JP4036567B2 - 制御形磁気軸受装置 - Google Patents

制御形磁気軸受装置 Download PDF

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Publication number
JP4036567B2
JP4036567B2 JP14470199A JP14470199A JP4036567B2 JP 4036567 B2 JP4036567 B2 JP 4036567B2 JP 14470199 A JP14470199 A JP 14470199A JP 14470199 A JP14470199 A JP 14470199A JP 4036567 B2 JP4036567 B2 JP 4036567B2
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JP
Japan
Prior art keywords
signal
control unit
magnetic bearing
control
phase
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Expired - Lifetime
Application number
JP14470199A
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English (en)
Japanese (ja)
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JP2000283159A (ja
JP2000283159A5 (https=
Inventor
弘行 篠崎
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Ebara Corp
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Ebara Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to JP14470199A priority Critical patent/JP4036567B2/ja
Application filed by Ebara Corp filed Critical Ebara Corp
Priority to DE60042253T priority patent/DE60042253D1/de
Priority to EP00900852A priority patent/EP1065395B1/en
Priority to US09/647,169 priority patent/US6515387B1/en
Priority to PCT/JP2000/000272 priority patent/WO2000045059A1/ja
Priority to KR1020007010700A priority patent/KR100622098B1/ko
Priority to TW089101141A priority patent/TW436586B/zh
Publication of JP2000283159A publication Critical patent/JP2000283159A/ja
Priority to US10/316,048 priority patent/US6809449B2/en
Publication of JP2000283159A5 publication Critical patent/JP2000283159A5/ja
Application granted granted Critical
Publication of JP4036567B2 publication Critical patent/JP4036567B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
    • F16C32/0406—Magnetic bearings
    • F16C32/044—Active magnetic bearings
    • F16C32/0444—Details of devices to control the actuation of the electromagnets
    • F16C32/0451—Details of controllers, i.e. the units determining the power to be supplied, e.g. comparing elements, feedback arrangements with P.I.D. control

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)
JP14470199A 1999-01-27 1999-05-25 制御形磁気軸受装置 Expired - Lifetime JP4036567B2 (ja)

Priority Applications (8)

Application Number Priority Date Filing Date Title
JP14470199A JP4036567B2 (ja) 1999-01-27 1999-05-25 制御形磁気軸受装置
EP00900852A EP1065395B1 (en) 1999-01-27 2000-01-21 Controlled magnetic bearing device
US09/647,169 US6515387B1 (en) 1999-01-27 2000-01-21 Controlled magnetic bearing device
PCT/JP2000/000272 WO2000045059A1 (en) 1999-01-27 2000-01-21 Controlled magnetic bearing device
DE60042253T DE60042253D1 (de) 1999-01-27 2000-01-21 Steuerbares magnetlager
KR1020007010700A KR100622098B1 (ko) 1999-01-27 2000-01-21 제어형 자기 베어링장치
TW089101141A TW436586B (en) 1999-01-27 2000-01-25 Controlling type magnetic bearing device
US10/316,048 US6809449B2 (en) 1999-01-27 2002-12-11 Controlled magnetic bearing apparatus

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP1872099 1999-01-27
JP11-18720 1999-01-27
JP14470199A JP4036567B2 (ja) 1999-01-27 1999-05-25 制御形磁気軸受装置

Publications (3)

Publication Number Publication Date
JP2000283159A JP2000283159A (ja) 2000-10-13
JP2000283159A5 JP2000283159A5 (https=) 2004-11-11
JP4036567B2 true JP4036567B2 (ja) 2008-01-23

Family

ID=26355446

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14470199A Expired - Lifetime JP4036567B2 (ja) 1999-01-27 1999-05-25 制御形磁気軸受装置

Country Status (7)

Country Link
US (2) US6515387B1 (https=)
EP (1) EP1065395B1 (https=)
JP (1) JP4036567B2 (https=)
KR (1) KR100622098B1 (https=)
DE (1) DE60042253D1 (https=)
TW (1) TW436586B (https=)
WO (1) WO2000045059A1 (https=)

