JP4069488B2 - Alignment transfer device - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to an alignment transport device that transports a laminated board with an inner layer circuit to a predetermined position of an X-ray drilling device.
[0002]
[Prior art]
Multilayer printed wiring boards are used in electrical and electronic equipment. This multilayer printed wiring board is formed by stacking an inner layer substrate on which a conductor pattern is formed and a prepreg impregnated with a glass cloth with a thermosetting resin composition, and further arranging a metal foil on the outermost layer of the prepreg. Thereafter, this laminate is heated and pressed to form a laminate containing an inner layer circuit.
[0003]
Next, after forming a reference hole to be a reference in the subsequent process on the laminated board with the inner layer circuit, it is set in a drill machine using this reference hole, and then drilled. In addition, a multilayer printed wiring board is manufactured by a method of forming a through-hole plating film for conducting an inner layer conductor pattern and an outer layer metal foil, and etching the outer layer metal foil to form an outer layer circuit.
[0004]
In addition, by forming a reference mark in advance at the position where the reference hole of the inner layer substrate is to be formed, and forming a reference hole at the position of the reference mark after molding, the position of the inner layer conductor pattern and the drill hole The alignment is done. In addition to the reference marks 2 and 2, the direction mark 3 is also formed on the inner layer substrate as shown in FIGS. 3A and 3C so that the front, back, left and right sides of the laminated board with the inner layer circuit are not mistaken. In addition, after forming, by making a direction hole at the position of the direction mark 3, the hole is made asymmetric to prevent mistakes.
[0005]
As a method of forming these reference holes and direction holes, drilling is performed by seeing through the reference marks and direction marks with X-rays. For example, Japanese Patent Laid-Open Nos. 5-138503 and 7-185999 are disclosed. After placing the laminated board with the inner layer circuit at a predetermined position as described in the above, the reference mark and the direction mark formed on the laminated board with the inner layer circuit are fluoroscopically seen through X-rays, and then these fluoroscopic positions and After obtaining the deviation from the predetermined reference position, adjust the position of the laminated board with the inner layer circuit and the drill position of the drill machine according to the obtained deviation, and drill a hole at the center of the reference mark or direction mark. A device called a wire drilling device is used.
[0006]
Further, in order to shorten the time required for adjusting the position of the laminated board with the inner layer circuit as described above and the drill position of the drill machine and improve the productivity of the X-ray drilling apparatus, a predetermined X-ray drilling apparatus is used. It is also being considered to combine an alignment transport device that transports and places the laminated board with the inner layer circuit at the position of X2 with an X-ray drilling device. For example, after seeing two reference marks through X-rays Alignment conveyance that conveys the laminated board with the inner layer circuit to a predetermined position while aligning the laminated board with the inner layer circuit by adjusting according to the deviation between the position of the two transparent reference marks and the predetermined reference position. The device is used.
[0007]
However, even when using the above-mentioned alignment transport device, it still takes a long time to complete the drilling with the X-ray drilling device, and a drilling method capable of drilling with higher productivity is desired. It is rare.
[0008]
[Problems to be solved by the invention]
The present invention has been made to remedy the above problems, and its purpose is to align and convey the laminated board containing the inner layer circuit to a predetermined position of the X-ray drilling device. It is an apparatus, and it is an object of the present invention to provide an alignment transport device that can perform drilling with excellent productivity when used in combination with an X-ray drilling device.
[0009]
[Means for Solving the Problems]
The alignment conveying apparatus according to claim 1 of the present invention moves after seeing through any one of the direction marks of the laminated board with the inner layer circuit having the reference mark and the direction mark in the inner layer by X-ray, Any one of the marks is seen through with X-rays, and then the position deviation detecting means for obtaining the deviation between the position of each of the seen reference marks and direction marks and the predetermined reference position, and the position deviation detecting means. By adjusting according to the deviation between the position of the direction mark and the predetermined reference position, each of the direction mark making means for making a direction hole at the position of the direction mark, and the reference mark and the direction mark obtained by the position deviation detection means And a conveying means for conveying the laminated board with the inner layer circuit while aligning it at a predetermined position by adjusting according to the deviation between the position of the inner layer and the predetermined reference position. X-ray drilling apparatus for drilling a reference hole of over click the position of the reference mark by fluoroscopy by X-ray, characterized in that it is transportable form an inner layer circuit containing laminate in place.
[0011]
According to a second aspect of the present invention, there is provided the alignment conveying device according to the first aspect , wherein the method of obtaining the position of the reference mark and the direction mark by the misalignment detecting means is obtained by seeing through. And, it is a method for obtaining respective gravity center positions of images corresponding to the direction marks.
