JPH11290767A - Water-repellent member and its production - Google Patents

Water-repellent member and its production

Info

Publication number
JPH11290767A
JPH11290767A JP10254098A JP10254098A JPH11290767A JP H11290767 A JPH11290767 A JP H11290767A JP 10254098 A JP10254098 A JP 10254098A JP 10254098 A JP10254098 A JP 10254098A JP H11290767 A JPH11290767 A JP H11290767A
Authority
JP
Japan
Prior art keywords
water
repellent
vacuum
plasma
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10254098A
Other languages
Japanese (ja)
Other versions
JP4073540B2 (en
Inventor
Masaaki Kakimoto
雅明 柿本
Yoshikazu Takahashi
善和 高橋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc filed Critical Ulvac Inc
Priority to JP10254098A priority Critical patent/JP4073540B2/en
Publication of JPH11290767A publication Critical patent/JPH11290767A/en
Application granted granted Critical
Publication of JP4073540B2 publication Critical patent/JP4073540B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Application Of Or Painting With Fluid Materials (AREA)
  • Polymerisation Methods In General (AREA)
  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
  • Chemical Vapour Deposition (AREA)

Abstract

PROBLEM TO BE SOLVED: To provide the water-repellent member capable of easily preventing the deposition of a waterdrop and the production method suitable for the member. SOLUTION: A water-repellent film cosisting of a vinylidene fluoride polymer obtained on the positive electrode side by the plasma polymerization utilizing a glow discharge generated by applying a DC high voltage in vacuum is provided on the surface of a member 1 to be treated. The inside of a vacuum treating chamber is filled with a vinylindene fluoride monomer gas under vacuum, a DC high voltage is applied on the reticular electrode provided directly above the number 1 prepared in the vacuum treating chamber to generate a glow discharge, and the monomers are plasma-polymerized. Otherwise, a positive DC high voltage is directly applied on the member 1 itself or on the electrode holding the member to generate a glow discharge to polymerize the monomers, and the water-repellent plasma-polymerized film 2 is formed on the member 1 surface.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、結露や水による黴
発生、絶縁破壊等の不都合を生ずる部材、例えば住宅用
建材、電気絶縁用絶縁碍子等の部材の撥水性を改良した
撥水性部材及びその製造方法に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a water-repellent member having improved water repellency of members which cause inconveniences such as generation of mold due to dew condensation or water, insulation breakdown, etc. It relates to the manufacturing method.

【0002】[0002]

【従来の技術】従来、この種の部材には、親水性のセラ
ミックスもしくは合成樹脂が使用され、部材がそのまま
露出している状態で用いられている。
2. Description of the Related Art Heretofore, hydrophilic ceramics or synthetic resin has been used for this kind of member, and the member is used in a state where the member is exposed as it is.

【0003】[0003]

【発明が解決しようとする課題】例えば、電気絶縁用碍
子等の部材は、降雨、霧などの気象状況では、部材の外
面に水滴が付着し、電気絶縁性が悪くなる欠点があり、
また、住宅建材であるアルミサッシ等では、冬季、結露
によって大量の水滴が発生し、この水滴が原因で黴が発
生したりする。
For example, a member such as an insulator for electric insulation has a drawback that, in weather conditions such as rainfall and fog, water droplets adhere to the outer surface of the member, resulting in poor electric insulation.
In addition, in the case of aluminum sashes and the like, which are house building materials, a large amount of water droplets are generated due to dew condensation in winter, and molds are generated due to the water droplets.

【0004】本発明は、簡単に水滴の付着を防止できる
撥水性の部材を提供すること及びこの部材を製造するの
に適した方法を提供することを目的とするものである。
An object of the present invention is to provide a water-repellent member capable of easily preventing the attachment of water droplets, and to provide a method suitable for manufacturing the member.

