこれに接触する水滴の接触角を大きくする性質を有し、その接触角はプラズマ重合膜の成膜時の印加電圧に略比列することがわかっているが、この場合に、成膜に先立ち被処理部材に導電膜を形成しておく必要があり、この導電膜形成工程が成膜工程を複雑化しコストアップの原因となっている。かくして、更に実験を重ね、簡単かつ安価に製造できる成膜法と膜の種類を探究したところ、その接触角はまたプラズマ重合膜の成膜時のモノマーガスの圧力にも略比例することから、プラズマ重合膜の成膜時のモノマーガスの圧力及び印加電圧を制御すれば、水に対する接触角が高い、特に正の電極側で成膜した場合、160°を越えるような高い撥水性のプラズマ重合膜を製造できることが判明した。また、フッ化ビニリデンモノマーガスを使用してプラズマ重合膜を得る場合、その重合膜は該ガス圧力に比例して接触角が変化するので、このモノマーはプラズマ重合膜の原料として好都合である。
【0011】
本発明の製造方法の実施に使用出来る装置の一例は、図2に示す如くであり、真空ポンプに接続した真空排気口3とプラズマ重合膜2の原料モノマー4を収容した蒸発源からの導入口10とを備えた真空処理室5からなり、その室内にガラス板やセラミックス板や合成樹脂板又は金属板の被処理部材1を保持部材(図示せず)に載せて対向電極7に対向させて設置出来るようになっており、該被処理部材1の成膜面すなわち対向電極7と対向した表面の直上に直流電源8へ接続した網状電極6を設けて構成されている。
【0012】
上記装置を使用する場合、まず、該真空処理室5内を例えば10-2Paに真空排気し、モノマーガス導入バルブ9を調節しながら蒸発源から原料モノマー4の蒸気を該真空処理室5内へ導入して、所定の圧力、例えば30Paの圧力とする。次いで、該網状電極5に該直流電源8から正の直流高電圧を印加するとグロー放電が発生し、これにより該蒸気が分解励起されて該被処理部材1上にプラズマ重合膜2が形成される。
【0013】
該プラズマ重合膜2の成膜時の印加電圧と該膜2の水に対する接触角とは比列関係を持ち、例えばフッ化ビニリデンモノマーを使用して圧力を30Paとした場合、図3のように水滴の接触角が印加電圧に比例して変化し、+1kVの電圧下で接触角160°を有する撥水性の良好な膜が得られる。
【0014】
なお、印加電圧を1kV以上にすると、放電が不安定になって均一な成膜が行えなくなり、またガス圧力を30Paより高くすると水に対する接触角が小さくなり、30Paより低くして行くと放電が不安定になる。
【0015】
該被処理部材1の寸法形状は任意であり、例えば曲面を有する被処理部材や1×1mのような大表面積を有する被処理部材であっても、網状電極5を被処理部材1の表面に沿わせて設けることで、均一にプラズマ重合膜2を成膜出来る。被処理部材1の表面と網状電極6との間隔は10mm程度が望ましい。
【0016】
また、本発明の製造方法の実施に使用出来る装置の別の例は、図2に示す装置において網状電極を設けずに、該被処理部材自体に直接又は該被処理部材を保持するための保持部材を兼ねる電極に、正の直流高電圧が印加できるように構成されている。すなわち、この装置では、被処理部材として金属、ガラス、セラミックス又は合成樹脂からなる部材を用いるが、金属からなる被処理部材にはその部材自体に直接正の直流高電圧を印加し又は該被処理部材保持用電極に正の直流高電圧を印加してグロー放電を発生出来るように構成されている。かかる装置を用いて、図2に示す装置の場合と同様にして、撥水性のプラズマ重合膜を成膜出来る。
【0017】
【実施例】
(実施例1)
図2に示した構成の装置を使用して、真空処理室5内に厚さ5mm、縦横0.3×0.3mの板ガラスの窓基材1を設置し、該真空処理室5内を10-2Paに真空排気したのち、フッ化ビニリデンのモノマーを入れた蒸発源から導入口10を経て該室5内にモノマー蒸気を導入し、30Paに圧力を調整し、網状電極6に+1kVの高電圧を印加した。該網状電極6と対向電極7との間でグロー放電が発生し、該窓基材1の表面に100nmの厚さでフッ化ビニリデンのプラズマ重合膜2が形成されたところで電圧の印加を止め、グロー放電を消滅させ、そこで成膜を停止した。得られた窓材を傾斜させてその表面に水滴をかけたところ、水滴はそのまま流下し、水の膜は形成されなかった。このフッ化ビニリデンのプラズマ重合膜の接触角は160°であった。
【0018】
上記実施例では、被処理部材として板ガラスの窓基材を用いたが金属板、セラミックス板及び合成樹脂板からなる被処理部材を用いて得たプラズマ重合膜の場合にも、同様に高い接触角を有する撥水性のプラズマ重合膜が得られた。
【0019】
かくして、住宅用建材、絶縁碍子の撥水性を改良することができる。
【0020】
(実施例2)