[0012]
When the alignment transport device according to the present invention is combined with an X-ray drilling device, the X-ray drilling device eliminates the need for X-ray fluoroscopy and direction hole drilling of the portion where the direction mark is formed. Compared to the case of an X-ray drilling apparatus that also drills a hole, the processing time can be shortened. Moreover, in the alignment transport device, if the two marks are seen through with X-rays, it can be transported while being aligned. Therefore, the laminated board with an inner layer circuit in substantially the same cycle as that processed by the X-ray drilling device. Can be supplied, and it is difficult to hinder the effect of shortening the processing time by the X-ray drilling apparatus, and drilling with excellent productivity becomes possible.
[0013]
DETAILED DESCRIPTION OF THE INVENTION
An alignment conveyance device according to the present invention will be described with reference to the drawings. 1A and 1B are diagrams for explaining an embodiment of an alignment conveyance device according to the present invention, in which FIG. 1A is a plan view and FIG. FIG. 2 is a plan view for explaining a state in which the alignment conveying apparatus according to an embodiment of the present invention is combined with an X-ray drilling apparatus. FIGS. 3A and 3B are diagrams for explaining a laminated board with an inner layer circuit according to the present invention, in which FIG. 3A is a plan view broken in the horizontal direction, and FIG. 3B is broken in the vertical direction of FIG. Front view, (c) is a variation of (a).
[0014]
As shown in FIG. 2, an embodiment of the alignment transport device according to the present invention includes a misregistration detection means 10 for seeing through the reference mark 2 and the like by X-rays, and a direction punching means 20 for punching the direction hole 8. , A conveying means 30 for conveying the laminated board 1 with the inner layer circuit to the X-ray punching device 80, a laminated board preparing means 40 on which a plurality of laminated boards 1 with inner circuit are stacked, and a laminated board preparing means 40. Preparation means 50 for conveying the laminated board 1 with the inner layer circuit one by one so that the laminated board 1 with the inner layer circuit in which the directional hole 8 is formed at a predetermined position of the X-ray drilling device 80 can be conveyed. It is the alignment conveyance apparatus currently formed.
[0015]
As shown in FIGS. 3 (a) and 3 (b) and FIG. 3 (c), in addition to the conductor pattern 4 and the reference marks 2 and 2, the laminated board 1 with the inner layer circuit transported by this alignment transport device, It also has a direction mark 3, and when a reference hole is made at the position of the reference mark 2, 2 and a direction hole is made at the position of the direction mark 3, the hole becomes asymmetrical, and the laminated board with the inner layer circuit The front and back of 1 and the right and left are not mistaken. The reference hole is a hole to be used as a reference in the subsequent processing process of the printed wiring board. For example, the reference hole is a hole that is set in a drill machine using the reference hole, and is generally a reference hole. A line connecting them is provided so as to be parallel to one side of the laminated board 1 with the inner layer circuit.
[0016]
The laminated board 1 with the inner layer circuit is not particularly limited as long as it has the reference mark 2 and the direction mark 3 in the inner layer. For example, a board obtained by curing a thermosetting resin composition or a substrate is heated. For the inner layer, a metal foil-clad plate in which a metal foil such as a copper foil is bonded to the surface of a plate or the like bonded with a curable resin composition is used, and the reference mark 2 or the like is formed by etching the metal foil on the surface. A substrate and a metal foil such as a copper foil adhered to one or both sides of the inner layer substrate via a prepreg impregnated with a thermosetting resin composition or a liquid thermosetting resin composition. is there. In addition, as said thermosetting resin composition, an epoxy resin type, a phenol resin type, a polyimide resin type, an unsaturated polyester resin type, a polyphenylene ether resin type, etc., and these thermosetting resins are inorganic. The thing which mix | blended the filler etc. is mentioned. Moreover, as a base material, cloth, paper, etc. using inorganic fibers, such as glass, and organic fibers, such as polyester, polyamide, and cellulose, are mentioned.
[0017]
As shown in FIG. 2, the X-ray drilling device 80 combined with the alignment conveying device is made to pass through the reference mark 2 formed on the inner layer of the laminated board 1 with the inner layer circuit through the X-ray, and to the position of the reference mark 2. This is a device for drilling a reference hole. After the two reference marks 2 and 2 are sequentially seen through X-rays by the X-ray drilling device position deviation detecting means 82, the deviation between the see-through position and a predetermined reference position is detected. Then, according to the obtained deviation, the drill position of the X-ray drilling apparatus reference drilling means 84 and the position of the laminated board 1 with the inner layer circuit are adjusted to drill the center of the reference marks 2 and 2. . It should be noted that a predetermined dimension between the reference marks 2 and 2 is set in advance, and if the dimension between the reference marks 2 and 2 obtained through fluoroscopy is different from a predetermined dimension, the difference is determined. Thus, by drilling the holes by shifting from the center of the reference marks 2 and 2, the dimension between the reference holes may be made to coincide with a preset dimension.