【0005】[0005]

【課題を解決するための手段】本発明では、真空中で直
流高電圧を印加して発生させたグロー放電を利用してモ
ノマーをプラズマ重合せしめ、正の電極側で得られる撥
水性のプラズマ重合膜を表面に有する部材により上記の
目的を達成する。該プラズマ重合膜は、フッ化ビニリデ
ンモノマーを原料とするプラズマ重合膜であることが好
ましい。
According to the present invention, a monomer is subjected to plasma polymerization using a glow discharge generated by applying a high DC voltage in a vacuum, and a water-repellent plasma polymerization obtained on the positive electrode side. The above object is achieved by a member having a film on the surface. The plasma polymerized film is preferably a plasma polymerized film using a vinylidene fluoride monomer as a raw material.

【0006】上記目的はまた、真空下、真空処理室内に
原料ガスとしてフッ化ビニリデンのモノマーガスを存在
させ、該真空処理室内に用意した被処理部材の表面直上
に設けた網状電極に正の直流高電圧を印加してグロー放
電を発生させることによりプラズマ重合させ、該被処理
部材の表面に撥水性のプラズマ重合膜を成膜することに
より達成される。該被処理部材には、例えば金属、ガラ
ス、セラミックス又は合成樹脂等からなるものが望まし
い。
Another object of the present invention is to provide a method in which a monomer gas of vinylidene fluoride is present as a raw material gas in a vacuum processing chamber under a vacuum, and a positive direct current This is achieved by applying a high voltage to generate glow discharge to cause plasma polymerization, and forming a water-repellent plasma polymerized film on the surface of the member to be processed. The member to be processed is desirably made of, for example, metal, glass, ceramics, synthetic resin, or the like.

【0007】また、真空下、真空処理室内に金属、ガラ
ス、セラミックス又は合成樹脂からなる被処理部材を用
意し、この被処理部材自体に直接又は該被処理部材を保
持する電極に正の直流高電圧を印加してグロー放電を発
生させることによりプラズマ重合させ、該被処理部材の
表面に撥水性のプラズマ重合膜を成膜することによって
も上記の目的が達成される。
A member to be processed made of metal, glass, ceramics or synthetic resin is prepared in a vacuum processing chamber under a vacuum, and a positive DC voltage is applied directly to the member to be processed itself or to an electrode holding the member to be processed. The above object can also be achieved by applying a voltage to generate glow discharge to cause plasma polymerization, and forming a water-repellent plasma polymerized film on the surface of the member to be processed.

【0008】前記被処理部材としては、例えばサッシの
ような住宅用建材又は絶縁碍子等が望ましい。
As the member to be processed, for example, a house building material such as a sash or an insulator is desirable.

【0009】[0009]

【発明の実施の形態】本発明の撥水性部材を得るための
被処理部材としては、上記したように、一般的に使用さ
れているガラス、セラミックス、合成樹脂又は金属から
なる被処理部材が用いられる。本発明の実施の形態の一
例によれば、該撥水性部材は、図1に示すように、被処
理部材1の少なくとも片面に直接に撥水性のプラズマ重
合膜2を形成したものである。該プラズマ重合膜2とし
ては、フッ化ビニリデンモノマーのガスを直流高電圧を
印加して発生させたプラズマ中で分解励起し、該被処理
部材1の表面上で重合して成膜したフッ化ビニリデンポ
リマーからなる膜が十分な撥水性を持つので適当であ
る。該プラズマ重合膜2は通常100〜300nmの厚
さに成膜される。
DESCRIPTION OF THE PREFERRED EMBODIMENTS As a member to be treated for obtaining a water-repellent member of the present invention, a member to be treated generally used, made of glass, ceramics, synthetic resin or metal, is used as described above. Can be According to an example of the embodiment of the present invention, the water-repellent member is formed by directly forming a water-repellent plasma-polymerized film 2 on at least one surface of a member to be processed 1 as shown in FIG. As the plasma polymerized film 2, vinylidene fluoride gas is formed by decomposing and exciting vinylidene fluoride monomer gas in a plasma generated by applying a high DC voltage and polymerizing on the surface of the member 1 to be processed. The polymer film is suitable because it has sufficient water repellency. The plasma polymerized film 2 is usually formed to a thickness of 100 to 300 nm.