図2に示した装置であって真空室内に網状電極を設けていない装置を使用して、該真空室内に厚さ2mm、縦横0.4×0.4mの金属板の被処理部材を設置し、この被処理部材に直接+1kVの高電圧を印加し、実施例1と同様に成膜処理したところ、実施例1の場合と同様に、高い接触角を有する撥水性のプラズマ重合膜を成膜出来た。
【0021】
また、上記金属板の代わりに、厚さ5mm、縦横0.3×0.3mの合成樹脂板又はセラミックス板を被処理部材保持用電極上に設置し、この電極に正の直流高電圧を印加し、実施例2と同様に成膜処理したところ、実施例2の場合と同様に、高い接触角を有する撥水性のプラズマ重合膜を成膜出来た。
【0022】
【発明の効果】
本発明によれば、正の直流高電圧を印加して発生させたグロー放電を利用するプラズマ重合により正の電極側で得られたフッ化ビニリデンポリマーからなる撥水性の膜が被処理部材の表面に直接形成されているので、製造が簡単でかつ製造コストが安価な、容易に水滴の付着を防止できる撥水性の高い部材が提供できる。
【0023】
また、本発明の製造方法によれば、真空中、モノマーガスを導入し、真空処理室内の被処理部材の表面直上に設けた網状電極に正の直流高電圧を印加しし、モノマーガスの圧力及び印加電圧を制御してグロー放電を発生させることによりプラズマ重合させ、又は被処理部材自体に直接若しくは被処理部材を保持する電極に正の直流高電圧を印加してグロー放電を発生させることによりプラズマ重合させ、該被処理部材の表面に撥水性のプラズマ重合膜を直接成膜しているので、プラズマ重合膜の成膜時のモノマーガスの圧力及び印加電圧を制御して、水に対する高い接触角、特に正の電極側で成膜した場合、160°を越えるような接触角を有し、容易に水滴の付着を防止できるプラズマ重合膜を備えた撥水性の高い部材を、簡単にかつ安価に製造できる。
【図面の簡単な説明】
【図1】本発明の撥水性部材の1例の切断側面図。
【図2】本発明の製造方法に使用した装置の一例の模式的断面図。
【図3】印加電圧とプラズマ重合膜の水に対する接触角との関係を示す線図。
【符号の説明】
1 被処理部材(窓基材) 2 プラズマ重合膜
3 真空排気口 4 モノマー
5 真空処理室 6 網状電極
7 対向電極 8 直流電源
9 モノマーガス導入バルブ 10 導入口
[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a water repellent member having improved water repellency of a member that causes inconveniences such as condensation, water generation, and dielectric breakdown, for example, a building material for housing and an insulator for electrical insulation, and a method for manufacturing the same.
[0002]
[Prior art]
Conventionally, for this type of member, a hydrophilic ceramic or synthetic resin is used, and the member is used as it is exposed.
[0003]
[Problems to be solved by the invention]
For example, a member such as an insulator for electrical insulation has a defect that water drops adhere to the outer surface of the member in a weather situation such as rain or fog, and the electrical insulation becomes worse, and in an aluminum sash that is a housing building material, In winter, a lot of water droplets are generated due to condensation, and the water droplets cause wrinkles.
[0004]
An object of the present invention is to provide a water-repellent member that can easily prevent adhesion of water droplets, and to provide a method suitable for manufacturing the member.