[0018]
The laminated plate preparing means 40 of the alignment conveying device is loaded with a plurality of laminated plates 1 with inner layer circuits, and the prepared conveying means 50 is a laminated plate with inner layer circuits loaded on the laminated plate preparing means 40. 1 is sucked and conveyed one by one to the position where the position deviation detecting means 10 is provided.
[0019]
As shown in FIG. 1 (a) or (b), the misregistration detection means 10 includes an X-ray irradiation unit 12, an X-ray light receiving unit 14, and an image processing calculation unit 16, and the X-ray irradiation unit. 12, and X-rays that have passed through the inner layer circuit-containing laminate 1 are received by the X-ray light receiving unit 14, so that the inner layer circuit-containing laminate 1 can be seen through with X-rays. ing.
[0020]
Then, the X-ray irradiation unit 12 and the X-ray light-receiving unit 14 see through the portion where any one of the direction marks 3 formed on the inner layer of the laminated board 1 with the inner layer circuit is formed by X-rays. Next, the X-ray irradiation unit 12 and the X-ray light receiving unit 14 move to a portion where any one of the reference marks 2 is formed, and the reference mark 2 is seen through with X-rays. Next, the image processing calculation unit 16 obtains a deviation between the position of each of the see-through reference mark 2 and the direction mark 3 and a predetermined reference position. In addition, when the reference mark 2 seen through with the X-ray is the direction mark 3 at a position close to the direction mark 3, the time required for the X-ray irradiation unit 12 and the X-ray light receiving unit 14 to move is shortened, so the processing cycle is shortened. In the case of the direction mark 3 at a position far from the direction mark 3, the accuracy of detecting the displacement of the laminated board 1 with the inner layer circuit is improved. In addition, when only one direction mark 3 is formed on the laminated board 1 with the inner layer circuit, one of them is seen through with X-rays.
[0021]
As a method for obtaining the positions of the reference mark 2 and the direction mark 3 in the image processing calculation unit 16, a method for obtaining the respective gravity center positions of the images corresponding to the reference mark 2 and the direction mark 3 obtained through fluoroscopy, For example, a method of detecting the respective contours of the images corresponding to the reference mark 2 and the direction mark 3 obtained by fluoroscopy and obtaining the center thereof may be used. In the case of the method for obtaining the position of the center of gravity, even if the reference mark 2 or the direction mark 3 is formed, even if a chip or the like is generated and the shape is somewhat deformed, the influence of the deformation can be suppressed to a small value. The position accuracy is excellent and preferable.
[0022]
In addition, when the reference mark 2 and the direction mark 3 are seen through with X-rays, the portion with the metal foil in the inner layer is less likely to transmit X-rays compared with the portion without the metal foil. Thus, the image processing calculation unit 16 performs image processing on the shading, whereby the center positions of the reference mark 2 and the direction mark 3 can be obtained.
[0023]
Further, the direction punching means 20 is formed so as to be movable in the vertical direction and the horizontal direction, and the misalignment detection means 10 sees through the portion where the direction mark 3 of the laminated board 1 with the inner layer circuit is formed. Sometimes, it stands by at a position shifted from the portion where the direction mark 3 is formed. Then, after obtaining the deviation between the position of the direction mark 3 and the predetermined reference position by the image processing calculation unit 16, it moves while adjusting according to the magnitude and direction of the obtained deviation and the center of the direction mark 3. It is designed to make a directional hole.
[0024]
Further, the conveying means 30 has a rotating part 32 capable of attracting the laminated board 1 with the inner layer circuit and a shaft part 34 for supporting the rotating part 32, and the shaft part 34 is freely movable in the vertical direction and the horizontal direction. The rotary part 32 is formed so as to be rotatable with respect to the shaft part 34. Therefore, the laminated board 1 with the inner layer circuit is formed so as to be able to be conveyed while moving freely in the vertical direction, the horizontal direction, and the rotation direction.
