JP4031625B2 - Electronic component mounting apparatus and electronic component mounting method - Google Patents

Electronic component mounting apparatus and electronic component mounting method Download PDF

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Publication number
JP4031625B2
JP4031625B2 JP2001201514A JP2001201514A JP4031625B2 JP 4031625 B2 JP4031625 B2 JP 4031625B2 JP 2001201514 A JP2001201514 A JP 2001201514A JP 2001201514 A JP2001201514 A JP 2001201514A JP 4031625 B2 JP4031625 B2 JP 4031625B2
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Japan
Prior art keywords
backup
electronic component
cleaning
component mounting
backup member
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
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JP2001201514A
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Japanese (ja)
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JP2003017528A (en
Inventor
圭剛 広瀬
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Shibaura Mechatronics Corp
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Shibaura Mechatronics Corp
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Priority to JP2001201514A priority Critical patent/JP4031625B2/en
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Description

【0001】
【発明の属する技術分野】
本発明は、例えば液晶表示パネル等のフラットパネルディスプレイの製造に用いられ、フラットパネルに電子部品を実装するに用いて好適な電子部品実装装置および電子部品実装方法に関する。
【0002】
【従来の技術】
例えば液晶表示パネルを製造するにおいては、基板に相当するフラットパネル(以下「セル」という)に電子部品に相当するTCP(Tape Carrier Package)を実装する電子部品実装装置が用いられる。
【0003】
この電子部品実装装置について説明すると、この装置は大きく分けて、接合部材である異方性導電テープをセルに貼り付ける接合部材貼付装置、異方性導電テープを介してTCPをセルに仮圧着する仮圧着装置、セルをバックアップ部材で支持した状態で加圧ツールによりTCPを加圧してセルに本圧着する本圧着装置、そしてこれら装置間にてセルを搬送する搬送装置等から構成される。
【0004】
【発明が解決しようとする課題】
ところで、上述した電子部品実装装置において、図5に示すように、特に本圧着装置においては、ガラスよりなるセルの破片等が、バックアップツール50のバックアップ面51に異物52として付着することがあり、このような状態下で加圧ツール53を用いてTCP54をセル55に本圧着を行なうと、セル55に傷がつき、製品不良が発生し、製品歩留まりの低下を招いていた。
【0005】
本発明は、バックアップ部材が起因して発生していた製品不良を防止し、製品歩留まりを向上させることのできる電子部品実装装置および電子部品実装方法を提供することを目的とする。
【0006】
【課題を解決するための手段】
本願発明は、基板をバックアップ部材で支持した状態で加圧ツールを用いて電子部品を前記基板に実装する電子部品実装装置において、前記バックアップ部材のバックアップ面を清掃する清掃装置を設け、前記清掃装置は、前記バックアップ部材の長手方向両端部に設けた回動アームの端部に清掃部材を設け、この回動アームを回動させることで前記清掃部材を前記バックアップ面の清掃位置に位置づけることを特徴とする。
【0007】
また、前記清掃装置による前記バックアップ面の清掃は、前記バックアップ部材が前記基板をバックアップする前に行なわれるようにすると良い。
【0008】
また、前記清掃装置による前記バックアップ面の清掃は、前記加圧ツールによる1回の実装動作ごとに毎回行なわれるようにすると良い。
【0011】
基板をバックアップ部材で支持した状態で加圧ツールを用いて電子部品を前記基板に実装する電子部品実装方法において、前記実装動作の前に前記バックアップ部材の長手方向両端部に設けた回動アームの端部に清掃部材を設け、この回動アームを回動させることで前記清掃部材を前記バックアップ面の清掃位置に位置づける清掃装置を用いて、前記バックアップ部材のバックアップ面を清掃することを特徴とする。
