JP4065336B2 - 高分解能分光分析顕微方法および装置 - Google Patents

高分解能分光分析顕微方法および装置 Download PDF

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JP4065336B2
JP4065336B2 JP52350899A JP52350899A JP4065336B2 JP 4065336 B2 JP4065336 B2 JP 4065336B2 JP 52350899 A JP52350899 A JP 52350899A JP 52350899 A JP52350899 A JP 52350899A JP 4065336 B2 JP4065336 B2 JP 4065336B2
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sample
thermal
thermal probe
probe
electromagnetic radiation
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JP2001507464A5 (enExample
JP2001507464A (ja
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クレイボーン，マイケル
ハミッチェ，アゼダイン
マレイ モンタグ―ポロック，ヒューバート
リーディング，マイケル
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N25/00—Investigating or analyzing materials by the use of thermal means
    • G01N25/20—Investigating or analyzing materials by the use of thermal means by investigating the development of heat, i.e. calorimetry, e.g. by measuring specific heat, by measuring thermal conductivity
    • G01N25/48—Investigating or analyzing materials by the use of thermal means by investigating the development of heat, i.e. calorimetry, e.g. by measuring specific heat, by measuring thermal conductivity on solution, sorption, or a chemical reaction not involving combustion or catalytic oxidation
    • G01N25/4806—Details not adapted to a particular type of sample
    • G01N25/4826—Details not adapted to a particular type of sample concerning the heating or cooling arrangements
    • G01N25/4833—Details not adapted to a particular type of sample concerning the heating or cooling arrangements specially adapted for temperature scanning
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N3/00—Investigating strength properties of solid materials by application of mechanical stress
    • G01N3/60—Investigating resistance of materials, e.g. refractory materials, to rapid heat changes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q30/00—Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices
    • G01Q30/02—Non-SPM analysing devices, e.g. SEM [Scanning Electron Microscope], spectrometer or optical microscope
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/58—SThM [Scanning Thermal Microscopy] or apparatus therefor, e.g. SThM probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2203/00—Investigating strength properties of solid materials by application of mechanical stress
    • G01N2203/02—Details not specific for a particular testing method
    • G01N2203/026—Specifications of the specimen
    • G01N2203/0286—Miniature specimen; Testing on microregions of a specimen
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/852—Manufacture, treatment, or detection of nanostructure with scanning probe for detection of specific nanostructure sample or nanostructure-related property
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/86—Scanning probe structure
    • Y10S977/867—Scanning thermal probe

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  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Analytical Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Radiology & Medical Imaging (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biochemistry (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Nanotechnology (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Combustion & Propulsion (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Investigating Or Analyzing Materials Using Thermal Means (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
JP52350899A 1997-10-28 1998-10-26 高分解能分光分析顕微方法および装置 Expired - Fee Related JP4065336B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US6355897P 1997-10-28 1997-10-28
US60/063,558 1997-10-28
PCT/GB1998/003184 WO1999022226A1 (en) 1997-10-28 1998-10-26 Method and apparatus for high spatial resolution spectroscopic microscopy

Publications (3)

Publication Number Publication Date
JP2001507464A JP2001507464A (ja) 2001-06-05
JP2001507464A5 JP2001507464A5 (enExample) 2006-01-05
JP4065336B2 true JP4065336B2 (ja) 2008-03-26

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JP52350899A Expired - Fee Related JP4065336B2 (ja) 1997-10-28 1998-10-26 高分解能分光分析顕微方法および装置

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US (1) US6260997B1 (enExample)
EP (1) EP0948741B1 (enExample)
JP (1) JP4065336B2 (enExample)
DE (1) DE69835803T2 (enExample)
WO (1) WO1999022226A1 (enExample)