【0010】本発明者等の実験によれば、プラズマ重合
膜はこれに接触する水滴の接触角を大きくする性質を有
し、その接触角はプラズマ重合膜の成膜時の印加電圧に
略比列することがわかっているが、この場合に、成膜に
先立ち被処理部材に導電膜を形成しておく必要があり、
この導電膜形成工程が成膜工程を複雑化しコストアップ
の原因となっている。かくして、更に実験を重ね、簡単
かつ安価に製造できる成膜法と膜の種類を探究したとこ
ろ、その接触角はまたプラズマ重合膜の成膜時のモノマ
ーガスの圧力にも略比例することから、プラズマ重合膜
の成膜時のモノマーガスの圧力及び印加電圧を制御すれ
ば、水に対する接触角が高い、特に正の電極側で成膜し
た場合、160°を越えるような高い撥水性のプラズマ
重合膜を製造できることが判明した。また、フッ化ビニ
リデンモノマーガスを使用してプラズマ重合膜を得る場
合、その重合膜は該ガス圧力に比例して接触角が変化す
るので、このモノマーはプラズマ重合膜の原料として好
都合である。
According to experiments conducted by the present inventors, the plasma polymerized film has a property of increasing the contact angle of a water droplet contacting the film, and the contact angle is substantially equal to the applied voltage at the time of forming the plasma polymerized film. It is known that they are arranged, but in this case, it is necessary to form a conductive film on the member to be processed before film formation,
This conductive film forming process complicates the film forming process and causes an increase in cost. Thus, by conducting further experiments and searching for a film forming method and a kind of film that can be manufactured easily and inexpensively, the contact angle is also substantially proportional to the pressure of the monomer gas at the time of forming the plasma polymerized film. By controlling the pressure of the monomer gas and the applied voltage during the formation of the plasma polymerized film, the contact angle with water is high, and particularly when the film is formed on the positive electrode side, high water-repellent plasma polymerization exceeding 160 ° is obtained. It has been found that a membrane can be produced. Further, when a plasma polymerized film is obtained by using a vinylidene fluoride monomer gas, the monomer is convenient as a raw material of the plasma polymerized film because the contact angle of the polymerized film changes in proportion to the gas pressure.

【0011】本発明の製造方法の実施に使用出来る装置
の一例は、図2に示す如くであり、真空ポンプに接続し
た真空排気口3とプラズマ重合膜2の原料モノマー4を
収容した蒸発源からの導入口10とを備えた真空処理室
5からなり、その室内にガラス板やセラミックス板や合
成樹脂板又は金属板の被処理部材1を保持部材(図示せ
ず)に載せて対向電極7に対向させて設置出来るように
なっており、該被処理部材1の成膜面すなわち対向電極
7と対向した表面の直上に直流電源8へ接続した網状電
極6を設けて構成されている。
FIG. 2 shows an example of an apparatus which can be used for carrying out the production method of the present invention. The apparatus comprises a vacuum exhaust port 3 connected to a vacuum pump and an evaporation source containing the raw material monomer 4 of the plasma polymerization film 2. A vacuum processing chamber 5 having an inlet 10 is provided, and a glass plate, a ceramics plate, a synthetic resin plate, or a metal plate to be processed 1 is placed on a holding member (not shown), and The processing target 1 is provided with a mesh electrode 6 connected to a DC power supply 8 immediately above a film forming surface of the processing target member 1, that is, a surface facing the counter electrode 7.

【0012】上記装置を使用する場合、まず、該真空処
理室5内を例えば10-2Paに真空排気し、モノマーガ
ス導入バルブ9を調節しながら蒸発源から原料モノマー
4の蒸気を該真空処理室5内へ導入して、所定の圧力、
例えば30Paの圧力とする。次いで、該網状電極5に
該直流電源8から正の直流高電圧を印加するとグロー放
電が発生し、これにより該蒸気が分解励起されて該被処
理部材1上にプラズマ重合膜2が形成される。
When the above apparatus is used, first, the inside of the vacuum processing chamber 5 is evacuated to 10 −2 Pa, for example, and the vapor of the raw material monomer 4 is evaporated from the evaporation source while adjusting the monomer gas introduction valve 9. It is introduced into the chamber 5 and has a predetermined pressure,
For example, the pressure is set to 30 Pa. Next, when a positive DC high voltage is applied from the DC power supply 8 to the mesh electrode 5, a glow discharge occurs, whereby the vapor is decomposed and excited, and the plasma polymerized film 2 is formed on the processing target member 1. .