【0012】
【作用】
本発明の実装装置及び実装方法によれば、バックアップ部材のバックアップ面の清掃が行われ、バックアップ部材が起因する製品不良が防止され、製品歩留まりを向上させることができる。
【0013】
【発明の実施の形態】
本発明の実施の形態を図を参照して説明する。
【0014】
図1は、本発明の電子部品実装装置を構成する本圧着装置の実施の形態の正面図、図2は図1の側面図、図3は図1にて用いられてなる清掃装置周辺部を示し、同図(a)は正面図、同図(b)は側面図である。
【0015】
なお、図1に示す本圧着装置1の前段には、従来と同様に、接合部材である異方性導電テープ3を基板に相当するセル2に貼り付ける接合部材貼付装置、セルに貼り付けられた異方性導電テープ3を介して電子部品に相当するTCP4をセル2に仮圧着する仮圧着装置がそれぞれ配置され、異方性導電テープ3を介してTCP4の仮圧着されたセル2が、不図示の搬送装置によってこの本圧着装置1に搬入される。
【0016】
さて図1において、2は前段から搬入されたセル、3はセル2とTCP4間に介在された異方性導電テープ、5は不図示の駆動手段で上下動され、後述する本圧着時には上昇位置にてセル2の特に本圧着箇所に相当する下面を支持し加圧力を受けるバックアップ部材、6はバックアップ部材5に対向してセル2の上方に配置され、不図示の駆動手段で上下動されるとともに、必要によりヒータにて加熱された加圧ツール、7は清掃装置をそれぞれ示す。
【0017】
ここで清掃装置7について、図3を用いて説明する。
【0018】
清掃装置7は、バックアップ部材5の長手方向両端部にそれぞれ一端が回動自在に支持され他端に清掃部材なる円柱状の弾性を有するブラシ7bを固定保持する回動アーム7aと、一端をエアシリンダ8のロッド8aに連結され、他端を回動アーム7aの他端に連結された連結ロッド7cとを有する。これにより、エアシリンダ8の作動によりロッド8aが伸長すると、連結ロッド7cを介して回転アーム7aはその一端を支点として回動し、この回動により、ブラシ7bがバックアップ部材5のバックアップ面5aに接触しつつ移動するようになっている。なお、これらの動作制御は、不図示の制御装置によって達成される。
【0019】
次に、この本圧着装置1の作動について説明する。
【0020】
本圧着装置1においては、前述したように、前段に配置される仮圧着装置よりTCP4の仮圧着されたセル2が不図示の搬送装置により搬入され、本圧着されることとなるが、セル2の搬入に先立ち、清掃装置7によりバックアップ部材5のバックアップ面5aの清掃が次のようにして行われる。
【0021】
すなわち、エアシリンダ8を作動させてロッド8aを伸長させる。すると回動アーム7aは、その一端を支点として回動し、ブラシ7bを待機位置(図3の実線で示す位置)からバックアップ部材5のバックアップ面5aの清掃位置(同図の二点鎖線で示す位置)へと移動させる。そしてこの移動の過程において、バックアップ部材5のバックアップ面5aがブラシ7bにより清掃され、バックアップ面5aに付着した異物等が取り除かれる。
【0022】
なお前述した実施の形態による清掃装置7は、ブラシ7bの有する回動アーム7aを回動させるものであったが、ブラシなどの清掃部材をバックアップ部材5のバックアップ面5aに沿って水平移動させるさせるものであっても良い。
図4は、この水平移動タイプの清掃装置を示す。図4に示す清掃装置9において、10はブラシ、11はブラシ10の保持アーム、12は保持アーム11を上下させるエアシリンダ、13はシリンダ12を保持するとともに、バックアップ部材5の長手方向に移動させる平行移動部をそれぞれ示す。
【0023】
従ってこの実施の形態において、ブラシ10の移動に着眼して説明すると、バックアップ部材5の一端側でしかもバックアップ部材5のバックアップ面5aより下方位置にブラシ10が位置づけられた状態(原点位置)で、まずエアシリンダ12によって保持アーム11を介してブラシ10は上昇させられる。次に、平行移動部13の作動で、ブラシ10はバックアップ部材5のバックアップ面5aに沿ってバックアップ部材5の一端側から他端側まで水平移動させられ、そして再度一端側まで水平移動して戻り、この両水平移動の際、ブラシ10はバックアップ部材5のバックアップ面5aを清掃し異物52を取り除く。一端側に戻ったブラシ10はエアシリンダ12にて下降させられ、原点位置に戻る。
【0024】
なお、1回の清掃ごとにブラシを往復動させて原点位置に戻す代わりに、上記でいえば、ブラシ10がバックアップ部材5の他端側を越えて移動した後に下降させてその位置で待機させ、その後の清掃タイミングで上昇、バックアップ部材5の一端側への水平移動、そして下降させて原点位置に戻すという動作を行ない、このバックアップ部材5の他端側から一端側に向かう水平移動時にバックアップ部材5のバックアップ面5aの清掃を行なうようにしても良い。
【0025】
またいずれの場合であっても、清掃動作のタイミングとしては、本圧着装置に新たなセル2が前段装置より搬入される前や、加圧ツール6の下降動に伴う本圧着動作1回ごとに毎回、あるいは本圧着作業の終了したセル2の枚数や圧着回数をカウンタで数え、そのカウント数が予め設定した値に到達するごとなど、必要に応じて設定される。
【0026】
さて、上述のようにしてバックアップ部材5の清掃作業が終了すると、TCP4の仮圧着されたセル2が、前段よりその本圧着部分が加圧ツール6並びにバックアップ部材5に対向する位置となるように搬入位置決めされ、以後は従来と同様に、バックアップ部材5がセル2の下面を支持した状態で、加圧ツール6が下降して仮圧着状態のTCP4をセル2に本圧着する。
【0027】