[0005]
[Means for Solving the Problems]
In the present invention, the monomer is plasma polymerized using glow discharge generated by applying a DC high voltage in a vacuum, and the above-described member is provided on the surface with a water-repellent plasma polymerized film obtained on the positive electrode side. Achieve the goal. The plasma polymerized film is preferably a plasma polymerized film using a vinylidene fluoride monomer as a raw material.
[0006]
Another object of the present invention is to introduce a monomer gas of vinylidene fluoride as a raw material gas into the vacuum processing chamber under vacuum, and apply a positive DC high voltage to the mesh electrode provided immediately above the surface of the member to be processed prepared in the vacuum processing chamber. This is achieved by controlling the pressure of the monomer gas and the applied voltage to generate glow discharge to cause plasma polymerization, and forming a water-repellent plasma polymerization film on the surface of the member to be processed. The member to be treated is preferably made of, for example, metal, glass, ceramics or synthetic resin.
[0007]
In addition, a member to be processed made of metal, glass, ceramics or synthetic resin is prepared in a vacuum processing chamber under vacuum, and a positive DC high voltage is applied directly to the member to be processed or to an electrode holding the member to be processed. The above object can also be achieved by controlling the pressure of the monomer gas and the applied voltage to generate glow discharge to cause plasma polymerization, and forming a water-repellent plasma polymerization film on the surface of the member to be processed. The
[0008]
The member to be treated is preferably a building material for housing such as a sash or an insulator.
[0009]
DETAILED DESCRIPTION OF THE INVENTION
As described above, as the member to be processed for obtaining the water repellent member of the present invention, a member to be processed made of glass, ceramics, synthetic resin or metal, which is generally used, is used. According to an example of the embodiment of the present invention, the water-repellent member is formed by forming a water-repellent plasma polymerized film 2 directly on at least one surface of the member 1 to be treated, as shown in FIG. As the plasma polymerized film 2, vinylidene fluoride monomer gas is decomposed and excited in a plasma generated by applying a DC high voltage and polymerized on the surface of the member to be processed 1 to form a vinylidene fluoride film. A polymer film is suitable because it has sufficient water repellency. The plasma polymerized film 2 is usually formed to a thickness of 100 to 300 nm.
[0010]
According to the experiments by the present inventors, the plasma polymerized film has the property of increasing the contact angle of water droplets contacting the plasma polymerized film, and the contact angle is approximately proportional to the applied voltage when the plasma polymerized film is formed. However, in this case, it is necessary to form a conductive film on the member to be processed prior to film formation, and this conductive film formation process complicates the film formation process and causes an increase in cost. Thus, further experiments were conducted, and the film forming method and the type of film that could be manufactured easily and inexpensively were explored. The contact angle is also substantially proportional to the pressure of the monomer gas during the formation of the plasma polymerized film. If the pressure of the monomer gas and the applied voltage are controlled during the formation of the plasma polymerized film, the contact angle with water is high, especially when the film is formed on the positive electrode side, the water-repellent plasma polymerization exceeds 160 °. It has been found that membranes can be produced. Further, when a plasma polymerized film is obtained using a vinylidene fluoride monomer gas, the contact angle of the polymerized film changes in proportion to the gas pressure, so this monomer is convenient as a raw material for the plasma polymerized film.
[0011]
An example of an apparatus that can be used for carrying out the manufacturing method of the present invention is as shown in FIG. 2, and is an inlet from an evaporation source containing a vacuum exhaust port 3 connected to a vacuum pump and a raw material monomer 4 of a plasma polymerization film 2. 10, a processing member 1 made of a glass plate, a ceramic plate, a synthetic resin plate, or a metal plate is placed on a holding member (not shown) and opposed to the counter electrode 7. The mesh electrode 6 connected to the DC power source 8 is provided immediately above the film formation surface of the member 1 to be processed, that is, the surface facing the counter electrode 7.
[0012]
When the apparatus is used, first, the inside of the vacuum processing chamber 5 is evacuated to 10 −2 Pa, for example, and the vapor of the raw material monomer 4 is supplied from the evaporation source while adjusting the monomer gas introduction valve 9. To a predetermined pressure, for example, 30 Pa. Next, when a positive DC high voltage is applied to the mesh electrode 5 from the DC power supply 8, glow discharge is generated, whereby the vapor is decomposed and excited to form a plasma polymerized film 2 on the member 1 to be processed. .