【0013】該プラズマ重合膜2の成膜時の印加電圧と
該膜2の水に対する接触角とは比列関係を持ち、例えば
フッ化ビニリデンモノマーを使用して圧力を30Paと
した場合、図3のように水滴の接触角が印加電圧に比例
して変化し、+1kVの電圧下で接触角160°を有す
る撥水性の良好な膜が得られる。
The applied voltage during the formation of the plasma polymerized film 2 and the contact angle of the film 2 with water have a linear relationship. For example, when the pressure is 30 Pa using a vinylidene fluoride monomer, FIG. As described above, the contact angle of the water droplet changes in proportion to the applied voltage, and a good water-repellent film having a contact angle of 160 ° at a voltage of +1 kV can be obtained.

【0014】なお、印加電圧を1kV以上にすると、放
電が不安定になって均一な成膜が行えなくなり、またガ
ス圧力を30Paより高くすると水に対する接触角が小
さくなり、30Paより低くして行くと放電が不安定に
なる。
When the applied voltage is 1 kV or more, the discharge becomes unstable and uniform film formation cannot be performed. When the gas pressure is higher than 30 Pa, the contact angle with water becomes smaller, and the pressure becomes lower than 30 Pa. And the discharge becomes unstable.

【0015】該被処理部材1の寸法形状は任意であり、
例えば曲面を有する被処理部材や1×1mのような大表
面積を有する被処理部材であっても、網状電極5を被処
理部材1の表面に沿わせて設けることで、均一にプラズ
マ重合膜2を成膜出来る。被処理部材1の表面と網状電
極6との間隔は10mm程度が望ましい。
The size and shape of the member to be processed 1 are arbitrary.
For example, even in the case of a member to be processed having a curved surface or a member having a large surface area such as 1 × 1 m, the plasma polymerized film 2 can be uniformly formed by providing the mesh electrode 5 along the surface of the member to be processed 1. Can be formed. The distance between the surface of the member to be processed 1 and the mesh electrode 6 is preferably about 10 mm.

【0016】また、本発明の製造方法の実施に使用出来
る装置の別の例は、図2に示す装置において網状電極を
設けずに、該被処理部材自体に直接又は該被処理部材を
保持するための保持部材を兼ねる電極に、正の直流高電
圧が印加できるように構成されている。すなわち、この
装置では、被処理部材として金属、ガラス、セラミック
ス又は合成樹脂からなる部材を用いるが、金属からなる
被処理部材にはその部材自体に直接正の直流高電圧を印
加し又は該被処理部材保持用電極に正の直流高電圧を印
加してグロー放電を発生出来るように構成されている。
かかる装置を用いて、図2に示す装置の場合と同様にし
て、撥水性のプラズマ重合膜を成膜出来る。
Another example of an apparatus that can be used to carry out the manufacturing method of the present invention is that the apparatus shown in FIG. 2 does not have a mesh electrode and directly or directly holds the member to be processed. Is configured so that a positive direct current high voltage can be applied to an electrode which also serves as a holding member for use. That is, in this apparatus, a member made of metal, glass, ceramics, or synthetic resin is used as a member to be processed. However, a positive DC high voltage is directly applied to the member itself to be processed, or the member to be processed is made of metal. It is configured so that a glow discharge can be generated by applying a positive direct current high voltage to the member holding electrode.
Using such an apparatus, a water-repellent plasma polymerized film can be formed in the same manner as in the apparatus shown in FIG.