このように上記した実施の形態によれば、セル2に対するTCP4の本圧着工程に先立ち、バックアップ部材5のバックアップ面5aにおける異物52を清掃して取り除くようにしたことから、加圧ツール6にてTCP4を基板2に本圧着したときに、従来のように異物52によってセル2に傷がついたり、割れが生じたりする問題の発生を防止できることから、製品不良を防止し、製品歩留まりを向上させることができる。
【0028】
なお、上記した実施の形態では、電子部品実装装置において、比較的大なる荷重にて行われる本圧着装置におけるバックアップの清掃について述べたが、仮圧着装置における異方性導電テープ等を介しての電子部品の仮圧着時にもバックアップ部材が存在する場合、この仮圧着装置に用いられるバックアップ部材に清掃装置を設けても良い。
【0029】
【発明の効果】
本発明によれば、バックアップ部材が起因して発生していた製品不良を防止し、製品歩留まりを向上させることができる。
【図面の簡単な説明】
【図1】本発明の電子部品実装装置を構成する本圧着装置の実施の形態の正面図である。
【図2】図1の側面図である。
【図3】図1にて用いられてなる清掃装置周辺部を示し、同図(a)は正面図、同図(b)は側面図である。
【図4】本発明による清掃装置の別の実施の形態で、同図(a)は正面図、同図(b)は側面図である。
【図5】従来の問題点を示す模式図である。
【符号の説明】
1 本圧着装置
2 セル(基板)
3 異方性導電テープ
4 TCP(電子部品)
5 バックアップ部材
5a バックアップ面
6 加圧ツール
7 清掃装置
7a 回動アーム
7b ブラシ(清掃部材)
7c 連結ロッド
8 エアシリンダ
8a ロッド
9 清掃装置
10 ブラシ
11 保持アーム
12 エアシリンダ
13 平行移動部
52 異物
[0001]
BACKGROUND OF THE INVENTION
The present invention relates to an electronic component mounting apparatus and an electronic component mounting method which are used for manufacturing a flat panel display such as a liquid crystal display panel and are suitable for mounting an electronic component on a flat panel.
[0002]
[Prior art]
For example, in manufacturing a liquid crystal display panel, an electronic component mounting apparatus that mounts a TCP (Tape Carrier Package) corresponding to an electronic component on a flat panel (hereinafter referred to as “cell”) corresponding to a substrate is used.
[0003]
The electronic component mounting apparatus will be described. This apparatus is roughly divided into a bonding member sticking apparatus for sticking an anisotropic conductive tape, which is a joining member, to a cell, and TCP is temporarily pressure-bonded to the cell via the anisotropic conductive tape. The apparatus includes a temporary pressure bonding device, a main pressure bonding device that pressurizes the TCP with a pressure tool while the cell is supported by a backup member, and a pressure bonding tool to the cell, and a transport device that transfers the cell between these devices.
[0004]
[Problems to be solved by the invention]
By the way, in the electronic component mounting apparatus described above, as shown in FIG. 5, in particular, in the present crimping apparatus, cell fragments made of glass or the like may adhere to the backup surface 51 of the backup tool 50 as foreign matter 52, Under such conditions, when the pressure bonding of the TCP 54 to the cell 55 using the pressurizing tool 53, the cell 55 is damaged, a product defect occurs, and the product yield is reduced.