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US6748334B1 (en) * 1999-12-06 2004-06-08 Jorge E. Perez Specialty gas analysis system
US7366704B2 (en) * 2001-06-28 2008-04-29 Waters Investments, Limited System and method for deconvoluting the effect of topography on scanning probe microscopy measurements
US20040105485A1 (en) * 2002-07-29 2004-06-03 Unaxis Usa, Inc. Temperature compensation for acousto-optc devices
US7023622B2 (en) * 2002-08-06 2006-04-04 Dmetrix, Inc. Miniature microscope objective lens
US7113651B2 (en) * 2002-11-20 2006-09-26 Dmetrix, Inc. Multi-spectral miniature microscope array
EP1422518A1 (en) * 2002-11-20 2004-05-26 Communaute Europeenne Method and system for measuring the thermal diffusivity
EP1649265A1 (en) * 2003-07-28 2006-04-26 Symyx Technologies, Inc. Parallel infrared spectroscopy apparatus and method
US20060222047A1 (en) * 2005-04-05 2006-10-05 Michael Reading Method and apparatus for localized infrared spectrocopy and micro-tomography using a combination of thermal expansion and temperature change measurements
WO2007145233A1 (ja) * 2006-06-13 2007-12-21 Nikon Corporation 顕微鏡装置
US8402819B2 (en) * 2007-05-15 2013-03-26 Anasys Instruments, Inc. High frequency deflection measurement of IR absorption
WO2009147450A1 (en) * 2008-06-06 2009-12-10 Infinitesima Ltd Probe detection system
US7977636B2 (en) * 2008-08-12 2011-07-12 Anasys Instruments, Inc. Infrared imaging using thermal radiation from a scanning probe tip
WO2011007168A2 (en) 2009-07-13 2011-01-20 Voak, Graham Microspectroscopy apparatus and method
US8823802B2 (en) * 2009-10-15 2014-09-02 University Of South Carolina Multi-mode imaging in the thermal infrared for chemical contrast enhancement
US10816492B2 (en) 2012-01-31 2020-10-27 Regents Of The University Of Minnesota Lateral flow assays with thermal contrast readers
US10725033B2 (en) 2012-01-31 2020-07-28 Regents Of The University Of Minnesota Lateral flow assays with thermal contrast readers
US9040921B2 (en) * 2012-07-28 2015-05-26 Harvard Apparatus Regenerative Technology, Inc. Analytical methods
WO2014138660A1 (en) 2013-03-08 2014-09-12 Bruker Nano, Inc. Method and apparatus of physical property measurement using a probe-based nano-localized light source
US9885147B2 (en) 2015-04-24 2018-02-06 University Of South Carolina Reproducible sample preparation method for quantitative stain detection
US10041866B2 (en) 2015-04-24 2018-08-07 University Of South Carolina Reproducible sample preparation method for quantitative stain detection
IT201700081124A1 (it) * 2017-07-21 2019-01-21 Andrea Martinelli Strumento per analisi spettroscopiche in modulazione di temperatura
DE102019203562B4 (de) * 2019-03-15 2022-11-03 Bruker Optics Gmbh & Co. Kg Verfahren zur Ermittlung einer Korrekturgrößenfunktion und Verfahren zur Erzeugung eines frequenzkorrigierten Hyperspektralbildes
DE102021127596A1 (de) 2021-10-22 2023-04-27 Linseis Messgeräte Gesellschaft mit beschränkter Haftung Temperaturleitfähigkeitsmessgerät

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US4956538A (en) * 1988-09-09 1990-09-11 Texas Instruments, Incorporated Method and apparatus for real-time wafer temperature measurement using infrared pyrometry in advanced lamp-heated rapid thermal processors
US4941753A (en) * 1989-04-07 1990-07-17 International Business Machines Corp. Absorption microscopy and/or spectroscopy with scanning tunneling microscopy control
US5185572A (en) * 1989-09-28 1993-02-09 Olympus Optical Co., Ltd. Scanning tunneling potentio-spectroscopic microscope and a data detecting method
US5270214A (en) * 1990-05-30 1993-12-14 The United States Of America As Represented By The United States Department Of Energy Method for sequencing DNA base pairs
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Also Published As

Publication number Publication date
WO1999022226A1 (en) 1999-05-06
US6260997B1 (en) 2001-07-17
DE69835803T2 (de) 2007-09-13
JP2001507464A (ja) 2001-06-05
EP0948741A1 (en) 1999-10-13
DE69835803D1 (de) 2006-10-19
EP0948741B1 (en) 2006-09-06

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