【0017】[0017]

【実施例】(実施例1)図2に示した構成の装置を使用
して、真空処理室5内に厚さ5mm、縦横0.3×0.
3mの板ガラスの窓基材1を設置し、該真空処理室5内
を10-2Paに真空排気したのち、フッ化ビニリデンの
モノマーを入れた蒸発源から導入口10を経て該室5内
にモノマー蒸気を導入し、30Paに圧力を調整し、網
状電極6に+1kVの高電圧を印加した。該網状電極6
と対向電極7との間でグロー放電が発生し、該窓基材1
の表面に100nmの厚さでフッ化ビニリデンのプラズ
マ重合膜2が形成されたところで電圧の印加を止め、グ
ロー放電を消滅させ、そこで成膜を停止した。得られた
窓材を傾斜させてその表面に水滴をかけたところ、水滴
はそのまま流下し、水の膜は形成されなかった。このフ
ッ化ビニリデンのプラズマ重合膜の接触角は160°で
あった。
(Embodiment 1) Using the apparatus having the structure shown in FIG. 2, a 5 mm thick, 0.3 × 0.times.
A 3 m plate glass window substrate 1 is installed, the inside of the vacuum processing chamber 5 is evacuated to 10 −2 Pa, and then, from the evaporation source containing the vinylidene fluoride monomer, into the chamber 5 through the inlet 10. The monomer vapor was introduced, the pressure was adjusted to 30 Pa, and a high voltage of +1 kV was applied to the mesh electrode 6. The mesh electrode 6
Glow discharge is generated between the window substrate 1 and the counter electrode 7.
When the plasma polymerized film 2 of vinylidene fluoride was formed with a thickness of 100 nm on the surface of, the application of the voltage was stopped, the glow discharge was extinguished, and the film formation was stopped there. When the obtained window material was inclined and water droplets were applied to the surface thereof, the water droplets flowed down and no water film was formed. The contact angle of the vinylidene fluoride plasma polymerized film was 160 °.

【0018】上記実施例では、被処理部材として板ガラ
スの窓基材を用いたが金属板、セラミックス板及び合成
樹脂板からなる被処理部材を用いて得たプラズマ重合膜
の場合にも、同様に高い接触角を有する撥水性のプラズ
マ重合膜が得られた。
In the above embodiment, a window glass substrate is used as a member to be processed. However, the same applies to a plasma polymerized film obtained using a member to be processed made of a metal plate, a ceramic plate and a synthetic resin plate. A water-repellent plasma polymerized film having a high contact angle was obtained.

【0019】かくして、住宅用建材、絶縁碍子の撥水性
を改良することができる。
Thus, it is possible to improve the water repellency of the building material for a house and the insulator.

【0020】(実施例2)図2に示した装置であって真
空室内に網状電極を設けていない装置を使用して、該真
空室内に厚さ2mm、縦横0.4×0.4mの金属板の
被処理部材を設置し、この被処理部材に直接+1kVの
高電圧を印加し、実施例1と同様に成膜処理したとこ
ろ、実施例1の場合と同様に、高い接触角を有する撥水
性のプラズマ重合膜を成膜出来た。
(Embodiment 2) Using the apparatus shown in FIG. 2 in which a mesh electrode is not provided in a vacuum chamber, a metal having a thickness of 2 mm and a length and width of 0.4 × 0.4 m is placed in the vacuum chamber. A member to be processed was placed, and a high voltage of +1 kV was directly applied to the member to be processed to form a film in the same manner as in Example 1. As in Example 1, a repellent having a high contact angle was obtained. An aqueous plasma polymerized film could be formed.

【0021】また、上記金属板の代わりに、厚さ5m
m、縦横0.3×0.3mの合成樹脂板又はセラミック
ス板を被処理部材保持用電極上に設置し、この電極に正
の直流高電圧を印加し、実施例2と同様に成膜処理した
ところ、実施例2の場合と同様に、高い接触角を有する
撥水性のプラズマ重合膜を成膜出来た。
In place of the above metal plate, a thickness of 5 m
m, a synthetic resin plate or a ceramic plate of 0.3 × 0.3 m in length and width was placed on the electrode for holding the member to be processed, and a positive DC high voltage was applied to this electrode. As a result, as in the case of Example 2, a water-repellent plasma-polymerized film having a high contact angle could be formed.