[0005]
An object of the present invention is to provide an electronic component mounting apparatus and an electronic component mounting method capable of preventing a product defect that has occurred due to a backup member and improving a product yield.
[0006]
[Means for Solving the Problems]
The present invention provides an electronic component mounting apparatus that mounts an electronic component on the substrate using a pressure tool in a state where the substrate is supported by the backup member, and includes a cleaning device that cleans the backup surface of the backup member, and the cleaning device Is provided with a cleaning member at the end of a rotating arm provided at both longitudinal ends of the backup member, and the cleaning member is positioned at the cleaning position of the backup surface by rotating the rotating arm. And
[0007]
Further, the cleaning of the backup surface by the cleaning device may be performed before the backup member backs up the substrate.
[0008]
The cleaning of the backup surface by the cleaning device may be performed every time one mounting operation by the pressure tool.
[0011]
In an electronic component mounting method in which an electronic component is mounted on the substrate using a pressure tool in a state where the substrate is supported by a backup member, rotation arms provided at both ends in the longitudinal direction of the backup member before the mounting operation. A cleaning member is provided at the end, and the backup surface of the backup member is cleaned using a cleaning device that rotates the rotating arm to position the cleaning member at a cleaning position of the backup surface. .
[0012]
[Action]
According to the mounting apparatus and the mounting method of the present invention, the backup surface of the backup member is cleaned, product defects caused by the backup member are prevented, and the product yield can be improved.
[0013]
DETAILED DESCRIPTION OF THE INVENTION
Embodiments of the present invention will be described with reference to the drawings.
[0014]
FIG. 1 is a front view of an embodiment of the present crimping apparatus constituting the electronic component mounting apparatus of the present invention, FIG. 2 is a side view of FIG. 1, and FIG. 3 is a peripheral part of the cleaning apparatus used in FIG. 2A is a front view, and FIG. 2B is a side view.
[0015]
In addition, in the previous stage of the main crimping apparatus 1 shown in FIG. 1, as in the prior art, a bonding member affixing device for affixing the anisotropic conductive tape 3 as a bonding member to the cell 2 corresponding to the substrate is affixed to the cell. Temporary crimping devices for temporarily crimping TCP4 corresponding to electronic components to the cells 2 via the anisotropic conductive tape 3 are respectively arranged, and the cells 2 temporarily crimped to the TCP4 via the anisotropic conductive tape 3 are It is carried into the main crimping apparatus 1 by a transport device (not shown).
[0016]
In FIG. 1, 2 is a cell carried in from the previous stage, 3 is an anisotropic conductive tape interposed between the cell 2 and the TCP 4, 5 is moved up and down by a driving means (not shown), and is lifted at the time of final press-bonding described later. The back-up member 6 that supports the lower surface corresponding to the main press-bonding portion of the cell 2 and receives pressure is disposed above the cell 2 so as to face the back-up member 5 and is moved up and down by a driving means (not shown). In addition, a pressurizing tool 7 heated by a heater as necessary, and a cleaning device 7 respectively.
[0017]
Here, the cleaning device 7 will be described with reference to FIG.
[0018]
The cleaning device 7 includes a rotating arm 7a that fixes and holds a cylindrical elastic brush 7b that is rotatably supported at both ends in the longitudinal direction of the backup member 5 and has a cleaning member at the other end. A connecting rod 7c is connected to the rod 8a of the cylinder 8 and the other end is connected to the other end of the rotating arm 7a. As a result, when the rod 8a is extended by the operation of the air cylinder 8, the rotating arm 7a is rotated about one end thereof via the connecting rod 7c, and the brush 7b is moved to the backup surface 5a of the backup member 5 by this rotation. It moves while in contact. Note that these operation controls are achieved by a control device (not shown).
[0019]
Next, the operation of the main crimping apparatus 1 will be described.
[0020]
In the main crimping apparatus 1, as described above, the temporarily crimped cell 2 of the TCP 4 is carried by the transport apparatus (not shown) from the temporary crimping apparatus disposed in the preceding stage and is finally crimped. Prior to loading, the cleaning device 7 cleans the backup surface 5a of the backup member 5 as follows.