[0025]
And this conveyance means 30 is the part in which the direction mark 3 or the reference mark 2 is formed when the position deviation detection means 10 sees through the part in which the direction mark 3 or the reference mark 2 of the laminated board 1 with the inner layer circuit is formed. The image processing calculation unit 16 obtains a shift between the position of the direction mark 3 or the reference mark 2 and a predetermined reference position, and calculates the shift between the two to calculate the direction mark 3 side. And the reference mark 2 side, and by adjusting the moving distance and direction according to the size and angle of the distributed deviation, the laminated circuit board 1 with the inner layer circuit is placed at a predetermined position of the X-ray drilling device 80. It is designed to be transported while being aligned with.
[0027]
When the alignment conveyance device according to the present invention is combined with an X-ray drilling device, the X-ray drilling device does not require X-ray fluoroscopy or direction hole drilling of the portion where the direction mark 3 is formed. as compared with the case of X-ray drilling apparatus for drilling well a hole, it is possible to shorten the time to process one of the inner layer circuit containing laminate 1. In the case where the number of reference holes is short, such as when two reference holes are drilled, the cycle of supplying the laminated board 1 with the inner layer circuit from the alignment conveying device to the X-ray drilling device is rate-limiting. In some cases, the alignment transport device can be transported while aligning when the two marks are seen through X-rays, so that it can be supplied in substantially the same cycle as the cycle processed by the X-ray drilling device. Therefore, it is difficult to hinder the effect of shortening the processing time with the X-ray drilling apparatus, and drilling with excellent productivity becomes possible.
[0028]
In addition, the timing of making the direction hole at the position of the direction mark 3 by the direction hole punching means 20 is the position of each of the reference mark 2 and the direction mark 3 after the direction mark 3 is seen through X-rays by the position deviation detection means 10. Is not limited to the time until the deviation between the reference mark 2 and the predetermined reference position is obtained, and even if there is a slight delay from the time when the deviation between the respective positions of the reference mark 2 and the direction mark 3 and the predetermined reference position is obtained, In the line drilling device, the X-ray fluoroscopy of the portion where the direction mark 3 is formed becomes unnecessary, so that it is possible to perform drilling with excellent productivity. In addition, it is preferable to perform drilling at the timing between the above, because it is possible to perform drilling with excellent productivity, particularly with an X-ray drilling apparatus.
[0029]
【The invention's effect】
When the alignment conveyance device according to the present invention is combined with an X-ray drilling device, the X-ray drilling device eliminates the need for X-ray fluoroscopy of the portion where the direction mark is formed. Drilling is possible.
[Brief description of the drawings]
1A and 1B are diagrams for explaining an embodiment of an alignment conveyance device according to the present invention, in which FIG. 1A is a plan view and FIG.
FIG. 2 is a plan view for explaining a state in which the alignment conveying apparatus according to an embodiment of the present invention is combined with an X-ray drilling apparatus.
FIGS. 3A and 3B are diagrams illustrating a laminated board with an inner layer circuit according to the present invention, in which FIG. 3A is a plan view broken away in the horizontal direction, and FIG. 3B is broken away in the vertical direction of FIG. (C) is a modified example of (a).
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 Laminate board with inner layer circuit 2 Reference mark 3 Direction mark 4 Conductor pattern 8 Direction hole 10 Position shift detection means 12 X-ray irradiation part 14 X-ray light reception part 16 Image processing calculation part 20 Direction punching means 30 Conveyance means 32 Rotation part 34 Axis Unit 40 Laminate plate preparation means 50 Preparation conveyance means 80 X-ray drilling device 82 X-ray drilling device position deviation detection means 84 X-ray drilling device reference drilling means

Claims (2)

  The laminated board with the inner layer circuit having the reference mark and the direction mark in the inner layer, after seeing through any one of the direction marks with X-rays, moving, see through any one of the reference marks with X-rays, The positional deviation detection means for obtaining the deviation between the respective positions of the fluoroscopic reference mark and the direction mark and the predetermined reference position, and the deviation between the position of the direction mark obtained by the positional deviation detection means and the predetermined reference position. Adjust according to the deviation between the predetermined reference position and the direction hole drilling means for drilling the direction hole at the position of the direction mark, and the reference mark and the direction mark obtained by the position deviation detection means. And a conveying means for conveying the laminated board with the inner layer circuit while aligning it at a predetermined position. X-ray drilling apparatus for drilling a quasi hole, registration transport device of the inner layer circuit containing laminate characterized in that it is transportable form an inner layer circuit containing laminate in place. The method of obtaining the positions of the reference mark and the direction mark by the misalignment detection means is a method of obtaining respective gravity center positions of images corresponding to the reference mark and the direction mark obtained through fluoroscopy. 1. The alignment conveyance device according to 1 .

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