JP4071714B2 - 多層系の製造方法 - Google Patents
多層系の製造方法 Download PDFInfo
- Publication number
- JP4071714B2 JP4071714B2 JP2003539055A JP2003539055A JP4071714B2 JP 4071714 B2 JP4071714 B2 JP 4071714B2 JP 2003539055 A JP2003539055 A JP 2003539055A JP 2003539055 A JP2003539055 A JP 2003539055A JP 4071714 B2 JP4071714 B2 JP 4071714B2
- Authority
- JP
- Japan
- Prior art keywords
- layer
- ion beam
- energy
- ion
- sputtering
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/08—Mirrors
- G02B5/0816—Multilayer mirrors, i.e. having two or more reflecting layers
- G02B5/085—Multilayer mirrors, i.e. having two or more reflecting layers at least one of the reflecting layers comprising metal
- G02B5/0875—Multilayer mirrors, i.e. having two or more reflecting layers at least one of the reflecting layers comprising metal the reflecting layers comprising two or more metallic layers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/08—Mirrors
- G02B5/0891—Ultraviolet [UV] mirrors
-
- G—PHYSICS
- G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
- G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
- G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
- G21K1/06—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diffraction, refraction or reflection, e.g. monochromators
- G21K1/062—Devices having a multilayer structure
-
- G—PHYSICS
- G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
- G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
- G21K2201/00—Arrangements for handling radiation or particles
- G21K2201/06—Arrangements for handling radiation or particles using diffractive, refractive or reflecting elements
- G21K2201/067—Construction details
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Nanotechnology (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Mathematical Physics (AREA)
- Theoretical Computer Science (AREA)
- High Energy & Nuclear Physics (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Engineering & Computer Science (AREA)
- Physical Vapour Deposition (AREA)
- Optical Elements Other Than Lenses (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Description
Claims (7)
- Mo、Si、Ru、C、B、Rb、Rh、Sr、Y、Cr、Scまたはこれらの構成成分の少なくも1つの層をイオンビームアシストにより少なくとも部分的に堆積させる、極紫外線およびX線の波長範囲のミラー用に基板上に多層系を製造する方法であって、前記層のスパッタリングしきい値以下のエネルギーを前記イオンビームのイオンエネルギーとして選択し、前記イオンエネルギーは、Uの4〜10倍に相当し、Uは処理対象の層材料の結合エネルギーであることを特徴とする方法。
- 前記イオンビーム適用の工程時間は、層を成長させる時間に相当することを特徴とする請求項1に記載の方法。
- 前記イオンビーム適用を前記層の成長工程の一部の間に行うことを特徴とする請求項1に記載の方法。
- 少なくも1つの層をイオンビームアシストにより堆積した後、次の層に進む前のある時間、イオンによりそれを更に照射することを特徴とする請求項1ないし3のいずれか1項に記載の方法。
- Mo、Si、Ru、C、B、Rb、Rh、Sr、Y、Cr、Scまたはこれらの構成成分の少なくも1つの層をイオンビームアシストなしで堆積させ、そして堆積後イオンにより照射する、極紫外線およびX線の波長範囲のミラー用に基板上に多層系を製造する方法であって、前記層のスパッタリングしきい値以下のエネルギーを前記イオンエネルギーとして選択し、前記イオンエネルギーは、Uの4〜10倍に相当し、Uは処理対象の層材料の結合エネルギーであることを特徴とする方法。
- 前記イオンビームの直径と断面形状とが被覆対象の基板のサイズに釣り合うことを特徴とする請求項1ないし5のいずれか1項に記載の方法。
- 前記層を電子ビーム蒸発、マグネトロンスパッタリングまたはイオンビームスパッタリングにより堆積することを特徴とする請求項1ないし6のいずれか1項に記載の方法。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/EP2001/012305 WO2003036654A1 (en) | 2001-10-24 | 2001-10-24 | Process for manufacturing multilayer systems |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2005506553A JP2005506553A (ja) | 2005-03-03 |
JP4071714B2 true JP4071714B2 (ja) | 2008-04-02 |
Family
ID=8164650
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2003539055A Expired - Fee Related JP4071714B2 (ja) | 2001-10-24 | 2001-10-24 | 多層系の製造方法 |
Country Status (4)
Country | Link |
---|---|
US (1) | US20040245090A1 (ja) |
EP (1) | EP1446811A1 (ja) |
JP (1) | JP4071714B2 (ja) |
WO (1) | WO2003036654A1 (ja) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20040159538A1 (en) * | 2003-02-13 | 2004-08-19 | Hans Becker | Photo mask blank, photo mask, method and apparatus for manufacturing of a photo mask blank |
US20070207310A1 (en) * | 2006-03-03 | 2007-09-06 | Storey Daniel M | Chrome coated surfaces and deposition methods therefor |
EP2076801A1 (en) * | 2006-10-13 | 2009-07-08 | Media Lario S.r.L. | Coated mirrors and their fabication |
US7531373B2 (en) | 2007-09-19 | 2009-05-12 | Micron Technology, Inc. | Methods of forming a conductive interconnect in a pixel of an imager and in other integrated circuitry |
CA2793855A1 (en) * | 2010-03-22 | 2011-09-29 | Luxottica Us Holdings Corporation | Ion beam assisted deposition of ophthalmic lens coatings |
NL2017602A (en) * | 2015-11-02 | 2017-05-23 | Stichting Voor Fundamenteel Onderzoek Der Materie | Multilayer Reflector, Method of Manufacturing a Multilayer Reflector and Lithographic Apparatus |
DE102017203246A1 (de) * | 2017-02-28 | 2018-08-30 | Carl Zeiss Smt Gmbh | Verfahren zur Korrektur eines Spiegels für den Wellenlängenbereich von 5 nm bis 20 nm |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3060624B2 (ja) * | 1991-08-09 | 2000-07-10 | 株式会社ニコン | 多層膜反射鏡 |
JPH1138192A (ja) * | 1997-07-17 | 1999-02-12 | Nikon Corp | 多層膜反射鏡 |
US6295164B1 (en) * | 1998-09-08 | 2001-09-25 | Nikon Corporation | Multi-layered mirror |
DE10016008A1 (de) * | 2000-03-31 | 2001-10-11 | Zeiss Carl | Villagensystem und dessen Herstellung |
DE10019045B4 (de) * | 2000-04-18 | 2005-06-23 | Carl Zeiss Smt Ag | Verfahren zum Herstellen von Viellagensystemen |
-
2001
- 2001-10-24 EP EP01274591A patent/EP1446811A1/en not_active Withdrawn
- 2001-10-24 WO PCT/EP2001/012305 patent/WO2003036654A1/en active Application Filing
- 2001-10-24 US US10/493,336 patent/US20040245090A1/en not_active Abandoned
- 2001-10-24 JP JP2003539055A patent/JP4071714B2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
EP1446811A1 (en) | 2004-08-18 |
US20040245090A1 (en) | 2004-12-09 |
JP2005506553A (ja) | 2005-03-03 |
WO2003036654A1 (en) | 2003-05-01 |
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