[0021]
That is, the air cylinder 8 is operated to extend the rod 8a. Then, the rotating arm 7a rotates with one end thereof as a fulcrum, and the brush 7b is moved from the standby position (the position indicated by the solid line in FIG. 3) to the cleaning position of the backup surface 5a of the backup member 5 (indicated by the two-dot chain line in the same figure). Position). In the course of this movement, the backup surface 5a of the backup member 5 is cleaned by the brush 7b, and foreign matters and the like attached to the backup surface 5a are removed.
[0022]
Although the cleaning device 7 according to the above-described embodiment rotates the rotating arm 7a of the brush 7b, the cleaning member such as a brush is moved horizontally along the backup surface 5a of the backup member 5. It may be a thing.
FIG. 4 shows this horizontal movement type cleaning apparatus. In the cleaning device 9 shown in FIG. 4, 10 is a brush, 11 is a holding arm of the brush 10, 12 is an air cylinder for moving the holding arm 11 up and down, 13 is holding the cylinder 12 and is moved in the longitudinal direction of the backup member 5. Each of the translation units is shown.
[0023]
Therefore, in this embodiment, when focusing on the movement of the brush 10, the brush 10 is positioned on one end side of the backup member 5 and below the backup surface 5 a of the backup member 5 (origin position). First, the brush 10 is raised by the air cylinder 12 via the holding arm 11. Next, the brush 10 is moved horizontally from one end side to the other end side of the backup member 5 along the backup surface 5a of the backup member 5 by the operation of the parallel moving portion 13, and then horizontally moved again to one end side and returned. In this horizontal movement, the brush 10 cleans the backup surface 5a of the backup member 5 and removes the foreign matter 52. The brush 10 returned to the one end side is lowered by the air cylinder 12 and returns to the origin position.
[0024]
Instead of reciprocating the brush and returning it to the original position for each cleaning, the brush 10 is lowered after moving beyond the other end of the backup member 5 and waits at that position. Then, the backup member 5 is moved upward at the cleaning timing, horizontally moved to one end side of the backup member 5, and lowered to return to the origin position. When the backup member 5 is horizontally moved from the other end side to the one end side, the backup member is moved. 5 backup surface 5a may be cleaned.
[0025]
In any case, the cleaning operation is performed before the new cell 2 is carried into the main crimping device from the previous stage device or every main crimping operation accompanying the downward movement of the pressurizing tool 6. Each time or the number of cells 2 and the number of crimping operations for which the main crimping operation has been completed are counted with a counter, and the count is set as necessary, for example, when the count reaches a preset value.
[0026]
Now, when the cleaning operation of the backup member 5 is completed as described above, the TCP 2 temporarily crimped cell 2 is positioned so that its main crimping portion faces the pressing tool 6 and the backup member 5 from the previous stage. After being carried in and positioned, the pressure tool 6 is lowered while the backup member 5 supports the lower surface of the cell 2 and the temporary pressure-bonded TCP 4 is finally bonded to the cell 2 in the same manner as in the past.
[0027]
As described above, according to the embodiment described above, since the foreign matter 52 on the backup surface 5a of the backup member 5 is cleaned and removed prior to the main pressure bonding process of the TCP 4 to the cell 2, the pressurizing tool 6 is used. When the TCP 4 is finally pressure-bonded to the substrate 2, it is possible to prevent the problem that the cell 2 is scratched or cracked by the foreign matter 52 as in the prior art, thereby preventing product defects and improving the product yield. be able to.
[0028]
In the above-described embodiment, the cleaning of the backup in the main crimping apparatus performed with a relatively large load in the electronic component mounting apparatus has been described. In the case where a backup member exists even when the electronic component is temporarily crimped, a cleaning device may be provided on the backup member used in the temporary crimping apparatus.
[0029]
【The invention's effect】
ADVANTAGE OF THE INVENTION According to this invention, the product defect which generate | occur | produced due to the backup member can be prevented, and a product yield can be improved.
[Brief description of the drawings]
FIG. 1 is a front view of an embodiment of a main crimping apparatus constituting an electronic component mounting apparatus according to the present invention.
FIG. 2 is a side view of FIG.
3 shows the periphery of the cleaning device used in FIG. 1. FIG. 3 (a) is a front view and FIG. 3 (b) is a side view.