【0022】[0022]

【発明の効果】本発明によれば、正の直流高電圧を印加
して発生させたグロー放電を利用するプラズマ重合によ
り正の電極側で得られたフッ化ビニリデンポリマーから
なる撥水性の膜が被処理部材の表面に直接形成されてい
るので、製造が簡単でかつ製造コストが安価な、容易に
水滴の付着を防止できる撥水性の高い部材が提供でき
る。
According to the present invention, a water-repellent film made of a vinylidene fluoride polymer obtained on the positive electrode side by plasma polymerization utilizing a glow discharge generated by applying a positive direct current high voltage is provided. Since it is formed directly on the surface of the member to be processed, it is possible to provide a highly water-repellent member that is simple to manufacture and low in manufacturing cost and that can easily prevent the attachment of water droplets.

【0023】また、本発明の製造方法によれば、真空
中、モノマーガスの存在下、真空処理室内の被処理部材
の表面直上に設けた網状電極に正の直流高電圧を印加し
てグロー放電を発生させることによりプラズマ重合さ
せ、又は被処理部材自体に直接若しくは被処理部材を保
持する電極に正の直流高電圧を印加してグロー放電を発
生させることによりプラズマ重合させ、該被処理部材の
表面に撥水性のプラズマ重合膜を直接成膜しているの
で、プラズマ重合膜の成膜時のモノマーガスの圧力及び
印加電圧を制御して、水に対する高い接触角、特に正の
電極側で成膜した場合、160°を越えるような接触角
を有し、容易に水滴の付着を防止できるプラズマ重合膜
を備えた撥水性の高い部材を、簡単にかつ安価に製造で
きる。
Further, according to the manufacturing method of the present invention, a glow discharge is performed by applying a high positive DC voltage to a mesh electrode provided directly above the surface of a member to be processed in a vacuum processing chamber in the presence of a monomer gas in a vacuum. To generate a glow discharge by applying a positive DC high voltage directly to the member to be processed itself or to an electrode holding the member to be processed, thereby causing a plasma polymerization to be performed. Since the water-repellent plasma polymerized film is formed directly on the surface, the pressure and applied voltage of the monomer gas at the time of forming the plasma polymerized film are controlled to form a high contact angle with water, especially at the positive electrode side. When the film is formed, a highly water-repellent member having a contact angle exceeding 160 ° and having a plasma polymerized film capable of easily preventing the attachment of water droplets can be easily and inexpensively manufactured.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の撥水性部材の1例の切断側面図。FIG. 1 is a cut side view of an example of a water-repellent member of the present invention.

【図2】本発明の製造方法に使用した装置の一例の模式
的断面図。
FIG. 2 is a schematic cross-sectional view of an example of an apparatus used in the manufacturing method of the present invention.

【図3】印加電圧とプラズマ重合膜の水に対する接触角
との関係を示す線図。
FIG. 3 is a diagram showing a relationship between an applied voltage and a contact angle of a plasma-polymerized film with water.

【符号の説明】[Explanation of symbols]

1 被処理部材(窓基材) 2 プラズマ重合
膜 3 真空排気口 4 モノマー 5 真空処理室 6 網状電極 7 対向電極 8 直流電源 9 モノマーガス導入バルブ 10 導入口
DESCRIPTION OF SYMBOLS 1 Processed member (window base material) 2 Plasma polymerization film 3 Vacuum exhaust port 4 Monomer 5 Vacuum processing chamber 6 Reticulated electrode 7 Counter electrode 8 DC power supply 9 Monomer gas introduction valve 10 Inlet

Claims (5)