[0013]
The applied voltage at the time of the formation of the plasma polymerized film 2 and the contact angle of the film 2 with respect to water have a specific relationship. For example, when vinylidene fluoride monomer is used and the pressure is set to 30 Pa, as shown in FIG. The contact angle of the water droplet changes in proportion to the applied voltage, and a film with good water repellency having a contact angle of 160 ° under a voltage of +1 kV can be obtained.
[0014]
If the applied voltage is 1 kV or higher, the discharge becomes unstable and uniform film formation cannot be performed. If the gas pressure is higher than 30 Pa, the contact angle with water decreases, and if it is lower than 30 Pa, the discharge occurs. It becomes unstable.
[0015]
The dimension and shape of the member 1 to be processed are arbitrary. For example, even if the member to be processed has a curved surface or a member to be processed having a large surface area of 1 × 1 m, the mesh electrode 5 is placed on the surface of the member 1 to be processed. By providing along, the plasma polymerization film | membrane 2 can be formed into a film uniformly. The distance between the surface of the member 1 to be processed and the mesh electrode 6 is preferably about 10 mm.
[0016]
Further, another example of an apparatus that can be used for carrying out the manufacturing method of the present invention is a holding apparatus for holding the member to be processed directly or without the mesh electrode in the apparatus shown in FIG. A positive DC high voltage can be applied to the electrode serving also as a member. That is, in this apparatus, a member made of metal, glass, ceramics or synthetic resin is used as a member to be treated. However, a positive DC high voltage is directly applied to the member to be treated, or the material to be treated. A glow discharge can be generated by applying a positive DC high voltage to the member holding electrode. Using such an apparatus, a water-repellent plasma polymerized film can be formed in the same manner as the apparatus shown in FIG.
[0017]
【Example】
Example 1
A plate glass window substrate 1 having a thickness of 5 mm and a length and width of 0.3 × 0.3 m is installed in the vacuum processing chamber 5 using the apparatus having the configuration shown in FIG. After evacuating to -2 Pa, monomer vapor was introduced into the chamber 5 from the evaporation source containing vinylidene fluoride monomer through the inlet 10, the pressure was adjusted to 30 Pa, and a high voltage of +1 kV was applied to the mesh electrode 6. A voltage was applied. When glow discharge occurs between the mesh electrode 6 and the counter electrode 7 and the plasma polymerization film 2 of vinylidene fluoride is formed on the surface of the window base material 1 with a thickness of 100 nm, the application of voltage is stopped. The glow discharge was extinguished and the film formation was stopped there. When the obtained window material was inclined and water droplets were applied to the surface, the water droplets flowed down as they were, and no water film was formed. The contact angle of this vinylidene fluoride plasma polymerized film was 160 °.
[0018]
In the above embodiment, a plate glass window substrate is used as the member to be treated. However, the plasma contact film obtained by using the member to be treated consisting of a metal plate, a ceramic plate and a synthetic resin plate also has a high contact angle. A water-repellent plasma polymerized film having the following was obtained.
[0019]
Thus, it is possible to improve the water repellency of residential building materials and insulators.
[0020]
(Example 2)
Using the apparatus shown in FIG. 2 that does not have a mesh electrode in a vacuum chamber, a metal plate to be processed having a thickness of 2 mm and a height and width of 0.4 × 0.4 m is installed in the vacuum chamber. Then, a high voltage of +1 kV was directly applied to the member to be processed, and a film formation process was performed in the same manner as in Example 1. As in Example 1, a water-repellent plasma polymerized film having a high contact angle was formed. done.
[0021]
In place of the metal plate, a synthetic resin plate or ceramic plate having a thickness of 5 mm and a width and width of 0.3 × 0.3 m is placed on the electrode for holding the member to be processed, and a positive DC high voltage is applied to the electrode. Then, when a film formation process was performed in the same manner as in Example 2, a water-repellent plasma polymerization film having a high contact angle could be formed as in Example 2.
[0022]
【The invention's effect】
According to the present invention, a water-repellent film made of vinylidene fluoride polymer obtained on the positive electrode side by plasma polymerization using glow discharge generated by applying a positive DC high voltage is the surface of the member to be treated. Therefore, it is possible to provide a highly water-repellent member that is easy to manufacture and inexpensive to manufacture, and that can easily prevent water droplets from being attached.