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EP1621785A1 (en) * 2004-07-30 2006-02-01 Mecos Traxler AG Method and apparatus for controlling a magnetic bearing device
DE102005001494A1 (de) * 2005-01-12 2006-07-20 Siemens Ag Regelverfahren für eine Magnetlagerung und hiermit korrespondierende Einrichtung
WO2007007333A2 (en) 2005-07-12 2007-01-18 Technion Research And Development Foundation Ltd. System and method for active detection of asymmetry in rotating structures
EP2095198A2 (en) * 2006-12-19 2009-09-02 Koninklijke Philips Electronics N.V. Control system and method for negative damping compensation in magnetic levitation
EP2006556B1 (en) * 2007-06-18 2013-11-13 Mecos Traxler AG Recovery of impact in a magnetic bearing device
RU2010142965A (ru) * 2008-04-17 2012-05-27 Синкрони, Инк. (US) Высокоскоростной электродвигатель с постоянным магнитом и генератор с металлическим ротором с низким уровнем потерь
US8330311B2 (en) 2008-04-18 2012-12-11 Dresser-Rand Company Magnetic thrust bearing with integrated electronics
US9583991B2 (en) * 2009-06-24 2017-02-28 Synchrony, Inc. Systems, devices, and/or methods for managing magnetic bearings
CZ302646B6 (cs) * 2009-08-26 2011-08-10 Rieter Cz S.R.O. Zpusob stabilizace levitujícího rotujícího elementu a zarízení pro stabilizaci levitujícího rotujícího elementu
DE102009029129A1 (de) * 2009-09-02 2011-03-03 BSH Bosch und Siemens Hausgeräte GmbH Kältegerät mit einer Halteklammer für einen Lüftermotor
CN102947606B (zh) * 2010-06-21 2015-08-19 英派尔科技开发有限公司 影响磁轴承中的磁场的系统
US8987959B2 (en) 2010-06-23 2015-03-24 Dresser-Rand Company Split magnetic thrust bearing
CN102107375B (zh) * 2010-11-26 2013-01-02 北京工业大学 一种基于负刚度原理的磨削工艺系统刚度补偿机构
US9633890B2 (en) * 2011-12-16 2017-04-25 Lam Research Ag Device for treating surfaces of wafer-shaped articles and gripping pin for use in the device
US9250017B2 (en) 2012-03-16 2016-02-02 Jerry D. Miller Magnet supported rotary drum dryer
FR2997465B1 (fr) * 2012-10-31 2015-04-17 Ge Energy Power Conversion Technology Ltd Palier magnetique actif comprenant des moyens d'amortissement des deplacements radiaux d'un arbre d'une machine tournante
US9197110B2 (en) * 2013-03-14 2015-11-24 Lawrence Livermore National Security, Llc Electrostatic stabilizer for a passive magnetic bearing system
EP2818739B1 (en) 2013-06-28 2018-06-13 Skf Magnetic Mechatronics Improved active magnetic bearings control system
US9410554B2 (en) 2014-04-04 2016-08-09 Solar Turbines Incorporated Controlling a gas compressor having multiple magnetic bearings
PL2933512T3 (pl) * 2014-04-14 2017-11-30 Abb Schweiz Ag Układ łożyska magnetycznego i sposób działania układu łożyska magnetycznego
JP7148230B2 (ja) * 2017-08-31 2022-10-05 エドワーズ株式会社 真空ポンプ及び制御装置
JP7119312B2 (ja) * 2017-09-04 2022-08-17 株式会社島津製作所 磁気軸受制御装置および真空ポンプ
JP7093683B2 (ja) * 2018-06-15 2022-06-30 川崎重工業株式会社 磁気軸受制御装置および磁気軸受制御方法
CN109854622B (zh) * 2019-03-26 2020-04-28 中国船舶科学研究中心（中国船舶重工集团公司第七0二研究所） 一种基于智能材料可控制轴系径向振动的主动磁轴承系统
DE102019112735A1 (de) * 2019-05-15 2020-11-19 Maschinenfabrik Rieter Ag Verfahren zur Identifikation eines Spinnrotors an einer Rotorspinnmaschine sowie Rotorspinnmaschine
CN112460146A (zh) * 2019-09-06 2021-03-09 北京亚之捷环保科技有限责任公司 一种主动式磁悬浮转子跌落保护系统
KR102371862B1 (ko) 2020-06-25 2022-03-08 숭실대학교 산학협력단 동축 와전류 변위 센서를 갖는 자기베어링
CN115220444B (zh) * 2022-06-28 2025-02-11 中国科学院自动化研究所 一种基于模糊人工势场技术的水下机器人避障控制方法

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JPS5989821A (ja) 1982-11-11 1984-05-24 Seiko Instr & Electronics Ltd 制御形磁気軸受装置
FR2561738B1 (fr) * 1984-03-26 1986-08-22 Europ Propulsion Procede et dispositif de reduction des vibrations des machines tournantes equipees d'une suspension magnetique active
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Also Published As

Publication number Publication date
US6809449B2 (en) 2004-10-26
KR20010042206A (ko) 2001-05-25
US6515387B1 (en) 2003-02-04
WO2000045059A1 (en) 2000-08-03
US20030080638A1 (en) 2003-05-01
KR100622098B1 (ko) 2006-09-07
EP1065395A1 (en) 2001-01-03
TW436586B (en) 2001-05-28
JP2000283159A (ja) 2000-10-13
DE60042253D1 (de) 2009-07-09
EP1065395A4 (en) 2004-11-17
EP1065395B1 (en) 2009-05-27

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