【特許請求の範囲】[Claims] 【請求項1】 真空下、真空処理室内に原料ガスとして
フッ化ビニリデンのモノマーガスを存在させ、該真空処
理室内に用意した被処理部材の表面直上に設けた網状電
極に正の直流高電圧を印加してグロー放電を発生させる
ことによりプラズマ重合させ、該被処理部材の表面に撥
水性のプラズマ重合膜を成膜して撥水性部材を得ること
を特徴とする撥水性部材の製造方法。
In a vacuum processing chamber, a monomer gas of vinylidene fluoride is present as a raw material gas under a vacuum, and a positive DC high voltage is applied to a mesh electrode provided immediately above the surface of a member to be processed prepared in the vacuum processing chamber. A method for producing a water-repellent member, characterized in that a plasma-polymerized film is formed on the surface of the member to be treated by applying the voltage to generate a glow discharge for plasma polymerization, thereby obtaining a water-repellent member.
【請求項2】 真空下、真空処理室内に原料ガスとして
フッ化ビニリデンのモノマーガスを存在させ、該真空処
理室内に用意した被処理部材自体に直接又は該被処理部
材を保持する電極に正の直流高電圧を印加してグロー放
電を発生させることによりプラズマ重合させ、該被処理
部材の表面に撥水性のプラズマ重合膜を成膜して撥水性
部材を得ることを特徴とする撥水性部材の製造方法。
2. A method in which a monomer gas of vinylidene fluoride is present as a raw material gas in a vacuum processing chamber under a vacuum, and a positive electrode is directly applied to a processing target member prepared in the vacuum processing chamber or to an electrode holding the processing target member. Applying a DC high voltage to generate glow discharge for plasma polymerization, and forming a water-repellent member by forming a water-repellent plasma-polymerized film on the surface of the member to be processed. Production method.
【請求項3】 前記被処理部材が金属、ガラス、セラミ
ックス又は合成樹脂からなるものであることを特徴とす
る請求項1又は2に記載の撥水性部材の製造方法。
3. The method for producing a water-repellent member according to claim 1, wherein the member to be processed is made of metal, glass, ceramics or synthetic resin.
【請求項4】 真空中でフッ化ビニリデンモノマーの存
在下、直流高電圧を印加して発生させたグロー放電によ
りプラズマ重合せしめて正の電極側で得られるフッ化ビ
ニリデンポリマーからなる撥水性の膜を表面に有するこ
とを特徴とする撥水性部材。
4. A water-repellent film comprising a vinylidene fluoride polymer obtained by plasma polymerization by a glow discharge generated by applying a high DC voltage in the presence of a vinylidene fluoride monomer in a vacuum and obtained on the positive electrode side A water-repellent member, characterized by having on its surface.
【請求項5】 前記撥水性部材が撥水性のサッシ又は絶
縁碍子である請求項4記載の撥水性部材。
5. The water-repellent member according to claim 4, wherein the water-repellent member is a water-repellent sash or insulator.
JP10254098A 1998-04-14 1998-04-14 Water repellent member and manufacturing method thereof Expired - Fee Related JP4073540B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10254098A JP4073540B2 (en) 1998-04-14 1998-04-14 Water repellent member and manufacturing method thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10254098A JP4073540B2 (en) 1998-04-14 1998-04-14 Water repellent member and manufacturing method thereof

Publications (2)

Publication Number Publication Date
JPH11290767A true JPH11290767A (en) 1999-10-26
JP4073540B2 JP4073540B2 (en) 2008-04-09

Family

ID=14330102

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10254098A Expired - Fee Related JP4073540B2 (en) 1998-04-14 1998-04-14 Water repellent member and manufacturing method thereof

Country Status (1)

Country Link
JP (1) JP4073540B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2002088232A1 (en) * 2001-04-27 2002-11-07 The Coca-Cola Company Barrier coated plastic containers
JP2014504946A (en) * 2010-11-22 2014-02-27 アルケマ フランス PVDF membrane with superhydrophobic surface

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2002088232A1 (en) * 2001-04-27 2002-11-07 The Coca-Cola Company Barrier coated plastic containers
US6599584B2 (en) 2001-04-27 2003-07-29 The Coca-Cola Company Barrier coated plastic containers and coating methods therefor
JP2014504946A (en) * 2010-11-22 2014-02-27 アルケマ フランス PVDF membrane with superhydrophobic surface

Also Published As

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