[0023]
According to the production method of the present invention, in a vacuum, introducing a monomer gas, and applying a positive DC high voltage to the mesh electrode provided directly on the surface of the vacuum treatment chamber of the member to be processed, the monomer gas Plasma polymerization is performed by controlling the pressure and applied voltage to generate glow discharge, or generating a glow discharge by applying a positive DC high voltage directly to the member to be processed or to the electrode holding the member to be processed. Since the water-repellent plasma polymerized film is directly formed on the surface of the member to be treated, the pressure of the monomer gas and the applied voltage during the formation of the plasma polymerized film are controlled so When forming a film on the contact angle, particularly on the positive electrode side, a highly water-repellent member having a plasma polymerization film that has a contact angle exceeding 160 ° and can easily prevent adhesion of water droplets can be easily and Inexpensive It can be produced.
[Brief description of the drawings]
FIG. 1 is a cut side view of an example of a water repellent member of the present invention.
FIG. 2 is a schematic cross-sectional view of an example of an apparatus used in the manufacturing method of the present invention.
FIG. 3 is a diagram showing a relationship between an applied voltage and a contact angle of a plasma polymerization film with water.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 To-be-processed member (window base material) 2 Plasma polymerization film | membrane 3 Vacuum exhaust port 4 Monomer 5 Vacuum processing chamber 6 Reticulated electrode 7 Counter electrode 8 DC power supply 9 Monomer gas introduction valve 10 Inlet port

Claims (5)

真空下、真空処理室内に原料ガスとしてフッ化ビニリデンのモノマーガスを導入し、該真空処理室内に用意した被処理部材の表面直上に設けた網状電極に正の直流高電圧を印加し、モノマーガスの圧力及び印加電圧を制御してグロー放電を発生させることによりプラズマ重合させ、該被処理部材の表面に撥水性のプラズマ重合膜を成膜して撥水性部材を得ることを特徴とする撥水性部材の製造方法。  Under vacuum, a monomer gas of vinylidene fluoride is introduced as a source gas into the vacuum processing chamber, and a positive DC high voltage is applied to the mesh electrode provided immediately above the surface of the member to be processed prepared in the vacuum processing chamber. A water-repellent member is obtained by plasma-polymerizing by generating glow discharge by controlling the pressure and the applied voltage, and forming a water-repellent plasma-polymerized film on the surface of the treated member. Manufacturing method of member. 真空下、真空処理室内に原料ガスとしてフッ化ビニリデンのモノマーガスを導入し、該真空処理室内に用意した被処理部材自体に直接又は該被処理部材を保持する電極に正の直流高電圧を印加し、モノマーガスの圧力及び印加電圧を制御してグロー放電を発生させることによりプラズマ重合させ、該被処理部材の表面に撥水性のプラズマ重合膜を成膜して撥水性部材を得ることを特徴とする撥水性部材の製造方法。  Under vacuum, a monomer gas of vinylidene fluoride is introduced as a raw material gas into the vacuum processing chamber, and a positive DC high voltage is applied directly to the target member prepared in the vacuum processing chamber or to the electrode holding the target member. And plasma polymerization is performed by generating glow discharge by controlling the pressure of the monomer gas and the applied voltage, and a water-repellent plasma polymerized film is formed on the surface of the treated member to obtain a water-repellent member. A method for producing a water repellent member. 前記モノマーガスの圧力が30Paで、前記印加電圧が+1kVであることを特徴とする請求項1又は2に記載の撥水性部材の製造方法。  The method for producing a water-repellent member according to claim 1 or 2, wherein the pressure of the monomer gas is 30 Pa and the applied voltage is +1 kV. 請求項1〜3に記載の方法により成膜したフッ化ビニリデンポリマーからなり、水に対する接触角が160°を越える撥水性の膜を表面に有することを特徴とする撥水性部材。A water-repellent member comprising a vinylidene fluoride polymer film formed by the method according to claim 1 and having a water-repellent film having a contact angle with water exceeding 160 ° on the surface. 前記撥水性部材が撥水性のサッシ又は絶縁碍子である請求項4記載の撥水性部材。  The water repellent member according to claim 4, wherein the water repellent member is a water repellent sash or an insulator.
JP10254098A 1998-04-14 1998-04-14 Water repellent member and manufacturing method thereof Expired - Fee Related JP4073540B2 (en)

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