4 (a) is a front view and FIG. 4 (b) is a side view of another embodiment of the cleaning device according to the present invention.
FIG. 5 is a schematic diagram showing a conventional problem.
[Explanation of symbols]
1 Crimping device 2 Cell (substrate)
3 Anisotropic conductive tape 4 TCP (electronic component)
5 Backup member 5a Backup surface 6 Pressure tool 7 Cleaning device 7a Rotating arm 7b Brush (cleaning member)
7c Connecting rod 8 Air cylinder 8a Rod 9 Cleaning device 10 Brush 11 Holding arm 12 Air cylinder 13 Parallel moving part 52 Foreign matter

Claims (4)

基板をバックアップ部材で支持した状態で加圧ツールを用いて電子部品を前記基板に実装する電子部品実装装置において、前記バックアップ部材のバックアップ面を清掃する清掃装置を設け、前記清掃装置は、前記バックアップ部材の長手方向両端部に設けた回動アームの端部に清掃部材を設け、この回動アームを回動させることで前記清掃部材を前記バックアップ面の清掃位置に位置づけることを特徴とする電子部品実装装置。In an electronic component mounting apparatus that mounts electronic components on the substrate using a pressure tool in a state where the substrate is supported by the backup member, a cleaning device that cleans the backup surface of the backup member is provided , and the cleaning device includes the backup device An electronic component characterized in that a cleaning member is provided at the end of a rotating arm provided at both ends in the longitudinal direction of the member, and the cleaning member is positioned at a cleaning position of the backup surface by rotating the rotating arm. Mounting device. 前記清掃装置による前記バックアップ面の清掃は、前記バックアップ部材が前記基板をバックアップする前に行なわれることを特徴とする請求項1記載の電子部品実装装置。  The electronic component mounting apparatus according to claim 1, wherein the cleaning of the backup surface by the cleaning device is performed before the backup member backs up the substrate. 前記清掃装置による前記バックアップ面の清掃は、前記加圧ツールによる1回の実装動作ごとに毎回行なわれることを特徴とする請求項1記載の電子部品実装装置。  2. The electronic component mounting apparatus according to claim 1, wherein the cleaning of the backup surface by the cleaning apparatus is performed every time one mounting operation by the pressure tool. 基板をバックアップ部材で支持した状態で加圧ツールを用いて電子部品を前記基板に実装する電子部品実装方法において、前記実装動作の前に前記バックアップ部材の長手方向両端部に設けた回動アームの端部に清掃部材を設け、この回動アームを回動させることで前記清掃部材を前記バックアップ面の清掃位置に位置づける清掃装置を用いて、前記バックアップ部材のバックアップ面を清掃することを特徴とする電子部品実装方法。In an electronic component mounting method in which an electronic component is mounted on the substrate using a pressure tool in a state where the substrate is supported by a backup member, rotation arms provided at both longitudinal ends of the backup member before the mounting operation A cleaning member is provided at the end, and the backup surface of the backup member is cleaned by using a cleaning device that positions the cleaning member at the cleaning position of the backup surface by rotating the rotating arm. Electronic component mounting method.
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KR20170048136A (en) 2015-10-23 2017-05-08 휴글 가이하쓰 가부시키가이샤 Cleaning head and cleaning method

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TWI292350B (en) * 2004-02-10 2008-01-11 Sharp Kk Cleaning device of board and cleaning method, flat display panel, mounting equipment of electronic parts and mounting method
JP4668683B2 (en) * 2005-05-20 2011-04-13 アスリートFa株式会社 Joining head cleaning device and electronic component joining device
JP4773207B2 (en) * 2006-01-12 2011-09-14 パナソニック株式会社 Component crimping equipment
JP4773210B2 (en) * 2006-01-12 2011-09-14 パナソニック株式会社 Parts crimping method
JP4773209B2 (en) * 2006-01-12 2011-09-14 パナソニック株式会社 Component crimping equipment
JP4773208B2 (en) * 2006-01-12 2011-09-14 パナソニック株式会社 Parts crimping method
JP7432869B2 (en) 2020-04-27 2024-02-19 パナソニックIpマネジメント株式会社 Component crimping device and cleaning method for component crimping device

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20170048136A (en) 2015-10-23 2017-05-08 휴글 가이하쓰 가부시키가이샤 Cleaning head and cleaning method

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